KR20070086519A - 가스 혼합물에서 희귀가스를 회수하는 방법 - Google Patents

가스 혼합물에서 희귀가스를 회수하는 방법 Download PDF

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KR20070086519A
KR20070086519A KR1020077014130A KR20077014130A KR20070086519A KR 20070086519 A KR20070086519 A KR 20070086519A KR 1020077014130 A KR1020077014130 A KR 1020077014130A KR 20077014130 A KR20077014130 A KR 20077014130A KR 20070086519 A KR20070086519 A KR 20070086519A
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gas
rare
rich
column
stream
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Korean (ko)
Inventor
라비 자인
줄리안 리차드 딘
로버트 브루스 그랜트
나움 페렐맨
파울 알란 스톡맨
네일 콘돈
앤드류 존 하프햄
윌리암 로버트 제리스테드
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더 비오씨 그룹 피엘씨
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Publication of KR20070086519A publication Critical patent/KR20070086519A/ko
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0042—Physical processing only by making use of membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • B01D15/10—Selective adsorption, e.g. chromatography characterised by constructional or operational features
    • B01D15/24—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the treatment of the fractions to be distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/025—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with wetted adsorbents; Chromatography
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0052—Physical processing only by adsorption in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0037—Xenon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Treating Waste Gases (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
KR1020077014130A 2004-12-22 2005-12-15 가스 혼합물에서 희귀가스를 회수하는 방법 Withdrawn KR20070086519A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/019,843 US7368000B2 (en) 2004-12-22 2004-12-22 Treatment of effluent gases
US11/019,843 2004-12-22

Publications (1)

Publication Number Publication Date
KR20070086519A true KR20070086519A (ko) 2007-08-27

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KR1020077014130A Withdrawn KR20070086519A (ko) 2004-12-22 2005-12-15 가스 혼합물에서 희귀가스를 회수하는 방법

Country Status (6)

Country Link
US (1) US7368000B2 (https=)
EP (1) EP1841690A1 (https=)
JP (1) JP2008525779A (https=)
KR (1) KR20070086519A (https=)
TW (1) TWI399236B (https=)
WO (1) WO2006067384A1 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101366629B1 (ko) * 2010-09-30 2014-03-12 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 흡착 공정에 의한 제논의 회수
KR20210105667A (ko) * 2020-02-19 2021-08-27 (주)한양기술공업 가스 포집 시스템 및 가스 포집 방법
KR102710551B1 (ko) * 2023-09-01 2024-09-26 주식회사 에프알디 흡착칼럼을 이용한 제논 및 크립톤 함유 미정제 혼합가스의 추출방법
KR20250082914A (ko) 2023-11-30 2025-06-09 (주)한양기술공업 반도체 공정 후 희유가스 포집-정제 시스템
KR20250082903A (ko) 2023-11-30 2025-06-09 (주)한양기술공업 희유가스 흡착제 및 이를 구비한 반도체 공정 후 희유가스 포집-정제 시스템

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GB0521944D0 (en) 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
DE102006034601B3 (de) * 2006-07-26 2008-02-07 Schmidt, Klaus, Prof. Dr. Rückhaltung von Edelgasen im Atemgas bei beatmeten Patienten mit Hilfe von Membranseparation
GB0618016D0 (en) * 2006-09-13 2006-10-18 Boc Group Plc Method of recycling hydrogen
US20080072953A1 (en) * 2006-09-27 2008-03-27 Thinsilicon Corp. Back contact device for photovoltaic cells and method of manufacturing a back contact device
JP5202836B2 (ja) * 2006-12-01 2013-06-05 日本エア・リキード株式会社 キセノンの回収システムおよび回収装置
WO2008150769A2 (en) * 2007-05-31 2008-12-11 Thinsilicon Corporation Photovoltaic device and method of manufacturing photovoltaic devices
WO2009055750A1 (en) * 2007-10-26 2009-04-30 Applied Materials, Inc. Methods and apparatus for smart abatement using an improved fuel circuit
WO2009100163A1 (en) * 2008-02-05 2009-08-13 Applied Materials, Inc. Methods and apparatus for operating an electronic device manufacturing system
KR101581673B1 (ko) * 2008-02-05 2015-12-31 어플라이드 머티어리얼스, 인코포레이티드 제조 프로세스들로부터의 가연성 폐기물 가스들을 처리하기 위한 시스템 및 방법
FR2932059A1 (fr) * 2008-05-28 2009-12-04 Air Liquide Systeme de traitement par plasma d'un fluide ou melange de fluides
US8340827B2 (en) * 2008-06-20 2012-12-25 Lam Research Corporation Methods for controlling time scale of gas delivery into a processing chamber
US8021468B2 (en) * 2008-06-23 2011-09-20 Siemens Medical Solutions Usa, Inc. Room temperature chemical trap for the purification of gaseous methane
US8042566B2 (en) * 2008-07-23 2011-10-25 Atmel Corporation Ex-situ component recovery
JP2012504350A (ja) * 2008-09-29 2012-02-16 シンシリコン・コーポレーション 一体的に統合されたソーラーモジュール
CN102246272B (zh) * 2008-12-10 2013-08-14 薄膜硅公司 再循环用于沉积半导体层的气体的系统和方法
GB2469647B (en) * 2009-04-21 2014-03-05 Linde Ag Lasers
EP2356696A4 (en) * 2009-05-06 2013-05-15 Thinsilicon Corp PHOTOVOLTAIC CELLS AND METHOD FOR REINFORCING LIGHT DETECTION IN SEMICONDUCTOR LAYERED TABLES
CN102301490A (zh) * 2009-06-10 2011-12-28 薄膜硅公司 光生伏打模块和制造具有级联半导体层堆叠的光生伏打模块的方法
US20110114156A1 (en) * 2009-06-10 2011-05-19 Thinsilicon Corporation Photovoltaic modules having a built-in bypass diode and methods for manufacturing photovoltaic modules having a built-in bypass diode
US8920573B2 (en) * 2011-09-14 2014-12-30 Institute Of Nuclear Energy Research, Atomic Energy Council Method of improving purity and yield of chemical product in automatic radioactive medicine synthesis system
FR2985437A1 (fr) * 2012-01-10 2013-07-12 Alstom Technology Ltd Procede de filtration d'effluents gazeux d'une installation industrielle
CN102832096B (zh) * 2012-09-20 2015-11-25 中微半导体设备(上海)有限公司 一种用于真空处理装置的气体供应装置及其气体供应及切换方法
JP6464094B2 (ja) 2012-12-22 2019-02-06 ディエムエフ・メディカル・インコーポレーテッド 中空糸膜を有する麻酔回路
JP6368458B2 (ja) * 2013-05-24 2018-08-01 株式会社荏原製作所 除害機能付真空ポンプ
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
JP6441660B2 (ja) * 2014-03-17 2018-12-19 株式会社荏原製作所 除害機能付真空ポンプ
CN104383784B (zh) * 2014-11-27 2016-03-02 中国科学技术大学 从环境气体中分离提取惰性气体的系统和方法
TWI547305B (zh) * 2014-12-18 2016-09-01 財團法人工業技術研究院 中空纖維吸附壓縮空氣乾燥系統
JP6175471B2 (ja) * 2015-10-30 2017-08-02 日本エア・リキード株式会社 ネオン回収精製システムおよびネオン回収精製方法
JP6734061B2 (ja) * 2016-01-29 2020-08-05 アジレント・テクノロジーズ・インクＡｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． プラズマ分光分析装置
US10677713B1 (en) * 2016-08-04 2020-06-09 Hrl Laboratories, Llc Adaptive gas analyzer
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US10824049B1 (en) 2017-10-06 2020-11-03 Hrl Laboratories, Llc Optical-frequency up-converting spectrometric imager
JP7096004B2 (ja) * 2018-02-07 2022-07-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP7020951B2 (ja) 2018-02-09 2022-02-16 東京エレクトロン株式会社 プラズマ処理システムおよびプラズマ処理方法
CN108899104B (zh) * 2018-07-26 2020-12-04 中国核动力研究设计院 一种用于制备85Kr标准源的方法
CN109665506B (zh) * 2018-12-21 2020-11-06 北京放射性核素实验室 大气氙富集纯化方法及装置
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US11557462B2 (en) * 2019-03-13 2023-01-17 Kla Corporation Collecting and recycling rare gases in semiconductor processing equipment
WO2021167218A1 (ko) * 2020-02-19 2021-08-26 (주)한양기술공업 가스 포집 시스템 및 가스 포집 방법
US12285715B2 (en) 2020-07-28 2025-04-29 Edwards Limited Noble gas recovery system
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JP7792206B2 (ja) * 2021-06-17 2025-12-25 エドワーズ株式会社 希ガス回収システム、及び、希ガス回収方法
TWI808870B (zh) * 2022-08-11 2023-07-11 印能科技股份有限公司 氣體回收設備

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101366629B1 (ko) * 2010-09-30 2014-03-12 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 흡착 공정에 의한 제논의 회수
KR20210105667A (ko) * 2020-02-19 2021-08-27 (주)한양기술공업 가스 포집 시스템 및 가스 포집 방법
KR102710551B1 (ko) * 2023-09-01 2024-09-26 주식회사 에프알디 흡착칼럼을 이용한 제논 및 크립톤 함유 미정제 혼합가스의 추출방법
KR20250082914A (ko) 2023-11-30 2025-06-09 (주)한양기술공업 반도체 공정 후 희유가스 포집-정제 시스템
KR20250082903A (ko) 2023-11-30 2025-06-09 (주)한양기술공업 희유가스 흡착제 및 이를 구비한 반도체 공정 후 희유가스 포집-정제 시스템

Also Published As

Publication number Publication date
WO2006067384A1 (en) 2006-06-29
JP2008525779A (ja) 2008-07-17
TWI399236B (zh) 2013-06-21
TW200640555A (en) 2006-12-01
US7368000B2 (en) 2008-05-06
EP1841690A1 (en) 2007-10-10
US20060130649A1 (en) 2006-06-22

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PA0105 International application

Patent event date: 20070621

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid