KR101804051B1 - Centering apparatus for the inspection object - Google Patents

Centering apparatus for the inspection object Download PDF

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Publication number
KR101804051B1
KR101804051B1 KR1020160059973A KR20160059973A KR101804051B1 KR 101804051 B1 KR101804051 B1 KR 101804051B1 KR 1020160059973 A KR1020160059973 A KR 1020160059973A KR 20160059973 A KR20160059973 A KR 20160059973A KR 101804051 B1 KR101804051 B1 KR 101804051B1
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KR
South Korea
Prior art keywords
portion
position
object
unit
fixed
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KR1020160059973A
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Korean (ko)
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KR20170129373A (en
Inventor
유광룡
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유광룡
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Priority to KR1020160059973A priority Critical patent/KR101804051B1/en
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Publication of KR101804051B1 publication Critical patent/KR101804051B1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0491Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513Liquid crystal panels

Abstract

A centering unit for aligning a center position of a target object and a fixed unit for holding a target object in which the center positions are aligned, the centering unit being movable in X and Y axis directions with respect to the target object, And the centering unit and the fixing unit are provided with a buffer for damping the driving force upon contact with the object. According to such a configuration, it is possible to improve the accuracy of alignment of the center of the object and to contribute to the improvement of the inspection quality.

Description

[0001] CENTERING APPARATUS FOR THE INSPECTION OBJECT [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centering device for examining a target object, and more particularly, to a centering device for guiding a centering target for inspection of a target object.

Generally, manufacturing of a semiconductor wafer substrate or a liquid crystal glass substrate is performed through a number of processes, and quality inspection of a target such as a substrate is performed to detect defects in the final process. Among the quality inspection items of the object, the object must be located at the precise center position for the external inspection.

A general centering device for setting the center position of the object aligns the center position of the object in accordance with the same standard regardless of the type of the object. As a result, it is difficult to precisely align the center positions of various types of objects, resulting in quality deterioration of the object. Accordingly, in recent years, various centering devices capable of accurately aligning the center of a target object have been continuously studied.

Korean Patent No. 10-1174860

SUMMARY OF THE INVENTION It is an object of the present invention to provide a centering device for testing a target object, which can improve centering accuracy for object contouring.

According to another aspect of the present invention, there is provided a centering device for testing a target object, comprising: a centering unit that is movable in X and Y axis directions with respect to a target object and aligns the center position of the target object; Wherein the centering unit and the fixed unit are provided with a buffer for damping the driving force when the object is contacted with the object.

According to one aspect of the present invention, the centering unit includes a first position portion movable in the X-axis direction and a second position portion adjacent to the first position portion and movable in the Y-axis direction, A first pressing portion facing the first position portion and moving in the X-axis direction, and a second pressing portion located adjacent to the first pressing portion but facing the second positioning portion in the Y-axis direction And a support portion supporting the positioning portion and the center pressurizing portion, wherein the positioning portion is aligned with the center pressing portion.

According to one aspect of the present invention, the first position portion, the second position portion, the first pressing portion, and the second pressing portion are each provided with the shock absorber including a shock absorber for buffering the driving force.

According to one aspect of the present invention, the supporting portion includes a rectangular supporting frame having the first and second position portions and the first and second pressing portions on one side, respectively, so as to modularize the centering unit, A first guide hole provided at a position spaced apart from the first guide hole and a second guide provided at a position spaced apart from the first guide hole in a diagonal direction and spaced apart from the rim by a second gap different from the first gap, Holes are provided to prevent reverse insertion.

According to one aspect, a plurality of check blocks are provided on each edge of the support frame, and the check block is sensed to check whether or not the support frame is erroneously inserted.

According to one aspect of the present invention, the fixed unit includes a fixed body for holding the object aligned at the center position by the centering unit and a fixed driving unit for driving the fixed body, The buffering portion for attenuating the pressing force of the fixture is provided.

According to one aspect, the fixed body is driven by the fixed driving unit in the Z-axis direction and fixes the object by at least one of pressure or suction.

According to one aspect, a sensor is provided for inspecting the contour of the object aligned at the center position by the centering unit.

