KR930003261A - 반도체 집적 회로 - Google Patents
반도체 집적 회로 Download PDFInfo
- Publication number
- KR930003261A KR930003261A KR1019920013482A KR920013482A KR930003261A KR 930003261 A KR930003261 A KR 930003261A KR 1019920013482 A KR1019920013482 A KR 1019920013482A KR 920013482 A KR920013482 A KR 920013482A KR 930003261 A KR930003261 A KR 930003261A
- Authority
- KR
- South Korea
- Prior art keywords
- material layer
- aluminum material
- diffusion region
- integrated circuit
- semiconductor integrated
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims 6
- 229910052782 aluminium Inorganic materials 0.000 claims 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 9
- 239000000463 material Substances 0.000 claims 8
- 238000009792 diffusion process Methods 0.000 claims 7
- 230000004888 barrier function Effects 0.000 claims 5
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical group [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims 2
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical group [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 claims 2
- 229910021344 molybdenum silicide Inorganic materials 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 5
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3188850A JPH0536630A (ja) | 1991-07-29 | 1991-07-29 | 半導体集積回路 |
| JP91-188850 | 1991-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR930003261A true KR930003261A (ko) | 1993-02-24 |
Family
ID=16230937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920013482A KR930003261A (ko) | 1991-07-29 | 1992-07-28 | 반도체 집적 회로 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH0536630A (ja) |
| KR (1) | KR930003261A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6176131B2 (ja) * | 2014-01-28 | 2017-08-09 | 豊田合成株式会社 | 半導体装置の製造方法 |
-
1991
- 1991-07-29 JP JP3188850A patent/JPH0536630A/ja active Pending
-
1992
- 1992-07-28 KR KR1019920013482A patent/KR930003261A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536630A (ja) | 1993-02-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |