JP4636928B2 - Measuring unit support mechanism and thin plate surface shape measuring apparatus having the same - Google Patents

Description

  The present invention relates to a support mechanism for a measurement unit, and further relates to a measurement apparatus for measuring the surface shape of a thin plate provided with the measurement unit support mechanism.

  When measuring the thickness and surface shape (for example, flatness) of a large-sized thin plate such as a liquid crystal substrate, conventionally, as disclosed in, for example, Patent Document 1, a glass substrate to be measured is horizontally disposed. In addition, it has been devised to eliminate the influence of its own weight. In this prior art, from the lower side of the glass substrate, an air pressure equal to the weight per unit area of the glass substrate is applied to hold the glass substrate horizontally, but the apparatus becomes large and control is required. There were many disadvantages such as being troublesome and expensive. In view of this, a concept has been proposed in which the glass substrate as the object to be measured is held vertically to reduce the influence of its own weight.

  10 and 11 are diagrams showing examples of the surface shape measuring apparatus previously proposed by the present applicant. As shown in FIG. 10, a glass substrate 100 as a measurement object is vertically arranged. An apparatus for measuring the surface shape has been considered. Such a measuring apparatus includes a vertical holding mechanism 120 that holds the glass substrate 100 vertically on a base 110, a measuring unit 190 that measures a surface shape, and a measuring unit support mechanism 130 that supports the measuring unit.

The measurement unit support mechanism 130 includes vertical movement means 160 including air slides 140 and 140 erected on both ends of the base 110 and screw feed mechanisms 150 and 150 disposed on the outside thereof. Further, both end portions of the horizontal moving means 180 are attached to the slide portions 170, 170 of the air slides 140, 140 of the vertical moving means 160, 160 on the left and right sides, respectively. The measuring unit 190 is attached to the horizontal moving unit 180.
The measuring unit 190 is horizontally movable by the horizontal moving means 180 and vertically movable by the vertical moving means 160, and the surface shapes of both surfaces of the glass substrate 100 as the object to be measured are continuously contactless. Measure.

  As shown in FIG. 11, the horizontal moving means 180 has a pair of horizontal slide rail portions 181 and 181 that are longer than the width of the glass substrate 100 to be measured and arranged in parallel at a predetermined interval. The glass substrate 100 extends in the width direction. Slide members 182 and 182 that can move in the horizontal direction are mounted on the horizontal slide rail portions 181 and 181, and measuring units (for example, displacement sensors) 190 and 190 are attached to the opposing surfaces of the slide members 182 and 182, respectively. The measurement units 190 and 190 are disposed at opposing positions with the glass substrate 100 interposed therebetween.

  In such a horizontal movement means 180 in which two slide mechanisms are mounted in parallel, in order to maintain the parallelism of the horizontal slide rail portions 181 and 181, connecting members 183 and 183 having the same dimensions are mounted on both ends. As shown in FIG. 11, it has a rectangular structure.

Then, in order to attach both ends of the horizontal moving means 180 to the slide parts 170 and 170 of the vertical moving means 160, the end of the rectangular structure of the horizontal moving means 180 is attached to an attachment member 184 attached to the slide part 170. To be mounted on. This connection mounting is fixed integrally with a screw etc., for example.
Japanese Patent Laid-Open No. 9-126745 (paragraph 0005, FIG. 1)

However, in the apparatus as shown in FIG. 10, the vertical moving means 160 and 160 need to be fixed vertically and parallel to the base 110. It is difficult to do and errors remain. In particular, when the left and right vertical moving means 160, 160 are assembled in the opposite direction, the rectangular moving structure 180 disposed between the vertical moving means 160, 160 is distorted, or There is a problem that twisting occurs and the measurement unit 90 is affected, and accurate measurement cannot be performed, which may reduce the reliability of the measurement result.
Furthermore, since not only errors in assembly but also screw feeding mechanisms 150 and 150 arranged on both the left and right sides cause a synchronization error with respect to vertical movement, the vertical moving means 160, There is a problem that the rectangular structure of the horizontal moving means 180 disposed between 160 is distorted or twisted and affects the measuring unit 90, so that accurate measurement cannot be performed, and the reliability of the measurement result is lowered. There was a risk.

  Therefore, the present invention has been made in view of such a background, and has an adverse effect on the measurement result caused by the assembly error of the vertical movement means and the measurement result caused by the vertical movement synchronization error of the left and right vertical movement means. A measurement mechanism supporting mechanism capable of achieving stable operation, improving measurement accuracy, and improving the reliability of measurement results while minimizing adverse effects, and a thin plate surface shape measurement apparatus including the same It is an issue to provide.

In order to solve the above-described problem, a measurement unit support structure according to the present invention includes a pair of slide rails that are vertically provided on both sides of an object to be measured placed on a base, and each of the slide rails. A vertical movement means provided on the slide rail and moving in the vertical direction along the slide rail; a horizontal movement means constructed between the pair of vertical slide members; and mounted on the horizontal movement means A measuring unit for measuring the surface shape of the object to be measured, and one end of the horizontal moving means is fixedly supported by one of the vertical slide members, and the other end of the horizontal moving means is the other wherein said horizontal moving means through a first bearing guide in the vertical sliding member longitudinally slidably supported on the other end of the horizontal movement means for connecting to the vertical slide member of the other The first bearing guide further includes an inner race fixed to a sleeve attached to the other end of the horizontal moving means, and an outer race fixed to the first receiving plate portion. One end of the first receiving plate portion is attached to a side surface of the other vertical slide member, and the other end of the first receiving plate portion is connected to the other end of the horizontal moving means via the first bearing guide. And a first plate member fixed to the lower surface of the other end of the horizontal moving means, and the sleeve is attached to the first plate member with a screw via a first spherical bearing. In addition, a gap is provided between the first receiving plate portion and the first plate member .

According to the support structure of the measuring unit, since one side of the horizontal moving means is supported by the vertical slide member so as to be free in the longitudinal direction of the horizontal moving means, the vertical movement is caused by the assembly error of the left and right vertical moving means. Even if the means is inclined in the longitudinal direction (left-right direction) of the horizontal moving means or the vertical movement synchronization error of the left and right vertical moving means occurs, the deviation on the error is absorbed on the free side, and the horizontal moving means No excessive force is applied to the sensor, distortion and twisting are prevented, and stable operation can be achieved. As a result, measurement accuracy can be improved and reliability of the measurement results can be improved. it can.
Further, since one side of the horizontal moving means is fixed to the vertical slide member, the horizontal moving means on the free side moves following the movement of the fixed side with respect to the fixed side to absorb errors. For this reason, error absorption can be performed smoothly. If both sides are free and are supported by the vertical movement means, the position of the horizontal movement means becomes unstable because there is no reference point for movement of the horizontal movement means.

In the support structure of the measurement unit, the other end of the horizontal moving means is perpendicular to the longitudinal direction and the other vertical slide member via the second bearing guide in addition to the first bearing guide. It is preferably supported so as to be slidable in the direction .

As a result , the end of the horizontal moving means is free in the direction perpendicular to the longitudinal direction in addition to the freeness in the longitudinal direction. ) In addition to the inclination of the horizontal movement means in the direction perpendicular to the longitudinal direction (front-rear direction), or even if a vertical movement synchronization error occurs in the left and right vertical movement means, there is a deviation of the error on the free side. Absorbed and no excessive force is applied to the horizontal moving means, and the occurrence of distortion and twisting is prevented, so that stable operation can be achieved, resulting in improved measurement accuracy and Reliability can be improved.

In the support structure of the measurement unit, the horizontal moving means is a pair of horizontal slide rails arranged in parallel with a predetermined interval with the object to be measured interposed therebetween, and the measurement is performed by moving along the horizontal slide rail. and a horizontal slide member part is mounted, wherein the both end portions of the pair of horizontal slide rail connecting member is provided for supporting the pair of horizontal slide rails at predetermined intervals, the said pair of horizontal slide rails You may comprise in the substantially rectangular shape by the connection member.

