KR101705032B1 - 극저온 냉각용 시스템 및 방법 - Google Patents

극저온 냉각용 시스템 및 방법 Download PDF

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KR101705032B1
KR101705032B1 KR1020127032539A KR20127032539A KR101705032B1 KR 101705032 B1 KR101705032 B1 KR 101705032B1 KR 1020127032539 A KR1020127032539 A KR 1020127032539A KR 20127032539 A KR20127032539 A KR 20127032539A KR 101705032 B1 KR101705032 B1 KR 101705032B1
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South Korea
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delete delete
rod
main refrigerant
temperature
refrigerant
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KR20130116162A (ko
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알렌 제이. 바틀렛
윌리엄 존슨
마크 콜린스
세르게이 시소에브
제임스 에이. 오넬
마이클 제이. 주니어. 에아코바치
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브룩스 오토메이션, 인크.
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Assigned to 에드워즈 배큠 엘엘시 reassignment 에드워즈 배큠 엘엘시 권리의 전부이전등록 Assignors: 브룩스 오토메이션, 인크.
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/01—Heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/06—Several compression cycles arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/02—Compressor control
    • F25B2600/025—Compressor control by controlling speed
    • F25B2600/0251—Compressor control by controlling speed with on-off operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/02—Compressor control
    • F25B2600/025—Compressor control by controlling speed
    • F25B2600/0253—Compressor control by controlling speed with variable speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/34—Accessory or component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020127032539A 2010-05-12 2011-05-12 극저온 냉각용 시스템 및 방법 Active KR101705032B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33380110P 2010-05-12 2010-05-12
US61/333,801 2010-05-12
US36351410P 2010-07-12 2010-07-12
US61/363,514 2010-07-12
PCT/US2011/036213 WO2011143398A1 (en) 2010-05-12 2011-05-12 System and method for cryogenic cooling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020177002757A Division KR101905161B1 (ko) 2010-05-12 2011-05-12 극저온 냉각용 시스템 및 방법

Publications (2)

Publication Number Publication Date
KR20130116162A KR20130116162A (ko) 2013-10-23
KR101705032B1 true KR101705032B1 (ko) 2017-02-09

Family

ID=44515101

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Application Number Title Priority Date Filing Date
KR1020127032539A Active KR101705032B1 (ko) 2010-05-12 2011-05-12 극저온 냉각용 시스템 및 방법
KR1020177002757A Active KR101905161B1 (ko) 2010-05-12 2011-05-12 극저온 냉각용 시스템 및 방법

Family Applications After (1)

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Country Status (7)

Country Link
US (2) US10156386B2 (https=)
EP (2) EP2569583B1 (https=)
JP (2) JP5815682B2 (https=)
KR (2) KR101705032B1 (https=)
CN (1) CN102918336B (https=)
TW (1) TWI571941B (https=)
WO (1) WO2011143398A1 (https=)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8011191B2 (en) 2009-09-30 2011-09-06 Thermo Fisher Scientific (Asheville) Llc Refrigeration system having a variable speed compressor
EP2569583B1 (en) 2010-05-12 2016-03-02 Brooks Automation, Inc. System for cryogenic cooling
JP5938932B2 (ja) * 2012-02-14 2016-06-22 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
JP5942459B2 (ja) * 2012-02-14 2016-06-29 セイコーエプソン株式会社 ハンドラー、及び部品検査装置
US20140260380A1 (en) * 2013-03-15 2014-09-18 Energy Recovery Systems Inc. Compressor control for heat transfer system
CN103900315B (zh) * 2014-01-07 2016-08-17 沃姆制冷设备(上海)有限公司 超导器件及材料的液氮降温方法和实现该方法的超导制冷机
US10539360B2 (en) * 2014-11-13 2020-01-21 Leica Mikrosysteme Gmbh Freezing machine with container for frozen samples
CN105571187A (zh) * 2016-01-04 2016-05-11 上海理工大学 采用Xe为低温级制冷剂的超低温复叠制冷系统
KR102001251B1 (ko) * 2016-09-21 2019-07-18 한국전력공사 액체질소 순환 및 냉동기를 통합한 초전도 케이블 냉각시스템
CN106642776A (zh) * 2016-11-24 2017-05-10 深圳市天健机电设备有限公司 一种集中水冷系统
CN106766542A (zh) * 2016-12-28 2017-05-31 上海原能细胞医学技术有限公司 生物样本冷库
CN107818940B (zh) * 2017-11-30 2020-04-10 上海华力微电子有限公司 一种静电吸盘装置及其温控方法
US11472264B2 (en) * 2018-03-07 2022-10-18 Gogoro Inc. Apparatuses for controlling environmental conditions and associated methods
KR102608957B1 (ko) 2018-08-27 2023-12-01 삼성전자주식회사 플라즈마 처리 장치
KR102646904B1 (ko) 2018-12-04 2024-03-12 삼성전자주식회사 플라즈마 처리 장치
MX2022005127A (es) 2019-10-29 2022-08-04 Tmrw Life Sciences Inc Aparato para facilitar la transferencia de especimenes biologicos almacenados en condiciones criogenicas.
CN111043805B (zh) * 2019-12-30 2021-09-10 成都新连通低温设备有限公司 一种大功率液氮温区变温压力实验系统
US11817187B2 (en) 2020-05-18 2023-11-14 TMRW Life Sciences, Inc. Handling and tracking of biological specimens for cryogenic storage
TWI731722B (zh) * 2020-06-19 2021-06-21 國立臺北科技大學 具有自動除霜功能的冷凍系統及其自動除霜控制方法
JP7610303B2 (ja) 2020-09-24 2025-01-08 ティーエムアールダブリュ ライフサイエンシーズ，インコーポレイテツド 極低温条件で保管された生物学的試料の移送を容易にするためのワークステーション及び装置
JP7545768B2 (ja) 2020-10-02 2024-09-05 ティーエムアールダブリュ ライフサイエンシーズ，インコーポレイテツド 無線トランスポンダタグ付き試料容器及び／又はキャリアのための位置合わせ機構を有する問い合わせ装置及び／又はシステム
CN112218507A (zh) * 2020-11-10 2021-01-12 中天（江苏）防务装备有限公司 一种集成桅杆综合冷却系统
USD963194S1 (en) 2020-12-09 2022-09-06 TMRW Life Sciences, Inc. Cryogenic vial carrier
EP4259333B1 (en) 2020-12-10 2026-03-04 TMRW Life Sciences, Inc. Specimen holder with wireless transponder
EP4252009B1 (en) 2021-01-13 2025-03-05 TMRW Life Sciences, Inc. System to pick and/or place specimen containers
CN115406132B (zh) * 2021-05-28 2023-09-15 中国科学院理化技术研究所 一种氦低温制冷系统及制冷方法
US12527318B2 (en) 2021-10-08 2026-01-20 TMRW Life Sciences, Inc. Systems, apparatus and methods to pick and/or place specimen containers
GB202115660D0 (en) * 2021-11-01 2021-12-15 Edwards Vacuum Llc Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system
US12204989B2 (en) 2021-12-13 2025-01-21 The Boeing Company Cryogenic cooling system
KR102489501B1 (ko) * 2022-01-13 2023-01-18 크라이오에이치앤아이(주) 반도체 제조 장비용 온도 조절 장치
EP4499265A1 (en) * 2022-03-30 2025-02-05 Microsoft Technology Licensing, LLC Cryogenic removal of carbon dioxide from the atmosphere
KR102654974B1 (ko) * 2022-05-25 2024-04-08 크라이오에이치앤아이(주) 반도체 제조 장비용 온도 조절 장치
KR102857513B1 (ko) * 2023-11-03 2025-09-11 주식회사 엘지에너지솔루션 싸이클링 테스트 장치

