CN107389545B - Centering device for detecting object - Google Patents

Abstract

Disclosed is a centering device for detecting the shape of an object according to the present invention, comprising a centering unit, which runs in the direction of the X axis and the Y axis for the object, and arranges the center position of the object; and a fixing unit, the fixed center position is arranged. The posture of the object, and the centering unit and the fixing unit are provided with buffers that attenuate the driving force when they come into contact with the object. These structures can help improve the accuracy of the center position of the object and improve the detection quality.

Description

Centering device for inspection objects

technical field

The present invention relates to a centering device for a detection object, and more particularly, to a centering device for guiding the centering for a shape detection of a detection object.

Background technique

Generally, the manufacture of semiconductor wafer substrates, liquid crystal glass substrates, etc. goes through a plurality of processes, and in the final process, in order to detect defects, an object quality inspection such as a substrate is performed. In the quality inspection items of these objects, the objects are placed at the correct center of gravity for shape detection.

The common centering device used to set the center position of these objects arranges the center positions of the objects according to the same specification regardless of the type of the object. As a result, it is difficult to arrange various kinds of accurate center-of-gravity positions for the object, which leads to a decrease in the quality of the detection object. Therefore, there has recently been an ongoing trend of research into various centering devices that can facilitate precise center position alignment of objects.

prior art literature

Patent Literature

Korean Registered Patent No. 10-1174860

SUMMARY OF THE INVENTION

technical issues

The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a centering device for detecting objects that can improve the accuracy of center position alignment for object shape detection.

Technical solutions

In order to achieve the object, the centering device for detecting an object according to the present invention includes: a centering unit, which runs in the X-axis and Y-axis directions for the object, and arranges the center position of the object; and a fixing unit, which fixes the center position In the posture of the objects that are arranged, the centering unit and the fixing unit are provided with buffers that attenuate the driving force when they come into contact with the objects.

According to one aspect, the centering unit includes a position determination unit that arranges the objects to be a reference position for detecting the object, and includes a first position unit sum running in the X-axis direction, and the first position The second position part is adjacent to the part and drives in the Y-axis direction; the central pressing part runs toward the position determination part, and includes a first pressing part opposite to the first position part and runs in the X-axis direction and a second pressing portion adjacent to the first pressing portion and opposite to the second position portion and running in the Y-axis direction; and a support portion for supporting the position determining portion and the central pressing portion , the installation positions are arranged.

According to one side surface, the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion are provided with the buffer portions, which include a damper for buffering the driving force, respectively. (Shock Absorber).

According to one side, the support part includes a quadrangular support frame, and the first and second position parts and the first and second pressing parts are respectively arranged on one side, and the centering unit is modularized and arranged from the Each frame of the support frame has a first guide hole arranged at a position separated by a first interval, and a position separated from the first guide hole in a diagonal direction from the frame at a distance from the first interval. The second guide holes are arranged at different second intervals to prevent reverse insertion.

According to one side surface, a plurality of inspection blocks are arranged on each frame of the support frame, and the inspection blocks are sensed to inspect whether or not the support frame is inserted incorrectly.

According to one aspect, the fixing unit includes: a fixing body that fixes the posture of the objects arranged at the center position via the centering unit; and a fixing driving part that drives the fixing body and The buffer portion for damping the driving force of the fixed body is arranged between the fixed body and the fixed driving portion.

According to one aspect, the fixed body is driven from the Z-axis direction through the fixed drive unit, and the posture of the object is fixed by at least any one of pressurization or suction.

According to one side surface, a sensor for detecting the shape of the object is arranged through the centering unit toward the center position.

According to a preferred embodiment of the present invention, the centering device for detecting an object includes: a centering unit for arranging the object running in a first direction and a second direction perpendicular to the first direction to a center position; and The fixing unit operates in a third direction orthogonal to the first and second directions at a position opposite to the centering unit, and fixes the posture of the object whose center positions are arranged, and the centering unit and The fixing unit is modularized, and is provided with a buffer that damps the driving force when it comes into contact with the object.

According to one aspect, the centering unit includes: a position determining unit for arranging the object to a reference position for detecting the object, and including a first position unit running in the X-axis direction and a first position unit and the first position The position part is adjacent to the second position part, which is driven in the Y-axis direction; the central pressing part runs toward the position determination part, and includes a first position part opposite to the first position part and runs in the first direction. a pressing part and a second pressing part which is adjacent to the first pressing part but is opposite to the second position part and runs in the second direction; and a support part which supports the position determining part And the central pressing part is modularized, and the installation positions are arranged.

According to one side, the support part includes a quadrangular support frame, and the first and second position parts and the first and second pressing parts are respectively arranged on one side, and the centering unit is modularized and arranged from all Each frame of the support frame has a first guide hole arranged at a position separated by a first interval, and a position separated from the first guide hole in a diagonal direction from the frame to the first guide hole. The second guide holes arranged at the positions separated by the second intervals at different intervals prevent reverse insertion, and a plurality of inspection blocks are arranged on each frame of the support frame, and the inspection blocks are sensed to check for errors in the support frame. Insert or not.

According to one aspect, the fixing unit includes: a fixing body that fixes the posture of the objects arranged at the center position via the centering unit; and a fixing driving unit that drives the fixing body, and the fixing The body is driven in the Z-axis direction through the fixing drive unit, and the posture of the object is fixed by at least any one of pressurization or suction.

According to one side surface, the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion are provided with the buffer portions, which include a damper for buffering the driving force, respectively. (Shock Absorber).

According to one side surface, the buffer portion for damping the driving force of the stationary body is arranged between the stationary body and the stationary driving portion.

technical effect

According to the present invention having the above-described configuration, firstly, in the process of arranging the objects at the center position, the buffer portion that attenuates the driving force upon contact is provided, so that the damage of the objects can be prevented, and the detection quality of the objects can be improved.

Second, it can be applied to objects of various sizes, which is beneficial to ensure the detection diversity.

Third, it can prevent reverse insertion and wrong insertion of the modularized centering unit, which can help improve the accuracy of center position arrangement.

Description of drawings

FIG. 1 is a perspective view illustrating a centering device for shape detection of an object roughly according to a preferred embodiment of the present invention.

FIG. 2 is a plan view generally showing a centering unit of the centering device shown in FIG. 1 .

FIG. 3 is a plan view roughly showing a support portion of the centering unit shown in FIG. 2 .

FIG. 4 is a side view generally showing a fixing unit of the centering device shown in FIG. 1 .

Symbol Description

1: Centering device

10: Centering unit

20: Position Decision Department

50: Center pressurizing part

80: Support part

90: Fixed unit

Detailed ways

Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1 , according to a preferred embodiment of the present invention, a centering device 1 for detecting an object includes a centering unit 10 and a fixing unit 90 .

For reference, the centering device 1 for detecting an object described in the present invention is suitable for a detector for arranging an object 0 that requires a high-precision manufacturing process such as a substrate to a central position to detect the quality.

The centering unit 10 runs for the object 0 in the X-axis direction of the first direction and the Y-axis direction of the second direction, and arranges the center position of the object 0 . These centering units 10 include a position determination part 20 , a center pressing part 50 , and a support part 80 .

As shown in FIG. 2 , the position determination part 20 includes a first position part 30 running in the X direction, and a second position part 40 adjacent to the first position part 30 and running in the Y axis direction for detecting The reference position of object 0 is moved. To this end, the first position portion 30 includes a first position body 31 that can be in close contact with the object 0 and a first drive portion 32 that drives the first position body 31 in the X-axis direction, and the second position portion 40 also includes a The second position body 41 that is in close contact with the object 0 and the second drive unit 42 that drives the second position body 41 in the Y-axis direction.

In this case, the first and second drive units 32 and 42 include cylinders that generate linear driving force together with pistons, such as being connected to a drive source of a drive motor (not shown). For reference, elastic bodies (not shown) of the first and second position bodies 31 and 41 are sandwiched between the first and second driving parts 32 and 42, and the driving force is well buffered.

Since the first and second position units 30 and 40 move forward and backward in the X-axis and Y-axis directions, respectively, with respect to the reference position, these position determination units 20 place the object 0 at the reference position. In this regard, the first and second position bodies 31 and 41 of the first and second position parts 30 and 40 selectively adhere to the object 0 to arrange the position of the object 0 .