Thus, in order to measure the object to be measured from both sides, a horizontal slide rail in which horizontal movement means are arranged in parallel is used to form a rectangular structure, and when the object to be measured is arranged inside, a rectangular shape is formed as a whole. By supporting one side of the horizontal moving means on the vertical slide member so as to be free in the longitudinal direction of the horizontal moving means, the occurrence of distortion and twist is prevented. Stable operation can be achieved. As a result, the measurement accuracy can be improved and the reliability of the measurement result can be improved.

In the measurement structure supporting structure, a second receiving plate portion for connecting one end portion of the horizontal moving means to the one vertical slide member, and a second plate fixed to a lower surface of the one end portion of the horizontal moving means. A second member that is attached to the second plate member via two second spherical bearings disposed in a direction perpendicular to the longitudinal direction of the horizontal moving means. And a gap is provided between the second receiving plate portion and the second plate member, and the position of the first spherical bearing in the direction perpendicular to the longitudinal direction of the horizontal moving means is It may be intermediate between the two second spherical bearings.

A thin plate surface shape measuring apparatus according to the present invention includes a vertical holding mechanism that vertically holds a thin plate as an object to be measured on a base, and scanning over the entire surface of the thin plate that is vertically held by the vertical holding mechanism. And a measurement unit for measuring the surface shape of the thin plate, and the measurement unit is supported by the measurement unit support mechanism.

As a result, even if there is an assembly error of the vertical movement means that occurred during the assembly of the surface shape measuring apparatus for the thin plate, the vertical movement means is inclined in the longitudinal direction (left and right direction) of the horizontal movement means, or the vertical movement of the left and right Even if the vertical movement synchronization error of the means occurs, stable operation can be achieved, and as a result, the measurement accuracy can be improved and the reliability of the measurement result can be improved.

Also in the case of the surface profile measuring apparatus for the thin plate, the horizontal moving means includes a horizontal slide rail arranged in parallel at a predetermined interval, and moves along the horizontal slide rail and is attached to the measuring unit. The horizontal slide member is provided with a connecting member for supporting the horizontal slide rail at a predetermined interval at both ends of the horizontal slide rail, and the horizontal slide rail and the connecting member are formed in a substantially rectangular shape. It may be. Thus, in order to measure the object to be measured from both sides, a horizontal slide rail in which horizontal movement means are arranged in parallel is used to form a rectangular structure, and when the object to be measured is arranged inside, a rectangular shape is formed as a whole. By supporting one side of the horizontal moving means on the vertical slide member so as to be free in the longitudinal direction of the horizontal moving means, the occurrence of distortion and twist is prevented. Stable operation can be achieved. As a result, the measurement accuracy can be improved and the reliability of the measurement result can be improved.

  According to the measurement unit support mechanism and the thin plate surface shape measuring apparatus having the same according to the present invention, it is caused by the adverse effect on the measurement result caused by the assembly error of the vertical movement means and the vertical movement synchronization error of the left and right vertical movement means. It is possible to minimize the adverse effect on the measurement results, achieve stable operation, improve the measurement accuracy, and improve the reliability of the measurement results, and the support mechanism of the measurement unit and the thin plate including the same A surface shape measuring apparatus can be provided.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention unless otherwise specified, but are merely illustrative examples. Not too much.

  In the drawings to be referred to, FIG. 1 is a front view showing the whole of a measuring unit support mechanism and a thin plate surface shape measuring apparatus having the same according to the present invention, and FIG. . 3 is an enlarged view of FIG. 2, and FIG. 4 is an enlarged view of a horizontal moving means and a connecting portion between the horizontal moving means and the vertical moving means. FIGS. 5A and 6 are enlarged cross-sectional views of part B of FIG. 4, and FIG. 5B is a schematic explanatory view of a spherical bearing. 7 and 8 are enlarged sectional views of part C of FIG. FIG. 9 is a perspective view of the portion of FIG. In addition, the same code | symbol is attached | subjected about the same element as the element demonstrated in the conventional apparatus (FIG. 10, FIG. 11), and description is abbreviate | omitted.

