KR101061615B1 - 기판 처리 장치 및 기판 처리 방법 - Google Patents

기판 처리 장치 및 기판 처리 방법 Download PDF

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Publication number
KR101061615B1
KR101061615B1 KR1020060024236A KR20060024236A KR101061615B1 KR 101061615 B1 KR101061615 B1 KR 101061615B1 KR 1020060024236 A KR1020060024236 A KR 1020060024236A KR 20060024236 A KR20060024236 A KR 20060024236A KR 101061615 B1 KR101061615 B1 KR 101061615B1
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KR
South Korea
Prior art keywords
substrate
nozzle
stage
floating
pressure
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KR1020060024236A
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English (en)
Korean (ko)
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KR20060101311A (ko
Inventor
요시타카 오츠카
타카시 나카미츠
Original Assignee
도쿄엘렉트론가부시키가이샤
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Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20060101311A publication Critical patent/KR20060101311A/ko
Application granted granted Critical
Publication of KR101061615B1 publication Critical patent/KR101061615B1/ko

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    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47C—CHAIRS; SOFAS; BEDS
    • A47C27/00—Spring, stuffed or fluid mattresses or cushions specially adapted for chairs, beds or sofas
    • A47C27/14—Spring, stuffed or fluid mattresses or cushions specially adapted for chairs, beds or sofas with foamed material inlays
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47G—HOUSEHOLD OR TABLE EQUIPMENT
    • A47G27/00—Floor fabrics; Fastenings therefor
    • A47G27/02—Carpets; Stair runners; Bedside rugs; Foot mats

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020060024236A 2005-03-17 2006-03-16 기판 처리 장치 및 기판 처리 방법 KR101061615B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005076879A JP4429943B2 (ja) 2005-03-17 2005-03-17 基板処理装置及び基板処理方法
JPJP-P-2005-00076879 2005-03-17

Publications (2)

Publication Number Publication Date
KR20060101311A KR20060101311A (ko) 2006-09-22
KR101061615B1 true KR101061615B1 (ko) 2011-09-01

Family

ID=37100296

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060024236A KR101061615B1 (ko) 2005-03-17 2006-03-16 기판 처리 장치 및 기판 처리 방법

Country Status (3)

Country Link
JP (1) JP4429943B2 (ja)
KR (1) KR101061615B1 (ja)
TW (1) TWI305933B (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4407970B2 (ja) * 2006-11-28 2010-02-03 東京エレクトロン株式会社 基板処理装置及び基板処理方法
KR100834145B1 (ko) 2006-12-27 2008-06-02 세메스 주식회사 보강대를 포함하는 포토레지스트 도포용 장치
JP5188759B2 (ja) * 2007-08-07 2013-04-24 東京応化工業株式会社 塗布装置及び塗布方法
JP4942589B2 (ja) * 2007-08-30 2012-05-30 東京応化工業株式会社 塗布装置及び塗布方法
JP5144299B2 (ja) * 2008-02-12 2013-02-13 光洋サーモシステム株式会社 減圧乾燥装置
JP5029486B2 (ja) 2008-05-13 2012-09-19 東京エレクトロン株式会社 塗布装置、塗布方法及び記憶媒体
JP5012651B2 (ja) 2008-05-14 2012-08-29 東京エレクトロン株式会社 塗布装置、塗布方法、塗布、現像装置及び記憶媒体
KR101071583B1 (ko) 2009-08-21 2011-10-10 주식회사 케이씨텍 부상식 기판 코터 장치
JP5081261B2 (ja) * 2010-02-24 2012-11-28 東京エレクトロン株式会社 塗布装置
JP5490639B2 (ja) * 2010-07-14 2014-05-14 大日本スクリーン製造株式会社 基板処理装置および基板搬送方法
KR101543882B1 (ko) * 2013-12-17 2015-08-11 세메스 주식회사 기판 이송 장치 및 이를 포함하는 기판 검사 장치
JP6518891B2 (ja) * 2014-08-01 2019-05-29 株式会社ブイ・テクノロジー 搬送装置
JP6595276B2 (ja) * 2015-09-18 2019-10-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6890438B2 (ja) * 2017-03-03 2021-06-18 株式会社Ｓｃｒｅｅｎホールディングス 浮上量算出装置、塗布装置および塗布方法
CN108620288B (zh) * 2017-03-22 2020-02-14 深圳市腾盛精密装备股份有限公司 一种点胶高度的补偿方法及装置
CN113955485B (zh) * 2021-10-25 2023-05-23 博众精工科技股份有限公司 一种产品贴圈装置及产品贴圈方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294926A (ja) 2003-03-27 2004-10-21 Kyocera Corp ラビング装置及び配向膜のラビング方法
JP2004345814A (ja) 2003-05-23 2004-12-09 Murata Mach Ltd 浮上搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004294926A (ja) 2003-03-27 2004-10-21 Kyocera Corp ラビング装置及び配向膜のラビング方法
JP2004345814A (ja) 2003-05-23 2004-12-09 Murata Mach Ltd 浮上搬送装置

Also Published As

Publication number Publication date
KR20060101311A (ko) 2006-09-22
JP4429943B2 (ja) 2010-03-10
JP2006261394A (ja) 2006-09-28
TW200701333A (en) 2007-01-01
TWI305933B (en) 2009-02-01

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