KR101442431B1 - 산업용 로보트 - Google Patents

산업용 로보트 Download PDF

Info

Publication number
KR101442431B1
KR101442431B1 KR1020137000786A KR20137000786A KR101442431B1 KR 101442431 B1 KR101442431 B1 KR 101442431B1 KR 1020137000786 A KR1020137000786 A KR 1020137000786A KR 20137000786 A KR20137000786 A KR 20137000786A KR 101442431 B1 KR101442431 B1 KR 101442431B1
Authority
KR
South Korea
Prior art keywords
hand
absorbing member
tip
end side
impact absorbing
Prior art date
Application number
KR1020137000786A
Other languages
English (en)
Korean (ko)
Other versions
KR20130041097A (ko
Inventor
다카유키 야자와
준노스케 고야마
Original Assignee
니혼 덴산 산쿄 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼 덴산 산쿄 가부시키가이샤 filed Critical 니혼 덴산 산쿄 가부시키가이샤
Publication of KR20130041097A publication Critical patent/KR20130041097A/ko
Application granted granted Critical
Publication of KR101442431B1 publication Critical patent/KR101442431B1/ko

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • B25J19/063—Safety devices working only upon contact with an outside object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
KR1020137000786A 2010-07-13 2011-07-01 산업용 로보트 KR101442431B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010159001A JP5746483B2 (ja) 2010-07-13 2010-07-13 産業用ロボット
JPJP-P-2010-159001 2010-07-13
PCT/JP2011/065180 WO2012008320A1 (ja) 2010-07-13 2011-07-01 産業用ロボット

Publications (2)

Publication Number Publication Date
KR20130041097A KR20130041097A (ko) 2013-04-24
KR101442431B1 true KR101442431B1 (ko) 2014-09-18

Family

ID=45469324

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137000786A KR101442431B1 (ko) 2010-07-13 2011-07-01 산업용 로보트

Country Status (5)

Country Link
JP (1) JP5746483B2 (zh)
KR (1) KR101442431B1 (zh)
CN (1) CN102985235B (zh)
TW (1) TWI531450B (zh)
WO (1) WO2012008320A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190096493A (ko) * 2018-02-09 2019-08-20 한화정밀기계 주식회사 로봇의 충격 완화 장치
KR20210002029A (ko) * 2019-06-28 2021-01-06 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104444351B (zh) * 2014-11-07 2016-11-02 京东方科技集团股份有限公司 机械手臂及基板拾取装置
TWI564128B (zh) * 2015-11-17 2017-01-01 和碩聯合科技股份有限公司 防撞偵測裝置、相應之控制方法及適用其之機械手臂
CN111071899B (zh) * 2019-12-27 2021-11-05 龙岩烟草工业有限责任公司 提升装置和提升机
JP7465709B2 (ja) 2020-04-10 2024-04-11 ニデックインスツルメンツ株式会社 産業用ロボット
KR102521151B1 (ko) * 2021-05-26 2023-04-13 주식회사 뉴로메카 충돌감지 기능을 갖는 협동로봇 및 협동로봇의 충돌감지 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010029991A (ja) * 2008-07-29 2010-02-12 Kawasaki Heavy Ind Ltd 物品移載用ロボット装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056074Y2 (zh) * 1987-03-27 1993-02-17
JPH08288356A (ja) * 1995-04-18 1996-11-01 Metsukusu:Kk 薄型基板搬送装置におけるハンド保護装置
KR100563982B1 (ko) * 1998-10-19 2006-03-29 가부시키가이샤 야스카와덴키 클린 로봇의 안전 보호 장치
JP2001054890A (ja) * 1999-08-16 2001-02-27 Nikon Corp 基板搬送装置及び基板処理装置
JP2003060004A (ja) * 2001-08-20 2003-02-28 Yaskawa Electric Corp ロボットハンド
JP2005022049A (ja) * 2003-07-04 2005-01-27 Toyo Eng Corp 多関節ロボット装置
JP4980712B2 (ja) * 2004-04-20 2012-07-18 Ｊｘ日鉱日石エネルギー株式会社 ロボットハンド部材、その製造方法及びロボットハンド
EP1810795A1 (en) * 2006-01-19 2007-07-25 Abb Ab Safety device for an industrial robot with elastic sealed bag comprising a fluid or gas
JP5146641B2 (ja) * 2007-06-06 2013-02-20 株式会社安川電機 基板搬送ロボットおよび基板搬送ロボットの制御方法
JP5059573B2 (ja) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 基板保持具、基板搬送装置および基板処理システム
JP5166151B2 (ja) * 2008-07-17 2013-03-21 川崎重工業株式会社 ロボットフィンガ及びこれを備えるロボットハンド
JP5287186B2 (ja) * 2008-12-02 2013-09-11 セイコーエプソン株式会社 ロボットアーム及びロボットアーム装置
CN101422904B (zh) * 2008-12-09 2011-04-13 友达光电股份有限公司 承载构件

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010029991A (ja) * 2008-07-29 2010-02-12 Kawasaki Heavy Ind Ltd 物品移載用ロボット装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190096493A (ko) * 2018-02-09 2019-08-20 한화정밀기계 주식회사 로봇의 충격 완화 장치
KR102370911B1 (ko) 2018-02-09 2022-03-04 주식회사 한화 로봇의 충격 완화 장치
KR20210002029A (ko) * 2019-06-28 2021-01-06 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇
KR102390144B1 (ko) * 2019-06-28 2022-04-25 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇

Also Published As

Publication number Publication date
CN102985235B (zh) 2015-04-22
JP2012020360A (ja) 2012-02-02
TW201208834A (en) 2012-03-01
JP5746483B2 (ja) 2015-07-08
CN102985235A (zh) 2013-03-20
KR20130041097A (ko) 2013-04-24
TWI531450B (zh) 2016-05-01
WO2012008320A1 (ja) 2012-01-19

Similar Documents

Publication Publication Date Title
KR101442431B1 (ko) 산업용 로보트
JP2015136785A (ja) パラレルリンクロボット、パラレルリンクロボット用ハンドおよびパラレルリンクロボットシステム
JP2011119348A (ja) エッジグリップ装置、及びそれを備えるロボット。
KR101606223B1 (ko) 산업용 로보트
JP2010232326A (ja) 塗布装置
JP6667316B2 (ja) エアセパレータ
JP5576709B2 (ja) 支持装置および支持方法ならびに搬送装置および搬送方法
JP5553254B2 (ja) 非接触保持装置及び移載装置
JP5954032B2 (ja) リード配線溶接装置
KR101748426B1 (ko) 디스플레이 장치용 윈도우 보호 필름 부착 장치
JP2013107174A (ja) 吸着装置
JP5871579B2 (ja) ワーク搬送機の衝突検出装置
CN110926404A (zh) 显示屏偏光片平整度检测设备
CN105834566B (zh) 一种切割机割枪防撞装置
JP2016149857A (ja) ケーブル保護部材の支持装置
JPWO2011096033A1 (ja) 搬送装置
KR20220044674A (ko) 산업용 로봇
JP7190867B2 (ja) 産業用ロボットのハンドおよび産業用ロボット
JP2015044542A (ja) 搬送台車の衝撃吸収装置
JP2013017985A (ja) 液体塗布装置
JP6924372B2 (ja) ガラス管の箱詰方法
JP7007812B2 (ja) 位置決めシステム及び位置決め方法
JP2015120109A (ja) 接着剤の吐出切れ検出装置
CN104139392A (zh) 驱动机构
CN114132742B (zh) 一种软袋上料装置及灯检机

Legal Events

Date Code Title Description
A201 Request for examination
AMND Amendment
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20170823

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20180904

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20190903

Year of fee payment: 6