Family Cites Families (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3733845A (en) * 1972-01-19 1973-05-22 D Lieberman Cascaded multicircuit,multirefrigerant refrigeration system
US4279127A (en) 1979-03-02 1981-07-21 Air Products And Chemicals, Inc. Removable refrigerator for maintaining liquefied gas inventory
US4277949A (en) 1979-06-22 1981-07-14 Air Products And Chemicals, Inc. Cryostat with serviceable refrigerator
JPS61128065A (ja) * 1984-11-28 1986-06-16 株式会社日立製作所 極低温冷凍機
US4951471A (en) * 1986-05-16 1990-08-28 Daikin Industries, Ltd. Cryogenic refrigerator
JPH0776641B2 (ja) * 1986-05-16 1995-08-16 ダイキン工業株式会社 極低温冷凍機
US4840043A (en) * 1986-05-16 1989-06-20 Katsumi Sakitani Cryogenic refrigerator
JPS6375760A (ja) 1986-09-19 1988-04-06 Canon Inc 放電装置の製造方法
JPH0643647Y2 (ja) 1986-11-05 1994-11-14 株式会社日立製作所 極低温冷凍装置
USRE33878E (en) 1987-01-20 1992-04-14 Helix Technology Corporation Cryogenic recondenser with remote cold box
JPS63220048A (ja) * 1987-03-09 1988-09-13 ダイキン工業株式会社 極低温冷凍装置
US4829785A (en) * 1987-12-04 1989-05-16 The Boeing Company Cryogenic cooling system with precooling stage
US4796433A (en) 1988-01-06 1989-01-10 Helix Technology Corporation Remote recondenser with intermediate temperature heat sink
JPH0788980B2 (ja) * 1989-02-01 1995-09-27 ダイキン工業株式会社 ヘリウム冷凍機
US5060481A (en) * 1989-07-20 1991-10-29 Helix Technology Corporation Method and apparatus for controlling a cryogenic refrigeration system
JPH03102652A (ja) 1989-09-18 1991-04-30 Canon Inc 光学的情報記録再生装置
JP2873388B2 (ja) * 1990-05-15 1999-03-24 日本酸素株式会社 冷凍機及びその冷凍能力の調整方法
JP3102652B2 (ja) 1991-11-19 2000-10-23 株式会社日立製作所 冷熱衝撃試験装置
JPH05322343A (ja) * 1992-05-15 1993-12-07 Hitachi Ltd リザーバタンク付き冷凍装置
JP2725689B2 (ja) * 1992-06-09 1998-03-11 住友重機械工業株式会社 蓄冷器式冷凍機
JPH0626459A (ja) * 1992-07-09 1994-02-01 Hitachi Ltd 極低温冷却装置およびその冷却方法
JPH06117716A (ja) * 1992-10-05 1994-04-28 Kobe Steel Ltd 液化冷凍装置の予冷方法及び装置
JP2945806B2 (ja) * 1992-10-07 1999-09-06 株式会社神戸製鋼所 液化冷凍装置に設けられる冷凍負荷の予冷装置
JPH06123508A (ja) * 1992-10-07 1994-05-06 Japan Atom Energy Res Inst 冷凍装置
JP3159553B2 (ja) * 1992-12-18 2001-04-23 東海旅客鉄道株式会社 極低温冷凍機の運転制御方法
JPH06265230A (ja) * 1993-03-11 1994-09-20 Kobe Steel Ltd 液化冷凍装置の運転制御方法及び装置
JPH06323661A (ja) * 1993-05-18 1994-11-25 Hitachi Ltd 冷凍装置
JPH06323663A (ja) * 1993-05-18 1994-11-25 Hitachi Ltd 冷凍装置
JPH06323664A (ja) * 1993-05-18 1994-11-25 Hitachi Ltd 冷凍装置
JP2910499B2 (ja) * 1993-05-18 1999-06-23 株式会社日立製作所 冷凍装置
JPH06323662A (ja) * 1993-05-18 1994-11-25 Hitachi Ltd 冷凍装置
US5508613A (en) 1994-08-29 1996-04-16 Conductus, Inc. Apparatus for cooling NMR coils
JPH08222429A (ja) * 1995-02-13 1996-08-30 Hitachi Ltd 極低温装置
JPH09113052A (ja) * 1995-10-16 1997-05-02 Hitachi Ltd 冷凍装置
JPH09196487A (ja) * 1996-01-17 1997-07-31 Daikin Ind Ltd 極低温冷凍機
US5694776A (en) * 1996-01-30 1997-12-09 The Boc Group, Inc. Refrigeration method and apparatus
JP3573384B2 (ja) * 1996-02-20 2004-10-06 住友重機械工業株式会社 極低温冷凍装置
JPH09236340A (ja) * 1996-02-28 1997-09-09 Daikin Ind Ltd 極低温冷凍装置
JP3571837B2 (ja) * 1996-03-01 2004-09-29 住友重機械工業株式会社 極低温冷凍装置
JPH09303897A (ja) * 1996-05-10 1997-11-28 Daikin Ind Ltd 極低温冷凍装置
JPH10246524A (ja) * 1997-03-06 1998-09-14 Hitachi Ltd 冷凍装置
DE19720677C1 (de) 1997-05-16 1998-10-22 Spectrospin Ag NMR-Meßvorrichtung mit gekühltem Meßkopf
JPH11125474A (ja) * 1997-10-23 1999-05-11 Hitachi Ltd 極低温冷凍システム
JP3670536B2 (ja) * 1999-11-08 2005-07-13 東海旅客鉄道株式会社 極低温冷却装置
US20020023447A1 (en) * 2000-06-28 2002-02-28 Oleg Podtchereniaev High efficiency very-low temperature mixed refrigerant system with rapid cool down
US6324856B1 (en) * 2000-07-07 2001-12-04 Spx Corporation Multiple stage cascade refrigeration system having temperature responsive flow control and method
JP3929022B2 (ja) 2000-11-01 2007-06-13 松下電器産業株式会社 ポイントサービスシステム
