KR20090049169A - 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치 - Google Patents

구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치 Download PDF

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Publication number
KR20090049169A
KR20090049169A KR1020070115284A KR20070115284A KR20090049169A KR 20090049169 A KR20090049169 A KR 20090049169A KR 1020070115284 A KR1020070115284 A KR 1020070115284A KR 20070115284 A KR20070115284 A KR 20070115284A KR 20090049169 A KR20090049169 A KR 20090049169A
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KR
South Korea
Prior art keywords
members
magnetic force
protrusions
magnets
magnetic
Prior art date
Application number
KR1020070115284A
Other languages
English (en)
Korean (ko)
Inventor
임헌섭
김형배
강일규
류승수
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020070115284A priority Critical patent/KR20090049169A/ko
Priority to JP2008273121A priority patent/JP5126597B2/ja
Priority to CNA2008101720818A priority patent/CN101436561A/zh
Priority to TW097142735A priority patent/TWI433806B/zh
Publication of KR20090049169A publication Critical patent/KR20090049169A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/02—Adaptations of individual rollers and supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020070115284A 2007-11-13 2007-11-13 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치 KR20090049169A (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020070115284A KR20090049169A (ko) 2007-11-13 2007-11-13 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치
JP2008273121A JP5126597B2 (ja) 2007-11-13 2008-10-23 駆動磁力部材と、これを利用した基板移送ユニット及び基板処理装置
CNA2008101720818A CN101436561A (zh) 2007-11-13 2008-10-29 磁力驱动构件、基板传送单元及基板处理装置
TW097142735A TWI433806B (zh) 2007-11-13 2008-11-05 驅動磁力零件以及使用該零件的基板運送單元與基板處理裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070115284A KR20090049169A (ko) 2007-11-13 2007-11-13 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020090066890A Division KR101299704B1 (ko) 2009-07-22 2009-07-22 기판 처리 장치

Publications (1)

Publication Number Publication Date
KR20090049169A true KR20090049169A (ko) 2009-05-18

Family

ID=40710913

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070115284A KR20090049169A (ko) 2007-11-13 2007-11-13 구동 자력 부재와, 이를 이용한 기판 이송 유닛 및 기판처리 장치

Country Status (4)

Country Link
JP (1) JP5126597B2 (ja)
KR (1) KR20090049169A (ja)
CN (1) CN101436561A (ja)
TW (1) TWI433806B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103950686A (zh) * 2014-04-30 2014-07-30 谢娟 一种玻璃流水线用传动轮
JP6266488B2 (ja) * 2014-10-30 2018-01-24 アズビル株式会社 温度管理装置、搬送装置、及び搬送台
CN106429291A (zh) * 2016-11-08 2017-02-22 天奇自动化工程股份有限公司 磁性积放辊筒
JP6724239B2 (ja) * 2017-02-24 2020-07-15 アーベーベー・シュバイツ・アーゲー 補助搬送機及び対応する搬送システム
KR101806081B1 (ko) * 2017-07-25 2017-12-07 한양대학교 산학협력단 스텐트 전달 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030086879A (ko) * 2002-05-07 2003-11-12 주식회사 포스코 선재의 균일 냉각을 위한 선재 냉각 장치의 롤러 배열방법
KR100454909B1 (ko) * 2002-02-22 2004-11-06 엘지전자 주식회사 하드디스크 드라이버의 로딩/언로딩 장치
KR20060022010A (ko) * 2004-09-06 2006-03-09 삼성전자주식회사 반도체 연마설비의 패드 컨디셔닝 장치
KR20060100789A (ko) * 2005-03-18 2006-09-21 세메스 주식회사 평판 디스플레이 제조를 위한 컨베이어 장치
KR20070045537A (ko) * 2005-10-27 2007-05-02 세메스 주식회사 기판 이송 시스템

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0524644Y2 (ja) * 1987-07-21 1993-06-23
JP3193308B2 (ja) * 1996-10-16 2001-07-30 住友ゴム工業株式会社 翼列付きベルト、および、翼列付きベルトの製造方法
JP3489725B2 (ja) * 1999-05-19 2004-01-26 ノーリツ鋼機株式会社 感光材料の搬送装置
JP3884622B2 (ja) * 2001-02-26 2007-02-21 大日本スクリーン製造株式会社 基板搬送装置およびそれを用いた基板処理装置、ならびに基板処理方法
JP2003341835A (ja) * 2002-05-27 2003-12-03 Shimada Phys & Chem Ind Co Ltd 基板のガス処理装置
JP4286035B2 (ja) * 2003-03-19 2009-06-24 大日本スクリーン製造株式会社 基板搬送装置
JP2006121967A (ja) * 2004-10-28 2006-05-18 Iseki & Co Ltd 苗移植機
JP2006206218A (ja) * 2005-01-26 2006-08-10 Maruyasu Kikai Kk ガラス基板等の搬送システム
JP2006081555A (ja) * 2005-12-16 2006-03-30 Mitsubishi Agricult Mach Co Ltd 移植機における縦送りベルトローラ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100454909B1 (ko) * 2002-02-22 2004-11-06 엘지전자 주식회사 하드디스크 드라이버의 로딩/언로딩 장치
KR20030086879A (ko) * 2002-05-07 2003-11-12 주식회사 포스코 선재의 균일 냉각을 위한 선재 냉각 장치의 롤러 배열방법
KR20060022010A (ko) * 2004-09-06 2006-03-09 삼성전자주식회사 반도체 연마설비의 패드 컨디셔닝 장치
KR20060100789A (ko) * 2005-03-18 2006-09-21 세메스 주식회사 평판 디스플레이 제조를 위한 컨베이어 장치
KR20070045537A (ko) * 2005-10-27 2007-05-02 세메스 주식회사 기판 이송 시스템

Also Published As

Publication number Publication date
JP5126597B2 (ja) 2013-01-23
TW200938465A (en) 2009-09-16
CN101436561A (zh) 2009-05-20
JP2009124131A (ja) 2009-06-04
TWI433806B (zh) 2014-04-11

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