JP2013017985A - Liquid coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable clean coating corresponding to the need for semiconductors and medical products in coating a liquid agent using a coating robot.SOLUTION: An HEPA filter 6 is disposed on an upper part of a cover 7 of a device for coating a liquid agent. At a lower part of a coating head 9, lower than an A-A line indicating the upper face of a coating member (circuit substrate 2), a sliding part, a Z-axis driving part 42, an X-axis driving part 43 and a Y-axis driving part 44 of an X-Y table part 20 are arranged, and a flow 45 of down-flow air is discharged from a discharge port 17.

Description

The present invention relates to a liquid application apparatus that applies a liquid agent in a clean environment when applying the liquid agent to an application member.

Regarding liquid coating, it is widely used in various industrial fields. In recent years, the application of liquid preparations has become widespread in the fields of semiconductors, medical products, foods, etc., which require cleanliness. The market will continue to expand in the future, including environmentally conscious products such as LEDs, batteries, solar, information equipment, and food products that are environmentally conscious and medical products that accompany medical advances. Accordingly, a coating device having a high degree of cleanliness that can be handled is required.

2. Description of the Related Art Conventionally, in various fields of equipment, a configuration in which the head portion moves up and down is employed. From the viewpoint of device design, it is fundamental to operate a lightweight part such as a head, but in the field of semiconductors and medical products, it is necessary to increase the degree of cleanliness. This further improves the quality and reliability of the product. For this reason, if there is a drive part or a sliding part between the required application surface and the HEPA filter, the degree of cleanliness with respect to the application surface is lowered.

Looking at devices in the semiconductor field and the medical field, many have a HEPA filter (JISZ8122) attached to the top of the cover. Below that, a drive unit and a sliding part for moving the head up and down below the HEPA filter are moved on the tray and the circuit board even at the time of semiconductor component mounting head, medical chemical injection, experiment, etc. Then, the air whose cleanness is lowered is down-blowed on the application member.

The air blown down is discharged from the base plate of the coating apparatus or the vicinity of the base plate. Thus, ideally, a configuration in which there is no drive part or sliding part above the application surface and clean air is blown down is preferable.

In the liquid agent application apparatus, the liquid agent application-related head unit is basically positioned above the liquid agent application member. When application accuracy is required, in order to position the application member at the application position, it is often necessary to perform positioning in two directions, the horizontal direction and the vertical direction. In contrast to the positioning of the coating member mounted on the XY table, the horizontal positioning is performed by driving the XY axes. In this embodiment, the Z-axis table is provided with a vertically movable Z-axis for positioning in the vertical direction, and the tip of the liquid material application nozzle is optimized with respect to the application position height of the application member. -Y table part is moved up and down to apply the liquid agent. . The driving unit and the sliding unit for positioning the XYZ axes with respect to the liquid agent application are positioned below the application surface of the application member.

According to the present invention, clean air from the HEPA filter attached to the upper part of the apparatus cover is blown down, and the drive part and the sliding part in the apparatus are applied to the application surface against the application surface of the application member when applying the liquid agent. By adopting a configuration that is positioned further downward, it is possible to apply the liquid agent with a high degree of cleanliness.

The perspective view which shows the structure of the liquid agent coating device of one Embodiment of this invention. Schematic diagram of one implementation of vertical driving of XY table section Schematic diagram of the right side of the liquid material application device of an embodiment of the present invention Schematic of the right side surface of the head part mounting one-side stand of one embodiment of the present invention

Next, embodiments of the present invention will be described with reference to the drawings. First, FIG. 1 shows the overall configuration of the present invention. Before and after the coating device 1, a clean tunnel and a clean stocker for carrying in and out the circuit board 2 as a coating member are taken out after supply of the liquid agent from the supply unit 3 to the discharge unit 4 although not shown in detail. To go. Reference numeral 5 denotes a control unit of the coating apparatus 1.

In the coating apparatus 1, a HEPA filter 6 as a clean filter is attached to the upper part 7 of the apparatus cover, and clean air is blown down. Below that, a liquid application head 9 coupled with the liquid tank 8 is attached to a head mounting plate 11. Reference numeral 10 denotes a liquid supply tube. Reference numeral 12 denotes an application surface height detection sensor, which is attached to the bracket 13 and fixed to the head attachment plate 11. The head attachment plate 11 is attached to the holding column 14 and fixed to the main body base plate 16. Position 15 is a maintenance position. Although not shown in the figure, it is intended to facilitate maintenance in the front direction of the apparatus by driving with a cylinder or a ball screw.

