CN101196391A - 表面形状测定装置 - Google Patents
表面形状测定装置 Download PDFInfo
- Publication number
- CN101196391A CN101196391A CNA2007101941356A CN200710194135A CN101196391A CN 101196391 A CN101196391 A CN 101196391A CN A2007101941356 A CNA2007101941356 A CN A2007101941356A CN 200710194135 A CN200710194135 A CN 200710194135A CN 101196391 A CN101196391 A CN 101196391A
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- measuring instrument
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Links
- 238000012545 processing Methods 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- 238000004364 calculation method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 abstract description 26
- 239000011521 glass Substances 0.000 abstract description 23
- 230000007547 defect Effects 0.000 abstract 1
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- 238000012935 Averaging Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 239000002772 conduction electron Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/38—Concrete; Lime; Mortar; Gypsum; Bricks; Ceramics; Glass
- G01N33/386—Glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Food Science & Technology (AREA)
- Ceramic Engineering (AREA)
- Aviation & Aerospace Engineering (AREA)
- Medicinal Chemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006328597A JP5343314B2 (ja) | 2006-12-05 | 2006-12-05 | 表面形状測定装置 |
JP328597/2006 | 2006-12-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101196391A true CN101196391A (zh) | 2008-06-11 |
CN101196391B CN101196391B (zh) | 2012-07-04 |
Family
ID=39546942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101941356A Active CN101196391B (zh) | 2006-12-05 | 2007-12-05 | 表面形状测定装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5343314B2 (zh) |
KR (1) | KR20080052410A (zh) |
CN (1) | CN101196391B (zh) |
TW (1) | TWI479120B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106017352A (zh) * | 2016-07-22 | 2016-10-12 | 大连理工大学 | 一种蜂窝芯面形的测量方法 |
CN106017353A (zh) * | 2016-07-22 | 2016-10-12 | 大连理工大学 | 一种蜂窝芯面形测量装置 |
CN106403840A (zh) * | 2016-09-09 | 2017-02-15 | 蚌埠中建材信息显示材料有限公司 | 一种超薄浮法玻璃弯曲度检测方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201116636A (en) * | 2009-11-11 | 2011-05-16 | Shui-Kun Zhan | Local vacuum electroplating method of workpiece |
KR101160466B1 (ko) | 2010-12-27 | 2012-06-28 | (주)에스티아이 | 잉크젯 헤드 구동방법 |
JP5907429B2 (ja) | 2012-07-24 | 2016-04-26 | 日本電気硝子株式会社 | 板状体の反り検査装置及びその反り検査方法 |
JP6171048B1 (ja) * | 2016-04-28 | 2017-07-26 | 株式会社ディスコ | 研削装置 |
CZ308522B6 (cs) * | 2020-03-05 | 2020-10-21 | FOR G, s.r.o. | Způsob bezkontaktního zjišťování geometrické přesnosti tvaru transparentního tvarovaného plošného výrobku ze skla nebo plastu a zařízení k jeho provádění |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4934352A (zh) * | 1972-07-26 | 1974-03-29 | ||
JPS5158371A (ja) * | 1974-11-19 | 1976-05-21 | Sumitomo Shipbuild Machinery | Sokanitakeijokenshutsukiniokeru reitensetsuteihoho |
JPS51101560A (ja) * | 1975-03-05 | 1976-09-08 | Nippon Steel Corp | Mizumaikuromeeta |
JPS5294154A (en) * | 1976-02-03 | 1977-08-08 | Nippon Steel Corp | Roll profile detector |
JPS53145666A (en) * | 1977-05-25 | 1978-12-19 | Kawasaki Steel Co | Detecting method of surface profile of steel profile |
JPS5415550U (zh) * | 1977-07-05 | 1979-02-01 | ||
JPS60102508A (ja) * | 1983-11-09 | 1985-06-06 | Sumitomo Light Metal Ind Ltd | 金属帯板の形状検出方法 |
JPS60190806A (ja) * | 1984-03-12 | 1985-09-28 | Fanuc Ltd | 立体モデルの形状検出方法 |
JPS617U (ja) * | 1984-06-06 | 1986-01-06 | 川崎製鉄株式会社 | 位置及び形状検出装置 |
JPS6131915A (ja) * | 1984-07-25 | 1986-02-14 | Mitsubishi Heavy Ind Ltd | 真直度測定方法 |
JPS61290309A (ja) * | 1985-06-17 | 1986-12-20 | Daido Steel Co Ltd | 板材の平坦度測定装置 |
