KR101476913B1 - 핸들러 및 검사 장치 - Google Patents

핸들러 및 검사 장치 Download PDF

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Publication number
KR101476913B1
KR101476913B1 KR1020130074417A KR20130074417A KR101476913B1 KR 101476913 B1 KR101476913 B1 KR 101476913B1 KR 1020130074417 A KR1020130074417 A KR 1020130074417A KR 20130074417 A KR20130074417 A KR 20130074417A KR 101476913 B1 KR101476913 B1 KR 101476913B1
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KR
South Korea
Prior art keywords
moving
moving mechanism
component holding
respect
supported
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KR1020130074417A
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English (en)
Korean (ko)
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KR20140004012A (ko
Inventor
노부오 하세가와
마사미 마에다
Original Assignee
세이코 엡슨 가부시키가이샤
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Publication of KR20140004012A publication Critical patent/KR20140004012A/ko
Application granted granted Critical
Publication of KR101476913B1 publication Critical patent/KR101476913B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020130074417A 2012-06-28 2013-06-27 핸들러 및 검사 장치 KR101476913B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-146018 2012-06-28
JP2012146018A JP2014010018A (ja) 2012-06-28 2012-06-28 ハンドラーおよび検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020140110564A Division KR20140118947A (ko) 2012-06-28 2014-08-25 핸들러 및 검사 장치

Publications (2)

Publication Number Publication Date
KR20140004012A KR20140004012A (ko) 2014-01-10
KR101476913B1 true KR101476913B1 (ko) 2014-12-29

Family

ID=50106854

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020130074417A KR101476913B1 (ko) 2012-06-28 2013-06-27 핸들러 및 검사 장치
KR1020140110564A KR20140118947A (ko) 2012-06-28 2014-08-25 핸들러 및 검사 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020140110564A KR20140118947A (ko) 2012-06-28 2014-08-25 핸들러 및 검사 장치

Country Status (4)

Country Link
JP (1) JP2014010018A (zh)
KR (2) KR101476913B1 (zh)
CN (3) CN203519648U (zh)
TW (4) TW201810501A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11056901B2 (en) 2017-03-10 2021-07-06 Lg Chem, Ltd. Method for charging secondary battery using multiple charging sections

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103964133B (zh) * 2014-04-03 2016-01-20 北京首都国际机场股份有限公司 差速驱动单元、应用该差速驱动单元的输送机及输送方法
JP6331809B2 (ja) * 2014-07-17 2018-05-30 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6903267B2 (ja) * 2016-06-01 2021-07-14 株式会社Ｎｓテクノロジーズ 電子部品搬送装置および電子部品検査装置
JP6601385B2 (ja) * 2016-12-27 2019-11-06 株式会社ダイフク 学習用支持装置
TWI635292B (zh) * 2018-01-05 2018-09-11 電子元件的輸送裝置及其輸送方法
JP2020051944A (ja) * 2018-09-27 2020-04-02 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
CN116705671B (zh) * 2023-08-07 2023-10-13 江苏海纳电子科技有限公司 一种芯片ft测试装置及测试方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060118824A (ko) * 2005-05-17 2006-11-24 미래산업 주식회사 반도체 소자 테스트용 핸들러의 테스트 트레이 이송장치
KR20080021639A (ko) * 2005-08-31 2008-03-07 히라따기꼬오 가부시키가이샤 워크 핸들링 장치
KR20090034463A (ko) * 2007-10-04 2009-04-08 (주) 핸들러월드 반도체 디스크 테스트 장비의 커스터머 트레이 이송장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648150A (en) * 1987-06-30 1989-01-12 Shimadzu Corp Conveying device
EP1209106A1 (en) * 2000-11-23 2002-05-29 Mars B.V. Conveyor and method for conveying products
JP4426276B2 (ja) * 2003-10-06 2010-03-03 住友重機械工業株式会社 搬送装置、塗布システム、及び検査システム
JP4879181B2 (ja) * 2005-08-31 2012-02-22 平田機工株式会社 ワークハンドリング装置
JP4962147B2 (ja) * 2007-06-07 2012-06-27 パナソニック株式会社 基板搬送装置および基板搬送方法
KR100916538B1 (ko) * 2007-12-12 2009-09-11 코리아테크노(주) 멀티 소터의 웨이퍼 핸들링장치
TW200946933A (en) * 2008-05-08 2009-11-16 King Yuan Electronics Co Ltd IC handler with sites of variable pitch
JP5287227B2 (ja) * 2008-12-25 2013-09-11 村田機械株式会社 搬送台車

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060118824A (ko) * 2005-05-17 2006-11-24 미래산업 주식회사 반도체 소자 테스트용 핸들러의 테스트 트레이 이송장치
KR20080021639A (ko) * 2005-08-31 2008-03-07 히라따기꼬오 가부시키가이샤 워크 핸들링 장치
KR20090034463A (ko) * 2007-10-04 2009-04-08 (주) 핸들러월드 반도체 디스크 테스트 장비의 커스터머 트레이 이송장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11056901B2 (en) 2017-03-10 2021-07-06 Lg Chem, Ltd. Method for charging secondary battery using multiple charging sections

Also Published As

Publication number Publication date
TW201810501A (zh) 2018-03-16
KR20140118947A (ko) 2014-10-08
CN203519648U (zh) 2014-04-02
CN203794200U (zh) 2014-08-27
JP2014010018A (ja) 2014-01-20
TWI603419B (zh) 2017-10-21
TW201401416A (zh) 2014-01-01
CN203825037U (zh) 2014-09-10
TW201543607A (zh) 2015-11-16
TWI595588B (zh) 2017-08-11
KR20140004012A (ko) 2014-01-10
TW201601241A (zh) 2016-01-01
TWI509727B (zh) 2015-11-21

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