CN107389545B - Centering device for detecting object - Google Patents
Centering device for detecting object Download PDFInfo
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- CN107389545B CN107389545B CN201710333263.8A CN201710333263A CN107389545B CN 107389545 B CN107389545 B CN 107389545B CN 201710333263 A CN201710333263 A CN 201710333263A CN 107389545 B CN107389545 B CN 107389545B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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Abstract
The invention discloses a centering device for detecting the shape of an object, which comprises a centering unit, a positioning unit and a control unit, wherein the centering unit is used for arranging the center position of the object when the object runs in the X-axis direction and the Y-axis direction; and a fixing unit for fixing the posture of the objects arranged at the central position, wherein the centering unit and the fixing unit are provided with a buffer part for attenuating the driving force when the buffer part is contacted with the objects. Through the components, the accuracy of the center position of the object can be improved, and the detection quality can be improved.
Description
Technical Field
The present invention relates to a centering device for detecting an object, and more particularly, to a centering device for guiding centering for detecting an outer shape of an object.
Background
In general, a semiconductor wafer substrate, a liquid crystal glass substrate, or the like is manufactured through a plurality of processes, and in a final process, a quality inspection of an object such as a substrate is performed in order to inspect defects. In the quality detection items of these objects, the object is placed at the correct center of gravity for the purpose of shape detection.
The general centering means for setting the center positions of these objects arranges the center positions of the objects in accordance with the same specification regardless of the kind of the objects. As a result, it is difficult to arrange various types of accurate barycentric positions with respect to the object, which leads to a reduction in the quality of the detection object. Therefore, there is a recent trend toward the development of various centering devices that can facilitate the precise center position arrangement of objects.
Prior art documents
Patent document
Korean registered patent No. 10-1174860
Disclosure of Invention
Technical subject
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a centering device for detecting an object, which can improve the accuracy of arrangement of center positions for detecting the outer shape of the object.
Technical scheme
To achieve the above object, a centering device for detecting an object according to the present invention includes: a centering unit for aligning the center position of the object when the object moves in the X-axis and Y-axis directions; and a fixing unit that fixes a posture of the object with the center position aligned, and the centering unit and the fixing unit are provided with a buffer portion that attenuates a driving force when contacting the object.
According to one aspect, the centering unit includes a position determining part that arranges the object to a first position part that detects the object as a reference position and includes a movement in an X-axis direction and a second position part that is adjacent to the first position part and is driven in a Y-axis direction; a center pressurizing unit that operates to the position determining unit and includes a first pressurizing unit that operates in the X-axis direction while facing the first position unit and a second pressurizing unit that operates in the Y-axis direction while facing the second position unit, the second pressurizing unit being adjacent to the first pressurizing unit; and a support part supporting the position determining part and the central pressing part, wherein the mounting positions are arranged.
According to one aspect, the damper unit is disposed at each of the first position unit, the second position unit, the first pressurizing unit, and the second pressurizing unit, and includes a damper (Shock Absorber) for damping a driving force.
According to one aspect, the support portion includes a rectangular support frame, the first and second position portions and the first and second pressing portions are disposed on one side, and the centering unit is modularized, and a first guide hole disposed at a position spaced apart from each frame of the support frame by a first interval, and a second guide hole disposed at a position spaced apart from the first guide hole in a diagonal direction by a second interval different from the first interval are disposed to prevent reverse insertion.
According to one side surface, a plurality of checking blocks are configured on each frame of the supporting frame, and the checking blocks are sensed to check whether the supporting frame is inserted mistakenly or not.
According to one side, the fixing unit comprises: a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and a fixed driving unit for driving the fixed body, wherein the buffer unit for attenuating the driving force of the fixed body is disposed between the fixed body and the fixed driving unit.
According to one side, the fixing body is operated from the Z-axis direction via the fixing driving unit, and the posture of the object is fixed by at least one of pressing and suction.
According to one side, a sensor for detecting the outer shape of the object, which is arranged toward the center position via the centering unit, is disposed.
According to a preferred embodiment of the present invention, a centering device for detecting an object includes: a centering unit that arranges an object, which travels in a first direction and a second direction orthogonal to the first direction, to a central position; and a fixing unit which is operated in a third direction orthogonal to the first and second directions at a position opposite to the centering unit, fixes the posture of the object with the center position aligned, and is modularized with the centering unit and the fixing unit, and is provided with a buffer part which attenuates the driving force when contacting with the object.
