KR960011441A - 프로브 테스트 핸들러와 그를 사용한 ic 테스팅 방법 및 ic - Google Patents

프로브 테스트 핸들러와 그를 사용한 ic 테스팅 방법 및 ic Download PDF

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Publication number
KR960011441A
KR960011441A KR1019950005874A KR19950005874A KR960011441A KR 960011441 A KR960011441 A KR 960011441A KR 1019950005874 A KR1019950005874 A KR 1019950005874A KR 19950005874 A KR19950005874 A KR 19950005874A KR 960011441 A KR960011441 A KR 960011441A
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KR
South Korea
Prior art keywords
ics
testing methods
probe test
test handlers
handlers
Prior art date
Application number
KR1019950005874A
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English (en)
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KR0161342B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of KR960011441A publication Critical patent/KR960011441A/ko
Application granted granted Critical
Publication of KR0161342B1 publication Critical patent/KR0161342B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1019950005874A 1994-09-20 1995-03-20 프로브 테스트 핸들러와 그를 사용한 ic 테스팅 방법 및 ic KR0161342B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-225032 1994-09-20
JP6225032A JP2929948B2 (ja) 1994-09-20 1994-09-20 プローブ式テストハンドラー及びそれを用いたｉｃのテスト方法

Publications (2)

Publication Number Publication Date
KR960011441A true KR960011441A (ko) 1996-04-20
KR0161342B1 KR0161342B1 (ko) 1999-03-20

Family

ID=16822998

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950005874A KR0161342B1 (ko) 1994-09-20 1995-03-20 프로브 테스트 핸들러와 그를 사용한 ic 테스팅 방법 및 ic

Country Status (6)

Country Link
US (1) US5631573A (ko)
JP (1) JP2929948B2 (ko)
KR (1) KR0161342B1 (ko)
CN (2) CN1041253C (ko)
DE (1) DE19515154A1 (ko)
TW (1) TW280938B (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101130749B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 회전 테스트 모듈 및 그 테스트 시스템
KR101130750B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 회전 테스트 모듈 및 그 테스트 시스템
KR101130122B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 동적 테스트 장치 및 방법
KR101130125B1 (ko) * 2009-02-20 2012-04-02 킹 유안 일렉트로닉스 코포레이션 리미티드 직선 왕복 테스트 모듈 및 그 테스트 시스템
KR102115179B1 (ko) * 2018-11-20 2020-06-08 주식회사 탑 엔지니어링 프로브장치 및 프로브 자세 보정 방법