IT1182868B (it) * | 1985-09-20 | 1987-10-05 | Randolph Norwood Mitchell | Procedimento ed apparecchiatura per il controllo e/o correzione continua del profilo e planarita' di nastri metallici e simili |
JPH01213510A (ja) * | 1988-02-22 | 1989-08-28 | Fujitsu Ltd | 表面実装部品の実装検査装置 |
JP2711926B2 (ja) * | 1990-02-28 | 1998-02-10 | トヨタ自動車株式会社 | 研摩データ作成装置 |
JP2788162B2 (ja) * | 1993-04-06 | 1998-08-20 | 京セラ株式会社 | 非接触型測長器 |
JPH06307820A (ja) * | 1993-04-22 | 1994-11-04 | Daido Steel Co Ltd | 形状検査装置 |
JPH0821716A (ja) * | 1994-07-05 | 1996-01-23 | Daido Steel Co Ltd | 帯材の形状検出装置 |
JP3126288B2 (ja) * | 1995-03-27 | 2001-01-22 | 新日本製鐵株式会社 | 鉄道用レ−ルの形状測定方法 |
US5616853A (en) * | 1995-03-29 | 1997-04-01 | Kyocera Corporation | Measuring machine for measuring object |
JPH09126745A (ja) * | 1995-10-31 | 1997-05-16 | Mitsubishi Heavy Ind Ltd | ガラス基板の平面度測定装置 |
JPH09280853A (ja) * | 1996-04-09 | 1997-10-31 | Nippon Steel Corp | 鉄道レール柱部厚み測定方法 |
JPH10197283A (ja) * | 1996-12-30 | 1998-07-31 | Tosok Corp | 測定データ処理方法及び内径測定装置 |
JP2000337845A (ja) * | 1999-05-25 | 2000-12-08 | Toshiba Ceramics Co Ltd | 板状体の平坦度測定装置 |
JP2001249013A (ja) * | 2000-03-07 | 2001-09-14 | Hitachi Ltd | 立体形状検出装置及びパターン検査装置、並びにそれらの方法 |
JP2002277227A (ja) * | 2001-03-16 | 2002-09-25 | Union Optical Co Ltd | 気体式測定装置 |
WO2002093181A1 (fr) * | 2001-05-15 | 2002-11-21 | Synchro Co., Ltd. | Detecteur de forme d'onde et systeme de suivi d'etat l'utilisant |
CN2506976Y (zh) * | 2001-09-30 | 2002-08-21 | 西安交通大学 | 微轮廓测量仪 |
JP2003280738A (ja) * | 2002-03-26 | 2003-10-02 | Kawasaki Heavy Ind Ltd | 障害物認識方法および障害物認識装置 |
JP2005017386A (ja) * | 2003-06-23 | 2005-01-20 | V Technology Co Ltd | 平板状ワークの検査、修正装置 |
CN2682381Y (zh) * | 2004-02-16 | 2005-03-02 | 洪雄善 | 产品外观尺寸自动扫描检测机 |
AU2005248939B2 (en) * | 2004-12-30 | 2011-10-27 | John Bean Technologies Corporation | Portioning apparatus and method |
GB0502677D0 (en) * | 2005-02-09 | 2005-03-16 | Taylor Hobson Ltd | Apparatus for and a method of determining a surface characteristic |
CN100483071C (zh) * | 2006-01-23 | 2009-04-29 | 贵州大学 | 基于垂直位移扫描的非接触式表面形貌测量方法及测量仪 |
-
2006
- 2006-12-05 JP JP2006328597A patent/JP5343314B2/ja active Active
-
2007
- 2007-12-04 KR KR1020070124787A patent/KR20080052410A/ko active Search and Examination
- 2007-12-05 CN CN2007101941356A patent/CN101196391B/zh active Active
- 2007-12-05 TW TW096146305A patent/TWI479120B/zh active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106017352A (zh) * | 2016-07-22 | 2016-10-12 | 大连理工大学 | 一种蜂窝芯面形的测量方法 |
CN106017353A (zh) * | 2016-07-22 | 2016-10-12 | 大连理工大学 | 一种蜂窝芯面形测量装置 |
CN106017353B (zh) * | 2016-07-22 | 2019-07-16 | 大连理工大学 | 一种蜂窝芯面形测量装置 |
CN106017352B (zh) * | 2016-07-22 | 2019-10-29 | 大连理工大学 | 一种蜂窝芯面形的测量方法 |
CN106403840A (zh) * | 2016-09-09 | 2017-02-15 | 蚌埠中建材信息显示材料有限公司 | 一种超薄浮法玻璃弯曲度检测方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20080052410A (ko) | 2008-06-11 |
JP5343314B2 (ja) | 2013-11-13 |
TWI479120B (zh) | 2015-04-01 |
TW200840990A (en) | 2008-10-16 |
CN101196391B (zh) | 2012-07-04 |
JP2008139268A (ja) | 2008-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: NIPPON ELECTRIC GLASS CO., LTD. Owner name: NIPPON ELECTRIC GLASS CO., LTD. Free format text: FORMER OWNER: TOSHIBA SOLUTIONS CORP Effective date: 20101228 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: TOKYO, JAPAN TO: SHIGA PREFECTURE, JAPAN |
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TA01 | Transfer of patent application right |
Effective date of registration: 20101228 Address after: Shiga Applicant after: Toshiba Solutions Address before: Tokyo, Japan, Japan Applicant before: Toshiba Solutions Corporation Co-applicant before: Toshiba Solutions |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |