KR100808349B1 - 밀봉재, 그의 제조방법 및 그를 갖는 액정·반도체 제조 장치 - Google Patents
밀봉재, 그의 제조방법 및 그를 갖는 액정·반도체 제조 장치 Download PDFInfo
- Publication number
- KR100808349B1 KR100808349B1 KR1020067012210A KR20067012210A KR100808349B1 KR 100808349 B1 KR100808349 B1 KR 100808349B1 KR 1020067012210 A KR1020067012210 A KR 1020067012210A KR 20067012210 A KR20067012210 A KR 20067012210A KR 100808349 B1 KR100808349 B1 KR 100808349B1
- Authority
- KR
- South Korea
- Prior art keywords
- sealing material
- metal
- fluorine
- coating film
- hardness
- Prior art date
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/128—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal covering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/10—Materials in mouldable or extrudable form for sealing or packing joints or covers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Sealing Material Composition (AREA)
- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Gasket Seals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (13)
- 쇼어 D 경도가 75 이하이고, 쇼어 A 경도가 40 내지 100인 연질 재료로 이루어진 기재의 표면 전체 또는 일부에 금속, 금속 산화물, 금속 질화물, 금속 탄화물 및 이들의 복합물로 이루어지는 군에서 선택되는 1종 이상의 금속 또는 금속 화합물을 포함하는 코팅막을 가지며, 하기 조건에서의 마이크로 스크래치 시험으로 측정되는 임계 파괴 하중이 25 mN 이상이 되는 밀착도로 연질 재료와 코팅막이 밀착되어 있는 것인 밀봉재.시험 조건다이아몬드 압력자 곡률 반경: 5.0 ㎛탄성 아암: 146.64 g/mm스테이지 각도: 3.0도측정 속도: 10.0 ㎛/s하중 인가 속도: 75.31 mN/mm여진폭: 79 ㎛여진 주파수: 30 Hz
- 제1항에 있어서, 연질 재료가 엘라스토머인 밀봉재.
- 제1항에 있어서, 연질 재료가 불소계 고분자 재료인 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 연질 재료가 불소 고무인 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 코팅막의 막 두께가 0.005 내지 1 ㎛인 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 있어서, JIS K5600의 바둑판 눈금 테이프 시험(1 mm2/100 눈금)으로 측정되는 연질 재료와 코팅막의 박리수가 50/100 이하가 되는 밀착도로 연질 재료와 코팅막이 밀착되어 있는 밀봉재.
- 삭제
- 제1항 내지 제3항 중 어느 한 항에 있어서, 하기 조건으로 O2, CF4, NF3의 각각의 플라즈마를 조사했을 때의 중량 감소율이 모두 1 중량% 이하인 밀봉재.샘플: 두께 2 mm, 10 mm×35 mm의 시트조사 조건O2, CF4 플라즈마 가스 유량: 16 SCCM압력: 20 mTorr출력: 800 W조사 시간: 30 분NF3 플라즈마 NF3/Ar: 1 SLM/1 SLM압력: 3 Torr조사 시간: 2 시간온도: 150 ℃
- 제1항 내지 제3항 중 어느 한 항에 있어서, 코팅막이 진공 성막법에 의해 성막되는 밀봉재.
- 제9항에 있어서, 진공 성막법이 이온 플레이팅법인 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 액정ㆍ반도체 제조 장치에 사용하는 밀봉재.
- 제1항 내지 제3항 중 어느 한 항에 기재된 밀봉재를 갖는 액정ㆍ반도체 제조 장치.
