KR20080052410A - 표면 형상 측정 장치 - Google Patents

표면 형상 측정 장치 Download PDF

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Publication number
KR20080052410A
KR20080052410A KR1020070124787A KR20070124787A KR20080052410A KR 20080052410 A KR20080052410 A KR 20080052410A KR 1020070124787 A KR1020070124787 A KR 1020070124787A KR 20070124787 A KR20070124787 A KR 20070124787A KR 20080052410 A KR20080052410 A KR 20080052410A
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KR
South Korea
Prior art keywords
data
measurement
data processing
processing unit
surface shape
Prior art date
Application number
KR1020070124787A
Other languages
English (en)
Korean (ko)
Inventor
미쯔노리 도바
노리유끼 다까하시
노리오 우에따께
다다시 다까하시
Original Assignee
도시바 솔루션 가부시끼가이샤
니폰 덴키 가라스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도시바 솔루션 가부시끼가이샤, 니폰 덴키 가라스 가부시키가이샤 filed Critical 도시바 솔루션 가부시끼가이샤
Publication of KR20080052410A publication Critical patent/KR20080052410A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/38—Concrete; ceramics; glass; bricks
    • G01N33/386—Glass
KR1020070124787A 2006-12-05 2007-12-04 표면 형상 측정 장치 KR20080052410A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006328597A JP5343314B2 (ja) 2006-12-05 2006-12-05 表面形状測定装置
JPJP-P-2006-00328597 2006-12-05

Publications (1)

Publication Number Publication Date
KR20080052410A true KR20080052410A (ko) 2008-06-11

Family

ID=39546942

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070124787A KR20080052410A (ko) 2006-12-05 2007-12-04 표면 형상 측정 장치

Country Status (4)

Country Link
JP (1) JP5343314B2 (ja)
KR (1) KR20080052410A (ja)
CN (1) CN101196391B (ja)
TW (1) TWI479120B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101160466B1 (ko) 2010-12-27 2012-06-28 (주)에스티아이 잉크젯 헤드 구동방법

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TW201116636A (en) * 2009-11-11 2011-05-16 Shui-Kun Zhan Local vacuum electroplating method of workpiece
JP5907429B2 (ja) 2012-07-24 2016-04-26 日本電気硝子株式会社 板状体の反り検査装置及びその反り検査方法
JP6171048B1 (ja) * 2016-04-28 2017-07-26 株式会社ディスコ 研削装置
CN106017353B (zh) * 2016-07-22 2019-07-16 大连理工大学 一种蜂窝芯面形测量装置
CN106017352B (zh) * 2016-07-22 2019-10-29 大连理工大学 一种蜂窝芯面形的测量方法
CN106403840A (zh) * 2016-09-09 2017-02-15 蚌埠中建材信息显示材料有限公司 一种超薄浮法玻璃弯曲度检测方法
CZ2020113A3 (cs) * 2020-03-05 2020-10-21 FOR G, s.r.o. Způsob bezkontaktního zjišťování geometrické přesnosti tvaru transparentního tvarovaného plošného výrobku ze skla nebo plastu a zařízení k jeho provádění

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101160466B1 (ko) 2010-12-27 2012-06-28 (주)에스티아이 잉크젯 헤드 구동방법

Also Published As

Publication number Publication date
TWI479120B (zh) 2015-04-01
TW200840990A (en) 2008-10-16
CN101196391B (zh) 2012-07-04
JP2008139268A (ja) 2008-06-19
JP5343314B2 (ja) 2013-11-13
CN101196391A (zh) 2008-06-11

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