KR20230039525A - 도포 장치, 액적 토출 검사 방법 - Google Patents

도포 장치, 액적 토출 검사 방법 Download PDF

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Publication number
KR20230039525A
KR20230039525A KR1020220108157A KR20220108157A KR20230039525A KR 20230039525 A KR20230039525 A KR 20230039525A KR 1020220108157 A KR1020220108157 A KR 1020220108157A KR 20220108157 A KR20220108157 A KR 20220108157A KR 20230039525 A KR20230039525 A KR 20230039525A
Authority
KR
South Korea
Prior art keywords
droplet
cover
inspection
camera
area
Prior art date
Application number
KR1020220108157A
Other languages
English (en)
Korean (ko)
Inventor
다카히로 야마자키
마사히코 구로사와
유타카 오카베
도시히로 하야시
Original Assignee
시바우라 메카트로닉스 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 시바우라 메카트로닉스 가부시끼가이샤 filed Critical 시바우라 메카트로닉스 가부시끼가이샤
Publication of KR20230039525A publication Critical patent/KR20230039525A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
    • B41J2029/3935—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns by means of printed test patterns

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Ink Jet (AREA)
KR1020220108157A 2021-09-13 2022-08-29 도포 장치, 액적 토출 검사 방법 KR20230039525A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2021-148234 2021-09-13
JP2021148234A JP7526150B2 (ja) 2021-09-13 2021-09-13 塗布装置、液滴吐出検査方法

Publications (1)

Publication Number Publication Date
KR20230039525A true KR20230039525A (ko) 2023-03-21

Family

ID=85431687

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020220108157A KR20230039525A (ko) 2021-09-13 2022-08-29 도포 장치, 액적 토출 검사 방법

Country Status (4)

Country Link
JP (1) JP7526150B2 (ja)
KR (1) KR20230039525A (ja)
CN (1) CN115780171A (ja)
TW (1) TWI834283B (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010131562A (ja) 2008-12-08 2010-06-17 Toshiba Corp 液滴噴射塗布装置及び塗布体の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7367646B2 (en) 2004-12-22 2008-05-06 Pitney Bowes Inc. Test card for ink jet printers and method of using same
JP5761896B2 (ja) 2009-02-17 2015-08-12 芝浦メカトロニクス株式会社 液滴塗布方法及び装置
JP2010217643A (ja) 2009-03-18 2010-09-30 Seiko Epson Corp 液滴吐出装置、液滴吐出方法、及びカラーフィルターの製造方法
JP5864141B2 (ja) * 2011-06-16 2016-02-17 株式会社日立製作所 薄膜形成装置および薄膜形成方法
JP5839670B2 (ja) * 2011-09-13 2016-01-06 東レエンジニアリング株式会社 塗布装置および着弾状態検査方法
JP2013071292A (ja) 2011-09-27 2013-04-22 Fujifilm Corp 液滴吐出装置、および、検出装置のメンテナンス方法
JP6925225B2 (ja) 2017-10-16 2021-08-25 東京エレクトロン株式会社 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010131562A (ja) 2008-12-08 2010-06-17 Toshiba Corp 液滴噴射塗布装置及び塗布体の製造方法

Also Published As

Publication number Publication date
JP7526150B2 (ja) 2024-07-31
CN115780171A (zh) 2023-03-14
JP2023041085A (ja) 2023-03-24
TWI834283B (zh) 2024-03-01
TW202310932A (zh) 2023-03-16

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