KR20010050283A - 유전상수 ｋ가 낮은 유전체의 손상을 최소화하는, 금속플러그를 위한 예비세정 방법 - Google Patents

유전상수 ｋ가 낮은 유전체의 손상을 최소화하는, 금속플러그를 위한 예비세정 방법 Download PDF

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Publication number
KR20010050283A
KR20010050283A KR1020000050996A KR20000050996A KR20010050283A KR 20010050283 A KR20010050283 A KR 20010050283A KR 1020000050996 A KR1020000050996 A KR 1020000050996A KR 20000050996 A KR20000050996 A KR 20000050996A KR 20010050283 A KR20010050283 A KR 20010050283A
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KR
South Korea
Prior art keywords
dielectric
gas mixture
plasma
metal conductor
gas
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Withdrawn
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KR1020000050996A
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English (en)
Korean (ko)
Inventor
바니엠. 코헨
수라즈 렌가라잔
케니킹-타이 난
Original Assignee
조셉 제이. 스위니
어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20010050283A publication Critical patent/KR20010050283A/ko
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020000050996A 1999-09-02 2000-08-31 유전상수 ｋ가 낮은 유전체의 손상을 최소화하는, 금속플러그를 위한 예비세정 방법 Withdrawn KR20010050283A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/388,991 US6346489B1 (en) 1999-09-02 1999-09-02 Precleaning process for metal plug that minimizes damage to low-κ dielectric
US9/388,991 1999-09-02

Publications (1)

Publication Number Publication Date
KR20010050283A true KR20010050283A (ko) 2001-06-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000050996A Withdrawn KR20010050283A (ko) 1999-09-02 2000-08-31 유전상수 ｋ가 낮은 유전체의 손상을 최소화하는, 금속플러그를 위한 예비세정 방법

Country Status (6)

Country Link
US (2) US6346489B1 (enExample)
EP (1) EP1081750A3 (enExample)
JP (1) JP4932075B2 (enExample)
KR (1) KR20010050283A (enExample)
SG (1) SG93261A1 (enExample)
TW (1) TW473846B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100912321B1 (ko) * 2003-12-04 2009-08-14 도쿄엘렉트론가부시키가이샤 반도체 기판 도전층 표면의 청정화 방법
KR101276694B1 (ko) * 2003-02-14 2013-06-19 어플라이드 머티어리얼스, 인코포레이티드 수소-함유 라디칼을 이용한 자연 산화물 세정
KR20180018621A (ko) * 2015-09-30 2018-02-21 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 처리 시스템 및 방법