  As shown in FIG. 1, a surface shape measuring apparatus 1 for a glass substrate 100 (thin plate) such as a liquid crystal substrate includes a vertical holding mechanism 200 that vertically holds the glass substrate 100 on a base 110, and the surface shape of the glass substrate. The measurement unit 330 is configured to measure the measurement unit 330, and the measurement unit support mechanism 300 is configured to support the measurement unit 330.

  The vertical holding mechanism 200 includes a lower holding part 210 and an upper holding part 220. The lower holding part 210 is composed of lower holding members 211, 211 provided at two positions at a substantially central part of the base 110, and the upper holding part 220 is erected at a substantially central part of the base 110. The columnar holding main body 230 is provided. A screw holding mechanism 240 for the upper holding portion is built in the columnar holding main body 230, and the upper holding portion 220 is attached to the lower portion of the upper holding slide portion 250 connected to the screw feeding mechanism 240.

  The upper holding portion 220 can be freely moved only in the vertical direction by the screw feeding mechanism 240 for the upper holding portion, and the lower holding portion 210 can adjust the interval between the lower holding members 211 and 211 in the horizontal direction ( Not shown). And the space | interval of the lower holding members 211 and 211 is adjusted so that the upper holding part 220 may always be located in the center. That is, the lower holding members 211 and 211 are configured to be movable in the approaching direction or the moving away direction.

  The measurement unit support mechanism 300 includes vertical movement units 310 and 310 erected on both ends of the base 110, a horizontal movement unit 320 installed between the vertical movement units 310 and 310, and the horizontal movement unit. The measurement unit 330 is attached to 320. The vertical moving means 310 includes an air slide 340 and a vertical drive screw feed mechanism 350, and the vertical drive screw feed mechanism 350 is driven by a motor or the like via a base screw feed mechanism 351 provided on the base 110. Connected to means 352. By the driving of the driving means 352, the vertical movements of the left and right vertical moving means 310, 310 are configured to move synchronously.

The horizontal moving means 320 is formed in a bridge shape by connecting both ends thereof to the vertical slide members 360, 360, and the horizontal moving means 320 has a predetermined interval in the horizontal direction as shown in FIG. The horizontal slide rails 370 and 370 are provided in parallel with each other. The horizontal slide rails 370 and 370 are mounted with horizontal slide members 380 and 380 that are movable by a linear motor (not shown). Displacement sensors 330a and 330b constituting the measuring unit 330 are attached to the.
When measuring, the displacement sensors 330a and 330b are located on both sides of the front and back sides of the glass substrate 100, and can measure the shapes of both sides in a non-contact manner.

  According to such a measurement unit support mechanism 300, when the measurement is performed, the drive unit 352 is driven, whereby the left and right vertical movement units 310 and 310 are operated in synchronization, and the vertical slide member 360 is moved in the direction of the arrow Z. Move up and down (see Fig. 1). Further, the horizontal movement means 320 held by the left and right vertical slide members 360 and 360 is operated, and the displacement sensors 330a and 330b move to the left and right in the direction of the arrow X (see FIG. 1). And displacement sensor 330a, 330b can be scanned over the whole surface of both the front and back of the glass substrate 100, and the surface shape can be measured.

In this structure, the vertical drive screw feed mechanism 350 is disposed inside the air slide 340 (on the glass substrate 100 side). In addition, receiving plate portions 390 a and 390 b are provided to connect the end portion of the horizontal slide rail 370 to the vertical slide member 360 of the air slide 340. One end of each of the receiving plate portions 390a and 390b is attached to the side surface of the vertical slide member 360, the other end portion is attached to the lower surface of the end portion of the horizontal slide rail 370, and the central portion is the vertical drive screw feed mechanism 350 ( It is supported by a feed nut 400 of a ball screw).
The feed nut 400 and the receiving plate portions 390a and 390b are connected via a feed nut floating mechanism so that the weight on the measuring portion applied to the receiving plate portions 390a and 390b does not directly act on the screw feed mechanism side as a moment load. It is configured.

Further, as shown in the enlarged view of FIG. 3 or the perspective view of FIG. 9, the horizontal moving means 320 shown in FIG. 2 is a spacer (connecting member) 500 that supports the two horizontal slide rails 370 and 370 at a predetermined interval. 500 are provided at both ends thereof, and the horizontal slide rails 370 and 370 and the spacers 500 and 500 form a rectangular structure.
As shown in FIG. 4, both end portions of the horizontal slide rail 370 are supported by receiving plate portions 390a and 390b, respectively. The right end portion of the horizontal slide rail 370 has a fixed coupling structure to the receiving plate portion 390a, and details of the portion B in FIG. 4 are shown in FIGS. Further, the left end portion has a free coupling structure with respect to the receiving plate portion 390b, and details of a portion C in FIG. 4 are shown in FIGS.
5A and 7 show sectional views in the longitudinal direction of the horizontal slide rail 370, and FIGS. 6 and 8 show sectional views in the direction perpendicular to the longitudinal direction of the horizontal slide rail 370.

First, the fixed coupling structure will be described with reference to FIGS. 5 (a), 5 (b), and 6. FIG.
As shown in FIG. 6, a plate member 510 is disposed on the ends of the horizontal slide rails 370 and 370 and the lower surface of the spacer 500 and fixed to the horizontal slide rail 370 side with screws or the like (not shown). A receiving plate portion 390 a is provided below the plate member 510, and two spherical bearings 520 are interposed between the lower surface of the plate member 510 and the upper surface of the receiving plate portion 390 a, and the receiving plate is received by screws 530. The portion 390a is attached to the plate member 510 with a gap. That is, as shown in FIG. 5B, the plate member 510 is supported at two locations of the spherical bearing 520.
A schematic structure of the spherical bearing 520 is shown in FIG. By providing the spherical bearing 520, even if there is a slight distortion between the horizontal slide rail 370 and the receiving plate portion 390a, it is possible to improve the assembling property.

On the other hand, a free coupling structure will be described with reference to FIGS.
As shown in FIG. 8, a plate member 540 is disposed on the lower surfaces of the horizontal slide rails 370 and 370 and the spacer 500, and is fixed to the horizontal slide rail 370 side with screws or the like (not shown). A receiving plate portion 390b is provided below the plate member 540, and one spherical bearing 550 is interposed between the lower surface of the plate member 540 and the upper surface of the receiving plate portion 390b. By attaching the spherical bearing 550 with the screw 570 via the sleeve 560, the receiving plate portion 390 b is mounted with a gap between the plate member 540. The plate member 540 is supported by the spherical bearing 550 as in FIG. 5B described above, and the horizontal moving means 320 is supported at two locations, that is, the spherical bearings 520 and 520 on the opposite side. Become. The position of the spherical bearing 550 is positioned between two positions of the spherical bearings 520 and 520 having a fixed coupling structure located on the opposite side.
A floating mechanism 600 is mounted on the outer peripheral portion of the sleeve 560, and is configured to be able to float (slide) in the horizontal vertical and horizontal directions (longitudinal direction and perpendicular direction thereto) as indicated by arrows XY shown in FIG. Has been.

The floating mechanism 600 is configured to have a first bearing guide 610 and a second bearing guide 620 above and below, and a first fixed to a sleeve 560 is provided between the first bearing guide 610 and the second bearing guide 620. A first support member 650 is disposed, and a second support member 660 fixed to the receiving plate portion 390b is disposed below the second bearing guide 620. The first bearing guide 610 supports the receiving plate portion 390b so that the horizontal slide rail 370 can move in the direction indicated by the arrow F in FIG. 7, and is a second bearing disposed below the first bearing guide 610. The guide 620 supports the horizontal slide rail 370 so that it can move in the direction indicated by the arrow G in FIG. 8 which is orthogonal to the movement of the first bearing guide 610.

That is, the first bearing guide 610 includes an inner race 611 and an outer race 612 (see FIG. 8), and the inner race 611 is fixed to the sleeve 560 and fixed to the horizontal slide rail 370 side via the sleeve 560. The Further, the outer race 612 is fixed to the receiving plate portion 390b side and enables movement in the direction indicated by the arrow F in FIG.
Similarly, the second bearing guide 620 (see FIG. 7) also includes an inner race 621 and an outer race 622, and the inner race 621 is fixed to the second support member 660 and received via the second support member 660. It is fixed to the plate portion 390b side. The outer race 622 is fixed to the first support member 650, fixed to the sleeve 560 via the first support member 650, and fixed to the horizontal slide rail 370 side via the sleeve 560. This enables movement in the direction indicated by arrow G in FIG.

  In other words, the free side coupling structure between the receiving plate portions 390a and 390b and the horizontal slide rail 370 is such that the receiving plate portion 390b is connected to the sleeve 560 via the first bearing guide 610 and the second bearing guide 620. 560 is coupled to the horizontal slide rail 370 via a spherical bearing 550.

As described above, according to the embodiment of the present invention, the horizontal slide rail 370 can slide in the horizontal direction with respect to the receiving plate 390b by the floating mechanism 600 including the first bearing guide 610 and the second bearing guide 620. Therefore, the assembly error of the vertical movement means 310 or the synchronous operation error of the left and right vertical movement means, for example, the distortion or the twist acting on the horizontal movement means 320 due to the error of the left and right movement amount, the movement start time, etc. Can be absorbed. As a result, the measurement unit 330 can be prevented from being adversely affected, and the operation accuracy and measurement accuracy can be improved.
Further, the configuration of the spherical bearing 550 can absorb some distortion of the horizontal slide rail 370 with respect to the receiving plate portion 390b, and can improve the assembling property.

Further, since one side of the horizontal moving means 320 has a fixed joint structure fixed to the vertical slide member 360 side, the horizontal moving means 320 on the free joint structure side moves and follows an error following the movement on the fixed joint structure side. Absorb. For this reason, error absorption can be performed smoothly.
If both sides of the horizontal moving means 320 have a free coupling structure, there will be no reference point for movement of the horizontal moving means 320, the position of the horizontal moving means 320 will become unstable, and not only error absorption but also normal measurement itself. However, in this embodiment, there is no such a situation, and stable error absorption can be achieved.

The floating mechanism 600 is configured to be able to float (slide) in the horizontal vertical and horizontal directions (longitudinal direction and directions perpendicular thereto) as indicated by arrows XY in the left part of FIG. Even floating (sliding) only in the (longitudinal direction) is sufficiently practical.
In the embodiment described above, the X direction and the Y direction are separately configured. For example, an apparatus such as an XY table that has been commercially available is incorporated and configured as in the present application. It is also possible to drive the motor in both the X and Y directions, and to actively control the floating operation.

  Moreover, although the assemblability is improved by using the spherical bearings 520 and 550 for the connection between the receiving plate portions 390a and 390b and the horizontal slide rail 370, it may be unnecessary depending on the component accuracy.

  Moreover, although the example of the air slide was shown as the vertical moving means 310 and the horizontal moving means 320, it is not limited to it. Further, although the vertical drive screw feed mechanism 350 (screw feed mechanism using a ball screw) has been described as the vertical movement drive means, the present invention is not limited to this. Further, the horizontal moving means 320 has been described as a linear motor, but is not limited thereto.

  For the vertical movement means standing on both ends of the base, as a connection support with the horizontal movement means, one side is fixedly supported, and the other side is the longitudinal direction of the horizontal movement means or the longitudinal direction and the direction perpendicular to the longitudinal direction. Since the vertical movement means that are set up in parallel apart from each other has an assembly error, the horizontal movement means can be operated without being affected by the error. As a result of being able to accurately measure the surface shape of the thin plate without adversely affecting the measurement result due to assembly errors, etc., it can be applied to the surface shape measurement of various thin plates.

It is a front view which shows the whole measurement part support mechanism which concerns on embodiment of this invention, and the surface shape measuring apparatus of a thin plate provided with the same. It is A arrow directional view of FIG. FIG. 3 is an enlarged view of FIG. 2. It is an enlarged view of the connection part of a horizontal movement means and a horizontal movement means, and a vertical movement means. (A) is the B section expanded sectional view of Drawing 4, (b) is a schematic explanatory view of a spherical bearing. It is the B section expanded sectional view of Drawing 4. It is the C section expanded sectional view of Drawing 4. It is the C section expanded sectional view of Drawing 4. It is a perspective view of the part of FIG. It is a front view which shows the whole conventional surface shape measuring apparatus of a thin plate. It is a planar view of the part of the horizontal movement means of the conventional surface shape measuring apparatus of a thin plate.

1 Surface shape measuring device 100 Glass substrate (thin plate)
110 Base 200 Vertical Holding Mechanism 300 Measuring Unit Support Mechanism 310 Vertical Moving Unit 320 Horizontal Moving Unit 330 Measuring Unit 350 Vertical Drive Screw Feeding Mechanism 360 Vertical Slide Member 370 Horizontal Slide Rail 380 Horizontal Slide Member 500 Spacer (Connection Member)
600 Floating mechanism

Claims (5)

A pair of slide rails erected in the vertical direction on both sides of the object to be measured placed on the base, and a pair of vertical rails provided on each of the slide rails and moving in the vertical direction along the slide rails Vertical movement means having a slide member;
Horizontal moving means constructed between the pair of vertical slide members;
A measuring unit mounted on the horizontal moving means for measuring the surface shape of the object to be measured,
One end of the horizontal moving means is fixedly supported by one of the vertical slide members, and the other end of the horizontal moving means is attached to the other vertical slide member via a first bearing guide. Supported slidably in the longitudinal direction ,
A first receiving plate for connecting the other end of the horizontal moving means to the other vertical slide member;
The first bearing guide includes an inner race fixed to a sleeve attached to the other end of the horizontal moving means, and an outer race fixed to the first receiving plate part,
One end of the first receiving plate portion is attached to a side surface of the other vertical slide member, and the other end of the first receiving plate portion is connected to the other end portion of the horizontal moving means via the first bearing guide. Attached,
A first plate member fixed to the lower surface of the other end of the horizontal moving means;
The sleeve is attached to the first plate member with a screw via a first spherical bearing, and
A measuring part support mechanism , wherein a gap is provided between the first receiving plate part and the first plate member .   The other end of the horizontal moving means is supported by the other vertical slide member through the second bearing guide in addition to the first bearing guide so as to be slidable in the longitudinal direction and the direction perpendicular thereto. The measurement unit support mechanism according to claim 1, wherein the measurement unit support mechanism is provided. A second receiving plate portion for connecting one end portion of the horizontal moving means to the one vertical slide member;
A second plate member fixed to the lower surface of the one end of the horizontal moving means;
The second receiving plate portion is attached to the second plate member with screws through two second spherical bearings arranged in a direction perpendicular to the longitudinal direction of the horizontal moving means, and the second A gap is provided between the receiving plate portion and the second plate member,
2. The measurement unit support mechanism according to claim 1, wherein a position of the first spherical bearing in a direction orthogonal to a longitudinal direction of the horizontal moving means is an intermediate position between the two second spherical bearings. The horizontal moving means includes a pair of horizontal slide rails arranged in parallel with a predetermined interval with the object to be measured in between, and a horizontal slide member that moves along the horizontal slide rail and is mounted with the measurement unit And a connecting member provided at both ends of the pair of horizontal slide rails and supporting the pair of horizontal slide rails at a predetermined interval,
The horizontal moving means is configured in a substantially rectangular shape by the pair of horizontal slide rails and the connecting member,
2. The first plate member to which the sleeve is attached via the first spherical bearing is provided on the lower surface of the connecting member at the other end of the horizontal moving means. Measuring unit support mechanism. A vertical holding mechanism for vertically holding a thin plate as an object to be measured on a base, and a measuring unit for measuring the surface shape of the thin plate by scanning over the entire surface of the thin plate held vertically by the vertical holding mechanism A thin plate surface shape measurement apparatus, wherein the measurement unit is supported by using the measurement unit support mechanism according to any one of claims 1 to 4.

Images