According to one side, the centering unit comprises: a position determining unit which arranges the object to a first position part for detecting the object as a reference position and including a first position part moving in an X-axis direction and a second position part adjacent to the first position part and driven in a Y-axis direction; a center pressurizing unit that operates to the position determining unit and includes a first pressurizing unit that operates in the first direction while facing the first position unit and a second pressurizing unit that operates in the second direction while facing the second position unit, the second pressurizing unit being adjacent to the first pressurizing unit; and a support part for supporting the position determining part and the central pressing part to be modularized, and arranging the installation positions.
According to one aspect, the support portion includes a rectangular support frame, the first and second position portions and the first and second pressing portions are disposed on one side, the centering unit is modularized, the first guide holes are disposed at positions spaced apart from each other by a first distance from each side frame of the support frame, the first guide holes are disposed at positions spaced apart from each other in a diagonal direction from the first guide holes, the second guide holes are disposed at positions spaced apart from each other by a second distance different from the first distance from the side frame, the reverse insertion is prevented, the plurality of inspection blocks are disposed on each side frame of the support frame, and the inspection blocks are sensed to inspect whether the support frame is erroneously inserted.
According to one side, the fixing unit comprises: a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and a fixing drive unit that drives the fixing body, wherein the fixing body is operated in the Z-axis direction by the fixing drive unit, and the posture of the object is fixed by at least one of pressurization and suction.
According to one aspect, the damper unit is disposed at each of the first position unit, the second position unit, the first pressurizing unit, and the second pressurizing unit, and includes a damper (Shock Absorber) for damping a driving force.
According to one aspect, the buffer portion that attenuates the driving force of the fixed body is disposed between the fixed body and the fixed driving portion.
Technical effects
With the present invention having the above configuration, first, in arranging the object at the center position, the buffer portion that attenuates the driving force when in contact is provided, so that damage to the object is prevented and the detection quality of the object can be improved.
Second, it is applicable to objects of various sizes, facilitating detection diversity assurance.
Third, the reverse insertion and the erroneous insertion of the modularized centering unit can be prevented, and the improvement of the alignment accuracy of the center position can be facilitated.
Drawings
Fig. 1 is a perspective view showing a centering device for outline detection of an object, generally, according to a preferred embodiment of the present invention.
Fig. 2 is a plan view generally showing a centering unit of the centering device shown in fig. 1.
Fig. 3 is a plan view generally showing a support portion of the centering unit shown in fig. 2.
Fig. 4 is a side view generally illustrating a fixing unit of the centering device shown in fig. 1.
Description of the symbols
1: centering device
10: centering unit
20: position determining part
50: center pressurization part
80: supporting part
90: fixing unit
Detailed Description
Hereinafter, a preferred embodiment of the present invention is described with reference to the accompanying drawings.
Referring to fig. 1, a centering device 1 for detecting an object according to a preferred embodiment of the present invention includes a centering unit 10 and a fixing unit 90.
For reference, the centering device 1 for detecting an object described in the present invention is applied to a detector for aligning an object 0, which requires a high precision manufacturing process such as a substrate, to a central position to detect quality.
The centering unit 10 moves in the first direction X-axis direction and the second direction Y-axis direction with respect to the object 0, and arranges the center position of the object 0. These centering units 10 include a position determining unit 20, a center pressing unit 50, and a support unit 80.
As shown in fig. 2, the position determination unit 20 includes a first position unit 30 that moves in the X direction, and a second position unit 40 that moves in the Y axis direction adjacent to the first position unit 30, and is operated at a reference position for detecting the object 0. For this purpose, the first position unit 30 includes a first position body 31 that can be brought into close contact with the object 0 and a first driving unit 32 that drives the first position body 31 in the X-axis direction, and the second position unit 40 also includes a second position body 41 that can be brought into close contact with the object 0 and a second driving unit 42 that drives the second position body 41 in the Y-axis direction.
In this case, the first and second driving portions 32 and 42 include, for example, cylinders connected to a driving source of a driving motor, not shown, to generate a linear driving force together with the pistons. For reference, the first and second driving portions 32 and 42 preferably absorb the driving force by sandwiching an elastic body, not shown, between the first and second position bodies 31 and 41.
Since the first and second position determining portions 30 and 40 move forward and backward in the X-axis and Y-axis directions with respect to the reference position, respectively, the position determining portion 20 places the object 0 at the reference position. In contrast, the first and second position bodies 31,41 of the first and second position portions 30,40 are selectively brought into close contact with the object 0 to align the object 0.
The center pressurizing unit 50 includes a first pressurizing unit 60 that is opposed to the first position unit 30 and moves in the X-axis direction, and a second pressurizing unit 70 that is adjacent to the first pressurizing unit 60 and is opposed to the second position unit 40 and moves in the Y-axis direction, and moves to the position determining unit 20. The first pressing portion 60 of the center pressing portion 50 includes a first pressing member 61 that can be brought into close contact with the object 0 and a third driving portion 62 that drives the first pressing member 61 in the X-axis direction, and the second pressing portion 70 also includes a second pressing member 71 that can be brought into close contact with the object 0 and a fourth driving portion 72 that drives the second pressing member 71 in the Y-axis direction.
The third and fourth driving units 62 and 72 include a cylinder, not shown, connected to a driving source, not shown, for driving a piston in a linear direction, and an elastic body, not shown, for elastically pressing the first and second pressing bodies 61 and 71, respectively. That is, the first to fourth driving units 32,42,62,72 of the position determining unit 20 and the center pressing unit 50 have similar configurations to each other.
On the other hand, the center pressing unit 50 having the above-described configuration presses the object 0 located at the reference position via the position determining unit 20, and arranges the object at the center position. In the process of aligning the center positions of the objects 0 in this manner, the buffer portions S including dampers (Shock absorbers) for buffering the driving force are disposed at the first position portion 30, the second position portion 40, the first pressure portion 60, and the second pressure portion 70, respectively. The buffer unit S reduces acceleration at the start point of contact with the object 0 and attenuates the impact applied to the object 0 even when the first and second position units 30 and 40 and the first and second pressure units 60 and 70 are driven toward the object 0 at a fast speed.
The support portion 80 supports the position determining portion 20 and the center pressing portion 50, and arranges the mounting positions. These supporting portions 80 include a quadrangular supporting frame 81, and the first and second position portions 30,40 and the first and second pressing portions 60,70 are respectively disposed at one side, so that the centering unit 10 is modularized. In this case, the central region of the support frame 81 is shown in fig. 3 as an open figure.
On the other hand, as shown in fig. 3, first guide holes 82 are formed at positions spaced apart from each other by a first distance G1 from the respective rims of the support frame 81, and second guide holes 83 are formed at positions spaced apart from the first guide holes 82 in the diagonal direction and at positions spaced apart from each other by a second distance G2 different from the first distance G1 from the rims.
The first and second guide holes 82 and 83 are disposed at different intervals G1 and G2 from the side frame of the support frame 81, respectively, so that the support frame 81 of the centering unit 10 can be prevented from being mounted by being inserted backward into a mounting base, not shown. That is, guide bosses (not shown) corresponding to the first and second guide holes 82,83 are disposed on a mounting table (not shown) to mount the support frame 81 to a fixed position without reverse insertion, thereby supporting the operation of the position determining unit 20 and the center pressing unit 50.
As shown in fig. 3, a plurality of inspection blocks 84 are disposed on each side frame of the support frame 81, and a sensor 85 senses the inspection blocks 84 and inspects whether the support frame 81 is erroneously inserted. That is, whether the support frame 81 is located at a fixed position is determined by sensing of the check block 84. In this case, when none of the plurality of inspection blocks 84 is sensed, the worker is notified that the support frame 81 is erroneously inserted.
As a result, the support frame 81 can be mounted at a correct position via the first and second guide holes 82 and 83, the inspection block 84, and the sensor 85, and the correct centering operation of the position determining unit 20 and the center pressing unit 50 supported by the support frame 81 is guided.
The fixing unit 90 fixes the posture of the object 0 whose central position is aligned. The fixing unit 90 includes a centering unit 10, a fixing body 91 for pressing the object 0 aligned at the center position, and a fixing driving unit 92 for driving the fixing body 91. These fixing bodies 91 are attached to the centering unit 10 at the center position of the objects 0 aligned in the X and Y axis directions so as to face each other in the Z axis direction in the third direction, and are driven in the Z axis direction by the driving force of the fixing driving section 92. Thereby, the fixed body 91 selectively presses the object 0 in the Z-axis direction to fix the posture. A buffer portion S for buffering the driving force is also disposed between the fixing body 91 and the fixing driving portion 92 of the fixing unit 90.
On the one hand, a sensor, not shown, including an optical system for detecting the objects 0 arranged from the center position, is disposed on one side of the centering unit 10, detecting the outer shape of the objects 0. The outline detection of the object 0 by these sensors (not shown) is not the gist of the present invention, and therefore, detailed description thereof will be omitted.
The centering operation of the centering device 1 for detecting the outer shape of the object 0 according to the present invention, which has the above-described configuration, will be described with reference to the drawings of fig. 2 to 4.
As shown in fig. 2 and 3, first, the support frame 81 of the support 80 is placed on a mounting table, not shown, in a state in which reverse insertion is prevented through the first and second guide holes 82 and 83, and erroneous insertion is prevented by sensing between the inspection block 84 and the sensor 85. In this way, the modular centering unit 10 supported by the support frame 81 is mounted at the mounting position.
Thereafter, when the object 0 is placed on the support frame 81, the first and second position units 30 and 40 of the position determination unit 10 are placed while being pressed with respect to the object 0. For reference, the first and second position units 30 and 40 are located at positions separated from the reference positions before the object 0 is placed, and when the object 0 is placed, the first and second position bodies 31 and 41 move in the X-axis and Y-axis directions, respectively, and the object 0 is placed from the reference positions. In this case, the movement of the first and second position members 31 and 41 is formed by the first and second driving portions 32 and 42, and the driving force is attenuated by the buffer portion S at the moment when the first and second driving portions contact the object 0.
Further, as the object 0 is located at the reference position, the first and second pressurizing units 60 and 70 of the center pressurizing unit 50 move in the X-axis and Y-axis directions, respectively, and the object 0 is moved from the center position. In this case, the first and second pressurizing members 61 and 71 of the first and second pressurizing units 60 and 70 are driven by the third and fourth driving units 62 and 72, and the pressurizing force is buffered by the buffer unit S, so that the pressurizing force is closely attached to the object 0.
As can be seen from this, when the center positions of the objects 0 are aligned via the position determining unit 20 and the center pressing unit 50, the fixed body 91 of the fixing unit 90 moves down in the Z-axis direction as shown in fig. 4, and fixes the posture of the object 0. When the posture of the object 0 is fixed at the center position via the fixing body 91, the position determining unit 20 and the center pressing unit 50 of the centering unit 10 move to be separated from the object 0, and the outline detection of the object 0 is performed via a sensor including an optical system not shown.
On the other hand, in the present invention, as shown in fig. 4, the posture of the fixing body 91 of the fixing means 90 is shown and predicted, and the fixing body is driven in the Z-axis direction by the fixing driving unit 92 to press the upper portion of the object 0 to fix the object 0, but the present invention is not limited thereto. For example, although not shown in detail, the fixing body 91 may fix a modification of the posture of the object 0 arranged from the center position by an adsorption force arranged at the lower part of the object 0. Further, another modification of the fixing body 91 may be provided in which a first fixing body (not shown) above the object 0 is pressed and a second fixing body (not shown) below the object 0 is sucked. In this way, even when the fixing body 91 fixes the posture of the object 0 by the suction force, the fixing body 91 is driven toward the object 0 side with respect to the object 0 by the fixing driving unit 92.
As described above, although the present invention has been described with reference to the preferred embodiments, it is understood that various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present invention as set forth in the following claims.
Claims (11)
1. A centering device for detecting an object, comprising:
a centering unit for aligning the center position of the object when the object moves in the X-axis and Y-axis directions; and
a fixing unit fixing a posture of the object with the center position arranged, and
the centering unit and the fixing unit are provided with a buffer portion which attenuates the driving force when contacting the object,
wherein the centering unit includes:
a position determining unit which arranges the object to a first position part which is used for detecting the object as a reference position and moves towards the X-axis direction, and a second position part which is adjacent to the first position part and is driven towards the Y-axis direction, wherein the first position part is provided with a first position body which can be tightly attached to the object and a first driving part, the second position part is provided with a second position body which can be tightly attached to the object and a second driving part, and the shape of the first position body is different from that of the second position body;
a center pressing unit which moves to the position determining unit and includes a first pressing unit which moves in the X-axis direction and faces the first position unit, and a second pressing unit which moves in the Y-axis direction and is adjacent to the first pressing unit and faces the second position unit, the first pressing unit having a first pressing body and a third driving unit which can be brought into close contact with an object, the second pressing unit having a second pressing body and a fourth driving unit which can be brought into close contact with the object, the first pressing body and the second pressing body having different shapes; and
a support part for supporting the position determining part and the central pressurizing part, wherein the mounting positions are arranged, the support part comprises a quadrangular support frame, the first and second position parts and the first and second pressurizing parts are respectively arranged at one side, the centering unit is modularized, and
the first guide holes are arranged at positions spaced apart from each other by a first distance from each frame of the support frame, the second guide holes are arranged at positions spaced apart from the first guide holes in a diagonal direction from each frame, and the second guide holes are arranged at positions spaced apart from each other by a second distance different from the first distance from each frame.
2. The centering device for detecting an object according to claim 1, wherein the buffer portion is disposed at each of the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion, and the buffer portion includes a damper for buffering a driving force.
3. The centering device for detecting an object according to claim 1, wherein a plurality of inspection blocks are disposed on each frame of the support frame, and the inspection blocks are sensed to check whether the support frame is erroneously inserted.
4. The centering device for detecting an object according to claim 1, wherein the fixing unit includes:
a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and
a fixed driving part for driving the fixed body, and
the buffer portion for attenuating the driving force of the fixed body is disposed between the fixed body and the fixed driving portion.
5. The centering device for detecting an object according to claim 1, wherein the fixing body is operated from a Z-axis direction via the fixing driving section, and a posture of the object is fixed by at least any one of pressing and suction.
6. The centering device for detecting an object according to claim 1, wherein a sensor for detecting an outer shape of the object arranged toward the center position via the centering unit is provided.
7. A centering device for detecting an object, comprising:
a centering unit that arranges an object, which travels in a first direction and a second direction orthogonal to the first direction, to a central position; and
a fixing unit which is operated in a third direction orthogonal to the first and second directions at a position opposite to the centering unit, fixes the posture of the object with the center position arranged, and
the centering unit and the fixing unit are modularized, and a buffer part for attenuating driving force when contacting with the object is arranged,
wherein the centering unit includes:
a position determining unit which arranges the object to a first position part which is used for detecting the object as a reference position and moves towards the X-axis direction, and a second position part which is adjacent to the first position part and is driven towards the Y-axis direction, wherein the first position part is provided with a first position body which can be tightly attached to the object and a first driving part, the second position part is provided with a second position body which can be tightly attached to the object and a second driving part, and the shape of the first position body is different from that of the second position body;
a center pressing unit which is operated to the position determining unit, includes a first pressing unit which is operated in the first direction so as to face the first position unit, and a second pressing unit which is operated in the second direction so as to face the second position unit, is adjacent to the first pressing unit, and has a first pressing body and a third driving unit which can be brought into close contact with the object, and a second pressing unit which has a second pressing body and a fourth driving unit which can be brought into close contact with the object, and is different in shape from the first pressing body; and
a support part for supporting the position determining part and the central pressurizing part in a modularized manner, wherein the mounting positions are arranged, the support part comprises a quadrangular support frame, the first and second position parts and the first and second pressurizing parts are respectively arranged on one side, the centering unit is modularized, and
the first guide holes are arranged at positions spaced apart from each other by a first distance from each frame of the support frame, the second guide holes are arranged at positions spaced apart from the first guide holes in a diagonal direction from each frame, and the second guide holes are arranged at positions spaced apart from each other by a second distance different from the first distance from each frame.
8. The centering device for detecting an object according to claim 7, wherein a plurality of inspection blocks are disposed on each frame of the support frame, and the inspection blocks are sensed to check whether the support frame is erroneously inserted.
9. The centering device for detecting an object according to claim 7, wherein the fixing unit includes:
a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and
a fixed driving part for driving the fixed body, and
the fixing body is operated in the Z-axis direction via the fixing driving unit, and fixes the posture of the object by at least one of pressurization and suction.
10. The centering device for detecting an object according to claim 7, wherein the buffer portion is disposed at each of the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion, and the buffer portion includes a damper for buffering a driving force.
11. The centering device for detecting an object according to claim 10, wherein the buffer portion attenuating the fixed body driving force is disposed between the fixed body and a fixed driving portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2016-0059973 | 2016-05-17 | ||
| KR1020160059973A KR101804051B1 (en) | 2016-05-17 | 2016-05-17 | Centering apparatus for the inspection object |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107389545A CN107389545A (en) | 2017-11-24 |
| CN107389545B true CN107389545B (en) | 2020-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710333263.8A Active CN107389545B (en) | 2016-05-17 | 2017-05-12 | Centering device for detecting object |
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| KR (1) | KR101804051B1 (en) |
| CN (1) | CN107389545B (en) |
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| KR102291194B1 (en) | 2020-03-09 | 2021-08-20 | 에이엠티 주식회사 | The align device and method thereof of the device having micro pitch |
Citations (11)
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| CN107389545A (en) | 2017-11-24 |
| KR101804051B1 (en) | 2017-12-01 |
| KR20170129373A (en) | 2017-11-27 |
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