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980064441A (ko) * 1996-12-20 1998-10-07 윌리엄비.켐플러 전도물질을 반도체 소자 표면에 선택적으로 결합시키는 방법
US7804115B2 (en) 1998-02-25 2010-09-28 Micron Technology, Inc. Semiconductor constructions having antireflective portions
US6274292B1 (en) 1998-02-25 2001-08-14 Micron Technology, Inc. Semiconductor processing methods
US7067414B1 (en) * 1999-09-01 2006-06-27 Micron Technology, Inc. Low k interlevel dielectric layer fabrication methods
US7014887B1 (en) * 1999-09-02 2006-03-21 Applied Materials, Inc. Sequential sputter and reactive precleans of vias and contacts
US20050022839A1 (en) * 1999-10-20 2005-02-03 Savas Stephen E. Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing
US6759337B1 (en) * 1999-12-15 2004-07-06 Lsi Logic Corporation Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate
US6660646B1 (en) * 2000-09-21 2003-12-09 Northrop Grumman Corporation Method for plasma hardening photoresist in etching of semiconductor and superconductor films
US6573181B1 (en) 2000-10-26 2003-06-03 Applied Materials, Inc. Method of forming contact structures using nitrogen trifluoride preclean etch process and a titanium chemical vapor deposition step
KR100382725B1 (ko) * 2000-11-24 2003-05-09 삼성전자주식회사 클러스터화된 플라즈마 장치에서의 반도체소자의 제조방법
US6818513B2 (en) * 2001-01-30 2004-11-16 Fairchild Semiconductor Corporation Method of forming a field effect transistor having a lateral depletion structure
JP4124315B2 (ja) 2001-05-01 2008-07-23 東京応化工業株式会社 被膜の処理方法およびこの方法を用いた半導体素子の製造方法
US6951823B2 (en) * 2001-05-14 2005-10-04 Axcelis Technologies, Inc. Plasma ashing process
US6630406B2 (en) 2001-05-14 2003-10-07 Axcelis Technologies Plasma ashing process
JP2003045960A (ja) * 2001-08-01 2003-02-14 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JP2003086569A (ja) * 2001-09-12 2003-03-20 Tokyo Electron Ltd プラズマ処理方法
KR100443084B1 (ko) * 2001-09-21 2004-08-04 삼성전자주식회사 구리 금속막의 연마 방법, 연마장치 및 구리 금속 배선형성 방법
US20030205822A1 (en) * 2002-05-02 2003-11-06 Taiwan Semiconductor Manufacturing Co. Ltd. Low-strength plasma treatment for interconnects
US7125583B2 (en) * 2002-05-23 2006-10-24 Intel Corporation Chemical vapor deposition chamber pre-deposition treatment for improved carbon doped oxide thickness uniformity and throughput
US7247252B2 (en) * 2002-06-20 2007-07-24 Taiwan Semiconductor Manufacturing Co., Ltd. Method of avoiding plasma arcing during RIE etching
US20040118697A1 (en) * 2002-10-01 2004-06-24 Applied Materials, Inc. Metal deposition process with pre-cleaning before electrochemical deposition
US7401254B2 (en) * 2003-04-23 2008-07-15 Dot Hill Systems Corporation Apparatus and method for a server deterministically killing a redundant server integrated within the same network storage appliance chassis
US7627780B2 (en) * 2003-04-23 2009-12-01 Dot Hill Systems Corporation Apparatus and method for deterministically performing active-active failover of redundant servers in a network storage appliance
US7565566B2 (en) * 2003-04-23 2009-07-21 Dot Hill Systems Corporation Network storage appliance with an integrated switch
US7380163B2 (en) 2003-04-23 2008-05-27 Dot Hill Systems Corporation Apparatus and method for deterministically performing active-active failover of redundant servers in response to a heartbeat link failure
US8580076B2 (en) * 2003-05-22 2013-11-12 Lam Research Corporation Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith
KR100542031B1 (ko) * 2003-05-30 2006-01-11 피에스케이 주식회사 반도체 제조공정에서의 포토레지스트 제거방법
DE102004002464B4 (de) * 2004-01-16 2005-12-08 Infineon Technologies Ag Verfahren zum Füllen von Kontaktlöchern
US7144828B2 (en) * 2004-01-30 2006-12-05 Chartered Semiconductor Manufacturing Ltd. He treatment to improve low-k adhesion property
JP2006013190A (ja) 2004-06-28 2006-01-12 Rohm Co Ltd 半導体装置の製造方法
US20070193602A1 (en) * 2004-07-12 2007-08-23 Savas Stephen E Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing
KR100634262B1 (ko) * 2005-03-05 2006-10-13 삼성전자주식회사 복합 유전막을 갖는 반도체 장치의 제조 방법
KR100712818B1 (ko) * 2005-12-16 2007-04-30 동부일렉트로닉스 주식회사 구리 배선 형성 방법
US7416989B1 (en) 2006-06-30 2008-08-26 Novellus Systems, Inc. Adsorption based material removal process
US7789965B2 (en) * 2006-09-19 2010-09-07 Asm Japan K.K. Method of cleaning UV irradiation chamber
US20080153282A1 (en) * 2006-12-21 2008-06-26 Texas Instruments, Incorporated Method for preparing a metal feature surface
US7745335B2 (en) * 2006-12-21 2010-06-29 Texas Instruments Incorporated Semiconductor device manufactured by reducing hillock formation in metal interconnects
US20080170352A1 (en) 2007-01-15 2008-07-17 Seiko Epson Corporation Capacitor and its manufacturing method
JP2008251889A (ja) * 2007-03-30 2008-10-16 Seiko Epson Corp キャパシタの製造方法
US7977249B1 (en) 2007-03-07 2011-07-12 Novellus Systems, Inc. Methods for removing silicon nitride and other materials during fabrication of contacts
US20080289650A1 (en) * 2007-05-24 2008-11-27 Asm America, Inc. Low-temperature cleaning of native oxide
US8084356B2 (en) 2007-09-29 2011-12-27 Lam Research Corporation Methods of low-K dielectric and metal process integration
US8187486B1 (en) 2007-12-13 2012-05-29 Novellus Systems, Inc. Modulating etch selectivity and etch rate of silicon nitride thin films
US7871937B2 (en) 2008-05-16 2011-01-18 Asm America, Inc. Process and apparatus for treating wafers
US7981763B1 (en) 2008-08-15 2011-07-19 Novellus Systems, Inc. Atomic layer removal for high aspect ratio gapfill
JP5565314B2 (ja) * 2008-12-08 2014-08-06 富士通株式会社 半導体装置の製造方法及びその製造装置
US8058179B1 (en) 2008-12-23 2011-11-15 Novellus Systems, Inc. Atomic layer removal process with higher etch amount
US20100270262A1 (en) * 2009-04-22 2010-10-28 Applied Materials, Inc. Etching low-k dielectric or removing resist with a filtered ionized gas
KR20120084751A (ko) 2009-10-05 2012-07-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
US9518715B2 (en) * 2010-02-12 2016-12-13 Cree, Inc. Lighting devices that comprise one or more solid state light emitters
CN103474342A (zh) * 2012-06-06 2013-12-25 中芯国际集成电路制造(上海)有限公司 修复介质层损伤的方法
CN104143523A (zh) * 2013-05-06 2014-11-12 中芯国际集成电路制造(上海)有限公司 一种半导体器件的制造方法
US20150064921A1 (en) * 2013-08-30 2015-03-05 Applied Materials, Inc. Low temperature plasma anneal process for sublimative etch processes
GB201316446D0 (en) * 2013-09-16 2013-10-30 Spts Technologies Ltd Pre-cleaning a semiconductor structure
KR102110247B1 (ko) 2013-11-29 2020-05-13 삼성전자주식회사 관통전극을 갖는 반도체 소자 및 그 제조방법
US9299557B2 (en) 2014-03-19 2016-03-29 Asm Ip Holding B.V. Plasma pre-clean module and process
JP6435667B2 (ja) * 2014-07-01 2018-12-12 東京エレクトロン株式会社 エッチング方法、エッチング装置及び記憶媒体
US9474163B2 (en) 2014-12-30 2016-10-18 Asm Ip Holding B.V. Germanium oxide pre-clean module and process
US9431268B2 (en) 2015-01-05 2016-08-30 Lam Research Corporation Isotropic atomic layer etch for silicon and germanium oxides
US9425041B2 (en) 2015-01-06 2016-08-23 Lam Research Corporation Isotropic atomic layer etch for silicon oxides using no activation
US10373850B2 (en) 2015-03-11 2019-08-06 Asm Ip Holding B.V. Pre-clean chamber and process with substrate tray for changing substrate temperature
JP6483266B2 (ja) 2015-08-17 2019-03-13 株式会社アルバック 基板処理方法、および、基板処理装置
TWI726951B (zh) * 2015-12-17 2021-05-11 美商應用材料股份有限公司 處理氮化物膜之方法
US10535566B2 (en) * 2016-04-28 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and method of manufacture
JP2019192892A (ja) 2018-04-18 2019-10-31 東京エレクトロン株式会社 処理システムおよび処理方法
WO2019226341A1 (en) 2018-05-25 2019-11-28 Lam Research Corporation Thermal atomic layer etch with rapid temperature cycling
KR102871693B1 (ko) 2018-07-09 2025-10-15 램 리써치 코포레이션 전자 여기 원자 층 에칭
US10714329B2 (en) * 2018-09-28 2020-07-14 Taiwan Semiconductor Manufacturing Co., Ltd. Pre-clean for contacts
US11776805B2 (en) * 2020-03-10 2023-10-03 Applied Materials, Inc. Selective oxidation and simplified pre-clean
CN114141631A (zh) * 2020-09-03 2022-03-04 长鑫存储技术有限公司 金属连线的制备方法
JP7739434B2 (ja) 2021-02-03 2025-09-16 ラム リサーチ コーポレーション 原子層エッチングにおけるエッチング選択性の制御
US20230268223A1 (en) * 2022-02-24 2023-08-24 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor devices and methods of manufacture

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155526A (en) * 1980-05-06 1981-12-01 Shunpei Yamazaki Method of forming film
US5043299B1 (en) 1989-12-01 1997-02-25 Applied Materials Inc Process for selective deposition of tungsten on semiconductor wafer
US5202008A (en) 1990-03-02 1993-04-13 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
US5352636A (en) 1992-01-16 1994-10-04 Applied Materials, Inc. In situ method for cleaning silicon surface and forming layer thereon in same chamber
JPH07115130A (ja) * 1993-10-14 1995-05-02 Toshiba Corp 半導体装置の製造方法
US5453157A (en) * 1994-05-16 1995-09-26 Texas Instruments Incorporated Low temperature anisotropic ashing of resist for semiconductor fabrication
US5660682A (en) * 1996-03-14 1997-08-26 Lsi Logic Corporation Plasma clean with hydrogen gas
US5788778A (en) 1996-09-16 1998-08-04 Applied Komatsu Technology, Inc. Deposition chamber cleaning technique using a high power remote excitation source
JP3959790B2 (ja) * 1997-08-26 2007-08-15 ソニー株式会社 半導体装置の製造方法
US6107192A (en) 1997-12-30 2000-08-22 Applied Materials, Inc. Reactive preclean prior to metallization for sub-quarter micron application
US7053002B2 (en) * 1998-12-04 2006-05-30 Applied Materials, Inc Plasma preclean with argon, helium, and hydrogen gases
US6114259A (en) * 1999-07-27 2000-09-05 Lsi Logic Corporation Process for treating exposed surfaces of a low dielectric constant carbon doped silicon oxide dielectric material to protect the material from damage
US6281135B1 (en) * 1999-08-05 2001-08-28 Axcelis Technologies, Inc. Oxygen free plasma stripping process

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101276694B1 (ko) * 2003-02-14 2013-06-19 어플라이드 머티어리얼스, 인코포레이티드 수소-함유 라디칼을 이용한 자연 산화물 세정
KR100912321B1 (ko) * 2003-12-04 2009-08-14 도쿄엘렉트론가부시키가이샤 반도체 기판 도전층 표면의 청정화 방법
KR20180018621A (ko) * 2015-09-30 2018-02-21 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 처리 시스템 및 방법
US10529553B2 (en) 2015-09-30 2020-01-07 Taiwan Semiconductor Manufacturing Co., Ltd. Treatment system and method
US10796898B2 (en) 2015-09-30 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Treatment system and method
US11670500B2 (en) 2015-09-30 2023-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Treatment system and method

Also Published As

Publication number Publication date
JP2001203194A (ja) 2001-07-27
US6589890B2 (en) 2003-07-08
US6346489B1 (en) 2002-02-12
EP1081750A2 (en) 2001-03-07
JP4932075B2 (ja) 2012-05-16
US20020106908A1 (en) 2002-08-08
EP1081750A3 (en) 2003-02-05
SG93261A1 (en) 2002-12-17
TW473846B (en) 2002-01-21

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