KR950021294A - 와이어 본딩 장치 - Google Patents

와이어 본딩 장치 Download PDF

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KR950021294A
KR950021294A KR1019940033233A KR19940033233A KR950021294A KR 950021294 A KR950021294 A KR 950021294A KR 1019940033233 A KR1019940033233 A KR 1019940033233A KR 19940033233 A KR19940033233 A KR 19940033233A KR 950021294 A KR950021294 A KR 950021294A
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South Korea
Prior art keywords
bonding
image
wire
wire bond
bond object
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KR1019940033233A
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English (en)
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KR0155181B1 (ko
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다까시 고노
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가네꼬 히사시
닛본덴기 가부시끼가이샤(Nec Corporation)
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Publication of KR950021294A publication Critical patent/KR950021294A/ko
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Publication of KR0155181B1 publication Critical patent/KR0155181B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/788—Means for moving parts
    • H01L2224/78801—Lower part of the bonding apparatus, e.g. XY table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
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    • H01L2924/01—Chemical elements
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    • H01—ELECTRIC ELEMENTS
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Abstract

와이어 본딩 장치는 IC칩의 전극 패드와 리드 프레임의 대응하는 내부 리드를 포함하는 와이어 본드 물체를 둘러싸는 정방형 영역의 화상 프레임의 화상 데이타를 얻기위한 화상 픽업 유니트를 갖는다. 정방형 영역의 화상은 본딩 동작이 이행되는 본딩 스테이션에서 픽업된다. 화상 데이타는 각각의 내부 리드와 전극 패드의 위치와 메모리 유니트에 저장된 대응하는 설계위치로부터 각각의 와이어 본드 물체의 위치의 계산 편차를 검출하는 화상처리 유니트로 전송된다. 제어 유니트는 와이어 본드 물체의 각각의 본딩 점으로 본딩 틀을 정렬하기 위한 편차를 기초로 하여 XY테이블을 제어한다. 리드 프레임, 테이프 캐리어 또는 세라믹 패키지의 경우에, 와이어 본딩의 정확도는 전송, 열 변형, 열 팽창, 또는 화상 픽업 유니트에 남아있는 진동으로 인해 내부 리드의 변형에 의해 영향을 받지 않고 개선된다. 부가적으로, 검출 동작으로 위해 요구되는 시간의 양은 감소될 수 있다.

Description

와이어 본딩 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제8도는 본 발명의 제1실시예에 따른 와이어 본딩 장치의 측면도이다.

Claims (3)

  1. 와이어 본딩 장치에 있어서, IC칩의 복수의 전극 패드와 IC패키지에 대응하는 내부 리드를 포함하는 각각의 복수의 와이어 본드 물체의 본딩 점으로 와이어를 본딩하기 위한 본딩 툴, 상기 본딩 점으로 상기 본딩 툴을 정렬하기 위해 상기 본딩 툴을 이동시키기 위한 이동 테이블, 상기 이동 테이블에 의해 장착되고, 화상 데이타를 얻도록 본딩 스테이션에서 상기 와이어 본드 물체를 둘러싸는 영역의 화상 프레임을 픽업하기 위한 화상 픽업 유니트, 각각의 상기 와이어 본드 물체의 위치를 나타내는 제1좌표 데이타를 저장하기 위한 메모리 부분, 각각의 상기 와이어 본드 물체의 검출된 위치를 나타내는 제2좌표 데이타를 얻기 위해 상기 화상 데이타를 기초로 하여 각각의 상기 와이어 본드 물체를 식별하기 위한 식별 부분과 상기 제2좌표 데이타와 상기 제1좌표 데이타를 비교하므로써 상기 설계 위치중의 대응하는 위치로부터 상기 와이어 본드 물체의 각각의 상기 검출된 위치의 편차를 계산하기 위한 편차 계산 부분을 포함하는 화상 처리 유니트, 및 상기 본딩 스테이션에서 본딩 동작을 수행하기 위해 각 상기 본딩 점에 상기 본딩 툴을 정렬하도록 상기 편차를 기초로 하여 상기 이동 테이블의 이동을 제어하기 위한 제어 유니트를 포함하는 것을 특징으로 하는 와이어 본딩 장치.
  2. 제1항에 있어서, 상기 화상 픽업 유니트가 상기 화상 프레임을 픽업하기 위한 제1카메라와 상기 IC칩의 위치를 결정하기 위한 제2카메라를 포함하는 것을 특징으로 하는 와이어 본딩 장치.
  3. 제1항에 있어서, 상기 화상 픽업 유니트가 CCD화상 센서를 포함하는 것을 특징으로 하는 와이어 본딩 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940033233A 1993-12-06 1994-12-06 와이어 본딩 장치 KR0155181B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP93-305322 1993-12-06
JP5305322A JP2541489B2 (ja) 1993-12-06 1993-12-06 ワイヤボンディング装置
JP93-305,322 1993-12-06

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Publication Number Publication Date
KR950021294A true KR950021294A (ko) 1995-07-26
KR0155181B1 KR0155181B1 (ko) 1998-12-01

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Country Status (5)

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US (1) US5516023A (ko)
EP (1) EP0657917B1 (ko)
JP (1) JP2541489B2 (ko)
KR (1) KR0155181B1 (ko)
DE (1) DE69418837T2 (ko)

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US5516023A (en) 1996-05-14
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EP0657917A1 (en) 1995-06-14

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