KR101651007B1 - 기판의 도포 장치 및 기판의 도포 방법 - Google Patents

기판의 도포 장치 및 기판의 도포 방법 Download PDF

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Publication number
KR101651007B1
KR101651007B1 KR1020140133408A KR20140133408A KR101651007B1 KR 101651007 B1 KR101651007 B1 KR 101651007B1 KR 1020140133408 A KR1020140133408 A KR 1020140133408A KR 20140133408 A KR20140133408 A KR 20140133408A KR 101651007 B1 KR101651007 B1 KR 101651007B1
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KR
South Korea
Prior art keywords
nozzle
substrate
coating
curing means
running
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KR1020140133408A
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English (en)
Korean (ko)
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KR20150133623A (ko
Inventor
하치로우 도우치
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쥬가이로 고교 가부시키가이샤
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Publication of KR20150133623A publication Critical patent/KR20150133623A/ko
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Publication of KR101651007B1 publication Critical patent/KR101651007B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Spray Control Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
KR1020140133408A 2014-05-20 2014-10-02 기판의 도포 장치 및 기판의 도포 방법 KR101651007B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2014-104103 2014-05-20
JP2014104103A JP6452318B2 (ja) 2014-05-20 2014-05-20 基板の塗布装置及び基板の塗布方法

Publications (2)

Publication Number Publication Date
KR20150133623A KR20150133623A (ko) 2015-11-30
KR101651007B1 true KR101651007B1 (ko) 2016-08-24

Family

ID=54562623

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140133408A KR101651007B1 (ko) 2014-05-20 2014-10-02 기판의 도포 장치 및 기판의 도포 방법

Country Status (4)

Country Link
JP (1) JP6452318B2 (ja)
KR (1) KR101651007B1 (ja)
CN (1) CN105080766B (ja)
TW (1) TWI574745B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180071939A (ko) * 2016-12-20 2018-06-28 도오꾜오까고오교 가부시끼가이샤 도포 장치, 및 도포 방법

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106622794B (zh) * 2016-12-13 2023-02-03 彭亮 一种平面喷涂装置
CN106622793B (zh) * 2016-12-13 2023-02-03 彭亮 一种桥式自动喷涂设备
CN107214019A (zh) * 2017-07-31 2017-09-29 望江县精美欣钢构有限公司 一种双执行机构钢板表面自动喷胶设备
CN108789791A (zh) * 2018-08-06 2018-11-13 江西佳宇陶瓷有限公司 一种具有烘干功能的直角瓦生产用染色装置
CN108943333B (zh) * 2018-09-12 2020-11-03 浙江南洋水泥制品有限公司 一种玻璃纤维增强水泥制品成型用喷射车
CN109870880A (zh) * 2019-04-09 2019-06-11 合肥京东方显示技术有限公司 涂胶设备及涂胶方法
CN114798277B (zh) * 2022-04-21 2024-04-26 宁夏众源建材有限公司 一种建筑用铝合金型材处理方法及其生产线
CN115971003A (zh) * 2022-12-29 2023-04-18 王道胜 一种光伏薄膜组件涂覆工艺
CN115921168B (zh) * 2023-02-10 2023-10-03 东莞市华纬涂装设备有限公司 一种多工位喷涂机械手