A centering device for inspecting a target object according to a preferred embodiment of the present invention includes a centering unit that is movable in a first direction and a second direction orthogonal to the first direction to align a target object to a center position, Wherein the centering unit and the fixing unit are modularized, and the centering unit and the fixing unit are modularized, and the centering unit and the fixing unit are moved in a third direction orthogonal to the first and second directions, A buffering portion for attenuating the driving force is provided.

According to one aspect of the present invention, the centering unit includes: a first position portion movable in the first direction parallel to the X-axis direction; and a second position movable in the second direction adjacent to the first position portion, A first pressing portion facing the first position portion and movable in the first direction, and a second pressing portion facing the first pressing portion, And a second pressing portion facing the second positioning portion and movable in the second direction, the center pressing portion moving toward the positioning portion, and the positioning portion and the center pressing portion supported so as to be modularized, And a support.

According to one aspect of the present invention, the supporting portion includes a rectangular supporting frame having the first and second position portions and the first and second pressing portions on one side, respectively, so as to modularize the centering unit, A first guide hole provided at a position spaced apart from the first guide hole and a second guide provided at a position spaced apart from the first guide hole in a diagonal direction and spaced apart from the rim by a second gap different from the first gap, Holes are provided to prevent reverse insertion, and a plurality of check blocks are provided on each edge of the support frame, and the check block is sensed to check whether or not the support frame is erroneously inserted.

According to one aspect of the present invention, the fixed unit includes a fixed body for holding the object aligned at the center position by the centering unit and a fixed driving unit for driving the fixed body, And is fixed by the fixed driving unit and fixed to the object by at least one of pressurization and adsorption.

According to one aspect of the present invention, the first position portion, the second position portion, the first pressing portion, and the second pressing portion are each provided with the shock absorber including a shock absorber for buffering the driving force.

According to one aspect, between the fixed body and the fixed drive portion, the buffer portion for buffering the driving force of the fixed body is provided.

According to the present invention having the above-described configuration, first, by providing the buffering portion that attenuates the driving force at the time of contact when aligning the object to the center position, breakage of the object can be prevented and the inspection quality of the object can be improved.

Second, it can be applied to objects of various sizes, which is advantageous in securing inspection diversity.

Third, it is possible to prevent reverse insertion and misinsertion of the modularized centering unit, thereby contributing to the improvement of the alignment accuracy of the center position.

FIG. 1 is a perspective view schematically showing a centering device for checking a contour of a target object according to a preferred embodiment of the present invention. FIG.
FIG. 2 is a plan view schematically showing a centering unit of the centering device shown in FIG. 1,
Fig. 3 is a plan view schematically showing a support portion of the centering unit shown in Fig. 2,
4 is a side view schematically showing a fixing unit of the centering device shown in FIG.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1, a centering device 1 for testing a target object according to a preferred embodiment of the present invention includes a centering unit 10 and a fixed unit 90.

For reference, the centering device 1 for testing a target object described in the present invention is applied to a tester for inspecting quality by aligning a target object O requiring a high-precision manufacturing process such as a substrate to a center position.

The centering unit 10 is movable in the X-axis direction, which is the first direction, and the Y-axis direction, which is the second direction, with respect to the object O to align the center position of the object O. The centering unit 10 includes a positioning portion 20, a center pressing portion 50, and a supporting portion 80.

2, the positioning unit 20 includes a first position unit 30 which is movable in the X-axis direction, a second position unit 30 which is adjacent to the first position unit 30 and is movable in the Y-axis direction, 40 to the reference position for inspecting the object (O). The first position part 30 includes a first position body 31 which is in contact with the object O and a first driving part 32 which drives the first position body 31 in the X axis direction And the second positioning part 40 also includes a second positioning part 41 and a second driving part 42 that drive the second positioning part 41 and the second positioning part 41 in the Y axis direction.

At this time, the first and second driving units 32 and 42 include a cylinder connected to a driving source such as an unillustrated driving motor and generating a linear driving force like a piston. For reference, the first and second driving units 32 and 42 are provided with elastic bodies (not shown), so that the driving force is buffered.

The positioning portion 20 positions the object O at the reference position by advancing and retracting the first and second positioning portions 30 and 40 in the X-axis and Y-axis directions with respect to the reference position, respectively. The first and second positioning bodies 31 and 41 of the first and second positioning portions 30 and 40 are selectively brought into close contact with the object O to align the object O .

