JP2009115763A - Method and device for detecting torsion of level plane - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a torsion detecting device of a level plane for accurately, dynamically, continuously detecting the torsion of right and left parallel rails only by making it travel along the rails as objects to be measured similarly to a conveying vehicle even when rail states of the laying period of the rails and the actually existing period of the conveying vehicle on the rails are different from each other due to own weight or the like of the conveying vehicle. <P>SOLUTION: A casing-like frame 1 capable of being moved so as to follow the level plane of rails R1 and R2 includes at least two lateral frames 11 arranged so as to bridge the right and left parallel rails R1 and R2 and longitudinal frames 12 that are arranged in the same direction as the longitudinal direction of the rails R1 and R2 and connecting and fixing between both ends of the lateral frames 11. Strain gauges 2 are attached to both ends apt to receive momentum of the longitudinal frames 12, respectively. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a level surface twist detection method and apparatus therefor, for example, level surfaces (not limited to horizontal surfaces) such as rails (including traveling rails, guide rails, etc.) laid in parallel and traveling surfaces of a transport vehicle. ) Torsion detection method and apparatus for level surface which can dynamically detect torsion.

  Conventionally, a rail of a track-type transport vehicle that transports precision products such as a liquid crystal glass substrate and a semiconductor substrate is usually laid so that two rails are maintained at a predetermined interval and a required horizontal level. A transport vehicle, not particularly limited, along the rail, for example, a stacker crane, a tracked overhead transport vehicle, and a tracked ground transport vehicle are allowed to travel.

By the way, if the rails are irregular, it will naturally affect the transport vehicle. Conventionally, only the vertical vibration generated in the transport vehicle due to the swell of the rail has been noticed. Has been taken.
However, in reality, in addition to vertical vibration, twisting due to a slight horizontal level difference between the left and right rails forces the frame of the carriage that travels on the rail to follow it by its own weight or the action of a guide. It has been found through experiments and the like that the influence of the action of deforming to twist is large. This is because even if there is a twist due to a slight difference in the horizontal level between the left and right rails, it has a very large effect on the transport vehicle. That means you need to do it.

Of course, when the right and left rails are laid, the parallelism and the horizontal level are accurately measured based on the design values.
However, since these laying operations are performed in a no-load state in which the transport vehicle does not exist on the rail, a load is applied to the rail by the transport vehicle, and the horizontal level (twist) is maintained while the rail is bent. Until that is not guaranteed. Moreover, even if the rail is laid to have a predetermined parallelism and horizontal level, the weight of the transport vehicle, particularly the transport vehicle carrying the heavy load, is gradually increased. A horizontal level difference occurs in the rails, and the horizontal left and right rails are twisted due to the horizontal level difference.
Along with this, the vehicle body of the transport vehicle is also twisted, and adverse effects such as an increase in vibration during traveling are brought about.

  However, there is no conventional method to measure the horizontal level of the left and right rails in parallel, and if the horizontal level of the rails accumulates and errors occur frequently in the transport vehicle, After all work is stopped and the transport vehicle is withdrawn from the rails, the level of the left and right rails that the operator is parallel to is adjusted for the entire length of the rail or the section where errors frequently occur using equipment such as a level level. In addition, a passive method of repairing the damaged part is adopted. Therefore, it takes a long time to adjust and maintain the horizontal level of the rail, and also to adjust and maintain the horizontal level. However, there was a problem that all the conveyance work had to be stopped.

  In view of the problems caused by the difference in horizontal level between the conventional parallel left and right rails, the present invention, for example, when the rail is laid due to its own weight or the like and when the carriage is actually on the rail, Even when the conditions are different, just like traveling on a rail, it is possible to detect the torsion of the right and left parallel rails accurately and dynamically continuously just by running along the rail as the object to be measured. An object of the present invention is to provide a level surface twist detection method and apparatus.

  In order to achieve the above object, the level surface twist detection method of the present invention is arranged so that a frame-like frame that can move so as to follow the level surface of the rail is spanned between the rails parallel to the left and right. At least two horizontal frames, and a vertical frame that is arranged along the same direction as the longitudinal direction of the rail and that is connected and fixed between both ends of the horizontal frame. It is characterized in that a strain gauge is attached to each end where the moment is easily received, and the twist of the parallel rail is detected by the output of the strain gauge.

  Further, the level surface twist detection method of the present invention includes a frame-like frame that is movable so as to follow level surfaces other than the parallel left and right rails and at least two horizontal frames in the same direction as the moving direction. And a vertical frame that is connected and fixed between both ends of the horizontal frame, and strain gauges are attached to both ends of the vertical frame that are susceptible to moments, respectively. It is characterized in that the twist of the level surface is detected by the output.

  Further, the level surface twist detection device of the present invention that implements the above method is arranged so that a frame-like frame that can move so as to follow the level surface of the rail is spanned between rails parallel to the left and right. At least two horizontal frames, and a vertical frame that is arranged along the same direction as the longitudinal direction of the rail and that is connected and fixed between both ends of the horizontal frame. It is characterized by the fact that strain gauges are attached to both ends that are susceptible to moments.

  In addition, the level surface twist detection device of the present invention has a frame-like frame that is movable so as to follow level surfaces other than the parallel left and right rails, and at least two horizontal frames in the same direction as the moving direction. And a vertical frame that is connected and fixed between both end portions of the horizontal frame, and strain gauges are attached to both end portions that are susceptible to moments of the vertical frame, respectively. And

  In this case, the rigidity of the horizontal frame constituting the frame-like frame can be made large, and the rigidity of the vertical frame can be made smaller than the rigidity of the horizontal frame.

  Further, the rigidity of the vertical frame can be set so as to be distorted following the moment generated by the level difference.

  The frame-like frame can also be used as the main body frame of the transport vehicle.

  In addition, a guide mechanism can be disposed on the frame-shaped frame.

According to the level surface torsion detection method and apparatus of the present invention, if the level surface torsion detection device simply travels, for example, if there is a level difference in torsion mode between the parallel rails, the frame frame is twisted. Can be detected by a strain gauge via a frame-like frame, so that the torsion of the rail can be detected simultaneously and dynamically while carrying out the carrying work by the carriage, so the carrying work is stopped. In addition, since it is not necessary to temporarily retract the transport vehicle from the rail, the transport operation can be continued, and a decrease in transport capability can be prevented.
The level surface torsion detection method and apparatus of the present invention can be applied to detection of level surface torsion used as a traveling surface other than parallel left and right rails. It can be performed accurately and reliably.

  Also, if the level difference between the parallel left and right rails is generated by increasing the rigidity of the horizontal frame that makes up the frame-like frame and making the rigidity of the vertical frame smaller than the rigidity of the horizontal frame, this level Since the vertical frame is distorted by the difference, the torsion of the rail can be accurately and reliably detected by the strain gauge attached to the vertical frame.

  In addition, by setting the vertical frame stiffness to be distorted following the moment generated by the level difference, there is a slight horizontal level difference between the parallel left and right rails, that is, a slight twist in the rails. However, it is possible to accurately and reliably detect the twist with a strain gauge.

  Further, by using the frame-shaped frame also as the main body frame of the transport vehicle, it is possible to dynamically detect the twist of the rail simultaneously with the transport of the transport vehicle.

  In addition, by arranging a guide mechanism on the frame-shaped frame, even when the rail is laid not only horizontally but also in an inclined or vertical direction, the frame-shaped frame is moved along the rail to detect the twisting of the rail. Can be performed accurately and reliably.

  Embodiments of a level surface twist detection method and apparatus according to the present invention will be described below with reference to the drawings.

1 to 8 show an embodiment of a level surface twist detection method and apparatus according to the present invention.
As shown in FIG. 1, the level surface twist detection device A includes a frame-like frame 1 having traveling wheels 3 that are guided by two parallel rails R1 and R2 laid in parallel, and this frame. And a strain gauge 2 attached to the frame 1.
The traveling wheel 3 is not particularly limited. For example, a wheel with a flange can be used. The level surface twist detection device A is not shown in the figure, but may be used as needed. A traveling device (not shown) can be mounted.

This frame-shaped frame 1 includes two horizontal frames 11 and 11 disposed at a predetermined interval so as to span over the upper position between the parallel rails R1 and R2, and between both ends of the horizontal frames 11 and 11. In addition, the frame is formed into a frame shape, for example, a rectangular shape as in the illustrated embodiment, by the vertical frames 12 and 12 disposed so as to be along the same direction as the longitudinal direction of the rail.
In addition, joining of the horizontal frames 11 and 11 and the vertical frames 12 and 12 is not particularly limited, but, for example, they are integrated by welding or the like.

Further, the horizontal frames 11 and 11 have a large rigidity so that the horizontal frames 11 and 11 are not easily distorted even if there is a horizontal level difference between the parallel rails, and the vertical frame 12 is more rigid than the horizontal frames 11 and 11. Also, it is formed so as to easily follow the moment generated by the level difference between the left and right rails R1 and R2 that are parallel to be distorted. Although not particularly limited, for example, the vertical frame 12 can be manufactured using C-shaped steel as shown in FIG.
As a result, when the left and right traveling parallel rails are twisted, the vertical frame 12 of the frame-like frame 1 is also distorted correspondingly, but at a position where there is no level difference between the left and right rails R1 and R2. Will return to normal shape.

The strain gauge 2 is not particularly limited but is attached to the vertical frames 12 and 12 of the frame-like frame 1, for example, by being attached. In this case, as shown in FIG. 3, the vertical frame 12 that is distorted following the twist of the level surfaces of the rails R1 and R2 is most susceptible to the distortion, for example, at both end portions that are susceptible to the moment of the vertical frame 12. In addition, it is attached to the upper piece and the lower piece that are provided continuously from at least one side surface so that the distortion of the vertical frame 12 can be accurately detected.
In the illustrated embodiment, the strain gauges 2 are attached to both ends of the two vertical frames 12 and 12 in a U-shape, but this attachment position is not particularly limited, and the central portion thereof is not limited. Can also be attached.
Further, the strain gauge 2 and the device (not shown) for processing the output signal of the strain gauge 2 employ a sensitivity that can detect the twist of the left and right rails R1 and R2, thereby generating in the vertical frame 12. The distortion to be able to be detected in real time.

And, as shown in FIG. 4, for example, as shown in FIG. 4, the level surface torsion detection apparatus A having the above-described configuration is provided with a mast 5 mounted on the rigid horizontal frames 11 and 11, and a transfer machine is mounted on the mast 5. It can be applied to a stacker crane S having a structure including the lift platform 6.
In this case, the traveling main body frame of the stacker crane S becomes the frame-like frame 1 of the level surface twist detection device A.
Note that moments are generated in the vertical frames 12 and 12 that are part of the traveling main body frame due to the inertial force due to acceleration / deceleration and vibration of the stacker crane S. This moment is generated in the same direction in the left and right vertical frames 12 and 12. On the other hand, the level surface torsional moments occur in opposite directions on the left and right sides, so that they can be clearly distinguished.

This level surface twist detection device A not only allows the frame-like frame 1 to run horizontally along a rail laid horizontally, but also when the rail is inclined so that the wheel does not touch the rail under its own weight. Alternatively, when the guide mechanism 4 is moved along the guide rail disposed vertically, the guide mechanism 4 is disposed in the frame-like frame 1 so that the guide mechanism 4 can be moved along the rail or the guide rail accurately.
The guide mechanism 4 is not particularly limited, and for example, a linear motion mechanism such as a linear guide or a screw rod can be appropriately adopted. Thereby, it can employ | adopt not only in the trolley | bogie which moves to a horizontal direction but in the raising / lowering stand etc. which raise / lower vertically.

