KR101531581B1 - 반송 유닛 및 반송 장치 - Google Patents

반송 유닛 및 반송 장치 Download PDF

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Publication number
KR101531581B1
KR101531581B1 KR1020130031906A KR20130031906A KR101531581B1 KR 101531581 B1 KR101531581 B1 KR 101531581B1 KR 1020130031906 A KR1020130031906 A KR 1020130031906A KR 20130031906 A KR20130031906 A KR 20130031906A KR 101531581 B1 KR101531581 B1 KR 101531581B1
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South Korea
Prior art keywords
positioning
tray
transport
unit
contact
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Korean (ko)
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KR20130111354A (ko
Inventor
요이치 히라사와
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히라따기꼬오 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3208—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G41/00—Supporting frames or bases for conveyors as a whole, e.g. transportable conveyor frames
    • B65G41/006—Supporting frames or bases for conveyors as a whole, e.g. transportable conveyor frames with the conveyor not adjustably mounted on the supporting frame or base
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Automatic Assembly (AREA)
  • Special Conveying (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Tyre Moulding (AREA)
KR1020130031906A 2012-03-29 2013-03-26 반송 유닛 및 반송 장치 Active KR101531581B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012077770A JP5912764B2 (ja) 2012-03-29 2012-03-29 搬送ユニット及び搬送装置
JPJP-P-2012-077770 2012-03-29

Related Child Applications (2)

Application Number Title Priority Date Filing Date
KR1020140187539A Division KR101519815B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치
KR1020140187534A Division KR101537722B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치

Publications (2)

Publication Number Publication Date
KR20130111354A KR20130111354A (ko) 2013-10-10
KR101531581B1 true KR101531581B1 (ko) 2015-06-25

Family

ID=49235258

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020130031906A Active KR101531581B1 (ko) 2012-03-29 2013-03-26 반송 유닛 및 반송 장치
KR1020140187539A Active KR101519815B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치
KR1020140187534A Active KR101537722B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020140187539A Active KR101519815B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치
KR1020140187534A Active KR101537722B1 (ko) 2012-03-29 2014-12-23 반송 유닛 및 반송 장치

Country Status (5)

Country Link
US (2) US9051130B2 (https=)
JP (1) JP5912764B2 (https=)
KR (3) KR101531581B1 (https=)
CN (1) CN103359463B (https=)
MY (1) MY166718A (https=)

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* Cited by examiner, † Cited by third party
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JP5912764B2 (ja) * 2012-03-29 2016-04-27 平田機工株式会社 搬送ユニット及び搬送装置
CN104773482B (zh) * 2015-03-04 2018-05-01 昆山平成电子科技有限公司 一种自动定位流水线机构
CN105416945B (zh) * 2015-12-02 2017-09-08 国网浙江省电力公司湖州供电公司 货物取放装置及采用该装置的货物搬运设备
KR102483359B1 (ko) * 2015-12-09 2023-01-02 (주)테크윙 반도체소자 테스트용 핸들러 및 그의 정보처리 방법
CN107096668B (zh) * 2017-05-16 2022-08-05 珠海鼎龙新材料有限公司 高速自动喷涂一体化设备
CN107555162B (zh) * 2017-09-30 2024-03-19 江门格兰达物联装备有限公司 一种上料机
US10368467B2 (en) 2017-10-10 2019-07-30 Facebook, Inc. System and method for data center heat containment
CN108705996A (zh) * 2018-05-23 2018-10-26 力帆实业(集团)股份有限公司 一种充电托盘防错识别装置
JP6544605B1 (ja) * 2018-07-30 2019-07-17 ニチエツ株式会社 金型搬送用ローラユニット
CN110844457A (zh) * 2019-11-28 2020-02-28 深圳市圆梦精密技术研究院 物品自动收发设备
CN111063645A (zh) * 2019-12-31 2020-04-24 昆山晟丰精密机械有限公司 半导体基板自动收放料系统及方法
US11178879B2 (en) 2020-03-12 2021-11-23 James R. Kesler Automated pizza-making system
CN115552777B (zh) * 2020-05-15 2025-04-25 雅马哈发动机株式会社 输送台移载装置、输送系统及输送台移载方法
CN114496874B (zh) * 2022-01-26 2023-04-07 上海世禹精密设备股份有限公司 一种芯片自动更换载具设备
JP7543598B2 (ja) * 2022-02-25 2024-09-02 ヤマハ発動機株式会社 搬送路切換装置、搬送システムおよび搬送路切換方法
WO2023162165A1 (ja) * 2022-02-25 2023-08-31 ヤマハ発動機株式会社 搬送路切換装置、搬送システムおよび搬送路切換方法
CN118679109A (zh) * 2022-03-09 2024-09-20 平田机工株式会社 托盘输送装置、移载系统、控制装置、控制方法、存储介质以及程序
CN116714995B (zh) * 2023-06-25 2024-06-11 上海尼法智能设备股份有限公司 楔块导柱式顶升移载机
CN120085126B (zh) * 2025-05-07 2025-08-01 吕梁学院 一种电气设备组件性能检查装置

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KR100292934B1 (ko) * 1997-03-10 2001-06-15 이시다 아키라 기판처리장치 및 기판처리 방법

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JPH0729484U (ja) * 1993-11-09 1995-06-02 株式会社アドバンテスト Ｉｃテストハンドラのテストトレイ位置決め機構並びに該装置に用いるテストトレイ
KR100292934B1 (ko) * 1997-03-10 2001-06-15 이시다 아키라 기판처리장치 및 기판처리 방법

Also Published As

Publication number Publication date
KR20150013409A (ko) 2015-02-05
KR101537722B1 (ko) 2015-07-20
US9051130B2 (en) 2015-06-09
US9422118B2 (en) 2016-08-23
KR20130111354A (ko) 2013-10-10
JP5912764B2 (ja) 2016-04-27
CN103359463A (zh) 2013-10-23
CN103359463B (zh) 2016-02-10
KR20150008364A (ko) 2015-01-22
MY166718A (en) 2018-07-18
US20150117999A1 (en) 2015-04-30
KR101519815B1 (ko) 2015-05-13
JP2013203546A (ja) 2013-10-07
US20130259628A1 (en) 2013-10-03

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