KR101071024B1 - 프로브 카드용 대차 및 프로브 카드의 취급 방법 - Google Patents

프로브 카드용 대차 및 프로브 카드의 취급 방법 Download PDF

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Publication number
KR101071024B1
KR101071024B1 KR1020080072211A KR20080072211A KR101071024B1 KR 101071024 B1 KR101071024 B1 KR 101071024B1 KR 1020080072211 A KR1020080072211 A KR 1020080072211A KR 20080072211 A KR20080072211 A KR 20080072211A KR 101071024 B1 KR101071024 B1 KR 101071024B1
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KR
South Korea
Prior art keywords
probe card
temperature
inspection
test
inspection apparatus
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KR1020080072211A
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English (en)
Korean (ko)
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KR20090012123A (ko
Inventor
무네토시 나가사카
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication of KR20090012123A publication Critical patent/KR20090012123A/ko
Application granted granted Critical
Publication of KR101071024B1 publication Critical patent/KR101071024B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020080072211A 2007-07-25 2008-07-24 프로브 카드용 대차 및 프로브 카드의 취급 방법 KR101071024B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007193495A JP5049419B2 (ja) 2007-07-25 2007-07-25 プローブカード用台車及びこの台車を用いるプローブカードの取り扱い方法
JPJP-P-2007-00193495 2007-07-25

Publications (2)

Publication Number Publication Date
KR20090012123A KR20090012123A (ko) 2009-02-02
KR101071024B1 true KR101071024B1 (ko) 2011-10-06

Family

ID=40307330

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080072211A KR101071024B1 (ko) 2007-07-25 2008-07-24 프로브 카드용 대차 및 프로브 카드의 취급 방법

Country Status (4)

Country Link
JP (1) JP5049419B2 (ja)
KR (1) KR101071024B1 (ja)
CN (1) CN101354428B (ja)
TW (1) TWI459492B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101046769B1 (ko) * 2009-01-20 2011-07-06 주식회사 쎄믹스 프로브카드케이스
JP5517344B2 (ja) * 2010-02-12 2014-06-11 東京エレクトロン株式会社 プローブカードの搬送機構、プローブカードの搬送方法及びプローブ装置
JP5874427B2 (ja) * 2012-02-14 2016-03-02 セイコーエプソン株式会社 部品検査装置、及び、ハンドラー
CN104101425A (zh) * 2013-04-15 2014-10-15 镇江逸致仪器有限公司 具有常温检测与高温检测双夹具的巴条测试系统
JP6267928B2 (ja) * 2013-10-29 2018-01-24 東京エレクトロン株式会社 ウエハ検査装置の整備用台車及びウエハ検査装置の整備方法
JP5967509B1 (ja) * 2015-02-27 2016-08-10 株式会社東京精密 搬送ユニット及びプローバ
KR101854015B1 (ko) * 2015-11-06 2018-05-02 세메스 주식회사 프로브 카드 수납 장치
CN107664557B (zh) * 2017-11-15 2020-02-07 无锡阿尔法精密机械制造有限公司 陶瓷压力传感器等级分拣装置
JP6575663B2 (ja) * 2018-10-24 2019-09-18 株式会社東京精密 プローブカード型温度センサ及びウエハチャック温度測定方法
CN109782031A (zh) * 2018-12-27 2019-05-21 上海华岭集成电路技术股份有限公司 一种高低温测试环境自动更换探针卡的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100674417B1 (ko) 2005-07-28 2007-01-29 미래산업 주식회사 반도체 소자 테스트용 테스트 챔버 유닛
KR100698965B1 (ko) 2006-06-20 2007-03-23 주식회사 해동 금형의 온도제어장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05343486A (ja) * 1992-06-04 1993-12-24 Tokyo Electron Yamanashi Kk 検査装置
JPH06349909A (ja) * 1993-06-14 1994-12-22 Hitachi Ltd プローブ検査装置
JPH11145215A (ja) * 1997-11-11 1999-05-28 Mitsubishi Electric Corp 半導体検査装置およびその制御方法
JPH11330171A (ja) * 1998-05-11 1999-11-30 Sony Corp ウェーハプローバ及びそれにおけるウェーハの搬送処理方法
JP2000241454A (ja) * 1999-02-23 2000-09-08 Mitsubishi Electric Corp 高温テスト用プローブカード及びテスト装置
JP2003215162A (ja) * 2002-01-17 2003-07-30 Seiko Epson Corp プローブカード及びこれを備えた半導体測定装置
JP2004170267A (ja) * 2002-11-20 2004-06-17 Tokyo Seimitsu Co Ltd プローブカード搬送台車
JP4391744B2 (ja) * 2002-12-27 2009-12-24 東京エレクトロン株式会社 移動式プローブカード搬送装置、プローブ装置及びプローブ装置へのプローブカードの搬送方法
CN2695211Y (zh) * 2004-04-23 2005-04-27 陈国华 一种台车装置
JP2007165715A (ja) * 2005-12-15 2007-06-28 Tokyo Electron Ltd プローブカードの装着方法及びこの方法に用いられるプローブカード移載補助装置
US20070166134A1 (en) * 2005-12-20 2007-07-19 Motoko Suzuki Substrate transfer method, substrate transfer apparatus and exposure apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100674417B1 (ko) 2005-07-28 2007-01-29 미래산업 주식회사 반도체 소자 테스트용 테스트 챔버 유닛
KR100698965B1 (ko) 2006-06-20 2007-03-23 주식회사 해동 금형의 온도제어장치

Also Published As

Publication number Publication date
KR20090012123A (ko) 2009-02-02
JP5049419B2 (ja) 2012-10-17
CN101354428B (zh) 2011-07-27
TW200921832A (en) 2009-05-16
TWI459492B (zh) 2014-11-01
CN101354428A (zh) 2009-01-28
JP2009032801A (ja) 2009-02-12

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