KR20060099534A - 표면 코팅된 밀봉재 - Google Patents
표면 코팅된 밀봉재 Download PDFInfo
- Publication number
- KR20060099534A KR20060099534A KR1020067012210A KR20067012210A KR20060099534A KR 20060099534 A KR20060099534 A KR 20060099534A KR 1020067012210 A KR1020067012210 A KR 1020067012210A KR 20067012210 A KR20067012210 A KR 20067012210A KR 20060099534 A KR20060099534 A KR 20060099534A
- Authority
- KR
- South Korea
- Prior art keywords
- sealing material
- metal
- fluorine
- coating film
- hardness
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/128—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal covering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Sealing Material Composition (AREA)
- Laminated Bodies (AREA)
- Gasket Seals (AREA)
- Physical Vapour Deposition (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
Claims (13)
- 쇼어 D 경도가 75 이하이고, 쇼어 A 경도가 40 내지 100인 연질 재료로 이루어진 기재의 표면 전체 또는 일부에 금속, 금속 산화물, 금속 질화물, 금속 탄화물 및 이들의 복합물로 이루어지는 군에서 선택되는 1종 이상의 금속 또는 금속 화합물을 포함하는 코팅막을 갖는 밀봉재.
- 제1항에 있어서, 연질 재료가 엘라스토머인 밀봉재.
- 제1항에 있어서, 연질 재료가 불소계 고분자 재료인 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 연질 재료가 불소 고무인 밀봉재.
- 제1항 내지 제4항 중 어느 한 항에 있어서, 코팅막의 막 두께가 0.005 내지 1 ㎛인 밀봉재.
- 제1항 내지 제5항 중 어느 한 항에 있어서, JIS K5600의 바둑판 눈금 테이프 시험(1 mm2/100 눈금)으로 측정되는 연질 재료와 코팅막의 박리수가 50/100 이하가 되는 밀착도로 연질 재료와 코팅막이 밀착되어 있는 밀봉재.
- 제1항 내지 제5항 중 어느 한 항에 있어서, 하기 조건에서의 마이크로 스크래치 시험으로 측정되는 임계 파괴 하중이 25 mN 이상이 되는 밀착도로 연질 재료와 코팅막이 밀착되어 있는 밀봉재.시험 조건다이아몬드 압력자 곡률 반경: 5.0 ㎛탄성 아암: 146.64 g/mm스테이지 각도: 3.0도측정 속도: 10.0 ㎛/s하중 인가 속도: 75.31 mN/mm여진폭: 79 ㎛여진 주파수: 30 Hz
- 제1항 내지 제7항 중 어느 한 항에 있어서, 하기 조건으로 O2, CF4, NF3의 각각의 플라즈마를 조사했을 때의 중량 감소율이 모두 1 중량% 이하인 밀봉재.샘플: 두께 2 mm, 10 mm×35 mm의 시트조사 조건O2, CF4 플라즈마 가스 유량: 16 SCCM압력: 20 mTorr출력: 800 W조사 시간: 30 분NF3 플라즈마 NF3/Ar: 1 SLM/1 SLM압력: 3 Torr조사 시간: 2 시간온도: 150 ℃
- 제1항 내지 제8항 중 어느 한 항에 있어서, 코팅막이 진공 성막법에 의해 성막되는 밀봉재.
- 제9항에 있어서, 진공 성막법이 이온 플레이팅법인 밀봉재.
- 제1항 내지 제10항 중 어느 한 항에 있어서, 액정ㆍ반도체 제조 장치에 사용하는 밀봉재.
- 제1항 내지 제11항 중 어느 한 항에 기재된 밀봉재를 갖는 액정ㆍ반도체 제조 장치.
- 쇼어 D 경도가 75 이하이고, 쇼어 A 경도가 40 내지 100인 연질 재료로 이루어진 기재의 표면 전체 또는 일부를 이온 플레이팅법에 의해 금속, 금속 산화물, 금속 질화물, 금속 탄화물 및 이들의 복합물로 이루어지는 군에서 선택되는 1종 이상의 금속 또는 금속 화합물로 코팅하는 공정을 갖는 밀봉재의 제조 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003392172 | 2003-11-21 | ||
JPJP-P-2003-00392172 | 2003-11-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060099534A true KR20060099534A (ko) | 2006-09-19 |
KR100808349B1 KR100808349B1 (ko) | 2008-02-27 |
Family
ID=34616439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067012210A KR100808349B1 (ko) | 2003-11-21 | 2004-11-17 | 밀봉재, 그의 제조방법 및 그를 갖는 액정·반도체 제조 장치 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070098978A1 (ko) |
EP (1) | EP1688648A4 (ko) |
JP (1) | JPWO2005050069A1 (ko) |
KR (1) | KR100808349B1 (ko) |
CN (1) | CN100402895C (ko) |
TW (1) | TW200528547A (ko) |
WO (1) | WO2005050069A1 (ko) |
Families Citing this family (23)
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JP4821314B2 (ja) * | 2005-12-26 | 2011-11-24 | ダイキン工業株式会社 | 半導体製造装置用バルブの弁体およびその製造方法 |
JP4746510B2 (ja) * | 2006-02-21 | 2011-08-10 | 愛三工業株式会社 | 負荷駆動系の異常診断システムおよび燃料ポンプ制御システム |
US8430113B2 (en) * | 2007-04-26 | 2013-04-30 | Asahi Organic Chemicals Industry Co., Ltd. | Method of manufacturing valve, and valve produced by the method |
