KR101475396B1 - 연속 도금 장치 - Google Patents

연속 도금 장치 Download PDF

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Publication number
KR101475396B1
KR101475396B1 KR1020120105600A KR20120105600A KR101475396B1 KR 101475396 B1 KR101475396 B1 KR 101475396B1 KR 1020120105600 A KR1020120105600 A KR 1020120105600A KR 20120105600 A KR20120105600 A KR 20120105600A KR 101475396 B1 KR101475396 B1 KR 101475396B1
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KR
South Korea
Prior art keywords
plating
anode electrodes
workpieces
divided
divided anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020120105600A
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English (en)
Korean (ko)
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KR20130035201A (ko
Inventor
토모히로 노다
Original Assignee
아루멕쿠스 피이 가부시키가이샤
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Publication of KR20130035201A publication Critical patent/KR20130035201A/ko
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
KR1020120105600A 2011-09-29 2012-09-24 연속 도금 장치 Expired - Fee Related KR101475396B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-214301 2011-09-29
JP2011214301A JP5795514B2 (ja) 2011-09-29 2011-09-29 連続メッキ装置

Publications (2)

Publication Number Publication Date
KR20130035201A KR20130035201A (ko) 2013-04-08
KR101475396B1 true KR101475396B1 (ko) 2014-12-22

Family

ID=47878724

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120105600A Expired - Fee Related KR101475396B1 (ko) 2011-09-29 2012-09-24 연속 도금 장치

Country Status (6)

Country Link
US (1) US20130081939A1 (enExample)
JP (1) JP5795514B2 (enExample)
KR (1) KR101475396B1 (enExample)
CN (1) CN103031588B (enExample)
DE (1) DE102012018393B4 (enExample)
TW (1) TWI564431B (enExample)

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JP6115309B2 (ja) * 2013-05-22 2017-04-19 住友金属鉱山株式会社 化学処理装置
EP2907900A1 (en) * 2014-02-18 2015-08-19 Italfimet S.R.L. Electroplating process and apparatus, particularly for plating or forming parts made of electrically conducting materials by electrodeposition
TWI530593B (zh) * 2014-08-11 2016-04-21 亞智科技股份有限公司 多陽極控制裝置及具有該裝置的電鍍設備
CN104313657A (zh) * 2014-11-10 2015-01-28 临安振有电子有限公司 Hdi印制线路板通孔的电沉积装置
CN106149039B (zh) * 2015-04-08 2017-11-24 亚硕企业股份有限公司 电镀设备
CN104862768B (zh) * 2015-05-27 2017-09-22 广州杰赛科技股份有限公司 一种电路板的电镀方法及装置
TWI698554B (zh) * 2015-10-20 2020-07-11 香港商亞洲電鍍器材有限公司 電鍍機器及電鍍方法
CN105350062B (zh) * 2015-12-07 2018-01-19 依力柏电能有限公司 一种电镀装置
DE102016205417A1 (de) 2016-04-01 2017-10-05 Schaeffler Technologies AG & Co. KG Oberflächenbehandlungsanlage zur elektrochemischen Oberflächenbehandlung von Wälzkörpern
KR101880601B1 (ko) * 2016-12-16 2018-08-17 (주)포인텍 양극 이동형 전해도금 장치
JP6875758B2 (ja) * 2017-10-20 2021-05-26 株式会社アルメックステクノロジーズ 表面処理装置
CN111247272A (zh) * 2017-10-20 2020-06-05 Almex Pe 株式会社 表面处理装置
CN111247273B (zh) * 2017-10-20 2022-12-20 Almex 科技株式会社 表面处理装置和工件保持夹具
JP7293765B2 (ja) * 2018-07-24 2023-06-20 富士フイルムビジネスイノベーション株式会社 めっき装置
CN110699738A (zh) * 2019-11-07 2020-01-17 俊杰机械(深圳)有限公司 一种五金工件独立电镀装置及工艺
KR102343926B1 (ko) * 2020-04-03 2021-12-24 (주)포인텍 분사압 조절형 노즐이 장착된 도금장치
KR102164884B1 (ko) * 2020-06-30 2020-10-14 (주)네오피엠씨 개별 지그의 전류를 제어하는 도금장치
KR102206395B1 (ko) * 2020-06-30 2021-01-25 (주)네오피엠씨 개별파티션을 구비한 도금장치
CN112760701B (zh) * 2020-12-16 2022-04-12 景旺电子科技(珠海)有限公司 垂直连续电镀设备
CN114808057B (zh) * 2021-01-29 2024-06-21 泰科电子(上海)有限公司 电镀装置和电镀系统
KR102306782B1 (ko) * 2021-03-04 2021-09-30 (주)네오피엠씨 기판 개별 전류량 제어 시스템
US20250003105A1 (en) * 2023-06-27 2025-01-02 Semiconductor Components Industries, Llc Electroplating systems and methods

Citations (2)

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JP4268874B2 (ja) * 2001-10-27 2009-05-27 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 被処理物を電解処理するための方法およびコンベヤ式システム
KR20100115955A (ko) * 2009-04-21 2010-10-29 주식회사 티케이씨 수직연속도금 장치의 개별 급전장치 시스템

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FR2396102A1 (fr) * 1977-06-29 1979-01-26 Trefimetaux Procede de depot electrolytique en continu, a grande vitesse, sur un substrat metallique en mouvement
US4378281A (en) 1981-06-25 1983-03-29 Napco, Inc. High speed plating of flat planar workpieces
DE3205969A1 (de) 1982-02-19 1983-09-01 Frisch Kabel- Und Verseilmaschinenbau Gmbh, 4030 Ratingen Stromversorgung fuer elektrolyseanlagen
US4492621A (en) * 1982-09-29 1985-01-08 Stubb Paul R Method and apparatus for electrodeposition of materials
JPS60128295A (ja) 1983-12-16 1985-07-09 Nippon Steel Corp メツキ電流自動補償制御装置
JPS61133400A (ja) 1984-12-03 1986-06-20 Kosaku:Kk 電気めつき装置
JPH01177400A (ja) * 1988-01-06 1989-07-13 Kosaku:Kk めっき電流を自動調節するめっき装置
DD273653A1 (de) 1988-07-04 1989-11-22 Mikroelektronik Bruno Baum Zeh Vorrichtung zum gleichmaessigen galvanischen beschichten mehrerer parallel in einem bad zu veredelnder bandfoermiger substrate
DE3939681A1 (de) * 1989-12-01 1991-06-06 Schering Ag Verfahren zur steuerung des ablaufes von galvanischen anlagen, sowie zur durchfuehrung des verfahrens dienender anordnung
JP3178164B2 (ja) * 1993-05-12 2001-06-18 ソニー株式会社 電解めっき装置
DE19717512C3 (de) * 1997-04-25 2003-06-18 Atotech Deutschland Gmbh Vorrichtung zum Galvanisieren von Leiterplatten unter konstanten Bedingungen in Durchlaufanlagen
JP3299725B2 (ja) 1998-12-11 2002-07-08 株式会社ケミトロン メッキ方法とその装置
JP3715846B2 (ja) * 1999-09-06 2005-11-16 大日本スクリーン製造株式会社 基板メッキ装置
JP3285572B2 (ja) * 2000-06-09 2002-05-27 栄電子工業株式会社 分割電極部分を有する給電ローラを用いた連続めっき方法並びに装置
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KR100539239B1 (ko) * 2003-06-25 2005-12-27 삼성전자주식회사 도금 중단에 의해 불량이 발생되는 것을 방지하는 도금방법 및 이에 이용되는 도금 장비
CN100523309C (zh) * 2003-12-25 2009-08-05 亚洲电镀器材有限公司 电镀设备液体输送系统，有该系统的电镀设备及其操作方法
DE102005005095A1 (de) 2005-02-04 2006-08-10 Höllmüller Maschinenbau GmbH Verfahren und Vorrichtung zur elektrochemischen Behandlung von Bauteilen in Durchlaufanlagen
US8177945B2 (en) * 2007-01-26 2012-05-15 International Business Machines Corporation Multi-anode system for uniform plating of alloys
JP5457010B2 (ja) * 2007-11-01 2014-04-02 アルメックスＰｅ株式会社 連続めっき処理装置
JP2010020296A (ja) * 2008-07-14 2010-01-28 Toshiba Corp 画像形成装置及びクリーナ装置
JP5650899B2 (ja) * 2009-09-08 2015-01-07 上村工業株式会社 電気めっき装置
TWM400483U (en) * 2010-04-06 2011-03-21 Foxconn Advanced Tech Inc Plating apparatus and method

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JP4268874B2 (ja) * 2001-10-27 2009-05-27 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 被処理物を電解処理するための方法およびコンベヤ式システム
KR20100115955A (ko) * 2009-04-21 2010-10-29 주식회사 티케이씨 수직연속도금 장치의 개별 급전장치 시스템

Also Published As

Publication number Publication date
CN103031588B (zh) 2015-11-11
JP2013072131A (ja) 2013-04-22
DE102012018393A1 (de) 2013-04-04
JP5795514B2 (ja) 2015-10-14
US20130081939A1 (en) 2013-04-04
CN103031588A (zh) 2013-04-10
KR20130035201A (ko) 2013-04-08
TW201333262A (zh) 2013-08-16
DE102012018393B4 (de) 2018-05-24
TWI564431B (zh) 2017-01-01

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