KR20090073223A - Ｔｃｐ 핸들링 장치 및 그 장치에서의 접속단자의 위치맞춤 방법 - Google Patents

Ｔｃｐ 핸들링 장치 및 그 장치에서의 접속단자의 위치맞춤 방법 Download PDF

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Publication number
KR20090073223A
KR20090073223A KR1020097009678A KR20097009678A KR20090073223A KR 20090073223 A KR20090073223 A KR 20090073223A KR 1020097009678 A KR1020097009678 A KR 1020097009678A KR 20097009678 A KR20097009678 A KR 20097009678A KR 20090073223 A KR20090073223 A KR 20090073223A
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KR
South Korea
Prior art keywords
tcp
coordinate data
contact surface
connection terminal
measuring unit
Prior art date
Application number
KR1020097009678A
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English (en)
Korean (ko)
Inventor
마사요시 이치카와
마사타카 오노자와
Original Assignee
가부시키가이샤 아드반테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20090073223A publication Critical patent/KR20090073223A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020097009678A 2006-11-09 2006-11-09 Ｔｃｐ 핸들링 장치 및 그 장치에서의 접속단자의 위치맞춤 방법 KR20090073223A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/322396 WO2008056418A1 (en) 2006-11-09 2006-11-09 Tcp handling device, and method for positional alignment of connecting terminals in the device

Publications (1)

Publication Number Publication Date
KR20090073223A true KR20090073223A (ko) 2009-07-02

Family

ID=39364247

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097009678A KR20090073223A (ko) 2006-11-09 2006-11-09 Ｔｃｐ 핸들링 장치 및 그 장치에서의 접속단자의 위치맞춤 방법

Country Status (5)

Country Link
JP (1) JP5047188B2 (zh)
KR (1) KR20090073223A (zh)
CN (1) CN101583840A (zh)
TW (1) TW200836280A (zh)
WO (1) WO2008056418A1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160025291A (ko) * 2014-08-27 2016-03-08 에스케이하이닉스 주식회사 보정용 프로브 카드, 프로브 테스트 장치, 보정용 프로브 카드의 설정 방법 및 보정용 프로브 카드를 이용한 프로브 테스트 장치의 얼라인 방법
KR20180084337A (ko) 2017-01-16 2018-07-25 주식회사 에이티테크놀러지 Ｔａｂ용 핸들링 장치
KR200489368Y1 (ko) * 2018-12-13 2019-06-07 주식회사 케이비엔텍 다양한 규격의 테스터기 장착이 가능한 칩 검사장치
US10710877B2 (en) 2014-07-18 2020-07-14 Korea Institute Of Science And Technology Method and apparatus for generating hydrogen from formic acid

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10985328B2 (en) 2016-05-25 2021-04-20 Universal Display Corporation Organic electroluminescent materials and devices
US10324126B2 (en) * 2016-06-10 2019-06-18 Asm Technology Singapore Pte Ltd. Method and apparatus for aligning probe pins with respect to positions of electronic devices
CN107478152A (zh) * 2017-08-11 2017-12-15 哈尔滨工业大学 Tr芯片定位方法及检测方法
CN107560588B (zh) * 2017-10-24 2023-10-27 江阴鑫宝利金属制品有限公司 涡轮焊接腔表面平整度检测工装
TWI701441B (zh) * 2018-10-23 2020-08-11 鋒華科技股份有限公司 具有預先調整溫度的捲帶式覆晶薄膜測試裝置
CN111562413A (zh) * 2019-02-14 2020-08-21 均豪精密工业股份有限公司 检测方法及检测系统
CN110690135B (zh) * 2019-09-30 2022-02-01 武汉东飞凌科技有限公司 一种二次元坐标系旋转补偿测量方法及装置
CN110940918B (zh) * 2019-12-13 2021-04-09 吴江市金澜机械制造有限公司 一种发电机定子电性能自动检测装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08327658A (ja) * 1995-03-31 1996-12-13 Tokyo Electron Ltd 基板検査装置
JP2000161913A (ja) * 1998-12-01 2000-06-16 Philips Japan Ltd 複数の物体を相互に位置合わせする方法及び装置
JP2001061913A (ja) * 1999-08-26 2001-03-13 Ishimoku:Kk 歩行補助具、歩行補助具の製法
JP2001181888A (ja) * 1999-12-17 2001-07-03 Nippon Mining & Metals Co Ltd コネクタ用めっき材料
JP2002181888A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置
JP2004146776A (ja) * 2002-08-29 2004-05-20 Shinko Electric Ind Co Ltd フリップチップ実装装置及びフリップチップ実装方法
JP4098306B2 (ja) * 2003-01-31 2008-06-11 日本エンジニアリング株式会社 Ｔｃｐハンドリング装置および当該装置における位置ずれ補正方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10710877B2 (en) 2014-07-18 2020-07-14 Korea Institute Of Science And Technology Method and apparatus for generating hydrogen from formic acid
KR20160025291A (ko) * 2014-08-27 2016-03-08 에스케이하이닉스 주식회사 보정용 프로브 카드, 프로브 테스트 장치, 보정용 프로브 카드의 설정 방법 및 보정용 프로브 카드를 이용한 프로브 테스트 장치의 얼라인 방법
KR20180084337A (ko) 2017-01-16 2018-07-25 주식회사 에이티테크놀러지 Ｔａｂ용 핸들링 장치
KR200489368Y1 (ko) * 2018-12-13 2019-06-07 주식회사 케이비엔텍 다양한 규격의 테스터기 장착이 가능한 칩 검사장치

Also Published As

Publication number Publication date
JP5047188B2 (ja) 2012-10-10
WO2008056418A1 (en) 2008-05-15
JPWO2008056418A1 (ja) 2010-02-25
TW200836280A (en) 2008-09-01
CN101583840A (zh) 2009-11-18

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