KR101011360B1 - 검사 지그 및 그 검사 장치 - Google Patents

검사 지그 및 그 검사 장치 Download PDF

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Publication number
KR101011360B1
KR101011360B1 KR1020080075069A KR20080075069A KR101011360B1 KR 101011360 B1 KR101011360 B1 KR 101011360B1 KR 1020080075069 A KR1020080075069 A KR 1020080075069A KR 20080075069 A KR20080075069 A KR 20080075069A KR 101011360 B1 KR101011360 B1 KR 101011360B1
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KR
South Korea
Prior art keywords
probe
rear end
insertion hole
end side
inspection
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Expired - Fee Related
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KR1020080075069A
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English (en)
Korean (ko)
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KR20090013139A (ko
Inventor
겐지 쓰치하시
미쓰히코 이토
Original Assignee
가부시키가이샤 코요 테크노스
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Application filed by 가부시키가이샤 코요 테크노스 filed Critical 가부시키가이샤 코요 테크노스
Publication of KR20090013139A publication Critical patent/KR20090013139A/ko
Application granted granted Critical
Publication of KR101011360B1 publication Critical patent/KR101011360B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020080075069A 2007-07-31 2008-07-31 검사 지그 및 그 검사 장치 Expired - Fee Related KR101011360B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007198751A JP2009036532A (ja) 2007-07-31 2007-07-31 検査冶具および検査装置
JPJP-P-2007-00198751 2007-07-31

Publications (2)

Publication Number Publication Date
KR20090013139A KR20090013139A (ko) 2009-02-04
KR101011360B1 true KR101011360B1 (ko) 2011-01-28

Family

ID=40331497

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080075069A Expired - Fee Related KR101011360B1 (ko) 2007-07-31 2008-07-31 검사 지그 및 그 검사 장치

Country Status (4)

Country Link
JP (1) JP2009036532A (enrdf_load_stackoverflow)
KR (1) KR101011360B1 (enrdf_load_stackoverflow)
CN (1) CN101358997A (enrdf_load_stackoverflow)
TW (1) TW200905221A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6255914B2 (ja) * 2013-11-07 2018-01-10 日本電産リード株式会社 検査治具
KR101565344B1 (ko) 2013-12-13 2015-11-03 현대자동차주식회사 차량 연동 단말기 조명 제어 시스템 및 제어 방법
JP6237441B2 (ja) * 2014-04-24 2017-11-29 日本電産リード株式会社 電極構造体、検査治具、及び電極構造体の製造方法
CN106324481B (zh) * 2016-08-23 2018-11-27 管仙福 一种用于集成电路的定位检测装置
IT201700021400A1 (it) * 2017-02-24 2018-08-24 Technoprobe Spa Testa di misura a sonde verticali con migliorate proprietà in frequenza
CN106932615B (zh) * 2017-04-28 2024-02-13 尼得科精密检测设备(浙江)有限公司 检查夹具及具备该检查夹具的检查装置
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
US11454650B2 (en) * 2018-07-18 2022-09-27 Nidec-Read Corporation Probe, inspection jig, inspection device, and method for manufacturing probe
CN113433360B (zh) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 测试适配器、测试设备和测试部件承载件的方法
KR102324248B1 (ko) * 2020-06-19 2021-11-12 리노정밀(주) 검사 장치용 블록 조립체
CN113639979B (zh) * 2021-07-26 2022-04-26 苏州佳祺仕信息科技有限公司 一种检测治具及用于检测带孔工件性能的检测装置
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
KR100455097B1 (ko) 2000-09-13 2004-11-08 니덱-리드 가부시키가이샤 기판 검사용 검사지그 및 그 검사지그를 구비한 기판검사장치
KR20060111248A (ko) * 2005-04-21 2006-10-26 가부시키가이샤 코요 테크노스 검사 지그 및 검사 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3575501B2 (ja) * 1995-05-15 2004-10-13 株式会社日本マイクロニクス プローブ装置
US7248482B2 (en) * 2003-05-16 2007-07-24 Matsushita Electric Industrial Co., Ltd. Module with built-in circuit component and method for producing the same
TWI286606B (en) * 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
JP2005338065A (ja) * 2004-04-26 2005-12-08 Koyo Technos:Kk 検査冶具および検査装置
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
JP4448086B2 (ja) * 2005-12-12 2010-04-07 大西電子株式会社 プリント配線板の検査治具

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
KR100455097B1 (ko) 2000-09-13 2004-11-08 니덱-리드 가부시키가이샤 기판 검사용 검사지그 및 그 검사지그를 구비한 기판검사장치
KR20060111248A (ko) * 2005-04-21 2006-10-26 가부시키가이샤 코요 테크노스 검사 지그 및 검사 장치

Also Published As

Publication number Publication date
KR20090013139A (ko) 2009-02-04
TWI383163B (enrdf_load_stackoverflow) 2013-01-21
JP2009036532A (ja) 2009-02-19
CN101358997A (zh) 2009-02-04
TW200905221A (en) 2009-02-01

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