KR101125408B1 - 화합물 반도체 및 그 제조 방법 - Google Patents
화합물 반도체 및 그 제조 방법 Download PDFInfo
- Publication number
- KR101125408B1 KR101125408B1 KR1020057022054A KR20057022054A KR101125408B1 KR 101125408 B1 KR101125408 B1 KR 101125408B1 KR 1020057022054 A KR1020057022054 A KR 1020057022054A KR 20057022054 A KR20057022054 A KR 20057022054A KR 101125408 B1 KR101125408 B1 KR 101125408B1
- Authority
- KR
- South Korea
- Prior art keywords
- quantum well
- layer
- growth
- compound semiconductor
- inn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
Landscapes
- Led Devices (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003154745A JP2004356522A (ja) | 2003-05-30 | 2003-05-30 | 3−5族化合物半導体、その製造方法及びその用途 |
| JPJP-P-2003-00154745 | 2003-05-30 | ||
| PCT/JP2004/007792 WO2004107460A1 (ja) | 2003-05-30 | 2004-05-28 | 化合物半導体及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20060015609A KR20060015609A (ko) | 2006-02-17 |
| KR101125408B1 true KR101125408B1 (ko) | 2012-03-27 |
Family
ID=33487330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020057022054A Expired - Fee Related KR101125408B1 (ko) | 2003-05-30 | 2004-05-28 | 화합물 반도체 및 그 제조 방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7754515B2 (enExample) |
| JP (1) | JP2004356522A (enExample) |
| KR (1) | KR101125408B1 (enExample) |
| CN (1) | CN1788358B (enExample) |
| DE (1) | DE112004000936T5 (enExample) |
| GB (1) | GB2419466B (enExample) |
| TW (1) | TW200428496A (enExample) |
| WO (1) | WO2004107460A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100513923B1 (ko) * | 2004-08-13 | 2005-09-08 | 재단법인서울대학교산학협력재단 | 질화물 반도체층을 성장시키는 방법 및 이를 이용하는 질화물 반도체 발광소자 |
| CN100511737C (zh) * | 2004-09-28 | 2009-07-08 | 住友化学株式会社 | Ⅲ-ⅴ族化合物半导体及其制备方法 |
| JP4908453B2 (ja) * | 2008-04-25 | 2012-04-04 | 住友電気工業株式会社 | 窒化物半導体レーザを作製する方法 |
| KR100962898B1 (ko) | 2008-11-14 | 2010-06-10 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
| USRE48774E1 (en) | 2008-11-14 | 2021-10-12 | Suzhou Lekin Semiconductor Co., Ltd. | Semiconductor light emitting device |
| US8604461B2 (en) * | 2009-12-16 | 2013-12-10 | Cree, Inc. | Semiconductor device structures with modulated doping and related methods |
| US8536615B1 (en) | 2009-12-16 | 2013-09-17 | Cree, Inc. | Semiconductor device structures with modulated and delta doping and related methods |
| JP5671244B2 (ja) * | 2010-03-08 | 2015-02-18 | 日亜化学工業株式会社 | 窒化物系半導体発光素子 |
| US10090433B2 (en) * | 2016-12-02 | 2018-10-02 | Sensor Electronic Technology, Inc. | Semiconductor heterostructure polarization doping |
| US11557693B2 (en) | 2017-07-31 | 2023-01-17 | Xiamen San'an Optoelectronics Co., Ltd. | Semiconductor light emitting device |
| CN114038958B (zh) * | 2021-08-05 | 2023-03-24 | 重庆康佳光电技术研究院有限公司 | 发光芯片外延片及其制作方法、发光芯片 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001077415A (ja) * | 1999-08-31 | 2001-03-23 | Sharp Corp | GaN系化合物半導体発光素子の製造方法 |
| JP2001102633A (ja) * | 1999-07-26 | 2001-04-13 | Sharp Corp | 窒化物系化合物半導体発光素子の製造方法 |
| JP2001196632A (ja) * | 2000-01-14 | 2001-07-19 | Sharp Corp | 窒化物系化合物半導体発光およびその製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2780691B2 (ja) | 1994-12-02 | 1998-07-30 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
| US6346720B1 (en) * | 1995-02-03 | 2002-02-12 | Sumitomo Chemical Company, Limited | Layered group III-V compound semiconductor, method of manufacturing the same, and light emitting element |
| JPH0936429A (ja) | 1995-07-25 | 1997-02-07 | Sumitomo Chem Co Ltd | 3−5族化合物半導体の製造方法 |
| JP3304787B2 (ja) * | 1996-09-08 | 2002-07-22 | 豊田合成株式会社 | 半導体発光素子及びその製造方法 |
| JP3543628B2 (ja) | 1998-08-13 | 2004-07-14 | ソニー株式会社 | 窒化物系iii−v族化合物半導体の成長方法および半導体発光素子の製造方法 |
| JP3726252B2 (ja) * | 2000-02-23 | 2005-12-14 | 独立行政法人理化学研究所 | 紫外発光素子およびInAlGaN発光層の製造方法 |
| FR2807909B1 (fr) | 2000-04-12 | 2006-07-28 | Centre Nat Rech Scient | COUCHE MINCE SEMI-CONDUCTRICE DE GaInN, SON PROCEDE DE PREPARATION; DEL COMPRENANT CETTE COUCHE ET DISPOSITIF D'ECLAIRAGE COMPRENANT CETTE DEL |
-
2003
- 2003-05-30 JP JP2003154745A patent/JP2004356522A/ja active Pending
-
2004
- 2004-05-28 DE DE112004000936T patent/DE112004000936T5/de not_active Withdrawn
- 2004-05-28 CN CN2004800127740A patent/CN1788358B/zh not_active Expired - Fee Related
- 2004-05-28 TW TW093115357A patent/TW200428496A/zh not_active IP Right Cessation
- 2004-05-28 US US10/558,427 patent/US7754515B2/en not_active Expired - Fee Related
- 2004-05-28 GB GB0525436A patent/GB2419466B/en not_active Expired - Fee Related
