TW201208834A - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
TW201208834A
TW201208834A TW100123730A TW100123730A TW201208834A TW 201208834 A TW201208834 A TW 201208834A TW 100123730 A TW100123730 A TW 100123730A TW 100123730 A TW100123730 A TW 100123730A TW 201208834 A TW201208834 A TW 201208834A
Authority
TW
Taiwan
Prior art keywords
robot
end side
shock absorbing
manipulator
wiring
Prior art date
Application number
TW100123730A
Other languages
Chinese (zh)
Other versions
TWI531450B (en
Inventor
Takayuki Yazawa
Junnosuke Koyama
Original Assignee
Nidec Sankyo Corp
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Publication of TW201208834A publication Critical patent/TW201208834A/en
Application granted granted Critical
Publication of TWI531450B publication Critical patent/TWI531450B/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • B25J19/063—Safety devices working only upon contact with an outside object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Disclosed is an industrial robot that can reduce injury even when there has been major impact when the tip of the hand and a peripheral device have collided. Specifically disclosed is an industrial robot (1) for conveying conveyance items (2) which comprises a hand (3) on which the conveyance items (2) are loaded and a detection mechanism for detecting when the tip of the hand has impacted with a device in the periphery of the industrial robot (1), and which is structured to move substantially linearly with the hand (3) facing a predetermined direction. The hand (3) comprises an impact absorbing member (20) that forms an end section of the hand (3) and can move towards a proximal end side of the hand (3) when the end of the hand (3) collides with a peripheral device.

Description

201208834 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種對特定之搬送對象物進行搬送之產業 用機器人。 ' 【先前技術】 先前，已知有一種搬送液晶顯示器用之玻璃基板等大型 基板之產業用機器人（例如參照專利文獻丨）。專利文獻i所 記載之產業用機器人具備機械臂、及安裝於該機械臂上之 機械手（hand) 〇機械手具備安裝於機械臂之前端之基台、 及與該基台並列安裝之一對支撐構件。於支撐構件之前 端，安裝有封入流體之自由膨縮之中空體。又，基台及支 撐構件係形成為令空狀，於基台之内部配置有檢測封入中 空體之流體之壓力的壓力感測器，且於支撐構件及基台之 内部配置有將中空體與壓力感測器連結之配管。 專利文獻1所記載之產業用機器人中，若機械手之前端 (即中空體之前端）由於某些原因而與機器人之周邊機器發 生碰撞’則藉由壓力感測器檢測中空體内部之壓力變化。 若檢測出中空體内部之壓力變化，則進行用以使機械手立 即停止之特定之控制。又，機械手之前端與周邊機器發生 碰撞時之衝擊可藉由中空體之變形而緩和。因此，該產業 用機器人可減輕機械手之損傷。 [先前技術文獻] [專利文獻] [專利文獻1]曰本專利特開2003·60004號公報 157109.doc 201208834 【發明内容】 [發明所欲解決之問題] 由產業用機器人所搬送之液晶顯示器用之玻璃基板等搬 送對象物每年都有大型化之趨勢。另一方面，搬送對象物 之搬送速度與先前相同、或較先前更快。因此，由於某些 原因，機械手之前端與周邊機器發生碰撞時之衝擊每^都 有增大之趨勢。 如上所述，專利文獻丨所記載之產業用機器人中若檢 測出中空體内部之壓力變化’則進行用以使機械手立即停 止之控制，又’藉由使中空體變形，而緩和機械手之前端 與周邊機器發生碰撞時之衝擊。然而，專利文獻〗所記载 之產業用機器人中，由於中空體之變形量有限，故若機械 手之前端與周邊機器發生碰撞時之衝擊變大，則會產生以 下狀況：即便於剛檢測出中空體内部之壓力變化後進行用 以使機械手停止之控制，僅藉由使中空體變形亦無法充分 緩和機械手之前端與周邊機器發生碰撞時之衝擊。其結果 為，該產業用機器人中，若機械手之前端與周邊機器發生 碰撞時之衝擊變大，則存在因碰撞時之衝擊導致機械手之 損傷程度變大之虞。 因此，本發明之課題在於提供一種即便於機械手之前端 與周邊機器發生碰撞時之衝擊較大之情形時，亦可減輕機 械手之損傷的產業用機器人。 [解決問題之技術手段] 為解決上述之課題，本發明之產業用機器人係將搬送對 157109.doc -4- 201208834 象物進行搬送者’其特徵在於：具備搭载搬送對象物之機 械手、及用以偵測機械手之前端與產業用機器人之周邊機 器碰撞之偵測機構，並且使機械手以朝向特定方向之狀態 呈大致直線狀地移動而構成，機械手具備減震構件，其構 成機械手之則％部分，且於機械手之前端與周邊機器發生 碰撞時可向機械手之基端側移動》 本發明甲，產業用機器人具備例如連結機械手之基端側 之機械臂、及用以驅動機械臂之驅動源，若根據偵測機構 之偵測結果偵測出機械手之前端與周邊機器發生碰撞時， 對驅動源施行制動。 本發明之產業用機器人具備用以偵測機械手之前端與產 業用機器人之周邊機器碰撞之偵測機構。因此，根據偵測 機構之偵測結果，偵測出以朝向特定方向之狀態呈大致直 線狀移動之機械手之前端與周邊機器發生碰撞時，可對用 以驅動有連結機械手之基端側之機械臂的驅動源施行制 動又本發明中，機械手具備構成機械手之前端部分、 並且於機械手之前端與周邊機器發生碰撞時可向機械手之 基端側移動的減震構件。 因此，以朝向特定方向之狀態呈大致直線狀移動之機械 手之前端與周邊機器發生碰撞時，機械手等所具備之能量 藉由減震構件向機械手之基端側移動之期間作用於機械臂 等之製動而被消耗，並且藉由減震構件向機械手之基端側 移動時之摩擦阻力等而被消耗。其結果為，本發明中，即 便於機械手之前端與周邊機器發生碰撞時之衝擊較大之情 157109.doc 201208834 形時，亦可緩和安裝有減震構件之機械手之主體部分與周 邊機器發生碰撞時之衝擊，從而可減輕機械手之主體部分 之損傷。即，本發明中，即便於機械手之前端與周邊機器 發生碰撞時之衝擊較大之情形時，亦可減輕機械手之損 傷。又，可減輕機械手之前端所碰撞之周邊機器之損傷。 於本發明中，較佳為機械手具備複數個搭載構件該等 搭載構件以自機械手之基端側向機械手之前端側延伸之方 式形成，且搭載搬送對象物之至少一部分，搭載構件之至 少前端側形成為中空狀，減震構件係安裝於搭載構件之前 端側，減震構件之至少基端側於機械手之前端與周邊機器 發生碰撞時進入搭载構件之中。若以此方式構成則與以 減震構件朝向機械手之基端側而於搭載構件之外部移動之 式構成機械手的情形相比，易於防止減震構件與其他構 件之干涉。因此，可使減震構件確實地向機械手之基端侧 移動又’與以減震構件朝向機械手之基端側於搭載構件 卜部移動之方式構成機械手的情形相比可使配置有減 震構件之機械手之前端側小型化。 ;本發月中，較佳為偵測機構藉由偵測減震構件相對於 。冓件之相對移動，而傾測機械手之前端與周邊機器發 生·p» ,· 匕方式構成，則可根據與周邊機器碰撞之減 一 動作而偵測機械手之前端與周邊機器碰撞，故可 提南偵測機構之偵測精度。 1發月中，較佳為偵測機構具備配線，其一部分固定 於搭載構件、並且另一部分固定於減震構件，藉由機械手 157109.doc 201208834 之前端與周邊機器發生碰撞時之減震構件相對於搭載構件 之相對移動，而可切斷配線，當配線被切斷時，則偵測機 構债測減震構件相對於搭載構件之相對移動。若以此方式 構成’則可藉由比較簡單之構成而偵測機械手之前端與周 邊機器碰撞。 於本發明中’較佳為配線具備固定於搭載構件之固定側 配線部、及固定於減震構件之移動側配線部，且固定側配 線部與移動側配線部經焊接而連接。若以此方式構成，則 當機械手之前端與周邊機器發生碰撞時，配線易於固定側 配線部與移動側配線部之邊界部即焊接部切斷。因此當 機械手之前端與周邊機器發生碰撞時使朝向機械手之基端 側移動之減震構件再次向機械手之前端側移動，並將固定 側配線部與移動側配線部再次焊接，藉此可使機械手及偵 測機構比較容易地復原。 於本發明中，較佳為於減震構件上搭載搬送對象物之一 部分。若以此方式構成，則由於可使減震構件具備搬送對 象物之搭載功能，故與以於搭載構件上搭載全部搬送對象 物之方式構成機械手之情形相比，可使機械手小型化。 於本發明中，較佳為減震構件係由碳纖維形成之筒狀構 件。若以此方式構成，則可提高機械手之前端部分之剛 性，並且可減輕機械手之前端部分之重量。又，可比較容 易地形成減震構件。 [發明之效果] 如上所述，於本發明之產業用機器人中，即便於機械手 157109.doc 201208834 之前端與周邊機器發生碰撞時之衝擊較大之情形時，亦可 減輕機械手之損傷。 【實施方式】 以下’一面參照圖式一面對本發明之實施形態進行說 明。 (產業用機器人之概略構成） 圖1係表示本發明之實施形態之產業用機器人1及其周邊 機器的俯視圖。圖2係自圖1之E-E方向表示產業用機器 及其周邊機器之側視圖。 本形態之產業用機器人1(以下稱作「機器人丨」）係用以 對搬送對象物之液晶顯示器用之玻璃基板2(以下稱作「基 板2」）進行搬送之搬送用機器人。該機器人1係尤其適合 於搬送大型之基板2之大型機器人。如圖丨、圖2所示，機 器人1具備搭載有基板2之2個機械手3、前端側分別連結有 2個機械手3之2根機械臂4、支撐2根機械臂4之主體部5、 及於水平方向上可移動地支撐主體部5之基底構件6 ^主體 部5具備支撐2根機械臂4之基端側且可上下活動之支撐構 件8、於上下方向可移動地支撐支撐構件8之柱狀構件9、 構成主體部5之下端部分且相對於基底構件6而可水平移動 之基台10、及固定有柱狀構件9之下端且相對於基台1〇而 可旋轉之旋轉構件11。 機械手3之基端係可旋動地連結於機械臂4之前端。機械 臂4構成為具備2個關節部，且相對於主體部5而伸縮。具 體而s，以機械手3以朝向特定方向之狀態呈大致直線狀 157109.doc 201208834 移動之方式，機械臂4相對於主體部5而伸縮。又，機械臂 4之基端係固定於支撐構件8上。於本形態中，2個機械手3 與2根機械臂4係以於上下方向重合之方式配置。 如圖1、圖2所不，機器人丨係組入例如具備複數個基板 處理裝置13之基板處理系統14中使用。基板處理系統 中’機器人1係由安全罩15包圍。安全罩15具備例如金屬 製之框架、及固定於該框架之聚氯乙稀等樹脂製之罩板， 且罩板構成安全罩15之側面。再者，於安全罩15之特定部 位上’形成有可使機械手3通過之開口部。 於機器人1中，支撐構件8相對於柱狀構件9而與機械手3 及機械臂4一併上下活動。又’機械臂4相對於主體部5而 伸縮。具體而言，機械臂4係以機械手3以機械手3之前端 朝向特定方向之狀態直線狀移動之方式而伸縮。更具體而 言，例如，機械臂4係以機械手3之前端朝向基板處理裝置 U之狀態下，機械手3相對於基板處理裝置13呈直線狀地 移動並進出的方式而伸縮。進而，基台1()相對於基底構件 6而進行水平移動。又，旋轉構件u相對於基台丨而進行旋 轉。藉由該等動作之組合，機器基板處理裝置13中 搬出基板2,或者向基板處理裝置13中搬入基板 (機械手之構成） 圖3係圖！所表示之機械手3的圖，（Α)為俯視圖，（β)為 側視圖》圖4係用以說明圖3iF部之構成之放大圖，（Α)為 表示機械手3之前端未與安全罩15等發生碰撞時之狀態的 圖，（Β)為表示機械手3之前端與安全罩15等剛發生碰撞後 157109.doc -9- 201208834 之狀態的圖。圖5係自圖4(A)之G_G方向表示機械手3之前 端側之圖。 機械手3具備連結於機械臂4之前端側之連結構件丨8、作 為搭載基板2之搭載構件之複數個又架19、及構成機械手] 之前端部分的減震構件20。 叉架19係以自構成機械手3之基端部分之連結構件“朝 向機械手3之前端側延伸的方式而形成。該又架19形成為 細長且大致四角筒狀。即，叉架19形成為中空狀。形成為 中空狀之叉架19之厚度為固定。又，又架19為確保較高剛 性且謀求輕量化，由例如碳纖維與樹脂之複合材料而形 成。再者，叉架19亦可以前端側之厚度變薄之方式形成。 又，於本形態中，藉由使樹脂含浸於筒狀之碳纖維中而形 成包含碳纖維與樹脂之複合材料之又架19,但既可藉由其 他已知方法形成叉架19，亦可藉由新穎方法而形成又架 19 〇 叉架19係以越朝向前端侧則其左右方向之寬度逐漸變窄 之方式形成。又，如圖3(B)所示，叉架19之上表面19a為 水平面。另一方面，叉架19之下表面19b為越朝向又架19 之前端側則越向上方傾斜之傾斜面。即，叉架19係以越朝 向前端側則其上下方向之寬度逐漸變窄之方式形成。又架 19之上表面19a為搭載基板2之搭載面。如上所述，由於上 表面19a為水平面，故本形態中又架19可水平搭載基板2。 如圊4、圖5所示，於叉架19之前端側固定有用以固定減 震構件20之2個固定塊21。2個固定塊21係以於叉架19之長 157I09.doc •10· 201208834 度方向隔開特定間隔之狀態而固定於又架19之前端側。固 定塊21係由在上下方向一分為二之塊片22、23所構成。如 圖5所示，塊片22係藉由螺釘24而固定於又架19之上側 面，塊片23係藉由螺釘25而固定於塊片22之下表面。於塊 片22之下表面之中心、及塊片23之上表面之中心，以朝向 上下方向之外部下凹之方式形成有用以保持減震構件20之 保持凹部22a、23a »保持凹部22a、23a係於塊片23固定於 塊片22之狀態下，自叉架19之長度方向觀察時，以由保持 凹部22a、23 a形成之貫通孔之形狀成為大致圓形狀的方式 形成為大致半圓弧狀。 減震構件20係例如由碳纖維形成之筒狀構件。具體而 言’減震構件20係由碳纖維與樹脂之複合材料而形成。本 形態之減震構件20係形成為圓筒狀。該減震構件20安裝於 複數個又架19之各自之前端側。具體而言，於2個固定塊 21之保持凹部22a、23a上保持減震構件20之基端側。於本 形態中’以拆下塊片23之狀態，將減震構件20配置於保持 凹部22a之中’其後將塊片23固定於塊片22之下表面，藉 此於叉架19之前端側固定減震構件20。 如圖1所示，基板2係搭載於叉架19及減震構件20上》 即’減震構件20發揮支撐搭載於機械手3之基板2之功能。 再者’又架19之長度例如為3 m左右’減震構件20自叉架 19之則端之突出量例如為5〇〇〜6〇〇 mm左右。 於2個固定塊21中之配置於叉架19之基端側之固定塊21 上’如圖4所示，固定有用以固定配線27之一部分之2個固 157109.doc -11· 201208834 定構件28。2個固定構件28係以夾持被保持於保持凹部 22a、23a之減震構件20之基端的方式而配置。又，於減震 構件20之基端固定有用以固定配線27之一部分之固定構件 29。固定構件29係配置於2個固定構件28之間。 配線27例如為導線。該配線27係分割為經由固定構件28 而固定於又架19之作為固定侧配線部之第！配線部3 〇、及 經由固定構件29而固定於減震構件2〇之作為移動側配線部 之第2配線部31。第1配線部30與第2配線部31經焊接而相 互連接。即’如圖4(A)所示，於第1配線部3〇與第2配線部 3 1之間形成有焊接部32。配線27之端部例如連接於機器人 1之控制基板（省略圖示當機械臂4伸縮而機械手3移動 時，自該控制基板向配線27供給電流。 於本形態中，若由於某些原因，機械手3之前端（即，減 震構件20之前端）與安全罩15及基板處理裝置13等機器人1 之周邊機器發生碰撞，則保持於固定塊21之減震構件2〇會 抵抗固定塊21之保持力，如圖4(B)所示，向機械手3之基 端側移動。具體而言’若機械手3之前端與安全罩15等發 生碰撞’則減震構件20相對於叉架19而向機械手3之基端 側相對移動’減震構件2 〇之基端側部分或全部進入中空狀 之叉架19之中。 此時，如圖4(B)所示，配線27伴隨減震構件2〇相對於又 架19之相對移動而被切斷。具體而言，由於固定於固定構 件29之第2配線部31與減震構件2〇—併向機械手3之基端側 移動，故焊接部32上之配線27被切斷。如上所述，當機械 157109.doc •12- 201208834 臂4伸縮而機械手3移動時，控制基板向配線27供給電流。 因此’若減震構件20向機械手3之基端侧移動，配線27被 切斷’則配線27中不再流動電流。 於本形態中，藉由偵測機械手3移動時配線27上是否有 電流流動’而偵測減震構件2〇是否相對於叉架19向機械手 3之基端側相對移動，且藉由偵測減震構件2〇是否相對於 叉架19向機械手3之基端侧相對移動，而偵測機械手3之前 端是否與安全罩15等發生碰撞。即，本形態令，若配線27 被切斷’則偵測出減震構件20相對於叉架19向機械手3之 基端側相對移動’從而偵測出機械手3之前端與安全罩i 5 等發生碰撞。 本形態中，由配線27及連接有配線27之控制基板等構成 用以偵測機械手3之前端與安全罩15等周邊機器之碰撞之 债測機構。又，本形態中，若根據該偵測機構之偵測結 果’彳貞測出機械手3之前端與安全罩15等發生碰撞，則對 用以使機械臂4伸縮之驅動用馬達（省略圖示）施行制動。具 體而s ’對驅動用馬達進行無勵;^差動型製動（機械製 動）、伺服製動及動態製動。 再者’本形態中，由於減震構件20係保持於沿又架19之 長度方向隔開特定間隔所固定之2個固定塊21上，故機械 臂4及機械手3旋轉時及機械臂4伸縮時，即便於減震構件 20上作用有扭矩，減震構件2〇亦不會自叉架19之前端側脫 落。另一方面，若機械手3之前端與安全罩15等發生碰 撞’沿減震構件20之長度方向施加衝擊，則即便其衝擊相 157109.doc -13- 201208834 對較小’減震構件20亦會相對於叉架19向機械手3之基端 側相對移動。 (本形態之主要效果） 如以上所說明，本形態中，機械手3之前端與安全罩15 等發生碰撞時相對於又架19向機械手3之基端側相對移動 之減震構件20係安裝於機械手3之前端側。又，本形態 中’若偵測出機械手3之前端與安全罩15等發生碰撞，則 對用以使機械臂4伸縮之驅動用馬達施行制動。因此，機 械手3之前端與安全罩15等發生碰撞時，機械手3及機械臂 4所具有之能量藉由於減震構件20向機械手3之基端側移動 之期間作用於機械臂4等之製動被消耗，並且藉由減震構 件20抵抗固定塊21之保持力而向機械手3之基端侧移動時 之摩擦阻力及減震構件20之變形等被消耗。又，本形態 中’若減震構件20向機械手3之基端側移動，則由於配線 27被切斷’故藉由配線27之切斷時之阻力，機械手3之前 端與安全罩15等發生碰撞時機械手3及機械臂4所具有之能 量被消耗。 因此’本形態中，即便於機械手3之前端與安全罩15等 發生碰撞時之衝擊較大之情形時，亦可緩和安裝有減震構 件20之叉架19與安全罩15等發生碰撞時之衝擊，從而減輕 叉架19之損傷。又，本形態可減輕機械手3之前端所碰撞 之安全罩15等之損傷。又，由於可減輕安全罩15等之損 傷’故可確保基板處理系統14周圍之作業者之安全。 又，本形態中，由於可使減震構件20相對於叉架19向機 157109.doc -14- 201208834 械手3之基端侧相對移動，故即便不將機械手3自機器人1 上卸下’亦可於將減震構件20配置於叉架19中之狀態下搬 運機器人1。因此，可降低搬運時之成本。又，搬運後， 只要將減震構件20自又架19中拉出並固定便可復原機器人 1’故與將機械手3自機器人1上卸下而搬運機器人1之情形 相比’搬運後之機器人1之復原變得容易。 本形態中’若機械手3之前端與安全罩15等發生碰撞， 則減震構件2 0之基端侧部分或全部進入中空狀之又架19 中。因此’與減震構件20向機械手3之基端側於叉架19之 外部移動而構成機械手3之情形相比，易於防止減震構件 20與其他構件之干涉。因此，可使減震構件2〇確實地向機 械手3之基端側移動。又’與減震構件2〇向機械手3之基端 側於又架19之外部移動而構成機械手3之情形相比，可使 配置有減震構件20之機械手3之前端側小型化。 本^/態中，藉由偵測減震構件2〇是否相對於又架19向機 械手3之基端側相對移動，而可偵測出機械手3之前端與安 全罩15等是否發生碰撞。即，根據與安全罩。等發生碰撞 之減震構件20之動作，偵測出機械手3之前端與安全罩^ 等是否發生碰撞。因此，可對機械手3之前端與安全罩。 等是否發生碰撞進行精度良好之偵測。 本形態中，藉由伴隨減震構件2〇相對於又架丨9之相對移 動而切斷之配線27等，構成用以偵測機械手3之前端與安 全罩15等之碰撞之❹】機構，若配㈣被切斷，㈣測機 構摘測出機械手3之前端與安全罩15等發生碰撞。因此， 157109.doc •15- 201208834 本形態中’可藉由相對簡單之構成而偵測機械手3之前端 與安全罩15等碰撞。 本形態中’配線27具有第1配線部3〇與第2配線部31，第 1配線部30與第2配線部3丨係經焊接而相互連接。因此，若 機械手3之前端與安全罩15等發生碰撞，如上所述，配線 27於焊接部32被切斷。因此，使朝向機械手3之基端侧移 動之減震構件20再次向機械手3之前端侧移動，並將第1配 線部30與第2配線部31再次焊接，藉此可比較容易地復原 機械手3。 本形態中’減震構件20發揮支撐搭載於機械手3之基板2 之功能。因此’與由叉架19支撐全部基板2而構成機械手3 之情形相比，可使機械手3小型化。 本形態中’減震構件20係由碳纖維所形成。因此，可提 尚減震構件2 0之剛性。因此，可由減震構件2 〇對搭載於機 械手3之基板2進行適當之支撐。又，由於減震構件2〇由碳 纖維所形成且形成為筒狀，故可減輕機械手3之前端部分 之重量。又，可比較容易地形成減震構件20。 (其他實施形態） 上述之形態為本發明之較佳形態之一例，但並不限定於 此，於未變更本發明之主旨之範圍内可實施各種變形。 上述之形態中，乃根據配線27是否被切斷而偵測減震構 件20是否相對於叉架19相對移動。除此之外，例如可藉由 具備發光元件與受光元件之光學式感測器偵測減震構件2 〇 是否相對於叉架19相對移動’亦可藉由微動開關等之機械 157109.doc • 16 · 201208834 式感測器偵測減震構件20是否相對於又架19相對移動β 又，亦可於較減震構件20更靠機械手3之基端側流動壓縮 空氣，並利用壓力計偵測該壓縮空氣之壓力變化，藉此偵 測減震構件20是否相對於叉架19相對移動。 上述之形態中’係藉由偵測減震構件2〇是否相對於又架 19向機械手3之基端側相對移動，而偵測機械手3之前端與 安全罩15等是否發生碰撞。除此之外，例如亦可於減震構 件20之前端安裝壓力感測器，根據該壓力感測器之偵測結 果而偵測機械手3之前端與安全罩15等是否發生碰撞。 又，亦可於機械手3之基端側等上安裝加速度感測器，根 據該加速度感測器之偵測結果而偵測機械手3之前端與安 全罩15等是否發生碰撞。 上述之形態中，若機械手3之前端與安全罩15等發生碰 撞，則減震構件20之基端側部分或全部會進入中空狀之叉 架19。除此之外，例如亦可於機械手3之前端與安全罩。 等發生碰撞時，以使減震構件2〇向機械手3之基端側於又 架19之外部移動之方式構成機械手3。 上述之形態中，減震構件2〇係安裝於叉架19之前端侧。 除此之外，例如亦可於減震構件20之前端側安裝第2減震 構件，該第2減震構件於機械手3之前端與安全罩。等發生 碰撞時，相對於減震構件2〇向機械手3之基端側相對移 動又，亦可於第2減震構件之前端側安裝第3減震構件， 該第3減震構件於機械手3之前端與安全罩^等發生碰撞 時’相對於該第2減震構件向機械手3之基端側相對移動。 157109.doc 17 201208834 即’亦可於又架19之前端側安裝2段以上之減震構件。 上述之形態中’減震構件2〇係形成為圓筒狀，但減震構 件20可形成為四角筒狀等之多角筒狀，亦可形成為圓柱狀 或多角柱狀。又，減震構件20亦可形成為平板狀。又，上 述之形態中，減震構件2〇係由碳纖維形成，但減震構件2〇 亦可由金屬形成。 上述之形態中’配線27係經分割為第1配線部3〇與第2配 線部3 1 ,但配線27亦可不分割。又，上述之形態中，減震 構件20係發揮支撐搭載於機械手3之基板2之功能，但亦可 以由叉架19支撐基板2整體之方式而構成機械手3。 上述之形態中’機械臂4具備關節部，但機械臂4亦可不 具備關節部《該情形時，例如利用旋轉型之馬達及滾珠螺 桿等，或者利用線性馬達，以機械手3呈直線狀移動之方 式，將機械手3之基端側連結於機械臂。 上述之形態中，機器人1係具備2個機械手3與2個機械臂 4之所謂之雙機械臂型機器人，但機器人1亦可為具備一個 機械手3與一個機械臂4之單機械臂型機器人。又，上述之 形態中，由機器人1所搬送之搬送對象物為基板2,但由機 器人1所搬送之搬送對象物亦可為基板2以外之半導體晶圓 等。 【圖式簡單說明】 圖1係表示本發明之實施形態之產業用機器人及其周邊 機器的俯視圖。 圖2係自圖1之E-E方向表示產業用機器人及其周邊機器 157109.doc -18 ** 201208834 之側視圖。 圖3係圖1所表示之機械手的圖，（A)為俯視圖， 視圖。 （)為匈 圖4係用以說明圖3之F部之構成之放大圖，（A) ^ 械手之則端未為與安全罩等發生碰撞時之狀態的圖， 為表示機械手之前端與安全罩等剛發生碰撞後之狀態的 圖。 圖5係自圖4(A)之G-G方向表示機械手之前端側之圖。 【主要元件符號說明】 1 機器人（產業用機器人） 2 基板（玻璃基板、搬送對象物） 3 機械手 4 機械臂 5 主體部 6 基底構件 8 支撐構件 9 柱狀構件 10 基台 11 旋轉構件 13 基板處理裝置（周邊機器） 14 基板處理系統 15 安全罩（周邊機器） 18 連結構件 19 叉架（搭載構件） 157109.doc -19· 201208834 19a 叉架19之上表面 19b 叉架19之下表面 20 減震構件 21 固定塊 22 ' 23 塊片 22a ' 23a 保持凹部 24 ' 25 螺釘 27 配線（偵測機構之一部分） 28 ' 29 固定構件 30 第1配線部（固定側配線部） 31 第2配線部（移動側配線部） 32 焊接部 157109.doc •20·[Technical Field] The present invention relates to an industrial robot that transports a specific object to be transported. [Prior Art] An industrial robot that transports a large substrate such as a glass substrate for a liquid crystal display has been known (for example, see Patent Document). The industrial robot described in Patent Document i includes a robot arm and a robot attached to the robot arm. The robot has a base attached to the front end of the arm and a pair of the pair mounted on the base. Support member. At the front end of the support member, a freely expanding hollow body enclosing the fluid is mounted. Further, the base and the support member are formed in a hollow shape, and a pressure sensor for detecting the pressure of the fluid sealed in the hollow body is disposed inside the base, and the hollow body is disposed inside the support member and the base. The piping connected to the pressure sensor. In the industrial robot described in Patent Document 1, if the front end of the robot (that is, the front end of the hollow body) collides with the peripheral machine of the robot for some reason, the pressure sensor detects the pressure change inside the hollow body. . When the pressure change inside the hollow body is detected, the specific control for stopping the robot immediately is performed. Further, the impact when the front end of the robot collides with the peripheral machine can be alleviated by the deformation of the hollow body. Therefore, the robot for this industry can reduce the damage of the robot. [PRIOR ART DOCUMENT] [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-60004 No. 157109.doc 201208834 [Disclosure of the Invention] [Solution to be Solved by the Invention] A liquid crystal display device that is transported by an industrial robot The object to be transported, such as a glass substrate, tends to increase in size every year. On the other hand, the transport speed of the transport object is the same as before or faster than before. Therefore, for some reason, the impact of the collision between the front end of the robot and the peripheral machine tends to increase. As described above, in the industrial robot described in the patent document, if the pressure change inside the hollow body is detected, the control for stopping the robot immediately is performed, and the hollow body is deformed to alleviate the manipulator. The impact of the front end colliding with the surrounding machine. However, in the industrial robot described in the patent document, since the amount of deformation of the hollow body is limited, if the impact of the collision between the front end of the robot and the peripheral device becomes large, the following situation occurs: even if it is detected After the pressure inside the hollow body is changed, the control for stopping the robot is performed, and the impact of the collision between the front end of the robot and the peripheral machine cannot be sufficiently alleviated only by deforming the hollow body. As a result, in the industrial robot, if the impact of the collision between the front end of the robot and the peripheral device becomes large, the degree of damage of the robot due to the impact at the time of the collision increases. Accordingly, an object of the present invention is to provide an industrial robot that can reduce the damage of a robot hand even when the impact of the front end of the robot and the peripheral device is large. [Means for Solving the Problem] In order to solve the problem, the industrial robot of the present invention transports the object to the 157109.doc -4- 201208834 object, and is characterized in that it includes a robot that mounts the object to be transported, and a detecting mechanism for detecting a collision between a front end of the robot and a peripheral machine of the industrial robot, and moving the robot in a substantially linear state in a state of being oriented in a specific direction, the robot having a shock absorbing member and constituting the machine The % of the hand can be moved to the base end side of the robot when the front end of the robot collides with the peripheral device. The present invention has an arm for connecting the base end side of the robot, and the like. When the driving source of the driving arm is detected, if the front end of the robot collides with the peripheral machine according to the detection result of the detecting mechanism, the driving source is braked. The industrial robot of the present invention is provided with a detecting mechanism for detecting a collision between a front end of the robot and a peripheral machine of the industrial robot. Therefore, according to the detection result of the detecting mechanism, when the front end of the robot that moves in a substantially linear direction toward the specific direction is detected to collide with the peripheral device, the base end side for driving the coupled robot can be driven. In the present invention, the manipulator includes a shock absorbing member that constitutes the front end portion of the manipulator and that can move toward the proximal end side of the manipulator when the front end of the manipulator collides with the peripheral device. Therefore, when the front end of the robot that moves in a substantially linear state in a direction of a specific direction collides with the peripheral device, the energy of the robot or the like acts on the machine while the shock absorbing member moves toward the proximal end side of the manipulator. The brake of the arm or the like is consumed, and is consumed by the frictional resistance or the like when the shock absorbing member moves toward the proximal end side of the robot. As a result, in the present invention, even when the impact of the collision between the front end of the robot and the peripheral device is large, the main body of the robot to which the shock absorbing member is attached and the peripheral device can be alleviated. The impact of the collision occurs, thereby reducing the damage of the main body of the robot. That is, in the present invention, even when the impact of the collision between the front end of the robot and the peripheral device is large, the damage of the robot can be reduced. Moreover, the damage of the peripheral machine that the front end of the robot collides with can be alleviated. In the present invention, it is preferable that the robot has a plurality of mounting members that are formed so as to extend from the proximal end side of the robot to the front end side of the robot, and at least a part of the transport object is mounted, and the mounting member is mounted. At least the distal end side is formed in a hollow shape, and the damper member is attached to the front end side of the mounting member, and at least the proximal end side of the damper member enters the mounting member when the front end of the damper collides with the peripheral device. According to this configuration, it is easier to prevent the interference member from interfering with other members than when the vibration absorbing member is moved toward the base end side of the robot and moved outside the mounting member. Therefore, the shock absorbing member can be surely moved to the proximal end side of the manipulator, and the configuration can be reduced as compared with the case where the shock absorbing member is configured to move the mounting member toward the base end side of the robot. The front end side of the manipulator of the seismic member is miniaturized. In the current month, it is preferred that the detecting mechanism detects the shock absorbing member relative to it. When the relative movement of the component is detected, and the front end of the tilting robot and the peripheral device are configured to be p», · 匕, the collision between the front end of the robot and the peripheral device can be detected by the action of the collision with the peripheral device. It can detect the detection accuracy of the South Detection Agency. In the first month, it is preferable that the detecting mechanism has wiring, a part of which is fixed to the mounting member, and the other part is fixed to the shock absorbing member, and the shock absorbing member when the front end of the robot 157109.doc 201208834 collides with the peripheral machine The wiring can be cut with respect to the relative movement of the mounting member, and when the wiring is cut, the detecting mechanism measures the relative movement of the damping member with respect to the mounting member. If it is constructed in this way, it is possible to detect the collision between the front end of the robot and the peripheral machine by a relatively simple configuration. In the present invention, it is preferable that the wiring includes a fixed side wiring portion fixed to the mounting member and a moving side wiring portion fixed to the damper member, and the fixed side wiring portion and the moving side wiring portion are connected by welding. According to this configuration, when the front end of the robot collides with the peripheral device, the wiring is easily cut by the welded portion which is the boundary portion between the fixed side wiring portion and the moving side wiring portion. Therefore, when the front end of the robot collides with the peripheral device, the shock absorbing member that moves toward the proximal end side of the robot is again moved toward the front end side of the robot, and the fixed side wiring portion and the moving side wiring portion are welded again. The robot and the detection mechanism can be easily restored. In the present invention, it is preferable that one of the objects to be transported is mounted on the shock absorbing member. According to this configuration, the shock absorbing member can be provided with the function of carrying the object to be transported. Therefore, the robot can be made smaller than the case where the robot is mounted so that all the objects to be transported are mounted on the mounting member. In the present invention, it is preferable that the shock absorbing member is a tubular member formed of carbon fibers. If constructed in this manner, the rigidity of the front end portion of the manipulator can be improved, and the weight of the front end portion of the manipulator can be reduced. Further, the shock absorbing member can be formed relatively easily. [Effects of the Invention] As described above, in the industrial robot of the present invention, even when the impact of the collision between the front end of the robot 157109.doc 201208834 and the peripheral device is large, the damage of the robot can be reduced. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. (Schematic configuration of the industrial robot) Fig. 1 is a plan view showing the industrial robot 1 and its peripheral devices according to the embodiment of the present invention. Fig. 2 is a side view showing the industrial machine and its peripheral devices from the E-E direction of Fig. 1. The industrial robot 1 (hereinafter referred to as "the robot") of the present embodiment is a transport robot for transporting the glass substrate 2 (hereinafter referred to as "the substrate 2") for the liquid crystal display to which the object is transported. This robot 1 is particularly suitable for a large robot that transports a large substrate 2. As shown in FIG. 2 and FIG. 2, the robot 1 includes two robots 3 on which the substrate 2 is mounted, two robot arms 4 to which two robots 3 are connected to the distal end side, and a main body portion 5 that supports the two robot arms 4. And a base member 6 that movably supports the main body portion 5 in the horizontal direction. The main body portion 5 is provided with a support member 8 that supports the base end side of the two robot arms 4 and is movable up and down, and supports the support member in the up and down direction. a columnar member 9 of 8 , a base 10 constituting a lower end portion of the main body portion 5 and horizontally movable relative to the base member 6 , and a rotation rotatable relative to the lower end of the columnar member 9 and fixed relative to the base 1 Member 11. The base end of the robot 3 is rotatably coupled to the front end of the robot arm 4. The arm 4 is configured to include two joint portions and expand and contract with respect to the main body portion 5. Specifically, the robot arm 4 expands and contracts with respect to the main body portion 5 in such a manner that the robot 3 is substantially linear in a state of being oriented in a specific direction. Further, the base end of the robot arm 4 is fixed to the support member 8. In the present embodiment, the two robots 3 and the two robot arms 4 are arranged to overlap each other in the vertical direction. As shown in Fig. 1 and Fig. 2, the robot system is incorporated into, for example, a substrate processing system 14 including a plurality of substrate processing apparatuses 13. In the substrate processing system, the robot 1 is surrounded by the safety cover 15. The safety cover 15 is provided with, for example, a metal frame and a resin cover plate made of polyvinyl chloride or the like fixed to the frame, and the cover plate constitutes a side surface of the safety cover 15. Further, an opening portion through which the robot 3 can pass is formed at a specific portion of the safety cover 15. In the robot 1, the support member 8 moves up and down together with the manipulator 3 and the robot arm 4 with respect to the columnar member 9. Further, the robot arm 4 expands and contracts with respect to the main body portion 5. Specifically, the robot arm 4 expands and contracts in such a manner that the manipulator 3 linearly moves in a state in which the front end of the manipulator 3 is oriented in a specific direction. More specifically, for example, the robot arm 4 expands and contracts in such a manner that the front end of the robot 3 faces the substrate processing apparatus U, and the robot 3 moves linearly with respect to the substrate processing apparatus 13 and moves in and out. Further, the base 1 () is horizontally moved with respect to the base member 6. Further, the rotating member u is rotated with respect to the base cymbal. By the combination of these operations, the substrate 2 is carried out in the machine substrate processing apparatus 13, or the substrate is loaded into the substrate processing apparatus 13 (the configuration of the robot). The figure of the robot 3 is shown, (Α) is a plan view, and (β) is a side view. FIG. 4 is an enlarged view for explaining the configuration of the portion of FIG. 3iF, and (Α) indicates that the front end of the robot 3 is not secure. A diagram showing a state in which the cover 15 or the like collides, and (Β) is a view showing a state immediately after the collision between the front end of the robot 3 and the safety cover 15 and the like, 157109.doc -9-201208834. Fig. 5 is a view showing the front end side of the manipulator 3 from the G_G direction of Fig. 4(A). The robot 3 includes a coupling member 8 connected to the front end side of the arm 4, a plurality of rest frames 19 as mounting members for mounting the substrate 2, and a shock absorbing member 20 constituting a front end portion of the robot. The fork frame 19 is formed so as to extend from the joint member constituting the base end portion of the robot 3 toward the front end side of the robot 3. The frame 19 is formed in an elongated and substantially rectangular shape. That is, the fork 19 is formed. The hollow frame is formed in a hollow shape, and the thickness of the fork 19 is fixed. In addition, the frame 19 is formed of a composite material such as carbon fiber and resin in order to ensure high rigidity and to reduce weight. Further, the fork 19 is also Further, in the present embodiment, the thickness of the front end side is reduced. Further, in the present embodiment, the resin 19 is impregnated into the cylindrical carbon fiber to form a composite material 19 comprising a composite material of carbon fiber and resin, but it may be It is known that the fork frame 19 is formed, and the frame 19 can be formed by a novel method so that the width of the fork frame 19 is gradually narrowed toward the front end side. Further, as shown in Fig. 3(B) The upper surface 19a of the fork frame 19 is a horizontal plane. On the other hand, the lower surface 19b of the fork frame 19 is an inclined surface that is inclined upward as it goes toward the front end side of the frame 19. That is, the fork 19 is oriented toward The front end side has its width in the up and down direction The upper surface 19a of the shelf 19 is a mounting surface on which the substrate 2 is mounted. As described above, since the upper surface 19a is a horizontal surface, the substrate 19 can be horizontally mounted on the substrate 2 in this embodiment. As shown in Fig. 5, two fixing blocks 21 for fixing the damper member 20 are fixed to the front end side of the yoke 19. The two fixing blocks 21 are spaced apart from each other by the length of the yoke 19 in the direction of 157I09.doc •10·201208834 degrees. The state of the specific interval is fixed to the front end side of the frame 19. The fixing block 21 is composed of the pieces 22 and 23 which are divided into two in the up and down direction. As shown in Fig. 5, the piece 22 is by the screw 24. Fixed on the upper side of the frame 19, the block 23 is fixed to the lower surface of the block 22 by screws 25. The center of the lower surface of the block 22 and the center of the upper surface of the block 23 are oriented upwards and downwards. The outer direction of the direction is formed to hold the holding recesses 22a, 23a of the damper member 20. The holding recesses 22a, 23a are attached to the block 22 in a state where the block 23 is fixed to the block 22, as viewed from the length of the yoke 19. The shape of the through hole formed by the holding recesses 22a and 23a is a substantially circular shape. The shock absorbing member 20 is formed of, for example, a cylindrical member made of carbon fiber. Specifically, the shock absorbing member 20 is formed of a composite material of carbon fiber and resin. The shock absorbing member 20 is attached to the respective front end sides of the plurality of rest frames 19. Specifically, the base end side of the shock absorbing member 20 is held on the holding recesses 22a, 23a of the two fixing blocks 21. In the present embodiment, the shock absorbing member 20 is disposed in the holding recess 22a in a state in which the block 23 is removed. Then, the block 23 is fixed to the lower surface of the block 22, whereby the fork 19 is The shock absorbing member 20 is fixed to the front end side. As shown in FIG. 1, the substrate 2 is mounted on the yoke 19 and the damper member 20, that is, the damper member 20 functions to support the substrate 2 mounted on the robot 3. Further, the length of the frame 19 is, for example, about 3 m. The amount of protrusion of the shock absorbing member 20 from the end of the fork frame 19 is, for example, about 5 〇〇 to 6 〇〇 mm. On the fixed block 21 disposed on the base end side of the fork 19 in the two fixing blocks 21, as shown in FIG. 4, two solid members 157109.doc -11·201208834 are fixed for fixing one portion of the wiring 27. 28. The two fixing members 28 are disposed to sandwich the base end of the damper member 20 held by the holding recesses 22a and 23a. Further, a fixing member 29 for fixing a part of the wiring 27 is fixed to the base end of the damper member 20. The fixing member 29 is disposed between the two fixing members 28. The wiring 27 is, for example, a wire. This wiring 27 is divided into a fixed-side wiring portion that is fixed to the shelf 19 via the fixing member 28! The wiring portion 3 is fixed to the second wiring portion 31 as a moving-side wiring portion of the damper member 2A via the fixing member 29. The first wiring portion 30 and the second wiring portion 31 are connected to each other by soldering. That is, as shown in Fig. 4(A), the welded portion 32 is formed between the first wiring portion 3A and the second wiring portion 31. The end portion of the wiring 27 is connected to, for example, a control board of the robot 1 (not shown, when the robot arm 4 expands and contracts and the robot 3 moves, current is supplied from the control board to the wiring 27. In this embodiment, for some reasons, When the front end of the robot 3 (that is, the front end of the shock absorbing member 20) collides with the peripheral device of the robot 1 such as the safety cover 15 and the substrate processing apparatus 13, the shock absorbing member 2 held by the fixed block 21 resists the fixed block 21 The holding force is moved to the base end side of the robot 3 as shown in Fig. 4(B). Specifically, if the front end of the robot 3 collides with the safety cover 15 or the like, the shock absorbing member 20 is opposed to the fork. 19, the base end side portion of the shock absorbing member 2 is relatively moved toward the base end side of the manipulator 3, or all of them enter the hollow fork frame 19. At this time, as shown in Fig. 4(B), the wiring 27 is accompanied. The shock absorbing member 2 is cut relative to the relative movement of the frame 19. Specifically, the second wiring portion 31 fixed to the fixing member 29 and the damper member 2A are provided to the base end side of the robot 3 Moving, the wiring 27 on the welded portion 32 is cut. As described above, when the machine 1571 09.doc •12-201208834 When the arm 4 expands and contracts and the robot 3 moves, the control board supplies current to the wiring 27. Therefore, when the damping member 20 moves to the proximal end side of the robot 3, the wiring 27 is cut off. No current flows in 27. In this embodiment, it is detected whether the shock absorbing member 2 is at the base end of the robot 3 with respect to the yoke 19 by detecting whether or not current flows on the wiring 27 when the robot 3 moves. The side is relatively moved, and by detecting whether the shock absorbing member 2 is relatively moved relative to the fork frame 19 toward the base end side of the robot 3, it is detected whether the front end of the robot 3 collides with the safety cover 15 or the like. In the present embodiment, if the wiring 27 is cut, the relative movement of the shock absorbing member 20 to the base end side of the robot 3 is detected with respect to the fork frame 19, thereby detecting the front end of the robot 3 and the safety cover i 5 and the like. In the present embodiment, the wiring 27 and the control board to which the wiring 27 is connected constitute a debt detecting mechanism for detecting a collision between the front end of the robot 3 and a peripheral device such as the safety cover 15. Further, in this embodiment, According to the detection result of the detection mechanism, 'before the robot 3 is detected When the end collides with the safety cover 15 or the like, the driving motor (not shown) for expanding and contracting the arm 4 is braked. Specifically, the drive motor is not energized; the differential type brake (mechanical) Brake), servo brake, and dynamic brake. In the present embodiment, the shock absorbing member 20 is held by two fixed blocks 21 fixed at a predetermined interval along the longitudinal direction of the shelf 19. When the arm 4 and the robot 3 rotate and the arm 4 expands and contracts, even if a torque acts on the damper member 20, the damper member 2 does not fall off from the front end side of the yoke 19. On the other hand, if the manipulator 3 The front end collides with the safety cover 15 or the like. 'A shock is applied along the length direction of the shock absorbing member 20, even if the impact phase 157109.doc -13 - 201208834 is small, the shock absorbing member 20 will be opposite to the fork 19 The base end side of the robot 3 is relatively moved. (Main effect of the present embodiment) As described above, in the present embodiment, when the front end of the manipulator 3 collides with the safety cover 15 or the like, the shock absorbing member 20 that relatively moves toward the proximal end side of the robot 3 with respect to the frame 19 is attached. Installed on the front side of the robot 3. Further, in the present embodiment, when the front end of the robot 3 is detected to collide with the safety cover 15 or the like, the driving motor for expanding and contracting the arm 4 is braked. Therefore, when the front end of the manipulator 3 collides with the safety cover 15 or the like, the energy of the robot 3 and the robot arm 4 acts on the arm 4 by the period in which the damper member 20 moves toward the proximal end side of the manipulator 3 The brake is consumed, and the frictional resistance when the shock absorbing member 20 is moved against the holding force of the fixed block 21 and the deformation of the shock absorbing member 20 when the base end side of the robot 3 is moved is consumed. In the present embodiment, when the shock absorbing member 20 is moved to the proximal end side of the manipulator 3, the wiring 27 is cut. Therefore, the front end of the manipulator 3 and the safety cover 15 are prevented by the resistance when the wiring 27 is cut. The energy of the robot 3 and the robot arm 4 is consumed when a collision occurs. Therefore, in the present embodiment, even when the impact of the collision between the front end of the manipulator 3 and the safety cover 15 or the like is large, the collision between the fork frame 19 to which the damper member 20 is attached and the safety cover 15 can be alleviated. The impact is thereby reduced the damage of the fork 19. Further, this embodiment can reduce the damage of the safety cover 15 and the like which the front end of the manipulator 3 collides with. Further, since the damage of the safety cover 15 or the like can be reduced, the safety of the operator around the substrate processing system 14 can be ensured. Further, in the present embodiment, since the damper member 20 can be relatively moved with respect to the fork frame 19 toward the base end side of the machine 157109.doc -14 - 201208834, the robot 3 is not detached from the robot 1 The robot 1 can also be transported while the shock absorbing member 20 is placed in the fork 19 . Therefore, the cost at the time of handling can be reduced. Further, after the transfer, the shock absorbing member 20 can be restored and fixed by the frame 19, and the robot 1 can be restored. Therefore, the carrier 1 is removed from the robot 1 and the robot 1 is transported. The restoration of the robot 1 is easy. In the present embodiment, when the front end of the manipulator 3 collides with the safety cover 15 or the like, the base end side portion or all of the shock absorbing member 20 enters the hollow frame 19. Therefore, it is easier to prevent the shock absorbing member 20 from interfering with other members than when the shock absorbing member 20 is moved to the outside of the fork 19 to the base end side of the robot 3 to constitute the robot 3. Therefore, the shock absorbing member 2 can be surely moved to the base end side of the robot hand 3. Further, the front end side of the manipulator 3 in which the damper member 20 is disposed can be miniaturized as compared with the case where the damper member 2 移动 is moved to the outside of the frame 19 to the outside of the frame 19 to constitute the manipulator 3 . . In the present state, by detecting whether the shock absorbing member 2 is relatively moved relative to the base 19 side of the robot 3, it is possible to detect whether the front end of the robot 3 collides with the safety cover 15 or the like. . That is, according to the safety cover. The action of the shock absorbing member 20 that collides with the collision detects whether or not the front end of the robot 3 collides with the safety cover ^ or the like. Therefore, the front end of the robot 3 and the safety cover can be used. Whether or not collision occurs for accurate detection. In the present embodiment, the wiring 27 and the like which are cut off by the relative movement of the damper member 2 〇 with respect to the other frame 9 constitute a mechanism for detecting the collision between the front end of the robot 3 and the safety cover 15 and the like. If the (4) is cut off, (4) the measuring mechanism picks up the front end of the robot 3 and collides with the safety cover 15 and the like. Therefore, in the present embodiment, 157109.doc •15-201208834 can detect the collision of the front end of the robot 3 with the safety cover 15 or the like by a relatively simple configuration. In the present embodiment, the wiring 27 has the first wiring portion 3A and the second wiring portion 31, and the first wiring portion 30 and the second wiring portion 3 are connected to each other by soldering. Therefore, if the front end of the robot 3 collides with the safety cover 15 or the like, the wiring 27 is cut at the welded portion 32 as described above. Therefore, the damper member 20 that has moved toward the proximal end side of the robot 3 is again moved to the front end side of the manipulator 3, and the first wiring portion 30 and the second wiring portion 31 are welded again, whereby the vibration absorbing member 20 can be restored relatively easily. Robot 3. In the present embodiment, the damper member 20 functions to support the substrate 2 mounted on the robot 3. Therefore, the manipulator 3 can be miniaturized as compared with the case where the whole frame 2 is supported by the fork frame 19 to constitute the manipulator 3. In the present embodiment, the shock absorbing member 20 is formed of carbon fibers. Therefore, the rigidity of the shock absorbing member 20 can be improved. Therefore, the substrate 2 mounted on the robot 3 can be appropriately supported by the damper member 2 。. Further, since the shock absorbing member 2 is formed of carbon fibers and formed into a tubular shape, the weight of the front end portion of the manipulator 3 can be reduced. Moreover, the shock absorbing member 20 can be formed relatively easily. (Other Embodiments) The above-described embodiments are an example of a preferred embodiment of the present invention, and are not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention. In the above embodiment, whether or not the damper member 20 is relatively moved with respect to the yoke 19 is detected based on whether or not the wiring 27 is cut. In addition, for example, it can be detected by the optical sensor having the light-emitting element and the light-receiving element whether the shock-absorbing member 2 is relatively moved relative to the fork 19, or by a mechanical mechanism such as a micro switch 157109.doc. 16 · 201208834 The type sensor detects whether the shock absorbing member 20 is relatively moved relative to the frame 19, and can also flow compressed air on the base end side of the manipulator 3 with respect to the shock absorbing member 20, and utilizes a pressure gauge to detect The change in pressure of the compressed air is measured, thereby detecting whether the shock absorbing member 20 is relatively moved relative to the yoke 19. In the above-described form, it is detected whether or not the front end of the manipulator 3 collides with the safety cover 15 or the like by detecting whether or not the shock absorbing member 2 is relatively moved relative to the base end side of the robot 3 with respect to the frame 19. In addition, for example, a pressure sensor may be attached to the front end of the shock absorbing member 20 to detect whether the front end of the robot 3 and the safety cover 15 collide according to the detection result of the pressure sensor. Further, an acceleration sensor may be attached to the base end side of the robot 3 or the like to detect whether or not the front end of the robot 3 and the safety cover 15 collide with each other based on the detection result of the acceleration sensor. In the above-described embodiment, when the front end of the manipulator 3 collides with the safety cover 15 or the like, the base end side portion or all of the shock absorbing member 20 enters the hollow fork frame 19. In addition to this, for example, the front end of the robot 3 and the safety cover can also be used. When a collision occurs, the manipulator 3 is configured such that the shock absorbing member 2 is moved toward the base end side of the manipulator 3 outside the frame 19. In the above embodiment, the damper member 2 is attached to the front end side of the yoke 19. In addition to this, for example, a second damper member may be attached to the front end side of the damper member 20, and the second damper member may be at the front end of the manipulator 3 and the safety cover. When a collision occurs, the third damper member may be attached to the front end side of the second damper member, and the third damper member may be mechanically moved relative to the base end side of the damper member 2 〇. When the front end of the hand 3 collides with the safety cover or the like, it relatively moves toward the proximal end side of the manipulator 3 with respect to the second damper member. 157109.doc 17 201208834 That is, it is also possible to install two or more shock absorbing members on the front side of the frame 19. In the above-described embodiment, the damper member 2 is formed in a cylindrical shape, but the damper member 20 may be formed in a polygonal cylindrical shape such as a rectangular tube shape, or may be formed in a cylindrical shape or a polygonal column shape. Further, the damper member 20 may be formed in a flat plate shape. Further, in the above embodiment, the damper member 2 is made of carbon fiber, but the damper member 2' may be formed of metal. In the above-described form, the wiring 27 is divided into the first wiring portion 3A and the second wiring portion 3 1 , but the wiring 27 may not be divided. Further, in the above-described embodiment, the damper member 20 functions to support the substrate 2 mounted on the robot 3, but the robot 3 may be configured to support the entire substrate 2 by the yoke 19. In the above-described form, the robot arm 4 includes a joint portion, but the arm 4 does not have a joint portion. In this case, the robot 3 moves linearly by, for example, a rotary motor or a ball screw or a linear motor. In this manner, the proximal end side of the robot 3 is coupled to the robot arm. In the above-described form, the robot 1 is a so-called double-arm type robot having two robots 3 and two robot arms 4. However, the robot 1 may be a single-arm type having one robot 3 and one robot 4. robot. In the above-described embodiment, the object to be transported by the robot 1 is the substrate 2, but the object to be transported by the robot 1 may be a semiconductor wafer or the like other than the substrate 2. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing an industrial robot and its peripheral devices according to an embodiment of the present invention. Fig. 2 is a side view showing the industrial robot and its peripheral machines 157109.doc -18 ** 201208834 from the E-E direction of Fig. 1. Fig. 3 is a view showing the robot shown in Fig. 1, and (A) is a plan view and a view. () is a magnified view of the structure of the F part of Fig. 3 for the Hungarian 4 system, (A) ^ The figure of the state where the end of the hand is not collided with the safety cover, etc., indicating the front end of the manipulator A diagram of the state immediately after collision with a safety cover or the like. Fig. 5 is a view showing the front end side of the manipulator from the G-G direction of Fig. 4(A). [Description of main component symbols] 1 Robot (industrial robot) 2 Substrate (glass substrate, transfer object) 3 Robot 4 Robot arm 5 Main body 6 Base member 8 Support member 9 Column member 10 Base 11 Rotating member 13 Substrate Processing device (peripheral equipment) 14 Substrate processing system 15 Safety cover (peripheral equipment) 18 Connecting member 19 Fork frame (mounting member) 157109.doc -19· 201208834 19a Upper surface 19b of fork frame 19 Lower surface 20 of fork frame 19 minus Seismic member 21 fixed block 22' 23 piece 22a' 23a holding recess 24' 25 screw 27 wiring (one part of detecting mechanism) 28 ' 29 fixing member 30 first wiring portion (fixed side wiring portion) 31 second wiring portion ( Moving side wiring part) 32 Welded part 157109.doc •20·

Claims (1)

201208834 七、申請專利範圍： 1. 一種產業用機器人’其係將搬送對象物進行搬送者，其 特徵在於： 具備搭載上述搬送對象物之機械手、及用以偵測上述 機械手之前端與上述產業用機器人之周邊機器碰撞之偵 測機構，並且使上述機械手以朝向特定方向之狀態呈大 致直線狀地移動而構成； 上述機械手具備減震構件，其構成上述機械手之前端 邓分，且於上述機械手之前端與上述周邊機器發生碰撞 時可向上述機械手之基端側移動。 2. 如凊求項1之產業用機器人，其中具備連結上述機械手 之基端側之機械臂、及用以驅動上述機械臂之驅動源； 若根據上述偵測機構之偵測結果偵測出上述機械手之 前端與上述周邊機器發生碰撞時，對上述驅動源施行制 動。 3.如請求項1或2之產業用機器人，其中上述機械手具備複 數個搭載構件，該等搭載構件以自上述機械手之基端側 朝向上述機械手之前端側延伸之方式形成，且搭載上述 搬送對象物之至少一部分； 上述搭載構件之至少前端側形成為_空狀； 上述減震構件係安裝於上述搭載構件之前端侧； 上述減震構件之至少基端側於上述機械手之前端與上 述周邊機器發生碰撞時進入上述搭載構件之中。 4. 如請求項3之產業用機器人，其中上述债測機構係藉由 157109.doc 201208834 須測上述減震構件相對於上述搭載構件之相對移動，而 偵測上述機械手之前端與上述周邊機器發生碰撞。 5.如請求項4之產業用機器人，其中上述偵測機構具備配 線’其一部分固定於上述搭載構件、並且另一部分固定 於上述減震構件； 藉由上述機械手之前端與上述周邊機器發生碰撞時之 上述減震構件相對於上述搭載構件之相對移動，可切斷 上述配線； 當上述配線被切斷時，上述偵測機構偵測上述減震構 件相對於上述搭載構件之相對移動。 6·如請求項5之產業用機器人，其中上述配線具備固定於 上述搭載構件之固定側配線部、及固定於上述減震構件 之移動側配線部； 上述固定側配線部與上述移動側配線部經焊接而連 接。 7. 如請求項1或2之產業用機器人’其中於上述減震構件上 搭載上述搬送對象物之一部分。 8. 如請求項1或2之產業用機器人，其中上述減震構件係由 碳纖維形成之筒狀構件。 157109.doc201208834 VII. Patent application scope: 1. An industrial robot that transports an object to be transported, and is characterized in that: a robot having the object to be transported, and a front end for detecting the robot and the above a mechanism for detecting a collision of a peripheral device of an industrial robot, wherein the robot is moved in a substantially linear state in a state of being oriented in a specific direction; and the manipulator includes a damper member that constitutes a front end of the manipulator. When the front end of the manipulator collides with the peripheral device, the base end side of the manipulator can be moved. 2. The industrial robot of claim 1, wherein the robot arm connecting the base end side of the robot and the driving source for driving the robot arm are detected according to the detection result of the detecting mechanism; When the front end of the manipulator collides with the peripheral device, the driving source is braked. 3. The industrial robot according to claim 1 or 2, wherein the robot includes a plurality of mounting members, and the mounting members are formed to extend from a proximal end side of the robot toward a front end side of the robot, and are mounted At least a part of the object to be transported; at least a front end side of the mounting member is formed in a hollow shape; the damper member is attached to a front end side of the mounting member; and at least a proximal end side of the damper member is at a front end of the robot When entering a collision with the peripheral device, it enters the above-mentioned mounting member. 4. The industrial robot of claim 3, wherein the debt testing mechanism detects the relative movement of the shock absorbing member relative to the mounting member by 157109.doc 201208834, and detects the front end of the robot and the peripheral device Collision. 5. The industrial robot according to claim 4, wherein the detecting means includes wiring "a portion thereof is fixed to the mounting member, and another portion is fixed to the shock absorbing member; and the front end of the robot collides with the peripheral device In the case where the shock absorbing member moves relative to the mounting member, the wiring can be cut. When the wiring is cut, the detecting mechanism detects relative movement of the damper member relative to the mounting member. The industrial robot according to claim 5, wherein the wiring includes a fixed-side wiring portion fixed to the mounting member, and a moving-side wiring portion fixed to the damper member; the fixed-side wiring portion and the moving-side wiring portion Connected by soldering. 7. The industrial robot of claim 1 or 2, wherein one of the objects to be transported is mounted on the shock absorbing member. 8. The industrial robot according to claim 1 or 2, wherein the shock absorbing member is a cylindrical member formed of carbon fibers. 157109.doc
TW100123730A 2010-07-13 2011-07-05 Industrial robots TWI531450B (en)

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