CN101358997A - 检查夹具及检查装置 - Google Patents
检查夹具及检查装置 Download PDFInfo
- Publication number
- CN101358997A CN101358997A CNA2008101441557A CN200810144155A CN101358997A CN 101358997 A CN101358997 A CN 101358997A CN A2008101441557 A CNA2008101441557 A CN A2008101441557A CN 200810144155 A CN200810144155 A CN 200810144155A CN 101358997 A CN101358997 A CN 101358997A
- Authority
- CN
- China
- Prior art keywords
- probe
- mentioned
- rear end
- end side
- inserting hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims description 49
- 239000000523 sample Substances 0.000 claims abstract description 210
- 230000005465 channeling Effects 0.000 claims description 42
- 230000005611 electricity Effects 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 12
- 238000005452 bending Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 241000278713 Theora Species 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- -1 beryllium copper metals Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007198751 | 2007-07-31 | ||
JP2007198751A JP2009036532A (ja) | 2007-07-31 | 2007-07-31 | 検査冶具および検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101358997A true CN101358997A (zh) | 2009-02-04 |
Family
ID=40331497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008101441557A Pending CN101358997A (zh) | 2007-07-31 | 2008-07-29 | 检查夹具及检查装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2009036532A (enrdf_load_stackoverflow) |
KR (1) | KR101011360B1 (enrdf_load_stackoverflow) |
CN (1) | CN101358997A (enrdf_load_stackoverflow) |
TW (1) | TW200905221A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104634999A (zh) * | 2013-11-07 | 2015-05-20 | 日本电产理德股份有限公司 | 检测夹具 |
CN105044391A (zh) * | 2014-04-24 | 2015-11-11 | 日本电产理德股份有限公司 | 电极结构体,检测夹具及电极结构体的制造方法 |
CN106932615A (zh) * | 2017-04-28 | 2017-07-07 | 日本电产理德机器装置(浙江)有限公司 | 检查夹具及具备该检查夹具的检查装置 |
CN112424614A (zh) * | 2018-07-18 | 2021-02-26 | 日本电产理德股份有限公司 | 探针、检查治具、检查装置以及探针的制造方法 |
CN112424615A (zh) * | 2018-07-13 | 2021-02-26 | 日本电产理德股份有限公司 | 检查治具以及检查装置 |
CN113639979A (zh) * | 2021-07-26 | 2021-11-12 | 苏州佳祺仕信息科技有限公司 | 一种检测治具及用于检测带孔工件性能的检测装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101565344B1 (ko) | 2013-12-13 | 2015-11-03 | 현대자동차주식회사 | 차량 연동 단말기 조명 제어 시스템 및 제어 방법 |
CN106324481B (zh) * | 2016-08-23 | 2018-11-27 | 管仙福 | 一种用于集成电路的定位检测装置 |
IT201700021400A1 (it) * | 2017-02-24 | 2018-08-24 | Technoprobe Spa | Testa di misura a sonde verticali con migliorate proprietà in frequenza |
CN113433360B (zh) * | 2020-03-23 | 2023-12-01 | 奥特斯(中国)有限公司 | 测试适配器、测试设备和测试部件承载件的方法 |
KR102324248B1 (ko) * | 2020-06-19 | 2021-11-12 | 리노정밀(주) | 검사 장치용 블록 조립체 |
KR102649845B1 (ko) * | 2023-11-29 | 2024-03-21 | 주식회사 나노시스 | 반도체 소자 테스터 지그 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0729838U (ja) * | 1993-11-08 | 1995-06-02 | 日本電子材料株式会社 | 座屈応力減少機構付垂直動作式プローブカード |
JP3575501B2 (ja) * | 1995-05-15 | 2004-10-13 | 株式会社日本マイクロニクス | プローブ装置 |
JPH09274054A (ja) * | 1996-04-08 | 1997-10-21 | Furukawa Electric Co Ltd:The | プローバー |
JP3505495B2 (ja) | 2000-09-13 | 2004-03-08 | 日本電産リード株式会社 | 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法 |
US7248482B2 (en) * | 2003-05-16 | 2007-07-24 | Matsushita Electric Industrial Co., Ltd. | Module with built-in circuit component and method for producing the same |
TWI286606B (en) * | 2004-03-16 | 2007-09-11 | Gunsei Kimoto | Electric signal connecting device, and probe assembly and prober device using it |
JP2005338065A (ja) * | 2004-04-26 | 2005-12-08 | Koyo Technos:Kk | 検査冶具および検査装置 |
CN100535676C (zh) * | 2005-04-21 | 2009-09-02 | 株式会社光阳科技 | 检查夹具及检查装置 |
JP3849948B1 (ja) * | 2005-11-16 | 2006-11-22 | 日本電産リード株式会社 | 基板検査用治具及び検査用プローブ |
JP4448086B2 (ja) * | 2005-12-12 | 2010-04-07 | 大西電子株式会社 | プリント配線板の検査治具 |
-
2007
- 2007-07-31 JP JP2007198751A patent/JP2009036532A/ja active Pending
-
2008
- 2008-07-29 CN CNA2008101441557A patent/CN101358997A/zh active Pending
- 2008-07-29 TW TW097128552A patent/TW200905221A/zh not_active IP Right Cessation
- 2008-07-31 KR KR1020080075069A patent/KR101011360B1/ko not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104634999A (zh) * | 2013-11-07 | 2015-05-20 | 日本电产理德股份有限公司 | 检测夹具 |
CN104634999B (zh) * | 2013-11-07 | 2019-02-22 | 日本电产理德股份有限公司 | 检测夹具 |
CN105044391A (zh) * | 2014-04-24 | 2015-11-11 | 日本电产理德股份有限公司 | 电极结构体,检测夹具及电极结构体的制造方法 |
CN105044391B (zh) * | 2014-04-24 | 2019-10-25 | 日本电产理德股份有限公司 | 电极结构体,检测夹具及电极结构体的制造方法 |
CN106932615A (zh) * | 2017-04-28 | 2017-07-07 | 日本电产理德机器装置(浙江)有限公司 | 检查夹具及具备该检查夹具的检查装置 |
CN106932615B (zh) * | 2017-04-28 | 2024-02-13 | 尼得科精密检测设备(浙江)有限公司 | 检查夹具及具备该检查夹具的检查装置 |
CN112424615A (zh) * | 2018-07-13 | 2021-02-26 | 日本电产理德股份有限公司 | 检查治具以及检查装置 |
CN112424614A (zh) * | 2018-07-18 | 2021-02-26 | 日本电产理德股份有限公司 | 探针、检查治具、检查装置以及探针的制造方法 |
CN113639979A (zh) * | 2021-07-26 | 2021-11-12 | 苏州佳祺仕信息科技有限公司 | 一种检测治具及用于检测带孔工件性能的检测装置 |
CN113639979B (zh) * | 2021-07-26 | 2022-04-26 | 苏州佳祺仕信息科技有限公司 | 一种检测治具及用于检测带孔工件性能的检测装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20090013139A (ko) | 2009-02-04 |
KR101011360B1 (ko) | 2011-01-28 |
TWI383163B (enrdf_load_stackoverflow) | 2013-01-21 |
JP2009036532A (ja) | 2009-02-19 |
TW200905221A (en) | 2009-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20090204 |