KR102412725B1 - 제1 보호막 형성용 시트 - Google Patents

제1 보호막 형성용 시트 Download PDF

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Publication number
KR102412725B1
KR102412725B1 KR1020197009563A KR20197009563A KR102412725B1 KR 102412725 B1 KR102412725 B1 KR 102412725B1 KR 1020197009563 A KR1020197009563 A KR 1020197009563A KR 20197009563 A KR20197009563 A KR 20197009563A KR 102412725 B1 KR102412725 B1 KR 102412725B1
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KR
South Korea
Prior art keywords
resin film
curable resin
meth
buffer layer
test piece
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KR1020197009563A
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English (en)
Korean (ko)
Other versions
KR20190056385A (ko
Inventor
마사노리 야마기시
잇세이 아다치
Original Assignee
린텍 가부시키가이샤
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Application filed by 린텍 가부시키가이샤 filed Critical 린텍 가부시키가이샤
Publication of KR20190056385A publication Critical patent/KR20190056385A/ko
Application granted granted Critical
Publication of KR102412725B1 publication Critical patent/KR102412725B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Dicing (AREA)
KR1020197009563A 2016-10-05 2017-09-08 제1 보호막 형성용 시트 KR102412725B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2016-197523 2016-10-05
JP2016197523 2016-10-05
PCT/JP2017/032468 WO2018066302A1 (ja) 2016-10-05 2017-09-08 第１保護膜形成用シート

Publications (2)

Publication Number Publication Date
KR20190056385A KR20190056385A (ko) 2019-05-24
KR102412725B1 true KR102412725B1 (ko) 2022-06-23

Family

ID=61830909

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197009563A KR102412725B1 (ko) 2016-10-05 2017-09-08 제1 보호막 형성용 시트

Country Status (7)

Country Link
JP (1) JP6344811B1 (ja)
KR (1) KR102412725B1 (ja)
CN (1) CN109791887B (ja)
PH (1) PH12019500713A1 (ja)
SG (1) SG11201902955QA (ja)
TW (1) TWI649195B (ja)
WO (1) WO2018066302A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108821231B (zh) * 2018-06-26 2019-08-09 清华大学 一种基于力学原理的表面具有微结构的高弹性基体及方法
JP2020063362A (ja) * 2018-10-17 2020-04-23 住友ベークライト株式会社 湿式摩擦材用接着剤組成物
JP6859376B2 (ja) * 2019-01-22 2021-04-14 グンゼ株式会社 カバーフィルム
JP6697603B1 (ja) * 2019-03-27 2020-05-20 グンゼ株式会社 カバーフィルム
WO2021171898A1 (ja) * 2020-02-27 2021-09-02 リンテック株式会社 保護膜形成用シート、保護膜付きチップの製造方法、及び積層物
JP7323734B1 (ja) 2022-01-12 2023-08-08 リンテック株式会社 第１保護膜形成用シート、半導体装置の製造方法、及びシートの使用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169484A (ja) 2011-02-15 2012-09-06 Nitto Denko Corp 半導体装置の製造方法
JP2015084352A (ja) 2013-10-25 2015-04-30 東レ株式会社 回路部材接着用積層シートおよび半導体装置の製造方法
JP2015183008A (ja) 2014-03-20 2015-10-22 リンテック株式会社 粘着シート
JP2015206006A (ja) 2014-04-22 2015-11-19 デクセリアルズ株式会社 保護テープ、及びこれを用いた半導体装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5666335B2 (ja) 2011-02-15 2015-02-12 日東電工株式会社 保護層形成用フィルム
JP2013004872A (ja) * 2011-06-20 2013-01-07 Hitachi Chem Co Ltd 半導体装置の製造方法、フィルム状接着剤及び接着剤シート
JP5944155B2 (ja) * 2011-12-12 2016-07-05 日東電工株式会社 積層シート、及び、積層シートを用いた半導体装置の製造方法
JP6059499B2 (ja) * 2012-10-05 2017-01-11 リンテック株式会社 表面保護シート
KR20140069508A (ko) * 2012-11-29 2014-06-10 제일모직주식회사 반도체 웨이퍼 표면 보호용 점착 필름
CN104797423B (zh) * 2012-11-30 2017-06-13 琳得科株式会社 带固化性树脂膜形成层的片材以及使用了该片材的半导体装置的制造方法
JP5950869B2 (ja) * 2013-06-20 2016-07-13 古河電気工業株式会社 半導体ウエハ表面保護用粘着テープ
WO2015046529A1 (ja) * 2013-09-30 2015-04-02 リンテック株式会社 樹脂膜形成用複合シート
CN105765699A (zh) * 2013-11-22 2016-07-13 琳得科株式会社 切割片用基材膜及基材膜的制造方法
WO2015111310A1 (ja) * 2014-01-21 2015-07-30 リンテック株式会社 ウエハ保護用粘着シート

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169484A (ja) 2011-02-15 2012-09-06 Nitto Denko Corp 半導体装置の製造方法
JP2015084352A (ja) 2013-10-25 2015-04-30 東レ株式会社 回路部材接着用積層シートおよび半導体装置の製造方法
JP2015183008A (ja) 2014-03-20 2015-10-22 リンテック株式会社 粘着シート
JP2015206006A (ja) 2014-04-22 2015-11-19 デクセリアルズ株式会社 保護テープ、及びこれを用いた半導体装置の製造方法

Also Published As

Publication number Publication date
JP6344811B1 (ja) 2018-06-20
PH12019500713A1 (en) 2019-11-11
KR20190056385A (ko) 2019-05-24
TW201821270A (zh) 2018-06-16
JPWO2018066302A1 (ja) 2018-10-04
SG11201902955QA (en) 2019-05-30
CN109791887B (zh) 2023-04-28
WO2018066302A1 (ja) 2018-04-12
CN109791887A (zh) 2019-05-21
TWI649195B (zh) 2019-02-01

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