The central pressing part 50 includes a first pressing part 60 which is opposite to the first position part 30 and runs in the X-axis direction; The second pressing unit 70 that moves in the axial direction moves toward the position determining unit 20 . The first pressing parts 60 of these central pressing parts 50 include a first pressing body 61 that can be in close contact with the object 0 and a third driving part 62 that drives the first pressing body 61 in the X-axis direction. The second pressing unit 70 also includes a second pressing body 71 that can be in close contact with the object 0 and a fourth driving unit 72 that drives the second pressing body 71 in the Y-axis direction.

The third and fourth driving parts 62 and 72 include a cylinder (not shown) that is connected to a driving source not shown, and drives a piston in a linear direction, and a first and second pressurizing bodies that elastically pressurize the piston, respectively. 61,71 Elastomer not shown. That is, the above-described first to fourth drive units 32 , 42 , 62 , and 72 of the position determination unit 20 and the center pressing unit 50 have mutually similar configurations.

On the other hand, the central pressing unit 50 having the above-described configuration presses the object 0 at the reference position via the position determining unit 20, and aligns the object 0 at the central position. In the process of arranging the center position of the object 0 in this way, the first position portion 30 , the second position portion 40 , the first pressing portion 60 and the second pressing portion 70 are respectively arranged, including a buffer for buffering the driving force. The buffer part S of the shock absorber (Shock Absorber). Even if the buffer portion S drives the first and second position portions 30 and 40 and the first and second pressing portions 60 and 70 toward the object 0 at a high speed, the acceleration at the starting point of contact with the object 0 can be reduced. , attenuates the impact applied to object 0.

The supporting portion 80 supports the position determining portion 20 and the center pressing portion 50, and aligns the installation positions. These support parts 80 include a quadrangular support frame 81 , and the first and second position parts 30 , 40 and the first and second pressing parts 60 , 70 are arranged on one side, respectively, and the centering unit 10 is modularized. In this case, the central area of the support frame 81 as shown in FIG. 3 has an open image.

On the one hand, as shown in FIG. 3 , from each frame of the support frame 81 , first guide holes 82 are formed at positions separated by the first interval G1 , and the first guide holes 82 are formed diagonally from the first guide holes 82 . The directionally spaced positions are arranged, and the second guide holes 83 are arranged at positions separated from the frame by a second interval G2 different from the first interval G1.

The first and second guide holes 82, 83 are respectively arranged at different separation intervals G1, G2 from the frame of the support frame 81, so as to prevent the support frame 81 of the centering unit 10 from being reversely inserted into a not-shown The mounting table is installed. That is, guide protrusions (not shown) corresponding to the first and second guide holes 82 and 83 are arranged on an unshown mounting table, so that the support frame 81 is installed without being inserted backwards to the fixed position, and the support position determination unit 20 and the operation of the central pressing part 50 .

Further, as shown in FIG. 3 , a plurality of inspection blocks 84 are arranged on each frame of the support frame 81 , and the sensor 85 senses the inspection blocks 84 to check whether or not the support frame 81 is inserted incorrectly. That is, whether or not the support frame 81 is positioned at the fixed position is determined by whether the inspection block 84 is sensing or not. In this case, when none of the plurality of inspection blocks 84 is sensed, the operator is notified that the support frame 81 is erroneously inserted.

From this, it can be seen that the support frame 81 can be installed in the correct position through the first and second guide holes 82 and 83 , the inspection block 84 and the sensor 85 to guide the position determining portion 20 and the center supported by the support frame 81 . Accurate centering operation of the pressurizing portion 50 .

The fixing unit 90 fixes the posture of the object 0 whose center position is aligned. The fixing unit 90 includes an object 0 arranged in a central position under pressure by the centering unit 10 , a fixing body 91 having a fixed posture, and a fixing driving part 92 that drives the fixing body 91 . These fixed bodies 91 are attached to the centering unit 10 at the center of the object 0 aligned in the X and Y axis directions in the third Z axis direction, and are driven in the Z axis direction by the driving force of the fixed drive unit 92 . As a result, the fixed body 91 selectively presses the object 0 in the Z-axis direction to fix the posture. Here, between the fixed body 91 of the fixed unit 90 and the fixed driving part 92, a buffer part S for buffering the driving force is also arranged.

On the one hand, an unillustrated sensor is arranged on one side of the centering unit 10 , which includes an optical system for detecting the objects 0 arranged by the center position, and detects the shape of the objects 0 . The detection of the outer shape of the object 0 by these sensors (not shown) is not the gist of the present invention, so the detailed description thereof is omitted.

2 to 4 , the centering operation of the centering device 1 for detecting the outer shape of the object 0 according to the present invention having the above-described configuration will be described.

As shown in FIG. 2 and FIG. 3 , first, the support frame 81 of the support portion 80 is prevented from being inserted backward through the first and second guide holes 82 and 83 , and is passed through the transmission between the inspection block 84 and the sensor 85 . The sensor is placed on a mounting table not shown in a state where erroneous insertion is prevented. In this way, the modular centering unit 10 is supported by the support frame 81 and installed at the installation position.

After that, when the object 0 is placed on the support frame 81 , the first and second position portions 30 and 40 of the position determination unit 10 are pressed and placed with the object 0 as a reference. For reference, the first and second position parts 30 and 40 are respectively located at positions separated from the reference position before the object 0 is placed, and when the object 0 is placed, the first and second position parts 31 and 41 are respectively directed to X The axis and the Y axis are moved, and the object 0 is placed from the reference position. In this case, the movement of the first and second position bodies 31 and 41 is formed by the first and second driving parts 32 and 42 , and the driving force is attenuated through the buffer part S at the moment when the first and second driving parts 32 and 42 come into contact with the object 0 .

In addition, when the object 0 is located at the reference position, the first and second pressing parts 60 and 70 of the central pressing part 50 move in the X-axis and Y-axis directions, respectively, to move the object 0 from the center position. Also in this case, the first and second pressing bodies 61, 71 of the first and second pressing parts 60, 70 are driven by the third and fourth driving parts 62, 72, and are driven by the buffer part The S pressurization force is buffered and clings to object 0.

As can be seen from this, when the center positions of the object 0 are aligned via the position determining unit 20 and the center pressing unit 50, as shown in FIG. When the posture of the object 0 is fixed at the center position by the fixed body 91, the position determination part 20 and the center pressing part 50 of the centering unit 10 are moved to separate from the object 0, respectively, and are separated from the object 0 by means of an optical system not shown. Sensor, the shape detection of object 0 is performed.

On the one hand, in the present invention, as shown in FIG. 4 , the fixing body 91 of the fixing unit 90 is shown and predicted, which is driven by the fixing drive part 92 in the Z-axis direction, and presses the upper part of the object 0 to fix the object 0 posture, but not limited to this. For example, although not shown in detail, the fixing body 91 may be arranged in a modified example of the posture of the object 0 arranged in the center position by the suction force arranged at the lower part of the object 0 . In addition, other modifications of the fixed body 91 may also include a first fixed body (not shown) on the upper part of the object 0 for pressing and a second fixed body (not shown) on the lower part of the suction object 0 at the same time. In this way, when the fixed body 91 fixes the posture of the object 0 by the suction force, the fixed body 91 is also driven to the object 0 side through the fixing drive unit 92 for the object 0 .

As described above, the description has been made with reference to the preferred embodiments of the present invention. However, it is understood that those skilled in the art can carry out the present invention without departing from the spirit and scope of the present invention described in the following claims. Various modifications and changes.

Claims (11)

1. A centering device for detecting an object, comprising:

a centering unit for aligning the center position of the object when the object moves in the X-axis and Y-axis directions; and

a fixing unit fixing a posture of the object with the center position arranged, and

the centering unit and the fixing unit are provided with a buffer portion which attenuates the driving force when contacting the object,

wherein the centering unit includes:

a position determining unit which arranges the object to a first position part which is used for detecting the object as a reference position and moves towards the X-axis direction, and a second position part which is adjacent to the first position part and is driven towards the Y-axis direction, wherein the first position part is provided with a first position body which can be tightly attached to the object and a first driving part, the second position part is provided with a second position body which can be tightly attached to the object and a second driving part, and the shape of the first position body is different from that of the second position body;

a center pressing unit which moves to the position determining unit and includes a first pressing unit which moves in the X-axis direction and faces the first position unit, and a second pressing unit which moves in the Y-axis direction and is adjacent to the first pressing unit and faces the second position unit, the first pressing unit having a first pressing body and a third driving unit which can be brought into close contact with an object, the second pressing unit having a second pressing body and a fourth driving unit which can be brought into close contact with the object, the first pressing body and the second pressing body having different shapes; and

a support part for supporting the position determining part and the central pressurizing part, wherein the mounting positions are arranged, the support part comprises a quadrangular support frame, the first and second position parts and the first and second pressurizing parts are respectively arranged at one side, the centering unit is modularized, and

the first guide holes are arranged at positions spaced apart from each other by a first distance from each frame of the support frame, the second guide holes are arranged at positions spaced apart from the first guide holes in a diagonal direction from each frame, and the second guide holes are arranged at positions spaced apart from each other by a second distance different from the first distance from each frame.

2. The centering device for detecting an object according to claim 1, wherein the buffer portion is disposed at each of the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion, and the buffer portion includes a damper for buffering a driving force.

3. The centering device for detecting an object according to claim 1, wherein a plurality of inspection blocks are disposed on each frame of the support frame, and the inspection blocks are sensed to check whether the support frame is erroneously inserted.

4. The centering device for detecting an object according to claim 1, wherein the fixing unit includes:

a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and

a fixed driving part for driving the fixed body, and

the buffer portion for attenuating the driving force of the fixed body is disposed between the fixed body and the fixed driving portion.

5. The centering device for detecting an object according to claim 1, wherein the fixing body is operated from a Z-axis direction via the fixing driving section, and a posture of the object is fixed by at least any one of pressing and suction.

6. The centering device for detecting an object according to claim 1, wherein a sensor for detecting an outer shape of the object arranged toward the center position via the centering unit is provided.

7. A centering device for detecting an object, comprising:

a centering unit that arranges an object, which travels in a first direction and a second direction orthogonal to the first direction, to a central position; and

a fixing unit which is operated in a third direction orthogonal to the first and second directions at a position opposite to the centering unit, fixes the posture of the object with the center position arranged, and

the centering unit and the fixing unit are modularized, and a buffer part for attenuating driving force when contacting with the object is arranged,

wherein the centering unit includes:

a position determining unit which arranges the object to a first position part which is used for detecting the object as a reference position and moves towards the X-axis direction, and a second position part which is adjacent to the first position part and is driven towards the Y-axis direction, wherein the first position part is provided with a first position body which can be tightly attached to the object and a first driving part, the second position part is provided with a second position body which can be tightly attached to the object and a second driving part, and the shape of the first position body is different from that of the second position body;

a center pressing unit which is operated to the position determining unit, includes a first pressing unit which is operated in the first direction so as to face the first position unit, and a second pressing unit which is operated in the second direction so as to face the second position unit, is adjacent to the first pressing unit, and has a first pressing body and a third driving unit which can be brought into close contact with the object, and a second pressing unit which has a second pressing body and a fourth driving unit which can be brought into close contact with the object, and is different in shape from the first pressing body; and

a support part for supporting the position determining part and the central pressurizing part in a modularized manner, wherein the mounting positions are arranged, the support part comprises a quadrangular support frame, the first and second position parts and the first and second pressurizing parts are respectively arranged on one side, the centering unit is modularized, and

the first guide holes are arranged at positions spaced apart from each other by a first distance from each frame of the support frame, the second guide holes are arranged at positions spaced apart from the first guide holes in a diagonal direction from each frame, and the second guide holes are arranged at positions spaced apart from each other by a second distance different from the first distance from each frame.

8. The centering device for detecting an object according to claim 7, wherein a plurality of inspection blocks are disposed on each frame of the support frame, and the inspection blocks are sensed to check whether the support frame is erroneously inserted.

9. The centering device for detecting an object according to claim 7, wherein the fixing unit includes:

a fixed body that fixes, via the centering unit, postures of the objects arranged at the center positions; and

a fixed driving part for driving the fixed body, and

the fixing body is operated in the Z-axis direction via the fixing driving unit, and fixes the posture of the object by at least one of pressurization and suction.

10. The centering device for detecting an object according to claim 7, wherein the buffer portion is disposed at each of the first position portion, the second position portion, the first pressurizing portion, and the second pressurizing portion, and the buffer portion includes a damper for buffering a driving force.

11. The centering device for detecting an object according to claim 10, wherein the buffer portion attenuating the fixed body driving force is disposed between the fixed body and a fixed driving portion.

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