KR102062593B1 - 프로세스 챔버에 커플링된 유동 제어기를 모니터링하기 위한 방법들 - Google Patents

프로세스 챔버에 커플링된 유동 제어기를 모니터링하기 위한 방법들 Download PDF

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KR102062593B1
KR102062593B1 KR1020147011427A KR20147011427A KR102062593B1 KR 102062593 B1 KR102062593 B1 KR 102062593B1 KR 1020147011427 A KR1020147011427 A KR 1020147011427A KR 20147011427 A KR20147011427 A KR 20147011427A KR 102062593 B1 KR102062593 B1 KR 102062593B1
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flow controller
flow
controller
gas
process chamber
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KR20140069305A (ko
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발라라비 엔. 모함메드
존 더블유. 레인
마리우쉬 그레고르
댄 조셉 힐리
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어플라이드 머티어리얼스, 인코포레이티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020147011427A 2011-09-29 2012-09-28 프로세스 챔버에 커플링된 유동 제어기를 모니터링하기 위한 방법들 Active KR102062593B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161540817P 2011-09-29 2011-09-29
US61/540,817 2011-09-29
US13/627,659 2012-09-26
US13/627,659 US9772629B2 (en) 2011-09-29 2012-09-26 Methods for monitoring a flow controller coupled to a process chamber
PCT/US2012/057830 WO2013049512A2 (en) 2011-09-29 2012-09-28 Methods for monitoring a flow controller coupled to a process chamber

Publications (2)

Publication Number Publication Date
KR20140069305A KR20140069305A (ko) 2014-06-09
KR102062593B1 true KR102062593B1 (ko) 2020-01-06

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KR1020147011427A Active KR102062593B1 (ko) 2011-09-29 2012-09-28 프로세스 챔버에 커플링된 유동 제어기를 모니터링하기 위한 방법들

Country Status (6)

Country Link
US (2) US9772629B2 (https=)
JP (3) JP6328556B2 (https=)
KR (1) KR102062593B1 (https=)
CN (1) CN103930972B (https=)
TW (1) TWI583927B (https=)
WO (1) WO2013049512A2 (https=)

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Publication number Publication date
JP6789909B2 (ja) 2020-11-25
US9772629B2 (en) 2017-09-26
WO2013049512A2 (en) 2013-04-04
TW201331558A (zh) 2013-08-01
CN103930972B (zh) 2017-01-18
JP2020038678A (ja) 2020-03-12
TWI583927B (zh) 2017-05-21
JP6912540B2 (ja) 2021-08-04
CN103930972A (zh) 2014-07-16
JP6328556B2 (ja) 2018-05-23
JP2018037091A (ja) 2018-03-08
JP2014528606A (ja) 2014-10-27
US10222810B2 (en) 2019-03-05
US20130092243A1 (en) 2013-04-18
KR20140069305A (ko) 2014-06-09
WO2013049512A3 (en) 2013-05-23
US20180024573A1 (en) 2018-01-25

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