KR20120125326A - 반도체 발광 소자, 반도체 발광 소자의 보호막 및 그 제작 방법 - Google Patents
반도체 발광 소자, 반도체 발광 소자의 보호막 및 그 제작 방법 Download PDFInfo
- Publication number
- KR20120125326A KR20120125326A KR1020127022725A KR20127022725A KR20120125326A KR 20120125326 A KR20120125326 A KR 20120125326A KR 1020127022725 A KR1020127022725 A KR 1020127022725A KR 20127022725 A KR20127022725 A KR 20127022725A KR 20120125326 A KR20120125326 A KR 20120125326A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- protective film
- semiconductor light
- emitting element
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000001681 protective effect Effects 0.000 title claims abstract description 141
- 239000004065 semiconductor Substances 0.000 title claims abstract description 113
- 238000000034 method Methods 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- 229910008051 Si-OH Inorganic materials 0.000 claims description 7
- 229910006358 Si—OH Inorganic materials 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 abstract description 66
- 230000005012 migration Effects 0.000 abstract description 31
- 238000013508 migration Methods 0.000 abstract description 31
- -1 silicon nitrides Chemical class 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 69
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 69
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 21
- 230000002265 prevention Effects 0.000 description 19
- 230000015556 catabolic process Effects 0.000 description 14
- 230000035699 permeability Effects 0.000 description 14
- 238000009413 insulation Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 239000012528 membrane Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- FQMNUIZEFUVPNU-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co] FQMNUIZEFUVPNU-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
- H01L2224/02165—Reinforcing structures
- H01L2224/02166—Collar structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/49105—Connecting at different heights
- H01L2224/49107—Connecting at different heights on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/034—Manufacture or treatment of coatings
Landscapes
- Led Devices (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010104443A JP2011233784A (ja) | 2010-04-28 | 2010-04-28 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
| JPJP-P-2010-104443 | 2010-04-28 | ||
| PCT/JP2011/052814 WO2011135889A1 (ja) | 2010-04-28 | 2011-02-10 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20120125326A true KR20120125326A (ko) | 2012-11-14 |
Family
ID=44861210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127022725A Ceased KR20120125326A (ko) | 2010-04-28 | 2011-02-10 | 반도체 발광 소자, 반도체 발광 소자의 보호막 및 그 제작 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20130037850A1 (enExample) |
| EP (1) | EP2565946A4 (enExample) |
| JP (1) | JP2011233784A (enExample) |
| KR (1) | KR20120125326A (enExample) |
| TW (1) | TW201203613A (enExample) |
| WO (1) | WO2011135889A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011233783A (ja) * | 2010-04-28 | 2011-11-17 | Mitsubishi Heavy Ind Ltd | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
| JP2013251423A (ja) * | 2012-06-01 | 2013-12-12 | Mitsubishi Heavy Ind Ltd | 発光素子の保護膜の作製方法及び装置 |
| JP6476854B2 (ja) * | 2014-12-26 | 2019-03-06 | 日亜化学工業株式会社 | 発光素子の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240535A (ja) * | 1994-02-28 | 1995-09-12 | Kyocera Corp | 薄膜パターンの形成方法 |
| DE69516933T2 (de) * | 1994-04-06 | 2000-12-07 | At&T Ipm Corp., Coral Gables | Herstellungsverfahren für eine Vorrichtung mit einer SiOx Schicht |
| JP3723434B2 (ja) * | 1999-09-24 | 2005-12-07 | 三洋電機株式会社 | 半導体発光素子 |
| JP2003332616A (ja) * | 2002-05-14 | 2003-11-21 | Sharp Corp | 化合物半導体素子およびその製造方法 |
| JP2005286135A (ja) * | 2004-03-30 | 2005-10-13 | Eudyna Devices Inc | 半導体装置および半導体装置の製造方法 |
| JP4543732B2 (ja) * | 2004-04-20 | 2010-09-15 | 日立電線株式会社 | 発光ダイオードアレイ |
| JP2006041403A (ja) | 2004-07-29 | 2006-02-09 | Nichia Chem Ind Ltd | 半導体発光素子 |
| JP2007189097A (ja) | 2006-01-13 | 2007-07-26 | Nichia Chem Ind Ltd | 半導体発光素子 |
| JP2009135466A (ja) * | 2007-10-29 | 2009-06-18 | Mitsubishi Chemicals Corp | 半導体発光素子およびその製造方法 |
| US8031754B2 (en) * | 2008-04-24 | 2011-10-04 | The Furukawa Electric Co., Ltd. | Surface emitting laser element, surface emitting laser element array, method of fabricating a surface emitting laser element |
-
2010
- 2010-04-28 JP JP2010104443A patent/JP2011233784A/ja active Pending
-
2011
- 2011-02-10 KR KR1020127022725A patent/KR20120125326A/ko not_active Ceased
- 2011-02-10 US US13/582,192 patent/US20130037850A1/en not_active Abandoned
- 2011-02-10 WO PCT/JP2011/052814 patent/WO2011135889A1/ja not_active Ceased
- 2011-02-10 EP EP11774674.3A patent/EP2565946A4/en not_active Withdrawn
- 2011-02-23 TW TW100105984A patent/TW201203613A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011135889A1 (ja) | 2011-11-03 |
| US20130037850A1 (en) | 2013-02-14 |
| TW201203613A (en) | 2012-01-16 |
| JP2011233784A (ja) | 2011-11-17 |
| EP2565946A1 (en) | 2013-03-06 |
| EP2565946A4 (en) | 2014-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0105 | International application |
Patent event date: 20120830 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PA0201 | Request for examination | ||
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20140429 Patent event code: PE09021S01D |
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| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 20140901 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 20140429 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |