KR102686321B1 - 반송차 - Google Patents

반송차 Download PDF

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Publication number
KR102686321B1
KR102686321B1 KR1020217040980A KR20217040980A KR102686321B1 KR 102686321 B1 KR102686321 B1 KR 102686321B1 KR 1020217040980 A KR1020217040980 A KR 1020217040980A KR 20217040980 A KR20217040980 A KR 20217040980A KR 102686321 B1 KR102686321 B1 KR 102686321B1
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KR
South Korea
Prior art keywords
unit
antenna
transport vehicle
controller
traveling
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Active
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KR1020217040980A
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English (en)
Korean (ko)
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KR20220008331A (ko
Inventor
와타루 키타무라
Original Assignee
무라다기카이가부시끼가이샤
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Publication of KR20220008331A publication Critical patent/KR20220008331A/ko
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Publication of KR102686321B1 publication Critical patent/KR102686321B1/ko
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    • H01L21/67733—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H01L21/67706—
    • H01L21/6773—
    • H01L21/67736—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3216—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020217040980A 2019-06-20 2020-05-08 반송차 Active KR102686321B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2019-114535 2019-06-20
JP2019114535 2019-06-20
PCT/JP2020/018612 WO2020255577A1 (ja) 2019-06-20 2020-05-08 搬送車

Publications (2)

Publication Number Publication Date
KR20220008331A KR20220008331A (ko) 2022-01-20
KR102686321B1 true KR102686321B1 (ko) 2024-07-19

Family

ID=74037229

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217040980A Active KR102686321B1 (ko) 2019-06-20 2020-05-08 반송차

Country Status (8)

Country Link
US (1) US12119253B2 (https=)
EP (1) EP3988474A4 (https=)
JP (1) JP7435605B2 (https=)
KR (1) KR102686321B1 (https=)
CN (1) CN114126988B (https=)
IL (1) IL289059B2 (https=)
TW (1) TWI830922B (https=)
WO (1) WO2020255577A1 (https=)

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* Cited by examiner, † Cited by third party
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US11854849B2 (en) * 2020-06-12 2023-12-26 Taiwan Semiconductor Manufacturing Company Ltd. Method for operating conveying system
EP4287325A4 (en) 2022-01-20 2025-10-29 Lg Energy Solution Ltd Binder composition for the manufacture of a secondary lithium battery cathode, and secondary lithium battery cathode thus manufactured
WO2024231287A1 (en) * 2023-05-05 2024-11-14 Autostore Technology AS Automated vehicle with directional antenna
CN121752498A (zh) * 2023-09-11 2026-03-27 村田机械株式会社 输送系统
CN118248608B (zh) * 2024-05-28 2024-07-23 华芯智上半导体设备(上海)有限公司 自动化物料搬送系统
WO2026062095A1 (en) * 2024-09-20 2026-03-26 Flexlink Ab Article transporting system and method for operating an article transporting system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2018118809A (ja) * 2017-01-23 2018-08-02 株式会社ダイフク 物品搬送車
JP2019081639A (ja) 2017-10-31 2019-05-30 村田機械株式会社 搬送システム

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JPS6041234B2 (ja) * 1976-08-20 1985-09-14 株式会社 山口機械研究所 水流利用の発電装置
JPS58152235A (ja) * 1982-03-08 1983-09-09 Fuji Photo Film Co Ltd ハロゲン化銀写真感光材料
JPS6013801A (ja) 1983-07-01 1985-01-24 Seiko Instr & Electronics Ltd 高分子物質精製濃縮装置
JP2715130B2 (ja) 1989-01-12 1998-02-18 株式会社ダイフク 荷搬送設備
JPH09110398A (ja) 1995-10-16 1997-04-28 Sumitomo Heavy Ind Ltd 無人搬送車の誘導ガイド方式
JPH09289708A (ja) * 1996-04-19 1997-11-04 Toyota Autom Loom Works Ltd 移動体運行システムの通信方法
JPH09295707A (ja) * 1996-05-07 1997-11-18 Shinko Electric Co Ltd 搬送ロボットを用いたクリーンルームの物品搬送管理方法
JP2002068481A (ja) * 2000-08-28 2002-03-08 Ishikawajima Harima Heavy Ind Co Ltd コンテナの段積貯蔵装置
JP4651835B2 (ja) * 2001-03-08 2011-03-16 株式会社シンク・ラボラトリー ロール立体倉庫における被製版ロールの収納・取り出し方法
JP2003150247A (ja) * 2001-11-19 2003-05-23 Murata Mach Ltd 有軌道台車システム
JP2004010204A (ja) * 2002-06-04 2004-01-15 Matsushita Electric Ind Co Ltd マーカシステム
JP4131706B2 (ja) * 2004-02-12 2008-08-13 日本輸送機株式会社 無人搬送車の走行停止制御装置
CN101183431A (zh) * 2006-06-09 2008-05-21 日本电气株式会社 无线通信系统和无线通信方法
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法
US20110241845A1 (en) * 2010-04-06 2011-10-06 Sullivan Robert P Automated Material Handling System with Identification Features
JP5450334B2 (ja) * 2010-09-28 2014-03-26 株式会社椿本チエイン 物品管理システム
DE202013008718U1 (de) * 2013-09-30 2013-12-19 Grenzebach Maschinenbau Gmbh Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb
JP6041234B2 (ja) 2013-10-07 2016-12-07 村田機械株式会社 グリッパを備える搬送装置
DE102013019368A1 (de) * 2013-11-18 2015-05-21 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur weitgehend maschinellen Zusammenstellung von Warenlieferungen in Lagerhallen
JP6079672B2 (ja) 2014-03-10 2017-02-15 村田機械株式会社 搬送車システム
JP6365136B2 (ja) * 2014-09-02 2018-08-01 村田機械株式会社 走行車システム
JP6168476B2 (ja) 2015-03-19 2017-07-26 村田機械株式会社 搬送台車と搬送台車システム
JP2017154840A (ja) * 2016-02-29 2017-09-07 株式会社ダイフク 物品搬送設備
JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
US20170086540A1 (en) 2016-12-12 2017-03-30 Gold Brands Holdings Inc. Method and adjustable ring for relieving stress
JP7066160B2 (ja) * 2017-08-23 2022-05-13 学校法人千葉工業大学 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット
JP6946965B2 (ja) 2017-11-22 2021-10-13 村田機械株式会社 搬送システム
DE102017222883A1 (de) 2017-12-15 2019-06-19 Te Connectivity Germany Gmbh Kontaktierungseinheit zum elektrischen Kontaktieren zumindest eines Elektroniksegments eines Elektronikmoduls und Verfahren

Patent Citations (3)

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JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2018118809A (ja) * 2017-01-23 2018-08-02 株式会社ダイフク 物品搬送車
JP2019081639A (ja) 2017-10-31 2019-05-30 村田機械株式会社 搬送システム

Also Published As

Publication number Publication date
IL289059A (en) 2022-02-01
TWI830922B (zh) 2024-02-01
EP3988474A4 (en) 2023-06-21
IL289059B2 (en) 2025-09-01
JP7435605B2 (ja) 2024-02-21
KR20220008331A (ko) 2022-01-20
US20220359251A1 (en) 2022-11-10
CN114126988B (zh) 2023-11-10
US12119253B2 (en) 2024-10-15
JPWO2020255577A1 (https=) 2020-12-24
WO2020255577A1 (ja) 2020-12-24
TW202105111A (zh) 2021-02-01
CN114126988A (zh) 2022-03-01
EP3988474A1 (en) 2022-04-27
IL289059B1 (en) 2025-05-01

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