The center pressurizing portion 50 includes a first pressing portion 60 which is movable in the X axis direction opposite to the first position portion 30 and a second pressing portion 60 which is adjacent to the second pressing portion 60, And a second pressing portion 70 which is movable in the Y-axis direction so as to be movable toward the positioning portion 20. The first pressing portion 60 of the center pressing portion 50 includes a first pressing body 61 which is in contact with the object O and a third driving portion 62 which drives the first pressing body 61 in the X- And the second pressing portion 70 includes a second pressing body 71 which can be brought into close contact with the object O and a fourth driving portion 72 which drives the second pressing body 71 in the Y axis direction .

Here, the third and fourth driving units 62 and 72 are connected to a driving source (not shown) so that the cylinder and the first and second pressing bodies 61 and 71, which are linearly piston- And includes an unillustrated elastic body for pressing. That is, the positioning part 20 and the first to fourth driving parts 32, 42, 62, and 72 of the center pressing part 50 have a similar structure to each other.

On the other hand, the center pressurizing portion 50 having the above configuration aligns the object O positioned at the reference position by the positioning portion 20 so as to be positioned at the center position. In order to align the center position of the object O, the driving force is buffered to the first position part 30, the second position part 40, the first pressing part 60 and the second pressing part 70 And a shock absorber S including a shock absorber for shock absorbers. Even if the first and second positioning portions 30 and 40 and the first and second pressing portions 60 and 70 are driven toward the object O at a high speed, , Thereby attenuating the impact applied to the object (O).

The supporting part 80 supports the positioning part 20 and the center press-fitting part 50, but the mounting position is aligned. The support portion 80 includes a rectangular support frame 81 having the first and second positioning portions 30 and 40 and the first and second pressing portions 60 and 70 on one side The centering unit 10 is modularized. At this time, the central region of the support frame 81 may have an open shape as shown in FIG.

3, the first guide hole 82 and the first guide hole 82 provided at positions spaced apart from the rim of the support frame 81 by the first gap G1 are arranged in the diagonal direction from the first guide hole 82 and the first guide hole 82, A second guide hole 83 is formed at a position spaced apart from the rim by a second gap G2 different from the first gap G1.

The first and second guide holes 82 and 83 are spaced apart from each other by distances G1 and G2 from the rim of the support frame 81 so that the support frame 81 of the centering unit 10, So that it can be prevented from being inserted and inserted into the mounting base, which is not shown. In other words, the guide projections (not shown) corresponding to the first and second guide holes 82, 83 are provided on the mounting bracket (not shown), so that the support frame 81 is installed in the correct position And supports the operation of the crystal portion 20 and the center pressurizing portion 50.

3, a plurality of check blocks 84 are provided on each edge of the support frame 81. The sensor 85 senses the check block 84 to determine whether the support frame 81 is mis- Check. That is, whether the support frame 81 is positioned or not is determined based on whether or not the check block 84 is sensed. At this time, if any one of the plurality of check blocks 84 is not sensed, the operator is notified that the support frame 81 is erroneously inserted.

As described above, since the support frame 81 can be mounted at the correct position by the first and second guide holes 82, 83, the check block 84, and the sensor 85, 81 and the centering pressurizing portion 50 of the positioning portion 20 and the centering pressurizing portion 50, respectively.

The fixed unit 90 fixes the object O on which the center position is aligned. The fixed unit 90 includes a fixed body 91 for pressing and fixing the object O aligned in the center position by the centering unit 10 and a fixed drive unit 92 for driving the fixed body 91 . These fixed bodies 91 are provided so as to face the centering unit 10 in which the center positions of the object O are aligned in the X and Y axis directions in the Z axis direction as the third direction so as to face the driving force of the fixed driving unit 92 And is driven in the Z-axis direction. As a result, the fixing body 91 selectively presses the object O in the Z-axis direction to fix the object. The buffer unit S is provided between the fixed body 91 of the fixed unit 90 and the fixed drive unit 92 to buffer the driving force.

On one side of the centering unit 10, an unshown sensor including an optical system for inspecting a target object O aligned at a center position is provided, and the contour of the target object O is inspected. Since the inspection of the contour of the object O using such a sensor (not shown) is not a gist of the present invention, a detailed description will be omitted.

The centering operation of the centering device 1 for the external examination of the object O according to the present invention having the above-described configuration will be described with reference to FIGS. 2 to 4. FIG.

2 and 3, first, the support frame 81 of the support portion 80 is prevented from being inserted backward by the first and second guide holes 82 and 83, (Not shown) with mis-insertion prevented by the sensing between the sensor 85 and the sensor. Then, the modularized centering unit 10 supported by the support frame 81 is installed in the fixed position.

Thereafter, when the object O is placed on the support frame 81, the first and second positioning portions 30 and 40 of the positioning portion 10 press the object O to the reference position . The first and second positioning portions 30 and 40 are located at positions deviated from the reference position until the object O is placed and when the object O is placed on the first and second positioning portions 30 and 40, (31) and (41) are moved in the X-axis and Y-axis directions respectively to position the object (O) to the reference position. At this time, the movement of the first and second positioning bodies 31 and 41 is performed by the first and second driving portions 32 and 42 and the momentary buffering portion S contacts the object O The driving force is attenuated.

In addition, since the object O is located at the reference position and the first and second pressing portions 60 and 70 of the center pressing portion 50 move in the X and Y axis directions respectively, The object O is moved. The first and second pressing members 61 and 71 of the first and second pressing portions 60 and 70 are driven by the third and fourth driving portions 62 and 72, (S), and is brought into close contact with the object (O).

When the center position of the object O is aligned by the positioning portion 20 and the center pressing portion 50 as described above, the fixing body 91 of the fixing unit 90 is moved in the Z-axis direction Thereby lowering the posture of the object O. The positioning portion 20 and the central pressing portion 50 of the centering unit 10 move away from the object O when the object O is fixed at the center position by the fixing body 91, The outer shape of the object O is inspected by a sensor including an optical system not shown.

4, the fixed body 91 of the fixed unit 90 is driven by the fixed driving unit 92 in the Z-axis direction to press the upper portion of the object O, O), but it is not so limited. For example, although not shown in detail, a modification example in which the fixture 91 is fixed to the object O aligned at the center position by the attraction force provided at the lower portion of the object O is also possible. The fixing body 91 is provided with a first fixing body (not shown) for pressing the upper portion of the object O and a second fixing body (not shown) for absorbing the lower portion of the object O Variations are possible. The fixed body 91 is driven toward the target body O by the fixed drive unit 92 with respect to the target body O even when the fixed body 91 is fixed in posture by the attraction force.

Although the present invention has been described with reference to the preferred embodiments thereof, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined in the following claims. It can be understood that

1: Centering device
10: Centering unit
20:
50:
80: Support
90: fixed unit

Claims (14)

  1. A centering unit movable in X and Y axis directions with respect to the object to align the center position of the object; And
    A fixed unit for holding the object with its center position aligned;
    / RTI >
    Wherein the centering unit and the fixed unit are provided with a buffering portion for attenuating a driving force upon contact with the object,
    The centering unit,
    And a second position portion that is adjacent to the first position portion and is movable in the Y-axis direction, the positioning portion being adapted to align the object to a reference position for inspecting the object, ;
    And a second pressing portion which is adjacent to the first pressing portion and faces the second positioning portion and is movable in the Y axis direction, wherein the first pressing portion is movable in the X- A center pressurizing portion which is moved toward the positioning portion; And
    A supporting portion supporting the positioning portion and the center pressing portion, the mounting portion being aligned with the supporting portion;
    A centering device for inspecting a target object.
  2. delete
  3. The method according to claim 1,
    Wherein the shock absorber includes a shock absorber for buffering a driving force, the shock absorber being provided on the first position portion, the second position portion, the first pressing portion, and the second pressing portion.
  4. The method according to claim 1,
    Wherein the support portion includes a rectangular support frame having the first and second position portions and the first and second pressing portions on one side, respectively, to modularize the centering unit,
    A first guide hole provided at a position spaced apart from the rim of the support frame at a first interval and a second guide hole provided at a position diagonally spaced from the first guide hole, the second guide hole being spaced apart from the rim by a second interval different from the first interval, And a second guide hole provided at a position where the second guide hole is provided.
  5. 5. The method of claim 4,
    Wherein a plurality of check blocks are provided on each frame of the support frame, and the check block is sensed to check whether or not the support frame is erroneously inserted.
  6. The method according to claim 1,
    The fixed unit includes:
    A fixture for holding the object aligned at the center position by the centering unit; And
    A fixed driving unit for driving the fixed body;
    / RTI >
    And the buffering portion for attenuating the driving force of the fixing body is provided between the fixing body and the fixed driving portion.
  7. The method according to claim 6,
    Wherein the fixed body is driven by the fixed driving unit in the Z-axis direction, and the object is fixed by at least one of pressurization and adsorption.
  8. The method according to claim 1,
    And a sensor for inspecting the contour of the object aligned at the center position by the centering unit is provided.
  9. A centering unit movable in a first direction and a second direction orthogonal to the first direction to align the object to a center position; And
    A fixed unit movable in a third direction orthogonal to the first and second directions at a position facing the centering unit to fix the object with the center position aligned;
    / RTI >
    Wherein the centering unit and the fixed unit are modularized, a buffer for damping a driving force when the object is contacted,
    The centering unit,
    And a second position portion that is movable in the first direction and is adjacent to the first position portion and is movable in the second direction in parallel with the Y-axis direction, A positioning unit for aligning the object with a reference position for the object;
    A first pressing portion facing the first position portion and movable in the first direction and a second pressing portion adjacent to the first pressing portion but facing the second positioning portion and movable in the second direction, A center pressurizing portion that is movable toward the positioning portion; And
    A supporting part supporting the positioning part and the center pressurizing part so as to be modularized, the mounting position being aligned;
    A centering device for inspecting a target object.
  10. delete
  11. 10. The method of claim 9,
    Wherein the support portion includes a rectangular support frame having the first and second position portions and the first and second pressing portions on one side, respectively, to modularize the centering unit,
    A first guide hole provided at a position spaced apart from the rim of the support frame at a first interval and a second guide hole provided at a position diagonally spaced from the first guide hole, the second guide hole being spaced apart from the rim by a second interval different from the first interval, A second guide hole provided at a position where the first guide hole is formed,
    Wherein a plurality of check blocks are provided on each frame of the support frame, and the check block is sensed to check whether or not the support frame is erroneously inserted.
  12. 10. The method of claim 9,
    The fixed unit includes:
    A fixture for holding the object aligned at the center position by the centering unit; And
    A fixed driving unit for driving the fixed body;
    / RTI >
    Wherein the fixed body is driven by the fixed driving unit in the Z-axis direction, and the object is fixed by at least one of pressurization and adsorption.
  13. 10. The method of claim 9,
    Wherein the shock absorber includes a shock absorber for buffering a driving force, the shock absorber being provided on the first position portion, the second position portion, the first pressing portion, and the second pressing portion.
  14. 13. The method of claim 12,
    And the buffering portion for attenuating the driving force of the fixing body is provided between the fixing body and the fixed driving portion.
KR1020160059973A 2016-05-17 2016-05-17 Centering apparatus for the inspection object KR101804051B1 (en)

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Application Number Priority Date Filing Date Title
KR1020160059973A KR101804051B1 (en) 2016-05-17 2016-05-17 Centering apparatus for the inspection object
CN201710333263.8A CN107389545A (en) 2016-05-17 2017-05-12 Centring means for detection object

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KR101804051B1 true KR101804051B1 (en) 2017-12-01

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133376A (en) * 2001-10-29 2003-05-09 Matsushita Electric Ind Co Ltd Apparatus and method for inspecting semiconductor device
JP2006173206A (en) 2004-12-13 2006-06-29 Micronics Japan Co Ltd Prober

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101095594B1 (en) * 2011-08-25 2011-12-19 (주)프로텍이노션 Alignment device
DE102013204711A1 (en) * 2013-03-18 2014-09-18 Zf Friedrichshafen Ag Tilgerschwingungsdämpfer
JP2015219007A (en) * 2014-05-13 2015-12-07 日本電産リード株式会社 Positioner and processor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003133376A (en) * 2001-10-29 2003-05-09 Matsushita Electric Ind Co Ltd Apparatus and method for inspecting semiconductor device
JP2006173206A (en) 2004-12-13 2006-06-29 Micronics Japan Co Ltd Prober

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KR20170129373A (en) 2017-11-27

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