US6425250B1 (en) 2001-02-08 2002-07-30 Praxair Technology, Inc. System for providing cryogenic refrigeration using an upstream pulse tube refrigerator
CN102200356B (zh) * 2001-02-23 2014-03-26 布鲁克斯自动化公司 超低温闭环再循环气体冷却系统
US6415613B1 (en) * 2001-03-16 2002-07-09 General Electric Company Cryogenic cooling system with cooldown and normal modes of operation
US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US7478540B2 (en) * 2001-10-26 2009-01-20 Brooks Automation, Inc. Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems
DE10216786C5 (de) * 2002-04-15 2009-10-15 Ers Electronic Gmbh Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden
JP2003336923A (ja) * 2002-05-20 2003-11-28 Central Japan Railway Co 極低温冷凍装置
JP2004020754A (ja) 2002-06-13 2004-01-22 Namiki Precision Jewel Co Ltd ピグテイル型光ファイバ
US6679066B1 (en) * 2002-08-16 2004-01-20 Sumitomo Heavy Industries, Ltd. Cryogenic cooling system for superconductive electric machines
US7003977B2 (en) * 2003-07-18 2006-02-28 General Electric Company Cryogenic cooling system and method with cold storage device
JP4034253B2 (ja) * 2003-09-30 2008-01-16 株式会社日立製作所 核磁気共鳴測定装置
GB0408312D0 (en) * 2004-04-14 2004-05-19 Oxford Instr Superconductivity Cooling apparatus
JP4407384B2 (ja) 2004-05-28 2010-02-03 株式会社Ｓｕｍｃｏ Ｓｏｉ基板の製造方法
ITTO20040588A1 (it) * 2004-09-06 2004-12-06 Iarp S R L Impianto frigorifero a compressione di co2 per applicazioni di bassa temperatura
JP2006125772A (ja) * 2004-10-29 2006-05-18 Chubu Electric Power Co Inc 極低温冷凍機の運転制御装置
US7165422B2 (en) * 2004-11-08 2007-01-23 Mmr Technologies, Inc. Small-scale gas liquefier
DE102004053972B3 (de) * 2004-11-09 2006-07-20 Bruker Biospin Gmbh NMR-Spektrometer mit gemeinsamen Refrigerator zum Kühlen von NMR-Probenkopf und Kryostat
DE102004053973B3 (de) * 2004-11-09 2006-07-20 Bruker Biospin Ag NMR-Spektrometer mit Refrigeratorkühlung
US7185501B2 (en) * 2004-12-16 2007-03-06 General Electric Company Cryogenic cooling system and method with backup cold storage device
JP4563269B2 (ja) * 2005-07-05 2010-10-13 財団法人鉄道総合技術研究所 タービン型冷凍機の冷凍能力制御装置
JP2007303794A (ja) * 2006-05-15 2007-11-22 Sanyo Electric Co Ltd 冷凍装置
US8769982B2 (en) * 2006-10-02 2014-07-08 Emerson Climate Technologies, Inc. Injection system and method for refrigeration system compressor
US7528392B2 (en) * 2006-11-27 2009-05-05 Varian Semiconductor Equipment Associates, Inc. Techniques for low-temperature ion implantation
JP4253852B2 (ja) 2007-03-15 2009-04-15 村田機械株式会社 画像読取装置及びイメージスキャナ装置
EP2150756A1 (en) * 2007-04-26 2010-02-10 Linde, Inc. Air cycle refrigeration capacity control system
US8532832B2 (en) * 2008-09-23 2013-09-10 Be Aerospace, Inc. Method and apparatus for thermal exchange with two-phase media
CA2755679C (en) 2009-03-17 2017-09-12 Aciex Therapeutics, Inc. Ophthalmic formulations of cetirizine and methods of use
JP2011125474A (ja) 2009-12-17 2011-06-30 Isuzu Motors Ltd 体調判定装置
CN102834678B (zh) * 2010-04-23 2014-11-12 住友重机械工业株式会社 冷却系统及冷却方法
EP2569583B1 (en) 2010-05-12 2016-03-02 Brooks Automation, Inc. System for cryogenic cooling
KR20120109873A (ko) * 2011-03-28 2012-10-09 삼성중공업 주식회사 옥내의 환기시스템 및 그 제연 방법

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EP3040646B1 (en) 2017-11-15
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US20190120528A1 (en) 2019-04-25
CN102918336A (zh) 2013-02-06
US11215384B2 (en) 2022-01-04
WO2011143398A1 (en) 2011-11-17
JP2015227775A (ja) 2015-12-17
US20120038120A1 (en) 2012-02-16
JP2013538324A (ja) 2013-10-10
EP2569583A1 (en) 2013-03-20
KR20130116162A (ko) 2013-10-23
EP2569583B1 (en) 2016-03-02
JP6203800B2 (ja) 2017-09-27
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US10156386B2 (en) 2018-12-18

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