KR900007072A - 반도체장치의 제조방법 - Google Patents

반도체장치의 제조방법

Info

Publication number
KR900007072A
KR900007072A KR1019890015435A KR890015435A KR900007072A KR 900007072 A KR900007072 A KR 900007072A KR 1019890015435 A KR1019890015435 A KR 1019890015435A KR 890015435 A KR890015435 A KR 890015435A KR 900007072 A KR900007072 A KR 900007072A
Authority
KR
South Korea
Prior art keywords
manufacturing
semiconductor device
semiconductor
Prior art date
Application number
KR1019890015435A
Other languages
English (en)
Other versions
KR930001670B1 (ko
Inventor
사또시 다께찌
유꼬오 나까무라
유까리 미하라
Original Assignee
후지쓰 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지쓰 가부시끼가이샤 filed Critical 후지쓰 가부시끼가이샤
Publication of KR900007072A publication Critical patent/KR900007072A/ko
Application granted granted Critical
Publication of KR930001670B1 publication Critical patent/KR930001670B1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/949—Energy beam treating radiation resist on semiconductor

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
KR1019890015435A 1988-10-26 1989-10-26 반도체장치의 제조방법 KR930001670B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP(A)63-268298 1988-10-26
JP63268298A JPH02115853A (ja) 1988-10-26 1988-10-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
KR900007072A true KR900007072A (ko) 1990-05-09
KR930001670B1 KR930001670B1 (ko) 1993-03-08

Family

ID=17456584

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890015435A KR930001670B1 (ko) 1988-10-26 1989-10-26 반도체장치의 제조방법

Country Status (4)

Country Link
US (1) US5068169A (ko)
EP (1) EP0366460A3 (ko)
JP (1) JPH02115853A (ko)
KR (1) KR930001670B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220001827A (ko) * 2020-06-30 2022-01-06 현대제철 주식회사 냉연 강판의 제조 방법

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2685075B2 (ja) * 1988-11-29 1997-12-03 富士通株式会社 二層構造ポジ型レジストの上層レジスト
JPH0442229A (ja) * 1990-06-08 1992-02-12 Fujitsu Ltd レジスト材料およびパターンの形成方法
JPH06332196A (ja) * 1993-05-24 1994-12-02 Nippon Paint Co Ltd レジストパターンの形成方法
JP2980149B2 (ja) * 1993-09-24 1999-11-22 富士通株式会社 レジスト材料およびパターン形成方法
KR0156316B1 (ko) * 1995-09-13 1998-12-01 김광호 반도체장치의 패턴 형성방법
US6139647A (en) * 1995-12-21 2000-10-31 International Business Machines Corporation Selective removal of vertical portions of a film
US5767017A (en) * 1995-12-21 1998-06-16 International Business Machines Corporation Selective removal of vertical portions of a film
US5985524A (en) * 1997-03-28 1999-11-16 International Business Machines Incorporated Process for using bilayer photoresist
US6444408B1 (en) * 2000-02-28 2002-09-03 International Business Machines Corporation High silicon content monomers and polymers suitable for 193 nm bilayer resists
JP2020095068A (ja) * 2017-03-31 2020-06-18 富士フイルム株式会社 パターン形成方法、電子デバイスの製造方法
WO2020171006A1 (ja) * 2019-02-22 2020-08-27 Jsr株式会社 半導体基板の製造方法及び組成物

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551417A (en) * 1982-06-08 1985-11-05 Nec Corporation Method of forming patterns in manufacturing microelectronic devices
US4481049A (en) * 1984-03-02 1984-11-06 At&T Bell Laboratories Bilevel resist
US4770977A (en) * 1984-09-21 1988-09-13 Commissariat A L'energie Atomique Silicon-containing polymer and its use as a masking resin in a lithography process
FR2570844B1 (fr) * 1984-09-21 1986-11-14 Commissariat Energie Atomique Film photosensible a base de polymere silicie et son utilisation comme resine de masquage dans un procede de lithographie
JPH067263B2 (ja) * 1985-08-19 1994-01-26 富士写真フイルム株式会社 光可溶化組成物
US4665006A (en) * 1985-12-09 1987-05-12 International Business Machines Corporation Positive resist system having high resistance to oxygen reactive ion etching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220001827A (ko) * 2020-06-30 2022-01-06 현대제철 주식회사 냉연 강판의 제조 방법

Also Published As

Publication number Publication date
JPH02115853A (ja) 1990-04-27
EP0366460A2 (en) 1990-05-02
EP0366460A3 (en) 1990-08-29
KR930001670B1 (ko) 1993-03-08
US5068169A (en) 1991-11-26

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