KR101573302B1 - 반도체 장치 및 그 제조 방법 - Google Patents

반도체 장치 및 그 제조 방법 Download PDF

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KR101573302B1
KR101573302B1 KR1020090001448A KR20090001448A KR101573302B1 KR 101573302 B1 KR101573302 B1 KR 101573302B1 KR 1020090001448 A KR1020090001448 A KR 1020090001448A KR 20090001448 A KR20090001448 A KR 20090001448A KR 101573302 B1 KR101573302 B1 KR 101573302B1
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insulating layer
semiconductor substrate
semiconductor device
layer
via hole
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KR1020090001448A
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Korean (ko)
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KR20090076832A (ko
Inventor
요시미치 하라다
마사미 스즈키
요시히로 나베
유지 다카오카
다쓰오 스에마스
히데유키 와다
마사노부 사루타
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소니 주식회사
가부시키가이샤후지쿠라
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