- 쇼어 D 경도가 75 이하이고, 쇼어 A 경도가 40 내지 100인 연질 재료로 이루어진 기재의 표면 전체 또는 일부를 이온 플레이팅법에 의해 금속, 금속 산화물, 금속 질화물, 금속 탄화물 및 이들의 복합물로 이루어지는 군에서 선택되는 1종 이상의 금속 또는 금속 화합물로 코팅하는 공정을 갖는, 하기 조건에서의 마이크로 스크래치 시험으로 측정되는 임계 파괴 하중이 25 mN 이상이 되는 밀착도로 연질 재료와 코팅막이 밀착되어 있는 밀봉재의 제조 방법.시험 조건다이아몬드 압력자 곡률 반경: 5.0 ㎛탄성 아암: 146.64 g/mm스테이지 각도: 3.0도측정 속도: 10.0 ㎛/s하중 인가 속도: 75.31 mN/mm여진폭: 79 ㎛여진 주파수: 30 Hz
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003392172 | 2003-11-21 | ||
JPJP-P-2003-00392172 | 2003-11-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060099534A KR20060099534A (ko) | 2006-09-19 |
KR100808349B1 true KR100808349B1 (ko) | 2008-02-27 |
Family
ID=34616439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067012210A KR100808349B1 (ko) | 2003-11-21 | 2004-11-17 | 밀봉재, 그의 제조방법 및 그를 갖는 액정·반도체 제조 장치 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070098978A1 (ko) |
EP (1) | EP1688648A4 (ko) |
JP (1) | JPWO2005050069A1 (ko) |
KR (1) | KR100808349B1 (ko) |
CN (1) | CN100402895C (ko) |
TW (1) | TW200528547A (ko) |
WO (1) | WO2005050069A1 (ko) |
Cited By (1)
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KR101957063B1 (ko) * | 2017-12-27 | 2019-03-11 | 주식회사 비케이에스 | 유압브레이커의 스텝씰 |
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JP4821314B2 (ja) * | 2005-12-26 | 2011-11-24 | ダイキン工業株式会社 | 半導体製造装置用バルブの弁体およびその製造方法 |
JP4746510B2 (ja) * | 2006-02-21 | 2011-08-10 | 愛三工業株式会社 | 負荷駆動系の異常診断システムおよび燃料ポンプ制御システム |
KR20100015843A (ko) * | 2007-04-26 | 2010-02-12 | 아사히 유키자이 고교 가부시키가이샤 | 밸브 제조 방법 및 상기 방법에 의해서 생산된 밸브 |
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WO2018019754A1 (en) | 2016-07-28 | 2018-02-01 | Solvay Specialty Polymers Italy S.P.A. | Electric circuit including a flexible conductor |
US10910195B2 (en) | 2017-01-05 | 2021-02-02 | Lam Research Corporation | Substrate support with improved process uniformity |
EP3401358B1 (de) * | 2017-05-08 | 2021-04-14 | Carl Freudenberg KG | Plasma-beschichtetes dichtelement |
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CN109854747A (zh) * | 2019-03-15 | 2019-06-07 | 广东中宇恒通电热科技有限公司 | 金属发泡橡胶/氟橡胶复合密封材料及其制备方法 |
CN110611251A (zh) * | 2019-10-22 | 2019-12-24 | 中商民智科技工程有限公司 | 一种三相不平衡补偿柜式有源滤波器 |
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- 2004-11-17 JP JP2005515626A patent/JPWO2005050069A1/ja active Pending
- 2004-11-17 EP EP04818926A patent/EP1688648A4/en not_active Withdrawn
- 2004-11-17 WO PCT/JP2004/017085 patent/WO2005050069A1/ja active Application Filing
- 2004-11-17 US US10/580,110 patent/US20070098978A1/en not_active Abandoned
- 2004-11-17 KR KR1020067012210A patent/KR100808349B1/ko active IP Right Grant
- 2004-11-17 CN CNB2004800344719A patent/CN100402895C/zh active Active
- 2004-11-19 TW TW93135799A patent/TW200528547A/zh unknown
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JP2002022019A (ja) * | 2000-07-06 | 2002-01-23 | Mitsubishi Cable Ind Ltd | シール材料、それを用いたシール部材およびそれを用いたシール |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR101957063B1 (ko) * | 2017-12-27 | 2019-03-11 | 주식회사 비케이에스 | 유압브레이커의 스텝씰 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2005050069A1 (ja) | 2007-06-07 |
EP1688648A4 (en) | 2012-01-11 |
CN100402895C (zh) | 2008-07-16 |
WO2005050069A1 (ja) | 2005-06-02 |
CN1882796A (zh) | 2006-12-20 |
KR20060099534A (ko) | 2006-09-19 |
US20070098978A1 (en) | 2007-05-03 |
EP1688648A1 (en) | 2006-08-09 |
TW200528547A (en) | 2005-09-01 |
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