Next, the operation of the level surface twist detection method and apparatus according to the present invention will be described.
As shown in FIG. 1, the level surface twist detection device A is placed on rails R1 and R2 and travels along the rails. At this time, if a self-propelling device is mounted on the level surface twist detection device A, it can be self-propelled along the rail, but if the self-propelling device is not mounted, Towed or run manually.

When the level surface twist detection device A travels along the rails R1 and R2 and there is no difference in the horizontal level between the parallel left and right rails, the longitudinal frames 12 and 12 of the frame-shaped frame 1 travel without distortion. However, if there is a difference in the horizontal level between the left and right rails, when the frame-like frame 1 comes to a position where there is a level difference between the rails R1 and R2, the left and right rails are not detected. A moment is applied to the frame-shaped frame 1, particularly the vertical frames 12, 12 in accordance with the horizontal level difference, and the vertical frames 12, 12 are distorted so that the entire frame-shaped frame 1 is distorted.
In this case, as shown in FIG. 2, the distortion degree of the vertical frames 12 and 12 is distorted according to the horizontal level difference between the left and right rails.

In FIG. 2, the subscript f1 of the horizontal frame 11, the subscript f2 of the vertical frame 12, and
E: Longitudinal elastic modulus G: Transverse elastic modulus Iy: Secondary moment of section Zy: Cross section modulus L: Frame length, twist 2 · Δz / L _f2 of the left and right rails R1 and R2 is expressed by the following equation.

2 · Δz / L _f2 = 2 · (M · L _f2 ² ) / (3 · E _f2 · Iy _f2 ) / L _f2
Here, from σ = M / Zy _f2 ,
2 · Δz / L _f2 = 2 · (σ · Zy _f2 · L _f2 ² ) / (3 · E _f2 · Iy _f2 ) / L _f2
Therefore, if σ is obtained, 2 · Δz / L _f2 can be calculated.

When the stacker crane S to which the level surface twist detection device A is applied is reciprocated by the travel stroke ST from the travel start position X to the stop position Y as shown in FIG. 5, the stacker crane S is stopped. It is assumed that after accelerating from the position X and traveling at a constant speed, the vehicle decelerates near the stop position Y, stops at the stop position Y, and travels in the same way on the return path.
In this case, the dynamic strain waveform data at the strain gauge position by the level surface twist detection device A is as shown in FIG. 6, and among these, the reciprocating range converted into twist is shown in FIG. FIG. 8 is a graph showing the level difference between the left and right rails (however, since the measurement is performed discontinuously using transit, it does not correspond to the twisting of the rail).

In the dynamic strain waveform data shown in FIG. 5, during acceleration / deceleration of the stacker crane S, stress is generated due to the moment and vibration from the mast 5 of the stacker crane S, the lifting platform 6 on which the transfer machine is mounted, and the like. However, the data examined excluding these are shown. Here, Δε is an actually measured strain.
Δε = Δσ / E _f2 = 120 × 10 ⁻⁶
∴Δσ = Δε · E _f2 = 120 × 10 ⁻⁶ × 21000 = 2.5 [kgf / mm ² ]
∴Δz = (σ · Zy _f2 · L _f2 ² ) / (3 · E _f2 · Iy _f2 ) = (2.5 × 2.94 × 10 ⁵ × 3162 ² ) / (3 × 21000 × 4.85 × 10) ⁷ ) = 2.4mm
Δz corresponds to the level difference between the left and right rails causing twisting, and corresponds to the range of the level difference between the left and right rails in FIG.
From this measured data, the left and right rail twist detection method can be applied to the stacker crane S by removing the acceleration / deceleration region from the dynamic strain data.

In the above embodiment, the rail is taken as an object to be measured. However, the present invention is not limited to this, and the present invention can be applied to the detection of the twist of the level surface of the guide rail disposed horizontally or vertically. it can.
When this guide rail is arranged vertically, the frame-shaped frame is configured to move while following the guide rail.
Further, the level surface to be detected by the twist detection device A of the level surface is not limited to the rail of the above embodiment, can be any surface used as a running surface other than the rail, Thereby, it is applicable also to detection of the twist of arbitrary running surfaces.

  As described above, the level surface twist detection method and apparatus thereof according to the present invention have been described based on the embodiments. However, the present invention is not limited to the configurations described in the above embodiments, and does not depart from the spirit of the present invention. The configuration can be changed as appropriate.

  The level surface twist detection method and apparatus according to the present invention has the characteristic of accurately and dynamically detecting the twist of the traveling parallel rail simply by traveling along the rail. In addition to being suitable for use in detecting the level of rails, for example, it can also be used for detecting the level of a lifting platform of a stacker crane.

It is an external appearance perspective view which shows one Example of the twist detection apparatus of the level surface of this invention. The time of twist detection of a parallel rail is shown, (A) is a plan view and (B) is a side view. The external appearance perspective view of the vertical frame of a frame-shaped frame is shown, (A) is a surface view, (B) is a rear view. It is a side view of the Example applied to the stacker crane. It is explanatory drawing of the travel path of a stacker crane. The dynamic strain waveform data is shown, (A) is a measured dynamic strain waveform diagram, and (B) is a dynamic strain waveform diagram obtained by horizontally inverting the measured dynamic strain waveform diagram. It is the wave form diagram which converted the reciprocating range into the twist. It is a graph which shows the level difference of a rail on either side.

Explanation of symbols

A level twist detection device R1 rail R2 rail S stacker crane 1 frame-like frame 11 horizontal frame 12 vertical frame 2 strain gauge 3 traveling wheel 4 guide mechanism 5 mast 6 lifting platform equipped with transfer machine

Claims (8)

  A frame-like frame that can be moved so as to follow the level surface of the rail, and at least two horizontal frames that are arranged so as to span between the rails parallel to the left and right, and along the longitudinal direction of the rail And a vertical frame that is connected and fixed between both ends of the horizontal frame, and strain gauges are attached to both ends of the vertical frame that are susceptible to moments. A level surface twist detection method characterized by detecting twist of a parallel rail.   A frame-like frame that can be moved so as to follow the level surface is disposed along at least two horizontal frames and in the same direction as the moving direction, and is connected and fixed between both ends of the horizontal frame. A level frame characterized in that a strain gauge is attached to each end of the vertical frame that is susceptible to the moment of the vertical frame, and the twist of the level surface is detected by the output of the strain gauge. Twist detection method.   A frame-like frame that can be moved so as to follow the level surface of the rail, and at least two horizontal frames that are arranged so as to span between the rails parallel to the left and right, and along the longitudinal direction of the rail And a vertical frame configured to connect and fix the both ends of the horizontal frame, and strain gauges are attached to both ends of the vertical frame that are susceptible to moments. Level surface twist detection device.   A frame-like frame that can be moved so as to follow the level surface is disposed along at least two horizontal frames and in the same direction as the moving direction, and is connected and fixed between both ends of the horizontal frame. A level surface torsion detection apparatus comprising a vertical frame constructed as described above, and strain gauges attached to both ends of the vertical frame that are susceptible to a moment.   5. The level surface twist detection device according to claim 3 or 4, wherein the rigidity of the horizontal frame constituting the frame-like frame is large and the rigidity of the vertical frame is smaller than the rigidity of the horizontal frame.   6. The level surface twist detection device according to claim 3, wherein the rigidity of the vertical frame is set so as to be distorted following a moment generated by a level difference.   7. The level surface twist detection device according to claim 3, wherein the frame-shaped frame is also used as a main body frame of the transport vehicle.   The level surface twist detection device according to claim 3, 4, 5, 6, or 7, wherein a guide mechanism is disposed on the frame-shaped frame.

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