KR102603529B1 - 엑시머 램프 - Google Patents

엑시머 램프 Download PDF

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Publication number
KR102603529B1
KR102603529B1 KR1020190031236A KR20190031236A KR102603529B1 KR 102603529 B1 KR102603529 B1 KR 102603529B1 KR 1020190031236 A KR1020190031236 A KR 1020190031236A KR 20190031236 A KR20190031236 A KR 20190031236A KR 102603529 B1 KR102603529 B1 KR 102603529B1
Authority
KR
South Korea
Prior art keywords
external electrode
electrode
excimer lamp
external
lamp
Prior art date
Application number
KR1020190031236A
Other languages
English (en)
Korean (ko)
Other versions
KR20190134461A (ko
Inventor
히데아키 야규
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20190134461A publication Critical patent/KR20190134461A/ko
Application granted granted Critical
Publication of KR102603529B1 publication Critical patent/KR102603529B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
KR1020190031236A 2018-05-25 2019-03-19 엑시머 램프 KR102603529B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-100264 2018-05-25
JP2018100264A JP7115036B2 (ja) 2018-05-25 2018-05-25 エキシマランプ

Publications (2)

Publication Number Publication Date
KR20190134461A KR20190134461A (ko) 2019-12-04
KR102603529B1 true KR102603529B1 (ko) 2023-11-17

Family

ID=68659215

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190031236A KR102603529B1 (ko) 2018-05-25 2019-03-19 엑시머 램프

Country Status (4)

Country Link
JP (1) JP7115036B2 (zh)
KR (1) KR102603529B1 (zh)
CN (1) CN110534400B (zh)
TW (1) TWI791767B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111916336A (zh) * 2020-08-22 2020-11-10 江门市正华科技有限公司 一种准分子发光消毒灯、空气杀菌装置及水杀菌装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001023577A (ja) 1999-07-02 2001-01-26 Ushio Inc 誘電体バリア放電ランプ
JP2013140912A (ja) 2012-01-06 2013-07-18 Tatsumo Kk エキシマ照射装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3178184B2 (ja) * 1993-09-08 2001-06-18 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP3168848B2 (ja) * 1994-10-25 2001-05-21 ウシオ電機株式会社 誘電体バリア放電ランプ装置
JP3137026B2 (ja) * 1997-04-01 2001-02-19 ウシオ電機株式会社 外部電極型蛍光ランプ
US6515406B1 (en) * 1999-02-05 2003-02-04 Matsushita Electric Industrial Co., Ltd. High-pressure mercury vapor discharge lamp and lamp unit
JP2002100324A (ja) * 2000-09-25 2002-04-05 Toshiba Lighting & Technology Corp 誘電体バリヤ放電ランプおよび誘電体バリヤ放電ランプ装置
US6633109B2 (en) * 2001-01-08 2003-10-14 Ushio America, Inc. Dielectric barrier discharge-driven (V)UV light source for fluid treatment
JP2004063125A (ja) * 2002-07-25 2004-02-26 Harison Toshiba Lighting Corp 放電ランプ点灯装置、放電ランプ点灯方法および照明装置
JP2007213976A (ja) * 2006-02-09 2007-08-23 Harison Toshiba Lighting Corp 高圧放電灯、画像投影装置
JP2008218403A (ja) * 2007-02-09 2008-09-18 Matsushita Electric Ind Co Ltd 放電ランプ、バックライトユニット、および液晶表示装置
JP5303890B2 (ja) * 2007-10-10 2013-10-02 ウシオ電機株式会社 エキシマランプ
TWI437609B (zh) * 2008-05-30 2014-05-11 Gs Yuasa Int Ltd 外部電極型放電燈以及使用該放電燈之紫外線照射裝置
CN102160142A (zh) * 2008-09-22 2011-08-17 株式会社杰士汤浅国际 准分子灯及准分子灯单元及紫外线照射装置
JPWO2012043705A1 (ja) * 2010-09-30 2014-02-24 株式会社Ｇｓユアサ 誘電体バリア放電ランプ装置
JP5729034B2 (ja) 2011-03-15 2015-06-03 ウシオ電機株式会社 光照射装置
JP2012212615A (ja) * 2011-03-31 2012-11-01 Sony Corp 光電変換素子の製造方法、光電変換素子および電子機器
KR101451075B1 (ko) * 2011-12-16 2014-10-15 후지필름 가부시키가이샤 도전 시트 및 터치 패널
JP5979016B2 (ja) * 2013-01-21 2016-08-24 ウシオ電機株式会社 エキシマランプ
JP6201925B2 (ja) * 2013-07-31 2017-09-27 株式会社Ｇｓユアサ 放電ランプ
JP6314771B2 (ja) * 2014-09-26 2018-04-25 東芝ライテック株式会社 紫外線ランプ
JP2016195019A (ja) * 2015-03-31 2016-11-17 株式会社Ｇｓユアサ 放電ランプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001023577A (ja) 1999-07-02 2001-01-26 Ushio Inc 誘電体バリア放電ランプ
JP2013140912A (ja) 2012-01-06 2013-07-18 Tatsumo Kk エキシマ照射装置

Also Published As

Publication number Publication date
KR20190134461A (ko) 2019-12-04
TW202004835A (zh) 2020-01-16
JP7115036B2 (ja) 2022-08-09
CN110534400A (zh) 2019-12-03
CN110534400B (zh) 2024-02-20
JP2019204728A (ja) 2019-11-28
TWI791767B (zh) 2023-02-11

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