- 2004-05-28 KR KR1020057022054A patent/KR101125408B1/ko not_active Expired - Fee Related
- 2004-05-28 WO PCT/JP2004/007792 patent/WO2004107460A1/ja not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001102633A (ja) * | 1999-07-26 | 2001-04-13 | Sharp Corp | 窒化物系化合物半導体発光素子の製造方法 |
| JP2001077415A (ja) * | 1999-08-31 | 2001-03-23 | Sharp Corp | GaN系化合物半導体発光素子の製造方法 |
| JP2001196632A (ja) * | 2000-01-14 | 2001-07-19 | Sharp Corp | 窒化物系化合物半導体発光およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0525436D0 (en) | 2006-01-25 |
| CN1788358A (zh) | 2006-06-14 |
| TW200428496A (en) | 2004-12-16 |
| CN1788358B (zh) | 2010-04-21 |
| JP2004356522A (ja) | 2004-12-16 |
| US20060243960A1 (en) | 2006-11-02 |
| GB2419466B (en) | 2007-07-18 |
| GB2419466A (en) | 2006-04-26 |
| DE112004000936T5 (de) | 2006-11-16 |
| TWI360163B (enExample) | 2012-03-11 |
| WO2004107460A1 (ja) | 2004-12-09 |
| KR20060015609A (ko) | 2006-02-17 |
| US7754515B2 (en) | 2010-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101399250B1 (ko) | 질소 화합물 반도체 발광 소자 및 그 제조 방법 | |
| US20110309400A1 (en) | Nitride semiconductor device and manufacturing method of the device | |
| CN102084504B (zh) | 氮化物类半导体发光元件及其制造方法 | |
| JP2011258994A (ja) | 半導体装置 | |
| US20090242870A1 (en) | Light emitting device and method for manufacturing the same | |
| CN1431722A (zh) | Ⅲ族氮化物半导体蓝色发光器件 | |
| CN100511737C (zh) | Ⅲ-ⅴ族化合物半导体及其制备方法 | |
| KR101125408B1 (ko) | 화합물 반도체 및 그 제조 방법 | |
| TW200832758A (en) | GaN semiconductor light emitting element | |
| JP4457691B2 (ja) | GaN系半導体素子の製造方法 | |
| US9564552B2 (en) | Method for producing group III nitride semiconductor light-emitting device | |
| JP4609917B2 (ja) | 窒化アルミニウムガリウム層の製造方法、iii族窒化物半導体発光素子の製造方法およびiii族窒化物半導体発光素子 | |
| JP2004014587A (ja) | 窒化物系化合物半導体エピタキシャルウエハ及び発光素子 | |
| CN114664986B (zh) | 氮化物半导体发光元件及其制造方法 | |
| JP4229625B2 (ja) | 窒化物半導体層とそれを含む窒化物半導体素子 | |
| JP2008028121A (ja) | 半導体発光素子の製造方法 | |
| EP1869717B1 (en) | Production method of group iii nitride semioconductor element | |
| KR102553985B1 (ko) | Ⅲ족 질화물 반도체 | |
| JP7319559B2 (ja) | 窒化物半導体発光素子 | |
| JP7260807B2 (ja) | 窒化物半導体発光素子およびその製造方法 | |
| JP2006128653A (ja) | 3−5族化合物半導体、その製造方法及びその用途 | |
| US10038118B2 (en) | Light emitting element | |
| US9508895B2 (en) | Group III nitride semiconductor light-emitting device and production method therefor | |
| TW202232783A (zh) | 氮化物半導體發光元件 | |
| JP2000174336A (ja) | GaN系半導体発光素子およびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| AMND | Amendment | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
St.27 status event code: N-2-6-B10-B15-exm-PE0601 |
|
| T11-X000 | Administrative time limit extension requested |
St.27 status event code: U-3-3-T10-T11-oth-X000 |
|
| AMND | Amendment | ||
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| J201 | Request for trial against refusal decision | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PJ0201 | Trial against decision of rejection |
St.27 status event code: A-3-3-V10-V11-apl-PJ0201 |
|
| PB0901 | Examination by re-examination before a trial |
St.27 status event code: A-6-3-E10-E12-rex-PB0901 |
|
| B701 | Decision to grant | ||
| PB0701 | Decision of registration after re-examination before a trial |
St.27 status event code: A-3-4-F10-F13-rex-PB0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| FPAY | Annual fee payment |
Payment date: 20150130 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| FPAY | Annual fee payment |
Payment date: 20160127 Year of fee payment: 5 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5 |
|
| FPAY | Annual fee payment |
Payment date: 20170202 Year of fee payment: 6 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6 |
|
| FPAY | Annual fee payment |
Payment date: 20180219 Year of fee payment: 7 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 7 |
|
| FPAY | Annual fee payment |
Payment date: 20190218 Year of fee payment: 8 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 8 |
|
| PN2301 | Change of applicant |
St.27 status event code: A-5-5-R10-R13-asn-PN2301 St.27 status event code: A-5-5-R10-R11-asn-PN2301 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20200303 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20200303 |
|
| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-5-5-R10-R18-oth-X000 |
|
| P22-X000 | Classification modified |
St.27 status event code: A-4-4-P10-P22-nap-X000 |