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004327475A (ja) * 2003-04-21 2004-11-18 Tokyo Electron Ltd 現像処理方法及び現像処理装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3366630B2 (ja) * 2000-10-04 2003-01-14 大日本スクリーン製造株式会社 平面表示装置用の隔壁形成方法及びその装置
JP4183121B2 (ja) * 2003-04-14 2008-11-19 東京エレクトロン株式会社 現像処理方法及び現像処理装置
JP2004321980A (ja) * 2003-04-25 2004-11-18 Seiko Epson Corp 液滴吐出装置、及び液滴吐出方法
CN100467140C (zh) * 2004-05-10 2009-03-11 鸿富锦精密工业（深圳）有限公司 涂布装置
KR100643754B1 (ko) * 2004-11-26 2006-11-10 주식회사 엘지화학 2차원 또는 3차원 압출형재의 코팅장치 및 이를 이용한코팅방법
JP3836119B2 (ja) * 2004-11-29 2006-10-18 東京応化工業株式会社 塗布装置
JP4634265B2 (ja) * 2005-09-27 2011-02-16 東京エレクトロン株式会社 塗布方法及び塗布装置
JP2008012389A (ja) * 2006-07-03 2008-01-24 Dainippon Screen Mfg Co Ltd リブ形成装置
JP4738319B2 (ja) * 2006-11-15 2011-08-03 大日本スクリーン製造株式会社 パターン形成装置
JP4884991B2 (ja) * 2007-01-19 2012-02-29 東京エレクトロン株式会社 塗布処理装置
JP5244445B2 (ja) * 2008-04-24 2013-07-24 東京応化工業株式会社 塗布装置
JP4853536B2 (ja) * 2009-03-13 2012-01-11 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
CN102369572A (zh) * 2009-03-30 2012-03-07 芝浦机械电子装置股份有限公司 薄膜形成装置及薄膜形成方法
KR101182226B1 (ko) * 2009-10-28 2012-09-12 삼성디스플레이 주식회사 도포 장치, 이의 도포 방법 및 이를 이용한 유기막 형성 방법
JP5343030B2 (ja) * 2010-03-26 2013-11-13 大日本スクリーン製造株式会社 パターン形成装置
CN103201046B (zh) * 2010-08-31 2015-08-12 新日铁住金株式会社 用于将uv固化性树脂涂布至钢管的螺纹端的涂覆设备
JP5558993B2 (ja) * 2010-09-29 2014-07-23 芝浦メカトロニクス株式会社 接着剤供給装置及び接着剤供給方法
JP2012143691A (ja) * 2011-01-11 2012-08-02 Dainippon Screen Mfg Co Ltd パターン形成方法およびパターン形成装置
JP5138058B2 (ja) * 2011-03-07 2013-02-06 東レ株式会社 清掃部材と塗布器の清掃方法及び清掃装置並びにディスプレイ用部材の製造方法
JP5741078B2 (ja) * 2011-03-09 2015-07-01 セイコーエプソン株式会社 印刷装置
JP5819621B2 (ja) * 2011-03-25 2015-11-24 株式会社Ｓｃｒｅｅｎホールディングス パターン形成方法およびパターン形成装置
JP2012217884A (ja) * 2011-04-05 2012-11-12 Olympus Corp 接着剤塗布装置および接着剤塗布方法
JP5771432B2 (ja) * 2011-04-13 2015-08-26 東京応化工業株式会社 塗布装置
JP5864141B2 (ja) * 2011-06-16 2016-02-17 株式会社日立製作所 薄膜形成装置および薄膜形成方法
JP5890255B2 (ja) * 2012-04-02 2016-03-22 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 露光装置、基板処理装置、基板の露光方法および基板処理方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004327475A (ja) * 2003-04-21 2004-11-18 Tokyo Electron Ltd 現像処理方法及び現像処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180071939A (ko) * 2016-12-20 2018-06-28 도오꾜오까고오교 가부시끼가이샤 도포 장치, 및 도포 방법
KR102358071B1 (ko) 2016-12-20 2022-02-03 도오꾜오까고오교 가부시끼가이샤 도포 장치, 및 도포 방법

Also Published As

Publication number Publication date
CN105080766A (zh) 2015-11-25
KR20150133623A (ko) 2015-11-30
TWI574745B (zh) 2017-03-21
JP6452318B2 (ja) 2019-01-16
TW201544195A (zh) 2015-12-01
JP2015217362A (ja) 2015-12-07
CN105080766B (zh) 2017-08-11

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