JP4417130B2 - Glass substrate vertical holding device - Google Patents

Description

The present invention relates to an apparatus for vertically holding a rectangular glass substrate such as a large glass substrate for a photomask .

In the case of measuring the planar accuracy of the large glass substrate , conventionally, as disclosed in, for example, Patent Document 1, a glass substrate to be measured is placed horizontally to eliminate the influence of its own weight. . In this prior art, from the lower side of the glass substrate, an air pressure equal to the weight per unit area of the glass substrate is applied to hold the glass substrate horizontally, but the apparatus becomes large and control is required. There were many demerits such as being troublesome and expensive. In view of this, a concept has been proposed in which the glass substrate as the object to be measured is held vertically to reduce the influence of its own weight.

  For example, as a known apparatus, as shown in FIGS. 4 (A) and 4 (B), a glass substrate 100 as an object to be measured is arranged vertically, and three upper and lower portions of the glass substrate are held by V-grooves. There are devices with configured holding means. In such a holding device, the holding portion can be held at the end portion of the substrate without affecting the measurement range. For example, when setting, the upper holding portion 34 ′ and the lower two holding portions 22 ′ and 23 ′ There is some error in alignment. Accordingly, when the substrate is set, an alignment operation is performed in order to align the substrate vertically and thereafter. In this method, by performing this alignment work, the position adjustment work is performed by moving the V groove holding portion in the direction of the arrow in FIG. 4B. At this time, the end is held by the V groove. Therefore, as shown in FIG. 4 (A), each holding part is distorted. If this distortion occurs, not only accurate measurement becomes impossible, but also the surface of the glass substrate or the like, which is the object to be measured, cannot be stably held vertically due to the distortion.

JP-A-9-126745

  Therefore, in the conventional technique, when the alignment operation (position adjustment operation) is performed by moving the V groove holding portion in the direction of the arrow in FIG. As shown in A), each holding portion is distorted. If this distortion occurs, not only accurate measurement becomes impossible, but also the surface of the glass substrate or the like, which is the object to be measured, cannot be stably held vertically due to the distortion. SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a holding device that hardly causes distortion of an object to be measured even by alignment work.

To achieve the above object, the glass substrate vertical holding device of the present invention is a vertical holding device for vertically supporting a square glass substrate,
A holding member that holds a plurality of portions of the outer peripheral end surface of the rectangular glass substrate, the holding member having a flat surface that contacts and holds the end surface of the glass substrate; And holding the end surface of the held portion on the plane of the holding portion without distorting the glass substrate, and the fine pressure is sufficient to hold the square glass substrate vertically. A holding member pressure adjusting means for adjusting the pressure so as to be able to slide along the holding member,
The holding member is composed of a pair of lower holding members arranged at intervals on the lower end surface of the substrate and one upper holding member arranged on the upper end surface of the substrate,
Wherein the upper retaining member, a first moving means for moving said upper holding member in the vertical direction so as to disjunctive from the substrate upper end surface is provided, and wherein the pair of lower holding member, can be adjusted both intervals The end surface of the held portion is moved along the holding portion plane by second moving means for moving the pair of lower holding members in the lateral direction along the lower end surface of the substrate and the holding member pressure adjusting means. And a third moving means for moving the pair of lower holding members in a direction perpendicular to a plane formed by the substrate in a state where the pressure is adjusted so as to be able to slide . As a result, the glass substrate or the like slides and displaces on the holding material plane, so that during the alignment, the holding member does not receive a stress having a component perpendicular to the substrate surface and can be adjusted without causing distortion such as twisting. Become. The holding member pressure adjusting means is a means capable of urging or pressing the upper holding portion in contact with the outer peripheral end surface in the vertical direction, and is not particularly limited. Examples thereof include a spring provided with a screw, a hydraulic cylinder provided with pressure adjusting means, and a pneumatic cylinder.

The glass substrate vertical holding device of the present invention can adjust the position or posture of the rectangular glass substrate by sliding the end surface of the held portion along the holding member plane in this manner.

Furthermore, the glass substrate vertical holding apparatus of the present invention is characterized in that the holding member plane is formed of a member having a low coefficient of friction. Specifically, a polished metal surface or a surface coated or clad with smooth plastics is preferable. The material of the plastics is preferably selected depending on an appropriate coefficient of friction and wear resistance, and the chemical structure of the polymer is not particularly a problem.

Furthermore, the glass substrate vertical holding device of the present invention is characterized in that the holding member is rotatable about a rotation axis perpendicular to the holding member plane.

Furthermore, the glass substrate vertical holding device of the present invention is characterized in that a bank portion is provided in a part of the outline of the holding member plane to prevent the glass substrate from falling.

As described above, the effects of the present invention can be summarized as follows.
1. A rectangular glass substrate can be vertically held with a simple structure and high accuracy.
2. The vertical holding position or posture of the glass substrate that is easily distorted can be adjusted without applying distortion.
3. Even if the shape of the glass substrate is increased, vertical holding can be achieved with high accuracy.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention unless otherwise specified, but are merely illustrative examples. Not too much.

The glass substrate measuring apparatus shown in FIG. 1 has a substrate holding mechanism and a measuring mechanism provided on a base (base), and the outline will be described.
In the substrate holding mechanism, a lower holding portion 20 is configured at a substantially central portion on the base 10, a lower holding portion main body 21 is placed, and holding members 22 and 23 are arranged at intervals in the center. And the lower part is connected with the screw shaft 24. In addition, the screw shaft 24 is formed as a reverse screw at an intermediate position between the holding members 22 and 23, and the holding members 22 and 23 can be moved in a direction toward or away from each other by rotating the screw shaft 24. It has become. On the other hand, the upper holding portion 30 is configured as a columnar holding portion main body 31 on the base 10 located at the center in the longitudinal direction of the lower holding portion 20, and is connected to a screw feed mechanism 32 built in the main body 31. An upper holding portion 34 is attached to the lower portion of the slide portion 33. The upper holding portion 34 can move only up and down, and the lower holding portion 20 can adjust the distance between them in the lateral direction.

On the other hand, the measuring mechanism includes vertically moving means 40 and 50 comprising air slides 41 and 51 and screw feed mechanisms 42 and 52 arranged vertically at both ends on the base 10, and an air slide mechanism of these two vertically moving means. 41 and 51 are connected to the slide portions and have a bridge-shaped measurement driving means 60. The measurement driving means 60 is configured to be movable in the lateral direction by a linear motor 61, and measuring units 70 are mounted on both sides of the lower portion of the slide member 62.
The measurement unit 70 is positioned on both sides of the glass substrate when measuring, and can measure the shape of both sides in a non-contact manner. In this measuring mechanism, the screw feed mechanisms 42 and 52 of the vertical movement means 40 and 50 are further connected to a drive means 54 such as a motor via a screw feed mechanism 53 provided on the base 10. By driving the driving means, the two upper and lower means 40 and 50 move synchronously.

  Next, details of the holding members 22, 23, and 34 in the substrate holding mechanism will be described. FIG. 3 shows an example in which the shape of the upper surface is formed in an oblong shape. FIG. 3 (A) shows the entire contact surface with the base, and FIG. 3 (B) shows only the central portion. In FIG. 3C, the prevention step portions a may be provided on both sides of the upper surface so that the substrate does not fall from the holding portion due to the movement during the alignment work. In such a substrate holding mechanism, first, the interval between the lower holding members 22 and 23 is set to a predetermined interval according to the size of the substrate to be measured, and similarly, the size of the substrate to be measured with the upper holding member 34 is set. Accordingly, the substrate 100 (see FIGS. 1 and 2) is attached substantially vertically by being lowered or raised. Subsequently, alignment work is performed.

For example, in FIG. 2, the upper holding member 34 side is fixed, and the lower holding members 22 and 23 side are adjusted (moved slightly in the front-rear direction in the drawing, and a vertical surface is obtained by the arranged sensor. ). At this time, since the glass substrate and each holding member are in contact with each other in a plane, the glass substrate and the holding member move slightly while causing a slip with resistance (friction force) against the pressing force from above and below. .
The resistance force, that is, the frictional force at this time is the weight of the substrate itself and the pressing force in the vertical direction, and by setting so as not to apply an excessive force, it is possible to prevent the glass substrate from being distorted. In particular, as shown in FIG. 3, the frictional force can be adjusted by adjusting the contact area of the abutting plane. Further, by enabling the holding member on the side to be adjusted and rotated, the generation of friction due to the movement during the alignment operation can be further reduced (FIG. 3D).

Although not shown, the drive mechanism of the holding member at the time of the alignment operation can be manually operated, but the operation efficiency can be improved by operating the motor by driving the motor.
When the glass substrate is held vertically, the upper holding member side is lowered, and further lowered after each plane of the upper and lower holding members comes into contact with each other to hold the pressure (preload), thereby increasing the certainty. . This pressure can be small.

The apparatus of the present invention, a rectangular glass substrate, such as a liquid crystal glass substrate for a display, it is possible to precisely vertically held by a simple mechanism. Moreover, since the vertical holding posture and position can be adjusted without distorting the glass substrate , it can be used in glass substrate measurement, liquid crystal display manufacturing processes, etc., in the semiconductor industry, other electronics and industries, Used in manufacturing and inspection departments that require sophisticated material quality, it can contribute to the manufacture of advanced products.

It is a general-view figure which shows the glass substrate measuring apparatus incorporating the holding | maintenance apparatus by this invention. It is a conceptual diagram explaining the function of the holding member of this invention, (A) is the front state, (B) is a side view of (A). It is a perspective view of the various examples of the holding member used for this invention apparatus. It is a conceptual diagram explaining the function of the conventional holding member, (A) is the front state, (B) is a side view of A.

DESCRIPTION OF SYMBOLS 10 Base 20 Lower holding part 21 Lower holding part main body 22 Holding member 23 Holding member 24 Screw shaft 30 Upper holding part 31 Holding part main body 32 Screw feed mechanism 33 Slide part 34 Upper holding member 40 Vertical moving means 41 Air slide (mechanism)
42 Screw feed (mechanism)
50 Vertical movement means 51 Air slide (mechanism)
52 Screw feed (mechanism)
53 Screw feed mechanism 54 Drive means (motor)
60 Measurement drive means 61 Linear motor 62 Slide member 100 Glass substrate 22 'Conventional holding member 23' Conventional holding member 34 'Conventional holding member

Claims (3)

In a vertical holding device that vertically supports a square glass substrate,
A holding member that holds a plurality of portions of the outer peripheral end surface of the rectangular glass substrate, the holding member having a flat surface that contacts and holds the end surface of the glass substrate; And holding the end surface of the held portion on the plane of the holding portion without distorting the glass substrate, and the fine pressure is sufficient to hold the square glass substrate vertically. A holding member pressure adjusting means for adjusting the pressure so as to be able to slide along the holding member,
The holding member is composed of a pair of lower holding members arranged at intervals on the lower end surface of the substrate and one upper holding member arranged on the upper end surface of the substrate,
Wherein the upper retaining member, a first moving means for moving said upper holding member in the vertical direction so as to disjunctive from the substrate upper end surface is provided, and wherein the pair of lower holding member, can be adjusted both intervals The end surface of the held portion is moved along the holding portion plane by second moving means for moving the pair of lower holding members in the lateral direction along the lower end surface of the substrate and the holding member pressure adjusting means. And a third moving means for moving the pair of lower holding members in a direction perpendicular to the plane formed by the substrate in a state where the pressure is adjusted so as to be able to slide. A glass substrate vertical holding device. 2. The glass substrate vertical holding apparatus according to claim 1, wherein the holding member plane is formed of a member having a low coefficient of friction. 2. The glass substrate vertical holding device according to claim 1, wherein a bank portion is provided in a part of the outline of the holding member plane to prevent the glass substrate from falling.

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