TW200905221A - Inspection jig and inspection apparatus - Google Patents

Inspection jig and inspection apparatus Download PDF

Info

Publication number
TW200905221A
TW200905221A TW097128552A TW97128552A TW200905221A TW 200905221 A TW200905221 A TW 200905221A TW 097128552 A TW097128552 A TW 097128552A TW 97128552 A TW97128552 A TW 97128552A TW 200905221 A TW200905221 A TW 200905221A
Authority
TW
Taiwan
Prior art keywords
end side
probe
inspection
insertion hole
rear end
Prior art date
Application number
TW097128552A
Other languages
English (en)
Chinese (zh)
Other versions
TWI383163B (enrdf_load_stackoverflow
Inventor
Dobashi Kenji
Ito Mitsuhiko
Original Assignee
Koyo Technology Taiwan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Technology Taiwan Co Ltd filed Critical Koyo Technology Taiwan Co Ltd
Publication of TW200905221A publication Critical patent/TW200905221A/zh
Application granted granted Critical
Publication of TWI383163B publication Critical patent/TWI383163B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW097128552A 2007-07-31 2008-07-29 Inspection jig and inspection apparatus TW200905221A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007198751A JP2009036532A (ja) 2007-07-31 2007-07-31 検査冶具および検査装置

Publications (2)

Publication Number Publication Date
TW200905221A true TW200905221A (en) 2009-02-01
TWI383163B TWI383163B (enrdf_load_stackoverflow) 2013-01-21

Family

ID=40331497

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097128552A TW200905221A (en) 2007-07-31 2008-07-29 Inspection jig and inspection apparatus

Country Status (4)

Country Link
JP (1) JP2009036532A (enrdf_load_stackoverflow)
KR (1) KR101011360B1 (enrdf_load_stackoverflow)
CN (1) CN101358997A (enrdf_load_stackoverflow)
TW (1) TW200905221A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113433360A (zh) * 2020-03-23 2021-09-24 奥特斯(中国)有限公司 用于测试部件承载件同时防止变形的测试针对被测试部件承载件施加过多载荷的测试适配器

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6255914B2 (ja) * 2013-11-07 2018-01-10 日本電産リード株式会社 検査治具
KR101565344B1 (ko) 2013-12-13 2015-11-03 현대자동차주식회사 차량 연동 단말기 조명 제어 시스템 및 제어 방법
JP6237441B2 (ja) * 2014-04-24 2017-11-29 日本電産リード株式会社 電極構造体、検査治具、及び電極構造体の製造方法
CN106324481B (zh) * 2016-08-23 2018-11-27 管仙福 一种用于集成电路的定位检测装置
IT201700021400A1 (it) * 2017-02-24 2018-08-24 Technoprobe Spa Testa di misura a sonde verticali con migliorate proprietà in frequenza
CN106932615B (zh) * 2017-04-28 2024-02-13 尼得科精密检测设备(浙江)有限公司 检查夹具及具备该检查夹具的检查装置
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
US11454650B2 (en) * 2018-07-18 2022-09-27 Nidec-Read Corporation Probe, inspection jig, inspection device, and method for manufacturing probe
KR102324248B1 (ko) * 2020-06-19 2021-11-12 리노정밀(주) 검사 장치용 블록 조립체
CN113639979B (zh) * 2021-07-26 2022-04-26 苏州佳祺仕信息科技有限公司 一种检测治具及用于检测带孔工件性能的检测装置
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
JP3575501B2 (ja) * 1995-05-15 2004-10-13 株式会社日本マイクロニクス プローブ装置
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
JP3505495B2 (ja) 2000-09-13 2004-03-08 日本電産リード株式会社 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法
US7248482B2 (en) * 2003-05-16 2007-07-24 Matsushita Electric Industrial Co., Ltd. Module with built-in circuit component and method for producing the same
TWI286606B (en) * 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
JP2005338065A (ja) * 2004-04-26 2005-12-08 Koyo Technos:Kk 検査冶具および検査装置
CN100535676C (zh) * 2005-04-21 2009-09-02 株式会社光阳科技 检查夹具及检查装置
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
JP4448086B2 (ja) * 2005-12-12 2010-04-07 大西電子株式会社 プリント配線板の検査治具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113433360A (zh) * 2020-03-23 2021-09-24 奥特斯(中国)有限公司 用于测试部件承载件同时防止变形的测试针对被测试部件承载件施加过多载荷的测试适配器
CN113433360B (zh) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 测试适配器、测试设备和测试部件承载件的方法

Also Published As

Publication number Publication date
KR20090013139A (ko) 2009-02-04
KR101011360B1 (ko) 2011-01-28
TWI383163B (enrdf_load_stackoverflow) 2013-01-21
JP2009036532A (ja) 2009-02-19
CN101358997A (zh) 2009-02-04

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees