CN107389545A - Centring means for detection object - Google Patents
Centring means for detection object Download PDFInfo
- Publication number
- CN107389545A CN107389545A CN201710333263.8A CN201710333263A CN107389545A CN 107389545 A CN107389545 A CN 107389545A CN 201710333263 A CN201710333263 A CN 201710333263A CN 107389545 A CN107389545 A CN 107389545A
- Authority
- CN
- China
- Prior art keywords
- fixed
- center
- pressurization
- detection object
- run
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
A kind of disclosed centring means for detection object profile through the present invention, including centering unit, run for object to X-axis and Y direction, arrange the center of object；And fixed cell, the posture for the object that fixed center position is arranged, and centering unit and fixed cell are configured with the buffer part with making driving force decay during the object contact.It through these compositions, can help to improve the center degree of accuracy of object, improve detection quality.
Description
Technical field
The present invention relates to the centring means for detection object, more particularly, in order to guide for detection object
The centring means of the centering of profile measurement.
Background technology
The manufacture of usual semiconductor wafer substrate or liquid crystal glass base etc., by multiple engineerings, final engineering in order to
Defect is detected, the object quality such as substrate is performed and detects., will for profile measurement in the quality detection project of these objects
Object is placed in correct position of centre of gravity.
It is unrelated with the species of object for setting the common centring means of these object centers positions, according to identical rule
The center of grillages row object.As a result, because be difficult the various species of arrangement for the correct position of centre of gravity of object, so,
Cause the low of detection object quality.Therefore, being recently formed can facilitate what the accurate center of object arranged, to various centering
The trend that the research of device is persistently carried out.
Look-ahead technique document Prior Art
Patent document
Ebrean Registered Patent the 10-1174860th
The content of the invention
Technical task
The present invention is suggested in view of problem described above, and its object is to provide to improve for object profile measurement
Center arrangement precision, the centring means for detection object.
Technical scheme
In order to reach the purpose, the centring means for detection object through the present invention includes：Centering unit, for right
As being run to X-axis and Y direction, the center of the object is arranged；And fixed cell, the institute that fixed center position is arranged
The posture of object is stated, and the centering unit and fixed cell are configured with the buffering with making driving force decay during the object contact
Portion.
According to a side, the centering unit includes position determination section, the object is aligned to described for detecting
Position on the basis of object, and comprising the first position portion that is run to X-direction and, it is adjacent with the first position portion, to Y-axis side
To the second place portion of driving；Center pressurization part, to the position determination section run, and comprising with first position portion phase
It is right, to X-direction run the first pressurization part and, it is adjacent with first pressurization part and relative with the second place portion, to
Second pressurization part of Y direction operation；And supporting part, the position determination section and center pressurization part are supported, installation site is arranged
Row.
According to a side, in the first position portion, second place portion, the first pressurization part and the second pressurization part, difference
The buffer part is configured, the buffer part includes the shock absorber (Shock Absorber) for buffered-display driver power.
According to a side, the supporting part includes tetragonal carriage, and first and second described position portion and first
And second pressurized part be positioned respectively on one side, unit of feeling relieved described in modularization, and configure each frame from the carriage, with the
First bullport of the position configuration of one interval isolation, and from first bullport, the position isolated to diagonal is matched somebody with somebody
Put, the second bullport configured from the position that the frame is isolated with the second interval different with first interval, prevent non-return
Insertion.
According to a side, multiple inspection blocks are configured in each frame of the carriage, the inspection block is sensed, checks institute
State whether being mistakenly inserted for carriage.
According to a side, the fixed cell includes：Fixed body, it is fixed with the centre bit through the centering unit
Put the posture for the object being arranged；And fixed drive portion, the fixed body is driven, and in the fixed body and fixed drive
Between portion, the buffer part of the configuration decay fixed body driving force.
According to a side, the fixed body is run through the fixed drive portion by Z-direction, and by pressurizeing or inhaling
Attached middle school's at least any one method fixes the posture of the object.
According to a side, configure through the centering unit, be arranged to the center, it is described right for detecting
The sensor of the profile of elephant.
According to a preferred embodiment of the present invention, the centring means for detection object includes：Feel relieved unit, will be to the
The object that one direction is run with the second direction for being orthogonal to the first direction, is aligned to center；And fixed cell, with
The relative position of the centering unit, runs, fixed center position to the third direction for being orthogonal to first and second direction
The posture for the object being arranged, and the centering unit and fixed cell are modular, and be configured with and connect with the object
The buffer part for making driving force decay when tactile.
According to a side, the centering unit includes：Position determination section, the object is aligned to described for detecting
Position on the basis of object, and comprising the first position portion that is run to X-direction and, it is adjacent with the first position portion, to Y-axis side
To the second place portion of driving；Center pressurization part, to the position determination section run, and comprising with first position portion phase
It is right, to the first direction run the first pressurization part and, it is adjacent with first pressurization part, but with second place portion phase
The second pressurization part that is right, being run to the second direction；And supporting part, the position determination section and center pressurization part are supported by mould
Block, installation site are arranged.
According to a side, the supporting part includes tetragonal carriage, and first and second described position portion and first
And second pressurized part be positioned respectively at one side, unit of being felt relieved described in modularization, and configuring from each frame of the carriage, with
First bullport of the position configuration of the first interval isolation, and from first bullport, the position isolated to diagonal
Configuration, the second bullport configured from the position that the frame is isolated with the second interval different with first interval, is prevented
Inverse insertion, and multiple inspection blocks are configured in each frame of the carriage, the inspection block is sensed, checks the carriage
It whether is mistakenly inserted.
According to a side, the fixed cell includes：Fixed body, it is fixed with the centre bit through the centering unit
Put the posture for the object being arranged；And fixed drive portion, the fixed body is driven, and the fixed body passes through to Z-direction
The fixed drive portion is run, and by least any one method in pressurization or absorption, the posture of the fixed object.
According to a side, in the first position portion, second place portion, the first pressurization part and the second pressurization part, difference
The buffer part is configured, the buffer part includes the shock absorber (Shock Absorber) for buffered-display driver power.
According to a side, the institute of the configuration decay fixed body driving force between the fixed body and fixed drive portion
State buffer part.
Technique effect
Through with the present invention as constituted above, first, during object is arranged in into center, when possessing contact
The buffer part for the driving force that decays, makes the breakage for preventing object, can improve the detection quality of object.
Second, the object of various size is applicable to, being advantageous to detection diversity ensures.
3rd, the inverse insertion for the centering unit that can prevent from being modular and be mistakenly inserted, can the arrangement of Help Center position it is accurate
The raising of degree.
Brief description of the drawings
Fig. 1 is to show according to a preferred embodiment of the present invention, substantially shows the centering of the profile measurement for object
The perspective view of device.
Fig. 2 is substantially to show the plan in the centering unit of the centring means shown in Fig. 1.
Fig. 3 is substantially to show the plan in the supporting part of the centering unit shown in Fig. 2.
Fig. 4 is substantially to show the side view in the fixed cell of the centring means shown in Fig. 1.
Symbol description
1：Centring means
10：Centering unit
20：Position determination section
50：Center pressurization part
80：Supporting part
90：Fixed cell
Embodiment
Hereinafter, refer to the attached drawing illustrates a preferred embodiment of the present invention.
With reference to figure 1, through a preferred embodiment of the present invention, the centring means 1 for detection object includes centering unit
10 and fixed cell 90.
As reference, it is applied in the centring means 1 for detection object that the present invention illustrates, it would be desirable to such as the height of substrate
The object 0 of precision manufactureing engineering, it is aligned to the detector of center detection quality.
The centering unit 10 is run for object 0 by first direction X-direction and second direction Y direction, arrangement pair
As 0 center.These centering units 10 include position determination section 20, center pressurization part 50 and supporting part 80.
The position determination section 20 such as Fig. 2's shows, including the first position portion 30 and first position run by X-direction
Portion 30 is adjacent, and the second place portion 40 run to Y direction, the reference position for detection object 0 is run.Therefore, institute
State first position portion 30 includes to be close to the first position body 31 of object 0 and driving first position body 31 to X-direction the
One drive division 32, and second place portion 40 also includes that the second place body 41 of object 0 can be close to and by second place body 41 to Y-axis
Second drive division 42 of direction driving.
In this case, first and second described drive division 32,42 includes, such as driving with unshowned drive motor
Source connects, and the cylinder of linear driving force occurs together with piston.As reference, pressed from both sides in first and second described drive division 32,42
The elastomer that first and second position body 31,41 has been not shown, well buffered-display driver power.
Because first and second position portion 30,40 is for reference position, advances and retreat to X-axis and Y direction respectively, because
This, these position determination sections 20 are in reference position placing objects 0.On the other hand, first and second position portion 30,40 first and
Second place body 31,41, object 0 is optionally close to, arranges the position of object 0.
The center pressurization part 50 includes the He of the first pressurization part 60 relative with first position portion 30, to be run to X-direction,
It is adjacent with the first pressurization part 60, it is relative with second place portion 40, the second pressurization part 70 run to Y direction, determined to position
Portion 20 is run.First pressurization part 60 of these center pressurization parts 50 includes that the He of the first press body 61 of object 0 can be close to, by the
The 3rd drive division 62 that one press body 61 drives to X-direction, and the second pressurization part 70 also includes that the second of object 0 can be close to
The He of press body 71, the fourth drive part 72 that the second press body 71 is driven to Y direction.
Wherein, the described 3rd and fourth drive part 62,72 include, and are connected with unshowned driving source, are driven by rectilinear direction
The unshowned cylinder of piston and the unshowned elastomer of first and second press body 61,71 of difference elastic pressurized.That is,
Above-mentioned position determination section 20 has mutually similar structure with first to fourth drive division 32,42,62,72 of center pressurization part 50
Into.
On the one hand, there is center pressurization part 50 constituted as described through position determination section 20, pressurization is positioned at reference position
Object 0, arrangement are located at center.So arrangement object 0 center during, the first position portion 30,
Second place portion 40, the first pressurization part 60 and the second pressurization part 70 are respectively configured, including the damper for buffered-display driver power
The buffer part S of (Shock Absorber).Even if the buffer part S makes first and second position portion 30,40 with speed quickly
Driven with first and second pressurization part 60,70 to object 0, can also reduce initial point acceleration of the contact in object 0, decay is applied to
The impact of object 0.
The Support Position determination section 20 of supporting part 80 and center pressurization part 50, arrange installation site.These supporting parts 80
Including tetragonal carriage 81, and first and second position portion 30,40 and first and second pressurization part 60,70 are arranged respectively at one
Side, modularization centering unit 10.In this case, centre sphere such as Fig. 3 of the carriage 81, there is open image.
On the one hand, as Fig. 3 is shown, from each frame of the carriage 81, formed and matched somebody with somebody with the position of the first interval G1 isolation
The first bullport 82 put, and from first bullport 82, the position isolated to diagonal configures, from frame with the
Second bullport 83 of the position configuration of the second different one interval G1 interval G2 isolation.
First and second described bullport 82,83 is from the frame of carriage 81, respectively with different isolating partition G1, G2 quilt
Configuration, the carriage 81 of centering unit 10 can be prevented, be mounted against unshowned erecting bed is inserted into.That is, in unshowned peace
Platform configuration is filled corresponding to the guide hump (not shown) of first and second bullport 82,83, carriage 81 is put to positioning does not have
Inverse insertion is mounted, the action of Support Position determination section 20 and center pressurization part 50.
In addition, as shown in figure 3, each frame in the carriage 81 configures multiple inspection blocks 84, the sensing inspection of sensor 85
Block 84 is looked into, checks whether being mistakenly inserted for carriage 81.That is, whether described carriage 81 is put positioned at positioning, by checking block 84
Whether sense to judge.In this case, it is none of when being sensed in the multiple inspection block 84, notify to operation
Person's carriage 81 is mistakenly inserted.
As can be seen here, with the carriage 81 through first and second bullport 82,83, check block 84 and sensor 85,
Correct position can be arranged on, guides the correctly centering of the position determination section 20 supported by carriage 81 and center pressurization part 50
Action.
The posture for the object 0 that the fixed center position of fixed cell 90 is arranged.The fixed cell 90 is included by fixed
Heart unit 10, pressurize the object 0 arranged to center, the He of fixed body 91 of anchor, the fixed drive of driving fixed body 91
Dynamic portion 92.These fixed bodies 91 and the centering unit 10 of the center of object 0 arranged to X and Y direction, to third direction Z
Direction of principal axis, relatively install, by the driving force in fixed drive portion 92, driven to Z-direction.Thus, the fixed body 91 will be right
As being pressurizeed to Z-direction for 0 selectivity, anchor.Wherein, the fixed body 91 of the fixed cell 90 and fixed drive portion 92
Between, also configure buffered-display driver power buffer part S.
On the one hand, unshowned sensor is configured in the side of the centering unit 10, it includes being used to detect by center
The optical system of the object 0 of position arrangement, the profile of detection object 0.Utilize the profile of the object 0 of these sensor (not shown)
Detection, it is not the main points of the present invention, so, it explains to give and omitted.
Referring to figs. 2 to showing for Fig. 4, illustrate have as constituted above, through the present invention, for the profile of detection object 0
The centering action of centring means 1.
Such as showing for Fig. 2 and Fig. 3, first, the carriage 81 of the supporting part 80, through first and second bullport 82,83
Inverse insertion is prevented from, and by checking the sensing between block 84 and sensor 85, to be mistakenly inserted the state being prevented from, is placed on
Unshowned erecting bed.So, by the carriage 81 by the centering unit 10 of supporting module, it is installed in installation positioning
Put.
Afterwards, in 81 placing objects 0 of carriage, first and second position portion 30 of the position determination section 10,
40, pressurize and put on the basis of object 0.As reference, first and second described position portion 30,40 is before the placement of object 0
Untill, it is located at the position departed from from reference position respectively, and during placing objects 0, first and second position body 31,41 is respectively to X
Axle and Y direction movement, object 0 is put by reference position.In this case, first and second position body 31,41
It is mobile to be formed in first and second drive division 32,42, and the moment of object 0 is touched, buffered portion S driving forces are attenuated.
In addition, as the object 0 is located at reference position, first and second pressurization part 60,70 of center pressurization part 50, divide
Do not moved to X-axis and Y direction, by center mobile object 0.In such case and, first and second described pressurization part
60,70 first and second press body 61,71, through the 3rd and fourth drive part 62,72 are driven, and by buffer part S plus-pressures
Buffered, be close to object 0.
As can be seen here, through position determination section 20 and center pressurization part 50, when the center of object 0 is arranged, such as Fig. 4 institutes
Show, the fixed body 91 of fixed cell 90 declines to Z-direction, the posture of fixed object 0.Appearance through the object 0 of fixed body 91
When gesture is fixed on center, the position determination section 20 and center pressurization part 50 of unit 10 of feeling relieved, respectively movement make from object 0
Depart from, through including the sensor of unshowned optical system, the profile measurement of object 0 is performed.
On the one hand, in the present invention as shown in figure 4, showing and fixed body 91 predictive of the fixed cell 90, to Z axis side
Driven to by fixed drive portion 92, the top for the object 0 that pressurizes, to fix the posture of object 0, but be not limited to this.For example,
Do not show carefully, still, the fixed body 91 also can be configured the absorption affinity in the bottom of object 0, and fixation is arranged by center
The variation of the posture of object 0 of row.In addition, can also possess first fixed body on the pressurization object 0 of fixed body 91 top simultaneously
Other other variations of (not shown) and the second fixed body (not shown) of absorption object 0 bottom.So, the fixed body 91
When fixing the posture of object 0 through absorption affinity, also for the fixed body 91 of object 0 through fixed drive portion 92, driven to the side of object 0.
As it appears from the above, be illustrated with reference to a preferred embodiment of the present invention, it is to be understood that, this area
Technical staff, in the range of not departing from the thought of the invention recorded from following claims and field, the present invention can be carried out
Diversely modifications and changes.
