KR20040079916A - 반도체 디바이스를 형성하기 위한 재료의 본딩 및 전사 방법 - Google Patents

반도체 디바이스를 형성하기 위한 재료의 본딩 및 전사 방법 Download PDF

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Publication number
KR20040079916A
KR20040079916A KR10-2004-7010056A KR20047010056A KR20040079916A KR 20040079916 A KR20040079916 A KR 20040079916A KR 20047010056 A KR20047010056 A KR 20047010056A KR 20040079916 A KR20040079916 A KR 20040079916A
Authority
KR
South Korea
Prior art keywords
substrate
donor
semiconductor substrate
semiconductor
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR10-2004-7010056A
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English (en)
Korean (ko)
Inventor
존스로버트이.
크수탁세바스티안
Original Assignee
모토로라 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 모토로라 인코포레이티드 filed Critical 모토로라 인코포레이티드
Publication of KR20040079916A publication Critical patent/KR20040079916A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Element Separation (AREA)
  • Light Receiving Elements (AREA)
KR10-2004-7010056A 2001-12-17 2002-12-05 반도체 디바이스를 형성하기 위한 재료의 본딩 및 전사 방법 Withdrawn KR20040079916A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/022,711 US6616854B2 (en) 2001-12-17 2001-12-17 Method of bonding and transferring a material to form a semiconductor device
US10/022,711 2001-12-17
PCT/US2002/038564 WO2003052817A2 (en) 2001-12-17 2002-12-05 Method of bonding and transferring a material to form a semiconductor device

Publications (1)

Publication Number Publication Date
KR20040079916A true KR20040079916A (ko) 2004-09-16

Family

ID=21811041

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7010056A Withdrawn KR20040079916A (ko) 2001-12-17 2002-12-05 반도체 디바이스를 형성하기 위한 재료의 본딩 및 전사 방법

Country Status (8)

Country Link
US (1) US6616854B2 (https=)
EP (1) EP1500132A2 (https=)
JP (1) JP4554930B2 (https=)
KR (1) KR20040079916A (https=)
CN (1) CN1324674C (https=)
AU (1) AU2002353020A1 (https=)
TW (1) TWI255525B (https=)
WO (1) WO2003052817A2 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078320B2 (en) * 2004-08-10 2006-07-18 International Business Machines Corporation Partial wafer bonding and dicing
US7288458B2 (en) * 2005-12-14 2007-10-30 Freescale Semiconductor, Inc. SOI active layer with different surface orientation
KR100755368B1 (ko) * 2006-01-10 2007-09-04 삼성전자주식회사 3차원 구조를 갖는 반도체 소자의 제조 방법들 및 그에의해 제조된 반도체 소자들
US7682930B2 (en) * 2006-06-09 2010-03-23 Aptina Imaging Corporation Method of forming elevated photosensor and resulting structure
US7432174B1 (en) * 2007-03-30 2008-10-07 Advanced Micro Devices, Inc. Methods for fabricating semiconductor substrates with silicon regions having differential crystallographic orientations
EP1993126B1 (en) * 2007-05-18 2011-09-21 Semiconductor Energy Laboratory Co., Ltd. Manufacturing methods of semiconductor substrate
US8201325B2 (en) 2007-11-22 2012-06-19 International Business Machines Corporation Method for producing an integrated device
US7842583B2 (en) * 2007-12-27 2010-11-30 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
US7927975B2 (en) 2009-02-04 2011-04-19 Micron Technology, Inc. Semiconductor material manufacture
GB0914251D0 (en) * 2009-08-14 2009-09-30 Nat Univ Ireland Cork A hybrid substrate
CN102822970B (zh) * 2010-03-31 2015-06-17 Soitec公司 键合半导体结构及其形成方法
FR2965974B1 (fr) * 2010-10-12 2013-11-29 Soitec Silicon On Insulator Procédé de collage moléculaire de substrats en silicium et en verre
US8778737B2 (en) 2011-10-31 2014-07-15 International Business Machines Corporation Flattened substrate surface for substrate bonding
US9190379B2 (en) 2012-09-27 2015-11-17 Apple Inc. Perimeter trench sensor array package
US9209142B1 (en) * 2014-09-05 2015-12-08 Skorpios Technologies, Inc. Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal
WO2017052646A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Island transfer for optical, piezo and rf applications

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US5389569A (en) * 1992-03-03 1995-02-14 Motorola, Inc. Vertical and lateral isolation for a semiconductor device
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
JPH09127352A (ja) * 1995-10-30 1997-05-16 Hitachi Ltd 半導体装置およびその製造方法
JP3257624B2 (ja) * 1996-11-15 2002-02-18 キヤノン株式会社 半導体部材の製造方法
US6191007B1 (en) 1997-04-28 2001-02-20 Denso Corporation Method for manufacturing a semiconductor substrate
JPH1140823A (ja) * 1997-05-22 1999-02-12 Fujitsu Ltd 光検出器モジュール
JPH1145862A (ja) * 1997-07-24 1999-02-16 Denso Corp 半導体基板の製造方法
US6271101B1 (en) * 1998-07-29 2001-08-07 Semiconductor Energy Laboratory Co., Ltd. Process for production of SOI substrate and process for production of semiconductor device
US6093623A (en) 1998-08-04 2000-07-25 Micron Technology, Inc. Methods for making silicon-on-insulator structures
JP4313874B2 (ja) * 1999-02-02 2009-08-12 キヤノン株式会社 基板の製造方法
JP2001007362A (ja) * 1999-06-17 2001-01-12 Canon Inc 半導体基材および太陽電池の製造方法
JP2001102523A (ja) * 1999-09-28 2001-04-13 Sony Corp 薄膜デバイスおよびその製造方法
US6400009B1 (en) * 1999-10-15 2002-06-04 Lucent Technologies Inc. Hermatic firewall for MEMS packaging in flip-chip bonded geometry

Also Published As

Publication number Publication date
EP1500132A2 (en) 2005-01-26
JP4554930B2 (ja) 2010-09-29
WO2003052817A3 (en) 2003-08-21
WO2003052817A2 (en) 2003-06-26
US6616854B2 (en) 2003-09-09
CN1615543A (zh) 2005-05-11
US20030114001A1 (en) 2003-06-19
CN1324674C (zh) 2007-07-04
TWI255525B (en) 2006-05-21
AU2002353020A8 (en) 2003-06-30
JP2005513781A (ja) 2005-05-12
AU2002353020A1 (en) 2003-06-30
WO2003052817B1 (en) 2003-09-25
TW200302548A (en) 2003-08-01

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St.27 status event code: A-0-1-A10-A15-nap-PA0105

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P13-X000 Application amended

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R17-X000 Change to representative recorded

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