WO2012008320A1 - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- WO2012008320A1 WO2012008320A1 PCT/JP2011/065180 JP2011065180W WO2012008320A1 WO 2012008320 A1 WO2012008320 A1 WO 2012008320A1 JP 2011065180 W JP2011065180 W JP 2011065180W WO 2012008320 A1 WO2012008320 A1 WO 2012008320A1
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- WO
- WIPO (PCT)
- Prior art keywords
- hand
- absorbing member
- tip
- shock absorbing
- industrial robot
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
- B25J19/063—Safety devices working only upon contact with an outside object
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
図1は、本発明の実施の形態にかかる産業用ロボット1およびその周辺機器を示す平面図である。図2は、図1のE-E方向から産業用ロボット1およびその周辺機器を示す側面図である。 (Schematic configuration of industrial robot)
FIG. 1 is a plan view showing an industrial robot 1 and its peripheral devices according to an embodiment of the present invention. FIG. 2 is a side view showing the industrial robot 1 and its peripheral devices from the EE direction of FIG.
図3は、図1に示すハンド3の図であり、(A)は平面図、(B)は側面図である。図4は、図3のF部の構成を説明するための拡大図であり、(A)はハンド3の先端が安全カバー15等に衝突していないときの状態を示す図、(B)はハンド3の先端が安全カバー15等に衝突した直後の状態を示す図である。図5は、図4(A)のG-G方向からハンド3の先端側を示す図である。 (Hand structure)
3A and 3B are views of the
以上説明したように、本形態では、ハンド3の先端が安全カバー15等に衝突したときに、フォーク19に対してハンド3の基端側へ相対移動する衝撃吸収部材20がハンド3の先端側に取り付けられている。また、本形態では、ハンド3の先端が安全カバー15等に衝突したことが検知されると、アーム4を伸縮させるための駆動用モータにブレーキがかかる。そのため、安全カバー15等にハンド3の先端が衝突したときにハンド3およびアーム4が有するエネルギーは、衝撃吸収部材20がハンド3の基端側に向かって移動している間にアーム4等に作用するブレーキによって消費されるとともに、固定ブロック21の保持力に抗してハンド3の基端側へ衝撃吸収部材20が移動する際の摩擦抵抗や衝撃吸収部材20の変形等によって消費される。また、本形態では、衝撃吸収部材20がハンド3の基端側へ移動すると、配線27が切断されるため、配線27の切断時の抵抗によって、安全カバー15等にハンド3の先端が衝突したときにハンド3およびアーム4が有するエネルギーが消費される。 (Main effects of this form)
As described above, in this embodiment, when the front end of the
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
2 基板(ガラス基板、搬送対象物)
3 ハンド
4 アーム
13 基板処理装置(周辺機器)
15 安全カバー(周辺機器)
19 フォーク(搭載部材)
20 衝撃吸収部材
27 配線(検知機構の一部)
30 第1配線部(固定側配線部)
31 第2配線部(移動側配線部) 1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
3 Hand 4
15 Safety cover (peripheral equipment)
19 Fork (Mounting member)
20 Shock absorbing member 27 Wiring (part of detection mechanism)
30 1st wiring part (fixed side wiring part)
31 2nd wiring part (moving side wiring part)
Claims (8)
- 搬送対象物を搬送する産業用ロボットにおいて、
前記搬送対象物が搭載されるハンドと、前記産業用ロボットの周辺機器に前記ハンドの先端が衝突したことを検知するための検知機構とを備えるとともに、前記ハンドが所定方向を向いた状態で略直線状に移動するように構成され、
前記ハンドは、前記ハンドの先端部分を構成するとともに前記周辺機器に前記ハンドの先端が衝突したときに前記ハンドの基端側に向かって移動可能な衝撃吸収部材を備えることを特徴とする産業用ロボット。 In industrial robots that transport objects to be transported,
A hand on which the object to be transported is mounted; and a detection mechanism for detecting that the tip of the hand has collided with a peripheral device of the industrial robot; Configured to move in a straight line,
The hand includes an impact absorbing member that constitutes a tip portion of the hand and is movable toward a base end side of the hand when the tip of the hand collides with the peripheral device. robot. - 前記ハンドの基端側が連結されるアームと、前記アームを駆動するための駆動源とを備え、
前記検知機構での検知結果に基づいて、前記周辺機器に前記ハンドの先端が衝突したことが検知されると、前記駆動源にブレーキがかかることを特徴とする請求項1記載の産業用ロボット。 An arm to which the base end side of the hand is coupled; and a drive source for driving the arm;
2. The industrial robot according to claim 1, wherein when the tip of the hand collides with the peripheral device based on a detection result of the detection mechanism, the drive source is braked. - 前記ハンドは、前記ハンドの基端側から前記ハンドの先端側に向かって延びるように形成され前記搬送対象物の少なくとも一部が搭載される複数の搭載部材を備え、
前記搭載部材の少なくとも先端側は、中空状に形成され、
前記衝撃吸収部材は、前記搭載部材の先端側に取り付けられ、
前記衝撃吸収部材の少なくとも基端側は、前記周辺機器に前記ハンドの先端が衝突したときに前記搭載部材の中に入ることを特徴とする請求項1または2記載の産業用ロボット。 The hand includes a plurality of mounting members that are formed so as to extend from the proximal end side of the hand toward the distal end side of the hand and on which at least a part of the transport object is mounted;
At least the tip side of the mounting member is formed in a hollow shape,
The shock absorbing member is attached to the tip side of the mounting member,
The industrial robot according to claim 1, wherein at least a base end side of the shock absorbing member enters the mounting member when a tip of the hand collides with the peripheral device. - 前記検知機構は、前記搭載部材に対する前記衝撃吸収部材の相対移動を検知することで、前記周辺機器に前記ハンドの先端が衝突したことを検知することを特徴とする請求項3記載の産業用ロボット。 The industrial robot according to claim 3, wherein the detection mechanism detects that the tip of the hand has collided with the peripheral device by detecting a relative movement of the shock absorbing member with respect to the mounting member. .
- 前記検知機構は、前記搭載部材にその一部が固定されるとともに、前記衝撃吸収部材に他の一部が固定される配線を備え、
前記周辺機器に前記ハンドの先端が衝突したときの前記搭載部材に対する前記衝撃吸収部材の相対移動によって、前記配線が切断可能となっており、
前記検知機構は、前記配線が切断されると、前記搭載部材に対する前記衝撃吸収部材の相対移動を検知することを特徴とする請求項4記載の産業用ロボット。 The detection mechanism includes a wiring part of which is fixed to the mounting member and another part of the detection mechanism is fixed to the shock absorbing member.
By the relative movement of the shock absorbing member with respect to the mounting member when the tip of the hand collides with the peripheral device, the wiring can be cut,
The industrial robot according to claim 4, wherein the detection mechanism detects a relative movement of the shock absorbing member with respect to the mounting member when the wiring is cut. - 前記配線は、前記搭載部材に固定される固定側配線部と、前記衝撃吸収部材に固定される移動側配線部とを備え、
前記固定側配線部と前記移動側配線部とは、半田付けされて接続されていることを特徴とする請求項5記載の産業用ロボット。 The wiring includes a fixed-side wiring portion fixed to the mounting member, and a moving-side wiring portion fixed to the shock absorbing member,
The industrial robot according to claim 5, wherein the fixed side wiring portion and the moving side wiring portion are connected by soldering. - 前記衝撃吸収部材には、前記搬送対象物の一部が搭載されることを特徴とする請求項1から6のいずれかに記載の産業用ロボット。 The industrial robot according to any one of claims 1 to 6, wherein a part of the transport object is mounted on the shock absorbing member.
- 前記衝撃吸収部材は、炭素繊維で形成された筒状部材であることを特徴とする請求項1から7のいずれかに記載の産業用ロボット。 The industrial robot according to any one of claims 1 to 7, wherein the shock absorbing member is a cylindrical member formed of carbon fiber.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201180034381.XA CN102985235B (en) | 2010-07-13 | 2011-07-01 | Industrial robot |
KR1020137000786A KR101442431B1 (en) | 2010-07-13 | 2011-07-01 | Industrial robot |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010159001A JP5746483B2 (en) | 2010-07-13 | 2010-07-13 | Industrial robot |
JP2010-159001 | 2010-07-13 |
Publications (1)
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WO2012008320A1 true WO2012008320A1 (en) | 2012-01-19 |
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Family Applications (1)
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PCT/JP2011/065180 WO2012008320A1 (en) | 2010-07-13 | 2011-07-01 | Industrial robot |
Country Status (5)
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JP (1) | JP5746483B2 (en) |
KR (1) | KR101442431B1 (en) |
CN (1) | CN102985235B (en) |
TW (1) | TWI531450B (en) |
WO (1) | WO2012008320A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104444351B (en) * | 2014-11-07 | 2016-11-02 | 京东方科技集团股份有限公司 | Mechanical arm and substrate pick device |
TWI564128B (en) * | 2015-11-17 | 2017-01-01 | 和碩聯合科技股份有限公司 | Collision-avoidance detecting device, corresponding control method and applicable robotic arm thereof |
KR102370911B1 (en) * | 2018-02-09 | 2022-03-04 | 주식회사 한화 | Apparatus for impact mitigation of robot |
CN210282312U (en) * | 2019-06-28 | 2020-04-10 | 日本电产三协(浙江)有限公司 | Industrial robot |
CN111071899B (en) * | 2019-12-27 | 2021-11-05 | 龙岩烟草工业有限责任公司 | Lifting device and lifting machine |
JP7465709B2 (en) | 2020-04-10 | 2024-04-11 | ニデックインスツルメンツ株式会社 | Industrial Robots |
KR102521151B1 (en) * | 2021-05-26 | 2023-04-13 | 주식회사 뉴로메카 | Collaborative robot with collision detectiong function and collision detection method of collaborative robot |
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2011
- 2011-07-01 KR KR1020137000786A patent/KR101442431B1/en active IP Right Grant
- 2011-07-01 CN CN201180034381.XA patent/CN102985235B/en active Active
- 2011-07-01 WO PCT/JP2011/065180 patent/WO2012008320A1/en active Application Filing
- 2011-07-05 TW TW100123730A patent/TWI531450B/en active
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JPS63154187U (en) * | 1987-03-27 | 1988-10-11 | ||
JP2001054890A (en) * | 1999-08-16 | 2001-02-27 | Nikon Corp | Substrate carrying device and substrate treating device |
JP2003060004A (en) * | 2001-08-20 | 2003-02-28 | Yaskawa Electric Corp | Robot hand |
JP2005022049A (en) * | 2003-07-04 | 2005-01-27 | Toyo Eng Corp | Articulated robot device |
JP2010131676A (en) * | 2008-12-02 | 2010-06-17 | Seiko Epson Corp | Robot arm and robot arm device |
Also Published As
Publication number | Publication date |
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KR101442431B1 (en) | 2014-09-18 |
TW201208834A (en) | 2012-03-01 |
JP2012020360A (en) | 2012-02-02 |
TWI531450B (en) | 2016-05-01 |
KR20130041097A (en) | 2013-04-24 |
CN102985235B (en) | 2015-04-22 |
CN102985235A (en) | 2013-03-20 |
JP5746483B2 (en) | 2015-07-08 |
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