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US6181149B1 (en) 1996-09-26 2001-01-30 Delaware Capital Formation, Inc. Grid array package test contactor
JP3494828B2 (ja) * 1996-11-18 2004-02-09 株式会社アドバンテスト 水平搬送テストハンドラ
US6064218A (en) * 1997-03-11 2000-05-16 Primeyield Systems, Inc. Peripherally leaded package test contactor
DE19741352C2 (de) * 1997-09-19 1999-09-30 Mci Computer Gmbh Testsockel zum Testen von Anschlußbeinchen aufweisenden IC-Bauelementen
US6270357B1 (en) * 1999-05-06 2001-08-07 Wayne K. Pfaff Mounting for high frequency device packages
JP2001349925A (ja) 2000-06-09 2001-12-21 Mitsubishi Electric Corp 半導体集積回路の検査装置および検査方法
JP4327335B2 (ja) * 2000-06-23 2009-09-09 株式会社アドバンテスト コンタクトアームおよびこれを用いた電子部品試験装置
US6462568B1 (en) * 2000-08-31 2002-10-08 Micron Technology, Inc. Conductive polymer contact system and test method for semiconductor components
CN1191747C (zh) * 2001-09-06 2005-03-02 株式会社理光 电子元件组装检查方法
KR100436656B1 (ko) * 2001-12-17 2004-06-22 미래산업 주식회사 반도체 소자 테스트 핸들러의 소자 이송장치의 작업위치 인식방법
NL1019775C2 (nl) * 2002-01-18 2003-07-21 Integrated Production And Test Inrichting voor het testen van elektronische schakelingen, alsmede een naaldenbed voor toepassing in een dergelijke inrichting.
KR100451586B1 (ko) * 2002-03-13 2004-10-08 미래산업 주식회사 반도체 소자 테스트 핸들러의 소자 이송장치의 작업 높이인식장치 및 이를 이용한 작업 높이 인식방법
KR100573089B1 (ko) * 2003-03-17 2006-04-24 주식회사 파이컴 프로브 및 그 제조방법
KR101139666B1 (ko) * 2004-03-31 2012-05-15 제이에스알 가부시끼가이샤 프로브 장치 및 이 프로브 장치를 구비한 웨이퍼 검사 장치및 웨이퍼 검사 방법
US7479779B2 (en) * 2004-06-08 2009-01-20 Advantest Corporation Image sensor test system
CN100350585C (zh) * 2004-09-29 2007-11-21 立积电子股份有限公司 晶圆测量系统
JP2006284384A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 半導体装置の試験装置及び試験方法
US20070132471A1 (en) * 2005-12-13 2007-06-14 Carlson Gregory F Method and apparatus for testing integrated circuits over a range of temperatures
CN101188205B (zh) * 2006-11-15 2010-05-12 上海华虹Nec电子有限公司 测试铝膨胀缺陷的方法
TW200846688A (en) * 2007-05-25 2008-12-01 King Yuan Electronics Co Ltd A testboard with ZIF connectors, method of assembling, integrated circuit testing system and testing method introduced by the same
JP4539685B2 (ja) * 2007-06-22 2010-09-08 セイコーエプソン株式会社 部品搬送装置及びｉｃハンドラ
US20100026330A1 (en) * 2007-08-13 2010-02-04 Yuan-Chi Lin Testboard with zif connectors, method of assembling, integrated circuit test system and test method introduced by the same
KR100900162B1 (ko) * 2009-01-13 2009-06-02 에버테크노 주식회사 마이크로폰 테스트시스템의 테스트장치
DE102009045291A1 (de) * 2009-10-02 2011-04-07 Ers Electronic Gmbh Vorrichtung zur Konditionierung von Halbleiterchips und Testverfahren unter Verwendung der Vorrichtung
JP5024356B2 (ja) 2009-11-09 2012-09-12 株式会社村田製作所 電気特性測定基板
JP5835722B2 (ja) 2009-12-10 2015-12-24 オルボテック エルティ ソラー，エルエルシー 自動順位付け多方向直列型処理装置
US8872532B2 (en) * 2009-12-31 2014-10-28 Formfactor, Inc. Wafer test cassette system
KR101049310B1 (ko) * 2010-02-05 2011-07-13 (주)티에스이 Ｌｅｄ 소자 테스트 방법 및 ｌｅｄ 소자 테스트 시스템
US8564304B2 (en) * 2010-04-23 2013-10-22 AFA Micro Co. Integrated circuit device test apparatus
KR101136534B1 (ko) 2010-09-07 2012-04-17 한국기계연구원 프로브 카드 및 이의 제조 방법
US8844398B2 (en) 2010-12-18 2014-09-30 Accel Biotech, Inc. Three-axis robotic system with linear bearing supports
US8459276B2 (en) 2011-05-24 2013-06-11 Orbotech LT Solar, LLC. Broken wafer recovery system
CN102826364B (zh) * 2011-06-13 2014-12-24 Ykk株式会社 拉头供给装置
CN102360048A (zh) * 2011-09-05 2012-02-22 江苏天鹏电源有限公司 锂离子电池保护板的检测装置
CN102565469A (zh) * 2012-01-09 2012-07-11 昆山弗尔赛能源有限公司 燃料电池电堆用单体电压巡检连接器及其连接方法
JP2013230017A (ja) * 2012-04-26 2013-11-07 Seiko Epson Corp 搬送装置、電子部品搬送装置および電子部品検査装置
TW201408567A (zh) * 2012-08-31 2014-03-01 Mpi Corp 元件分料方法及使用該方法之分料裝置
TWI472465B (zh) * 2013-01-25 2015-02-11 Hon Tech Inc Material handling equipment
CN103823147B (zh) * 2013-11-04 2016-06-01 中国人民解放军国防科学技术大学 基于脉冲捕获的键合丝触碰短路检测方法
JP6562896B2 (ja) * 2016-12-22 2019-08-21 三菱電機株式会社 半導体装置の評価装置およびそれを用いた半導体装置の評価方法
US10429283B2 (en) * 2017-01-20 2019-10-01 Creative Viewpoint Machinery Fruit testing device
CN107757962A (zh) * 2017-11-01 2018-03-06 江苏凯尔生物识别科技有限公司 Smt检测封装机构
CN107758008A (zh) * 2017-11-01 2018-03-06 江苏凯尔生物识别科技有限公司 测试封装一体机
JP6719784B2 (ja) * 2018-12-21 2020-07-08 株式会社 Ｓｙｎａｘ ハンドラ
CN109741697A (zh) * 2018-12-28 2019-05-10 深圳市华星光电技术有限公司 短路检测装置及短路检测方法
TWI779822B (zh) * 2021-09-10 2022-10-01 鴻勁精密股份有限公司 轉位裝置及作業機
CN114019201A (zh) * 2021-09-29 2022-02-08 杭州长川科技股份有限公司 模组测试装置
CN113671358B (zh) * 2021-10-25 2021-12-21 江苏卓远半导体有限公司 一种半导体测试设备
CN116953487B (zh) * 2023-09-18 2024-01-16 成都汉芯国科集成技术有限公司 一种封装成品缺陷批量测试工装及其测试方法

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JPH0498167A (ja) * 1990-08-16 1992-03-30 Tokyo Electron Ltd Ｉｃ検査装置
JP2544015Y2 (ja) * 1990-10-15 1997-08-13 株式会社アドバンテスト Ｉｃ試験装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101130749B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 회전 테스트 모듈 및 그 테스트 시스템
KR101130750B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 회전 테스트 모듈 및 그 테스트 시스템
KR101130122B1 (ko) * 2009-02-20 2012-03-28 킹 유안 일렉트로닉스 코포레이션 리미티드 동적 테스트 장치 및 방법
KR101130125B1 (ko) * 2009-02-20 2012-04-02 킹 유안 일렉트로닉스 코포레이션 리미티드 직선 왕복 테스트 모듈 및 그 테스트 시스템
KR102115179B1 (ko) * 2018-11-20 2020-06-08 주식회사 탑 엔지니어링 프로브장치 및 프로브 자세 보정 방법

Also Published As

Publication number Publication date
JPH0894705A (ja) 1996-04-12
CN1041253C (zh) 1998-12-16
TW280938B (ko) 1996-07-11
US5631573A (en) 1997-05-20
DE19515154A1 (de) 1996-03-28
CN1214546A (zh) 1999-04-21
CN1113604A (zh) 1995-12-20
KR0161342B1 (ko) 1999-03-20
JP2929948B2 (ja) 1999-08-03

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