CN114126988B - 搬送车 - Google Patents

搬送车 Download PDF

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Publication number
CN114126988B
CN114126988B CN202080044041.4A CN202080044041A CN114126988B CN 114126988 B CN114126988 B CN 114126988B CN 202080044041 A CN202080044041 A CN 202080044041A CN 114126988 B CN114126988 B CN 114126988B
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CN
China
Prior art keywords
antenna
unit
vehicle
transfer
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080044041.4A
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English (en)
Chinese (zh)
Other versions
CN114126988A (zh
Inventor
北村亘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of CN114126988A publication Critical patent/CN114126988A/zh
Application granted granted Critical
Publication of CN114126988B publication Critical patent/CN114126988B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0618—Apparatus for monitoring, sorting, marking, testing or measuring using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3216—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
CN202080044041.4A 2019-06-20 2020-05-08 搬送车 Active CN114126988B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-114535 2019-06-20
JP2019114535 2019-06-20
PCT/JP2020/018612 WO2020255577A1 (ja) 2019-06-20 2020-05-08 搬送車

Publications (2)

Publication Number Publication Date
CN114126988A CN114126988A (zh) 2022-03-01
CN114126988B true CN114126988B (zh) 2023-11-10

Family

ID=74037229

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080044041.4A Active CN114126988B (zh) 2019-06-20 2020-05-08 搬送车

Country Status (8)

Country Link
US (1) US12119253B2 (https=)
EP (1) EP3988474A4 (https=)
JP (1) JP7435605B2 (https=)
KR (1) KR102686321B1 (https=)
CN (1) CN114126988B (https=)
IL (1) IL289059B2 (https=)
TW (1) TWI830922B (https=)
WO (1) WO2020255577A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11854849B2 (en) * 2020-06-12 2023-12-26 Taiwan Semiconductor Manufacturing Company Ltd. Method for operating conveying system
EP4287325A4 (en) 2022-01-20 2025-10-29 Lg Energy Solution Ltd Binder composition for the manufacture of a secondary lithium battery cathode, and secondary lithium battery cathode thus manufactured
WO2024231287A1 (en) * 2023-05-05 2024-11-14 Autostore Technology AS Automated vehicle with directional antenna
CN121752498A (zh) * 2023-09-11 2026-03-27 村田机械株式会社 输送系统
CN118248608B (zh) * 2024-05-28 2024-07-23 华芯智上半导体设备(上海)有限公司 自动化物料搬送系统
WO2026062095A1 (en) * 2024-09-20 2026-03-26 Flexlink Ab Article transporting system and method for operating an article transporting system

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JPH09289708A (ja) * 1996-04-19 1997-11-04 Toyota Autom Loom Works Ltd 移動体運行システムの通信方法
JPH09295707A (ja) * 1996-05-07 1997-11-18 Shinko Electric Co Ltd 搬送ロボットを用いたクリーンルームの物品搬送管理方法
JP2002068481A (ja) * 2000-08-28 2002-03-08 Ishikawajima Harima Heavy Ind Co Ltd コンテナの段積貯蔵装置
JP2002265009A (ja) * 2001-03-08 2002-09-18 Think Laboratory Co Ltd ロール立体倉庫における被製版ロールの収納・取り出し方法
JP2003150247A (ja) * 2001-11-19 2003-05-23 Murata Mach Ltd 有軌道台車システム
JP2004010204A (ja) * 2002-06-04 2004-01-15 Matsushita Electric Ind Co Ltd マーカシステム
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2005227914A (ja) * 2004-02-12 2005-08-25 Nippon Yusoki Co Ltd 無人搬送車の走行停止制御装置
CN101183431A (zh) * 2006-06-09 2008-05-21 日本电气株式会社 无线通信系统和无线通信方法
JP2012071928A (ja) * 2010-09-28 2012-04-12 Tsubakimoto Chain Co 物品管理システム
DE202013008718U1 (de) * 2013-09-30 2013-12-19 Grenzebach Maschinenbau Gmbh Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb
WO2015070841A1 (de) * 2013-11-18 2015-05-21 Grenzebach Maschinenbau Gmbh Verfahren und vorrichtung zur weitgehend maschinellen zusammenstellung von warenlieferungen in lagerhallen
JP2016053754A (ja) * 2014-09-02 2016-04-14 村田機械株式会社 走行車システム
CN107128658A (zh) * 2016-02-29 2017-09-05 株式会社大福 物品输送设备
JP2019039174A (ja) * 2017-08-23 2019-03-14 学校法人千葉工業大学 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット

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JPS6041234B2 (ja) * 1976-08-20 1985-09-14 株式会社 山口機械研究所 水流利用の発電装置
JPS58152235A (ja) * 1982-03-08 1983-09-09 Fuji Photo Film Co Ltd ハロゲン化銀写真感光材料
JPS6013801A (ja) 1983-07-01 1985-01-24 Seiko Instr & Electronics Ltd 高分子物質精製濃縮装置
JP2715130B2 (ja) 1989-01-12 1998-02-18 株式会社ダイフク 荷搬送設備
JPH09110398A (ja) 1995-10-16 1997-04-28 Sumitomo Heavy Ind Ltd 無人搬送車の誘導ガイド方式
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法
US20110241845A1 (en) * 2010-04-06 2011-10-06 Sullivan Robert P Automated Material Handling System with Identification Features
JP6041234B2 (ja) 2013-10-07 2016-12-07 村田機械株式会社 グリッパを備える搬送装置
JP6079672B2 (ja) 2014-03-10 2017-02-15 村田機械株式会社 搬送車システム
JP6168476B2 (ja) 2015-03-19 2017-07-26 村田機械株式会社 搬送台車と搬送台車システム
JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
US20170086540A1 (en) 2016-12-12 2017-03-30 Gold Brands Holdings Inc. Method and adjustable ring for relieving stress
JP6693428B2 (ja) 2017-01-23 2020-05-13 株式会社ダイフク 物品搬送車
JP6906754B2 (ja) 2017-10-31 2021-07-21 村田機械株式会社 搬送システム
JP6946965B2 (ja) 2017-11-22 2021-10-13 村田機械株式会社 搬送システム
DE102017222883A1 (de) 2017-12-15 2019-06-19 Te Connectivity Germany Gmbh Kontaktierungseinheit zum elektrischen Kontaktieren zumindest eines Elektroniksegments eines Elektronikmoduls und Verfahren

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289708A (ja) * 1996-04-19 1997-11-04 Toyota Autom Loom Works Ltd 移動体運行システムの通信方法
JPH09295707A (ja) * 1996-05-07 1997-11-18 Shinko Electric Co Ltd 搬送ロボットを用いたクリーンルームの物品搬送管理方法
JP2002068481A (ja) * 2000-08-28 2002-03-08 Ishikawajima Harima Heavy Ind Co Ltd コンテナの段積貯蔵装置
JP2002265009A (ja) * 2001-03-08 2002-09-18 Think Laboratory Co Ltd ロール立体倉庫における被製版ロールの収納・取り出し方法
JP2003150247A (ja) * 2001-11-19 2003-05-23 Murata Mach Ltd 有軌道台車システム
JP2004010204A (ja) * 2002-06-04 2004-01-15 Matsushita Electric Ind Co Ltd マーカシステム
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2005227914A (ja) * 2004-02-12 2005-08-25 Nippon Yusoki Co Ltd 無人搬送車の走行停止制御装置
CN101183431A (zh) * 2006-06-09 2008-05-21 日本电气株式会社 无线通信系统和无线通信方法
JP2012071928A (ja) * 2010-09-28 2012-04-12 Tsubakimoto Chain Co 物品管理システム
DE202013008718U1 (de) * 2013-09-30 2013-12-19 Grenzebach Maschinenbau Gmbh Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb
WO2015070841A1 (de) * 2013-11-18 2015-05-21 Grenzebach Maschinenbau Gmbh Verfahren und vorrichtung zur weitgehend maschinellen zusammenstellung von warenlieferungen in lagerhallen
JP2016053754A (ja) * 2014-09-02 2016-04-14 村田機械株式会社 走行車システム
CN107128658A (zh) * 2016-02-29 2017-09-05 株式会社大福 物品输送设备
JP2019039174A (ja) * 2017-08-23 2019-03-14 学校法人千葉工業大学 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット

Also Published As

Publication number Publication date
IL289059A (en) 2022-02-01
TWI830922B (zh) 2024-02-01
EP3988474A4 (en) 2023-06-21
IL289059B2 (en) 2025-09-01
JP7435605B2 (ja) 2024-02-21
KR20220008331A (ko) 2022-01-20
US20220359251A1 (en) 2022-11-10
US12119253B2 (en) 2024-10-15
JPWO2020255577A1 (https=) 2020-12-24
WO2020255577A1 (ja) 2020-12-24
TW202105111A (zh) 2021-02-01
KR102686321B1 (ko) 2024-07-19
CN114126988A (zh) 2022-03-01
EP3988474A1 (en) 2022-04-27
IL289059B1 (en) 2025-05-01

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