Claims (14)
1. a kind of centring means for detection object, it includes：
Centering unit, run for object to X-axis and Y direction, arrange the center of the object；And
Fixed cell, the posture for the object that fixed center position is arranged, and
The centering unit and fixed cell are configured with the buffer part with making driving force decay during the object contact.
2. the centring means according to claim 1 for detection object, wherein, the centering unit includes：
Position determination section, the object is aligned to for detecting position on the basis of the object, and comprising being run to X-direction
First position portion and, it is adjacent with the first position portion, to Y direction drive second place portion；
Center pressurization part, run to the position determination section, and comprising relative with the first position portion, run to X-direction
The first pressurization part and, adjacent with first pressurization part and relative with the second place portion, the run to Y direction
Two pressurization parts；And
Supporting part, the position determination section and center pressurization part, installation site is supported to be arranged.
3. the centring means according to claim 2 for detection object, wherein, in the first position portion, second
Portion, the first pressurization part and the second pressurization part are put, the buffer part is respectively configured, the buffer part is included for buffered-display driver power
Shock absorber.
4. the centring means according to claim 2 for detection object, wherein, the supporting part includes quadrangle and supported
Frame, and first and second described position portion and first and second pressurized part are positioned respectively on one side, unit of being felt relieved described in modularization,
And
Configure from each frame of the carriage, the first bullport configured with the position of the first interval isolation, and from described the
One bullport, the position isolated to diagonal configures, from the frame with second interval different with first interval
Second bullport of the position configuration of isolation, prevents non-return insertion.
5. the centring means according to claim 2 for detection object, wherein, configured in each frame of the carriage
Multiple inspection blocks, the inspection block is sensed, checks whether being mistakenly inserted for the carriage.
6. the centring means according to claim 1 for detection object, wherein, the fixed cell includes：
Fixed body, through the centering unit, the posture of the fixed object being arranged with the center；And
Fixed drive portion, the fixed body is driven, and
Between the fixed body and fixed drive portion, the buffer part of the configuration decay fixed body driving force.
7. the centring means according to claim 1 for detection object, wherein, the fixed body is by Z-direction, through institute
Fixed drive portion is stated to be run, and by least any one method fixes the posture of the object in pressurization or absorption.
8. the centring means according to claim 1 for detection object, wherein, configure through the centering unit, to institute
State what center was arranged, the sensor of the profile for detecting the object.
9. a kind of centring means for detection object, it includes：
Centering unit, center will be aligned to first direction and the object for the second direction operation for being orthogonal to the first direction
Position；And
Fixed cell, in the position relative with the centering unit, to the third direction for being orthogonal to first and second direction
Operation, the posture for the object that fixed center position is arranged, and
The centering unit and fixed cell are modular, and are configured with the buffering with making driving force decay during the object contact
Portion.
10. the device according to claim 9 for detection object, wherein, the centering unit includes：
Position determination section, the object is aligned to for detecting position on the basis of the object, and comprising being run to X-direction
First position portion and, it is adjacent with the first position portion, to Y direction drive second place portion；
Center pressurization part, run to the position determination section, and comprising relative with the first position portion, to the first direction
Operation the first pressurization part and, it is adjacent with first pressurization part but relative with the second place portion, to the second direction
Second pressurization part of operation；And
Supporting part, the position determination section and center pressurization part is supported to be modular, installation site is arranged.
11. the device according to claim 10 for detection object, wherein, the supporting part includes quadrangle and supported
Frame, and first and second described position portion and first and second pressurized part are positioned respectively at one side, are felt relieved described in modularization single
Member, and
Configure from each frame of the carriage, the first bullport configured with the position of the first interval isolation, and from described the
One bullport, the position isolated to diagonal configures, from the frame with second interval different with first interval
Second bullport of the position configuration of isolation, prevents non-return insertion, and
Multiple inspection blocks are configured in each frame of the carriage, the inspection block is sensed, checks being mistakenly inserted for the carriage
Whether.
