KR101912325B1 - 스위치를 사용하여 단일한 신호 채널과 복수의 패드 연결을 스위칭하는 테스트 회로 - Google Patents

스위치를 사용하여 단일한 신호 채널과 복수의 패드 연결을 스위칭하는 테스트 회로 Download PDF

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Publication number
KR101912325B1
KR101912325B1 KR1020160104767A KR20160104767A KR101912325B1 KR 101912325 B1 KR101912325 B1 KR 101912325B1 KR 1020160104767 A KR1020160104767 A KR 1020160104767A KR 20160104767 A KR20160104767 A KR 20160104767A KR 101912325 B1 KR101912325 B1 KR 101912325B1
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KR
South Korea
Prior art keywords
test
pads
switch
probes
tester
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KR1020160104767A
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English (en)
Korean (ko)
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KR20170087383A (ko
Inventor
헝-웨이 라이
Original Assignee
싱크-테크 시스템 코포레이션
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Publication of KR20170087383A publication Critical patent/KR20170087383A/ko
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Publication of KR101912325B1 publication Critical patent/KR101912325B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07385—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using switching of signals between probe tips and test bed, i.e. the standard contact matrix which in its turn connects to the tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020160104767A 2016-01-20 2016-08-18 스위치를 사용하여 단일한 신호 채널과 복수의 패드 연결을 스위칭하는 테스트 회로 KR101912325B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662280712P 2016-01-20 2016-01-20
US62/280,712 2016-01-20

Publications (2)

Publication Number Publication Date
KR20170087383A KR20170087383A (ko) 2017-07-28
KR101912325B1 true KR101912325B1 (ko) 2018-12-28

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Application Number Title Priority Date Filing Date
KR1020160104767A KR101912325B1 (ko) 2016-01-20 2016-08-18 스위치를 사용하여 단일한 신호 채널과 복수의 패드 연결을 스위칭하는 테스트 회로

Country Status (4)

Country Link
JP (1) JP6405346B2 (ja)
KR (1) KR101912325B1 (ja)
CN (1) CN106990346A (ja)
TW (1) TWI595248B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6912776B2 (ja) * 2017-11-08 2021-08-04 グローバルウェーハズ・ジャパン株式会社 誘電体膜の電気伝導率測定装置
CN108196179A (zh) * 2017-12-05 2018-06-22 广东欧珀移动通信有限公司 印制电路板、终端及基于共用测试点的电路测试方法
CN113933683B (zh) * 2021-09-23 2024-04-23 洛晶半导体(上海)有限公司 芯片测试系统及方法
CN115856588B (zh) * 2023-02-22 2023-08-04 长鑫存储技术有限公司 芯片测试板及测试方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007305879A (ja) * 2006-05-12 2007-11-22 Mt Picture Display Co Ltd 半導体装置の検査方法及び検査装置
JP2013088288A (ja) * 2011-10-18 2013-05-13 Fujitsu Semiconductor Ltd 検査装置及び検査システム

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JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
JP2004125707A (ja) * 2002-10-04 2004-04-22 Tokyo Cathode Laboratory Co Ltd 半導体検査装置、半導体検査装置用マザーボード及び半導体検査方法
US7121639B2 (en) * 2002-12-02 2006-10-17 Silverbrook Research Pty Ltd Data rate equalisation to account for relatively different printhead widths
US7414418B2 (en) * 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices
US7245134B2 (en) * 2005-01-31 2007-07-17 Formfactor, Inc. Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes
US7852094B2 (en) * 2006-12-06 2010-12-14 Formfactor, Inc. Sharing resources in a system for testing semiconductor devices
CN101545942B (zh) * 2008-03-27 2013-05-08 矽创电子股份有限公司 用于测试连接垫的电路
JP2009287943A (ja) * 2008-05-27 2009-12-10 Mitsubishi Electric Corp 基板検査方法
TWI560456B (en) * 2009-03-20 2016-12-01 Bravechips Microelectronics Method of parallel ic test and wafer containing same function dies under test and ic chips containing same function blocks under test
JP5691193B2 (ja) * 2010-02-26 2015-04-01 富士通セミコンダクター株式会社 コンタクタ、半導体装置の試験装置、及び半導体装置の製造方法
US8694845B2 (en) * 2010-04-25 2014-04-08 Ssu-Pin Ma Methods and systems for testing electronic circuits
CN102466739B (zh) * 2010-11-02 2014-04-09 旺矽科技股份有限公司 探针卡
US9110134B2 (en) * 2012-12-27 2015-08-18 Intel Corporation Input/output delay testing for devices utilizing on-chip delay generation
JP2014202728A (ja) * 2013-04-10 2014-10-27 独立行政法人国立高等専門学校機構 電子的に組み替え可能な半導体特性測定装置
CN105575303A (zh) * 2015-12-24 2016-05-11 中颖电子股份有限公司 液晶驱动芯片测试方法及使用这种测试方法的液晶驱动芯片

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JP2007305879A (ja) * 2006-05-12 2007-11-22 Mt Picture Display Co Ltd 半導体装置の検査方法及び検査装置
JP2013088288A (ja) * 2011-10-18 2013-05-13 Fujitsu Semiconductor Ltd 検査装置及び検査システム

Also Published As

Publication number Publication date
TW201727249A (zh) 2017-08-01
TWI595248B (zh) 2017-08-11
CN106990346A (zh) 2017-07-28
JP6405346B2 (ja) 2018-10-17
JP2017129559A (ja) 2017-07-27
KR20170087383A (ko) 2017-07-28

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