KR101256306B1 - 프로브 카드의 평행 조정 기구 및 검사 장치 - Google Patents

프로브 카드의 평행 조정 기구 및 검사 장치 Download PDF

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Publication number
KR101256306B1
KR101256306B1 KR1020110058525A KR20110058525A KR101256306B1 KR 101256306 B1 KR101256306 B1 KR 101256306B1 KR 1020110058525 A KR1020110058525 A KR 1020110058525A KR 20110058525 A KR20110058525 A KR 20110058525A KR 101256306 B1 KR101256306 B1 KR 101256306B1
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KR
South Korea
Prior art keywords
head plate
probe card
inclined surface
support
movable body
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KR1020110058525A
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English (en)
Korean (ko)
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KR20120000503A (ko
Inventor
마사유키 노구치
슈지 아키야마
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication of KR20120000503A publication Critical patent/KR20120000503A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020110058525A 2010-06-25 2011-06-16 프로브 카드의 평행 조정 기구 및 검사 장치 Active KR101256306B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010145424A JP5826466B2 (ja) 2010-06-25 2010-06-25 プローブカードの平行調整機構及び検査装置
JPJP-P-2010-145424 2010-06-25

Publications (2)

Publication Number Publication Date
KR20120000503A KR20120000503A (ko) 2012-01-02
KR101256306B1 true KR101256306B1 (ko) 2013-04-18

Family

ID=45358635

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110058525A Active KR101256306B1 (ko) 2010-06-25 2011-06-16 프로브 카드의 평행 조정 기구 및 검사 장치

Country Status (4)

Country Link
JP (1) JP5826466B2 (enrdf_load_stackoverflow)
KR (1) KR101256306B1 (enrdf_load_stackoverflow)
CN (1) CN102298079A (enrdf_load_stackoverflow)
TW (1) TWI503549B (enrdf_load_stackoverflow)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5277827B2 (ja) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 プローブ装置
JP2013175572A (ja) * 2012-02-24 2013-09-05 Tokyo Electron Ltd プローブ装置及びプローブカードの平行調整機構
JP5819880B2 (ja) * 2013-05-08 2015-11-24 本田技研工業株式会社 平行度調整装置および平行度調整方法
CN104183515A (zh) * 2013-05-24 2014-12-03 标准科技股份有限公司 晶圆测试机台
KR101607087B1 (ko) * 2014-09-24 2016-03-29 주식회사 디이엔티 프로브
JP6890921B2 (ja) 2015-10-21 2021-06-18 株式会社日本マイクロニクス プローブカード及び接触検査装置
KR102446953B1 (ko) * 2016-02-24 2022-09-23 세메스 주식회사 정렬 지그 및 이를 이용하여 테스트 헤드를 프로브 스테이션에 정렬하는 방법
TWI616664B (zh) * 2016-03-23 2018-03-01 創意電子股份有限公司 使用探針卡之方法、系統及其探針卡裝置
CN107422241B (zh) * 2016-03-23 2019-10-15 创意电子股份有限公司 使用探针卡的方法及系统
TWI610080B (zh) * 2016-05-12 2018-01-01 中華精測科技股份有限公司 探針卡總成
CN106206355B (zh) * 2016-08-30 2018-11-27 重庆市妙格半导体研究院有限公司 基于石墨烯感测单元的半导体检测系统
KR102654604B1 (ko) * 2016-11-22 2024-04-03 세메스 주식회사 프로브 스테이션
CN108387759B (zh) * 2018-01-15 2020-10-16 北京时代民芯科技有限公司 一种通用1553b总线电路反熔丝调整夹具
KR102115179B1 (ko) * 2018-11-20 2020-06-08 주식회사 탑 엔지니어링 프로브장치 및 프로브 자세 보정 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050004293A (ko) * 2002-08-07 2005-01-12 동경 엘렉트론 주식회사 탑재대 구동 장치 및 프로브 방법
JP2006098296A (ja) * 2004-09-30 2006-04-13 Optrex Corp 表示パネルの点灯検査装置
JP2007183194A (ja) * 2006-01-10 2007-07-19 Micronics Japan Co Ltd プロービング装置
KR20100119716A (ko) * 2009-05-01 2010-11-10 가부시키가이샤 니혼 마이크로닉스 평판형상 피검사체의 시험장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03185327A (ja) * 1989-12-15 1991-08-13 Sanwa Musen Sokki Kenkyusho:Kk 真空測定装置
JP3163221B2 (ja) * 1993-08-25 2001-05-08 東京エレクトロン株式会社 プローブ装置
JPH08320389A (ja) * 1995-05-26 1996-12-03 Dainippon Screen Mfg Co Ltd 測定ステージ
JP4102884B2 (ja) * 2005-05-13 2008-06-18 東京エレクトロン株式会社 プローブカードの調整機構及びプローブ装置
JP4685559B2 (ja) * 2005-09-09 2011-05-18 東京エレクトロン株式会社 プローブカードと載置台との平行度調整方法及び検査用プログラム記憶媒体並びに検査装置
JP4860242B2 (ja) * 2005-11-11 2012-01-25 東京エレクトロン株式会社 プローブ装置
JP2008294292A (ja) * 2007-05-25 2008-12-04 Tokyo Seimitsu Co Ltd プローバ、プローブ接触方法及びプログラム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050004293A (ko) * 2002-08-07 2005-01-12 동경 엘렉트론 주식회사 탑재대 구동 장치 및 프로브 방법
JP2006098296A (ja) * 2004-09-30 2006-04-13 Optrex Corp 表示パネルの点灯検査装置
JP2007183194A (ja) * 2006-01-10 2007-07-19 Micronics Japan Co Ltd プロービング装置
KR20100119716A (ko) * 2009-05-01 2010-11-10 가부시키가이샤 니혼 마이크로닉스 평판형상 피검사체의 시험장치

Also Published As

Publication number Publication date
TWI503549B (zh) 2015-10-11
CN102298079A (zh) 2011-12-28
TW201221965A (en) 2012-06-01
JP5826466B2 (ja) 2015-12-02
JP2012008051A (ja) 2012-01-12
KR20120000503A (ko) 2012-01-02

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