KR101719009B1 - 나노구조 용품 및 나노구조 용품의 제조 방법 - Google Patents

나노구조 용품 및 나노구조 용품의 제조 방법 Download PDF

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KR101719009B1
KR101719009B1 KR1020117017518A KR20117017518A KR101719009B1 KR 101719009 B1 KR101719009 B1 KR 101719009B1 KR 1020117017518 A KR1020117017518 A KR 1020117017518A KR 20117017518 A KR20117017518 A KR 20117017518A KR 101719009 B1 KR101719009 B1 KR 101719009B1
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electrode
nanostructured
plasma
matrix
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KR20110099768A (ko
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모세스 엠 데이비드
앤드류 케이 하첼
티모시 제이 헤브링크
타-후아 유
준-잉 장
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0361—Tips, pillars
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Electron Tubes For Measurement (AREA)
KR1020117017518A 2008-12-30 2009-12-18 나노구조 용품 및 나노구조 용품의 제조 방법 Expired - Fee Related KR101719009B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14151708P 2008-12-30 2008-12-30
US61/141,517 2008-12-30
PCT/US2009/068657 WO2010123528A2 (en) 2008-12-30 2009-12-18 Nanostructured articles and methods of making nanostructured articles

Publications (2)

Publication Number Publication Date
KR20110099768A KR20110099768A (ko) 2011-09-08
KR101719009B1 true KR101719009B1 (ko) 2017-03-22

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US (1) US9908772B2 (enExample)
EP (1) EP2379443B1 (enExample)
JP (2) JP5940809B2 (enExample)
KR (1) KR101719009B1 (enExample)
CN (2) CN102325719A (enExample)
BR (1) BRPI0923760A2 (enExample)
WO (1) WO2010123528A2 (enExample)

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US20110281068A1 (en) 2011-11-17
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