An exhaust port 17 is appropriately provided at or near the main body base plate 16 of the coating apparatus 1 so that clean air can flow and be discharged in an optimum direction with respect to the air volume of the HEPA filter 6. Further, on the main body base plate 16, the horizontal positioning with respect to the liquid agent application of the semiconductor component 18 of the circuit board 2, and the discharge nozzle tip 19 of the liquid agent application head 9 have an optimum height in the vertical direction. By making the circuit board 2 movable up and down by the -Y table section 20, an optimum liquid agent application is possible. There is a pair of guide rails 21 as a guide for loading and unloading the circuit board 2 as an application member and for positioning on the XY table.

The configuration of the XY table unit 20 will be described with reference to FIGS. 1 and 2. The Y-axis frame 22 is driven back and forth by a Y-axis drive motor 23 and a Y-axis drive ball screw 24 and moved along two Y-axis guides 25. Above that is an X-axis frame 26, which is moved along an X-axis guide 29 in the left-right direction by an X-axis drive motor 27 and an X-axis drive ball screw 28. Reference numeral 30 denotes a Z-axis motor that is driven up and down.
The Z-axis motor 30 is attached by a bracket 31 fixed to the X-axis frame 26. A pulley 34 directly connected to the motor is coupled to a pulley 37 integrated with a Z-axis drive ball screw 36 supported by a bearing 35 by a timing belt 38 so that the Z-axis ball screw 36 can be rotated. The Z-axis frame 32 on which the circuit board 2 that is an application member is placed is moved up and down with respect to the frame 26.
The Z-axis frame 32 is provided by four linear guides 33,
It can move in the horizontal direction integrally with the X-axis frame 26. Reference numeral 39 denotes a fixing ring for fixing to the X-axis frame 26, 40 denotes a ball screw nut fixed to the Z-axis frame 32, and 41 denotes a ball screw nut mounting bracket of the Y-axis drive ball screw 24.

FIG. 3 is a schematic right side view of the coating apparatus 1. The HEPA filter 6 is attached to the upper part of the apparatus cover 7, and the liquid application head 9 is mounted on the head attachment plate 11 and fixed to the holding column 14. Below the coating head 9, there is an XY table section 20, and a circuit board 2 as a coating member is placed on the top. The Z-axis drive unit 42, the X-axis drive unit 43, the Y-axis drive unit 44, and the drive unit corresponding to coating are driven and slid below the line AA on the upper surface of the circuit board 2 of the coating member. The part is arranged. Reference numeral 45 denotes a flow of clean air that is blown down from the HEPA filter. In this embodiment, the air is discharged from an exhaust port 17 provided in the base plate 16 as indicated by 46.

In order to improve the cleanliness of the unit in the device, it is effective to install a cover to correspond to the place where the cleanliness is required, such as the ball screw of the drive unit, timing belt, puller, etc. In the explanation, the explanation of the basic structure is emphasized, so the cover etc. are not shown.

FIG. 4 is a schematic right side view in which the head mounting plate 11 of the liquid application head 9 is configured as a stand from one side, and the basic configuration is the same as FIG. If the application member of the liquid application device is small, workability from the front, the weight and vibration of the head, etc., the shape of the holding column may be properly used as necessary. The HEPA filter 6 is provided at the upper part, and the head attachment plate 11 is attached to the one-side holding support 47 under the upper part. Below that, the circuit board 2, which is an application member, is placed on the XY table unit 20 and mounted on the main body base plate 16.

The liquid agent coating apparatus of the present invention is useful for liquid agent application in the fields of semiconductors, medical products, foods, and the like, which are fields that require cleanliness.

2 Circuit board 5 Control unit 6 HEPA filter 8 Liquid agent tank 9 Liquid agent application head 11 Head mounting plate 17 Exhaust port 20 X-Y table part 42 Z-axis drive part 43 X-axis drive part 44 Y-axis drive part

Claims (4)

A HEPA filter is provided on the upper part of the cover of the liquid agent applicator and is blown down. The application-related head unit joined to the liquid supply unit is attached to the holding column. Below the application-related head section, there is an XY table that can drive the application member in the horizontal and vertical directions. When applying the liquid, the gap between the discharge port of the liquid application head and the application member is optimized. In order to maintain and enable application of the liquid agent, the application member placed on the XY table is moved up and down to apply the liquid material. A liquid agent coating apparatus, wherein a drive unit and a sliding unit that perform coating positioning with respect to a coating member are positioned below a coating surface. 2. The application-related head unit can be mounted with a unit for detecting a gap between a tip of an application nozzle of a liquid application head and an application position of an application member and a unit for detecting a liquid application state. Liquid application device. The coating apparatus according to claim 2, wherein in the liquid agent coating apparatus, feedback control is performed so that a gap between the tip of the coating nozzle and the coating position becomes a set dimension, and the coating member on the XY table is moved in the horizontal direction or vertically. In the liquid application device, the application state of the liquid agent is detected, feedback control is performed on the position and size of the set application shape, and the application pressure, application time, and movement speed of the application member are adjusted to stably apply the liquid agent. The liquid agent application facility according to claim 2.

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