JP2011086920A (ja) | 2009-10-14 | 2011-04-28 | Greene Tweed Of Delaware Inc | プラズマ耐性に優れた処理装置 |
JP5475868B2 (ja) * | 2010-03-08 | 2014-04-16 | 本田技研工業株式会社 | 自動車用バルブステムシール |
CN102933496B (zh) * | 2010-06-08 | 2014-10-22 | 住友金属矿山株式会社 | 金属氧化物膜的制造方法及金属氧化物膜、使用该金属氧化物膜的元件、带有金属氧化物膜的基板以及使用该基板的器件 |
CN102563189B (zh) * | 2011-12-23 | 2014-04-30 | 中国航天科技集团公司第六研究院第十一研究所 | 橡胶夹布膜片及其制造方法 |
US9404334B2 (en) * | 2012-08-31 | 2016-08-02 | Baker Hughes Incorporated | Downhole elastomeric components including barrier coatings |
EP2722566B1 (en) * | 2012-10-19 | 2015-05-13 | Fei Company | Coated O-ring |
US9532567B2 (en) | 2012-11-29 | 2017-01-03 | Honeywell International Inc. | Synthesis and use of trans-1,3,3,3-tetrafluoropropene/vinylidene fluoride copolymers |
JP2017135002A (ja) * | 2016-01-28 | 2017-08-03 | 住友電気工業株式会社 | 多芯ケーブル |
CN109155267B (zh) * | 2016-05-06 | 2024-01-26 | 精密聚合物工程有限公司 | 一种弹性密封件 |
US10340171B2 (en) * | 2016-05-18 | 2019-07-02 | Lam Research Corporation | Permanent secondary erosion containment for electrostatic chuck bonds |
US11069553B2 (en) * | 2016-07-07 | 2021-07-20 | Lam Research Corporation | Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity |
JP2019524497A (ja) | 2016-07-26 | 2019-09-05 | ソルベイ スペシャルティ ポリマーズ イタリー エス.ピー.エー. | 燃料ホース |
WO2018019754A1 (en) | 2016-07-28 | 2018-02-01 | Solvay Specialty Polymers Italy S.P.A. | Electric circuit including a flexible conductor |
US10910195B2 (en) | 2017-01-05 | 2021-02-02 | Lam Research Corporation | Substrate support with improved process uniformity |
EP3401358B1 (de) | 2017-05-08 | 2021-04-14 | Carl Freudenberg KG | Plasma-beschichtetes dichtelement |
CN107749405B (zh) * | 2017-10-25 | 2020-05-05 | 无锡琨圣科技有限公司 | 一种制绒机机械臂 |
KR101957063B1 (ko) * | 2017-12-27 | 2019-03-11 | 주식회사 비케이에스 | 유압브레이커의 스텝씰 |
CN109854747A (zh) * | 2019-03-15 | 2019-06-07 | 广东中宇恒通电热科技有限公司 | 金属发泡橡胶/氟橡胶复合密封材料及其制备方法 |
CN110611251A (zh) * | 2019-10-22 | 2019-12-24 | 中商民智科技工程有限公司 | 一种三相不平衡补偿柜式有源滤波器 |
CN117342649A (zh) * | 2023-12-04 | 2024-01-05 | 江苏新聚环保科技有限公司 | 化工废水处理用树脂吸附装置 |
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JP2002048240A (ja) | 2000-07-31 | 2002-02-15 | Mitsubishi Cable Ind Ltd | シール材 |
JP2002047479A (ja) * | 2000-07-31 | 2002-02-12 | Mitsubishi Cable Ind Ltd | シール材 |
JP4177984B2 (ja) | 2001-12-03 | 2008-11-05 | 株式会社ジェイテクト | 封止材 |
KR100597929B1 (ko) | 2001-12-17 | 2006-07-13 | 다이킨 고교 가부시키가이샤 | 가교성 엘라스토머 조성물 및 이 조성물로 이루어지는성형품 |
-
2004
- 2004-11-17 JP JP2005515626A patent/JPWO2005050069A1/ja active Pending
- 2004-11-17 WO PCT/JP2004/017085 patent/WO2005050069A1/ja active Application Filing
- 2004-11-17 EP EP04818926A patent/EP1688648A4/en not_active Withdrawn
- 2004-11-17 US US10/580,110 patent/US20070098978A1/en not_active Abandoned
- 2004-11-17 KR KR1020067012210A patent/KR100808349B1/ko active IP Right Grant
- 2004-11-17 CN CNB2004800344719A patent/CN100402895C/zh active Active
- 2004-11-19 TW TW93135799A patent/TW200528547A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR100808349B1 (ko) | 2008-02-27 |
CN100402895C (zh) | 2008-07-16 |
JPWO2005050069A1 (ja) | 2007-06-07 |
CN1882796A (zh) | 2006-12-20 |
EP1688648A4 (en) | 2012-01-11 |
EP1688648A1 (en) | 2006-08-09 |
US20070098978A1 (en) | 2007-05-03 |
WO2005050069A1 (ja) | 2005-06-02 |
TW200528547A (en) | 2005-09-01 |
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