12. the device according to claim 9 for detection object, wherein, the fixed cell includes：
Fixed body, through the centering unit, the posture of the fixed object being arranged with the center；And
Fixed drive portion, the fixed body is driven, and
The fixed body is run through the fixed drive portion to Z-direction, and by least any one side in pressurization or absorption
Method fixes the posture of the object.
13. the device according to claim 10 for detection object, wherein, in the first position portion, the second place
Portion, the first pressurization part and the second pressurization part, are respectively configured the buffer part, and the buffer part includes subtracting for buffered-display driver power
Shake device.
14. the device according to claim 12 for detection object, wherein, the fixed body and fixed drive portion it
Between configuration decay the buffer part of the fixed body driving force.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2016-0059973 | 2016-05-17 | ||
| KR1020160059973A KR101804051B1 (en) | 2016-05-17 | 2016-05-17 | Centering apparatus for the inspection object |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107389545A true CN107389545A (en) | 2017-11-24 |
| CN107389545B CN107389545B (en) | 2020-10-16 |
Family
ID=60338377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710333263.8A Active CN107389545B (en) | 2016-05-17 | 2017-05-12 | Centering device for detecting object |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101804051B1 (en) |
| CN (1) | CN107389545B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102291194B1 (en) * | 2020-03-09 | 2021-08-20 | 에이엠티 주식회사 | The align device and method thereof of the device having micro pitch |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101486033A (en) * | 2009-03-09 | 2009-07-22 | 中国农业大学 | Device for sorting fruits and method for sorting Chinese chestnut |
| CN101996880A (en) * | 2009-08-14 | 2011-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method for exposing semiconductor substrate and invalidation analysis method |
| CN102362282A (en) * | 2009-03-26 | 2012-02-22 | 松下电工神视株式会社 | Signal classification method and signal classification device |
| CN202916209U (en) * | 2012-09-12 | 2013-05-01 | 白井电子工业股份有限公司 | Automatic inspection machine for two sides of base plate |
| KR20130050420A (en) * | 2011-11-08 | 2013-05-16 | 대원강업주식회사 | A measurement equipment and method for shape measure of curved spring |
| CN103764340A (en) * | 2011-08-25 | 2014-04-30 | 普罗泰克英诺讯株式会社 | Alignment device |
| CN104155307A (en) * | 2014-08-27 | 2014-11-19 | 昆山元崧电子科技有限公司 | 3D vision recheck device used in detection of AOI |
| CN104254768A (en) * | 2012-01-31 | 2014-12-31 | 3M创新有限公司 | Method and apparatus for measuring the three dimensional structure of a surface |
| CN104931421A (en) * | 2015-06-17 | 2015-09-23 | 武汉精测电子技术股份有限公司 | Locating and focusing method of visual inspection system of liquid crystal display panel |
| CN105082007A (en) * | 2014-05-13 | 2015-11-25 | 日本电产理德股份有限公司 | Positioning apparatus and processing apparatus |
| CN105247242A (en) * | 2013-03-18 | 2016-01-13 | Zf腓特烈斯哈芬股份公司 | Vibration damping device |
| CN105277750A (en) * | 2015-11-30 | 2016-01-27 | 惠州市德赛自动化技术有限公司 | Display screen detection device |
| CN105527295A (en) * | 2015-12-31 | 2016-04-27 | 苏州日和科技有限公司 | Display full-automatic optical inspection robot |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3795373B2 (en) * | 2001-10-29 | 2006-07-12 | 松下電器産業株式会社 | Inspection apparatus and inspection method for semiconductor device |
| JP4589710B2 (en) | 2004-12-13 | 2010-12-01 | 株式会社日本マイクロニクス | Prober |
-
2016
- 2016-05-17 KR KR1020160059973A patent/KR101804051B1/en active IP Right Grant
-
2017
- 2017-05-12 CN CN201710333263.8A patent/CN107389545B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101486033A (en) * | 2009-03-09 | 2009-07-22 | 中国农业大学 | Device for sorting fruits and method for sorting Chinese chestnut |
| CN102362282A (en) * | 2009-03-26 | 2012-02-22 | 松下电工神视株式会社 | Signal classification method and signal classification device |
| CN101996880A (en) * | 2009-08-14 | 2011-03-30 | 中芯国际集成电路制造(上海)有限公司 | Method for exposing semiconductor substrate and invalidation analysis method |
| CN103764340A (en) * | 2011-08-25 | 2014-04-30 | 普罗泰克英诺讯株式会社 | Alignment device |
| KR20130050420A (en) * | 2011-11-08 | 2013-05-16 | 대원강업주식회사 | A measurement equipment and method for shape measure of curved spring |
| CN104254768A (en) * | 2012-01-31 | 2014-12-31 | 3M创新有限公司 | Method and apparatus for measuring the three dimensional structure of a surface |
| CN202916209U (en) * | 2012-09-12 | 2013-05-01 | 白井电子工业股份有限公司 | Automatic inspection machine for two sides of base plate |
| CN105247242A (en) * | 2013-03-18 | 2016-01-13 | Zf腓特烈斯哈芬股份公司 | Vibration damping device |
| CN105082007A (en) * | 2014-05-13 | 2015-11-25 | 日本电产理德股份有限公司 | Positioning apparatus and processing apparatus |
| CN104155307A (en) * | 2014-08-27 | 2014-11-19 | 昆山元崧电子科技有限公司 | 3D vision recheck device used in detection of AOI |
| CN104931421A (en) * | 2015-06-17 | 2015-09-23 | 武汉精测电子技术股份有限公司 | Locating and focusing method of visual inspection system of liquid crystal display panel |
| CN105277750A (en) * | 2015-11-30 | 2016-01-27 | 惠州市德赛自动化技术有限公司 | Display screen detection device |
| CN105527295A (en) * | 2015-12-31 | 2016-04-27 | 苏州日和科技有限公司 | Display full-automatic optical inspection robot |
Non-Patent Citations (1)
| Title |
|---|
| 张介: "机器视觉高斯拟合法自动导星定心系统涉及", 《天文研究与技术》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170129373A (en) | 2017-11-27 |
| CN107389545B (en) | 2020-10-16 |
| KR101804051B1 (en) | 2017-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101427099B (en) | Horizontal-arm coordinate measuring machine | |
| ES2942322T3 (en) | Apparatus and method for checking the inclination of a cushioning pad | |
| JP6095676B2 (en) | Wind tunnel balance | |
| US9874429B2 (en) | Three-dimensional coordinate measuring machine | |
| CN107389545A (en) | Centring means for detection object | |
| KR20110050589A (en) | Machine bed for a co-codinate measuring machine | |
| CN106604884A (en) | Inspection method and inspection device for resin shock absorber | |
| JP4592445B2 (en) | Thin plate surface shape measuring device | |
| CN100471780C (en) | Elevtor | |
| TW201918697A (en) | Tire rolling resistance testing machine capable of improving accuracy and efficiency of testing operations | |
| CN102187194B (en) | Damper testing device | |
| CN104070794B (en) | Tape deck | |
| KR100919391B1 (en) | Stage apparatus | |
| CN103648933B (en) | Jacking system | |
| JP6588318B2 (en) | Car body floating device, and car body stiffness testing apparatus equipped with car body floating device | |
| CN108534731B (en) | Lifting driving device and measuring machine adopting same | |
| JP2001274223A (en) | Moving table apparatus | |
| JP6763675B2 (en) | Gear unit end play measuring method and end play measuring device | |
| JP2006242676A (en) | Outer diameter measuring device and measuring probe | |
| JP2009115763A (en) | Method and device for detecting torsion of level plane | |
| US20030106233A1 (en) | Column for measuring longitudinal dimensions | |
| JP4636928B2 (en) | Measuring unit support mechanism and thin plate surface shape measuring apparatus having the same | |
| US20050086821A1 (en) | Coordinate measuring device | |
| CN106017765A (en) | Push-pull force detecting mechanism | |
| TWI383152B (en) | Detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1241022 Country of ref document: HK |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20200918 Address after: Han Guojingjidao Applicant after: Shenlong Co., Ltd Address before: Han Guojingjidao Applicant before: Liu Guanglong |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |