200925610 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用以進行半導體元件等之電子元件 之電氣測試之探針卡。 【先前技術】 、立通常，探針卡備有細長之多&根探針，使各探針之針 纟部（針尖）以-對—之形式接觸於電子元件之各電極，對該 β電子元件通電，藉此進行電氣測試。 近年來’該電子元件隨著社會之需求及支援此之技術 之進步而逐漸小型化或高度集成化，因此，電子元件之電 和亦J型化，且其間隔（間距）亦狹小化。此外，依照電子元 件’亦會有其電極配置成多數行，且電極位置或間距每行 相異的情形。 進行此種電子元件之電氣測試時，與電極狹小化之間 ❹距或各電極間相異之間距對應之探針間，相互接觸之虞會 以往，有㈣出防止該探針間接觸之各種技術。例如， 為防止探針相互交又，有將該等針尖相互配置於電子元件 之電極之左右方向之鋸齒形排列之探針卡（專利文獻”。 又，有將複數根探針分成針主體部從針尖部延伸於一侧之 第1探針群組、與針主體部從針尖部延伸於另一側之第2 探針群組，將帛！及第2探針群組之探針交互設置於該等 針尖排列方向之探針卡（專利文獻2)。進而有第】層之探 200925610 針、第2層之探針及第3層（最下層）之探針在與壓針之下面 垂直之方向相距間隔固定，與電子元件之電極位置對應而 使用任一層之探針之探針卡（專利文獻3)。 專利文獻1 .日本特開2000 — 216204號公報（段落〇〇17) 專利文獻2:日本特開2〇〇1_1〇87〇8號公報（請求項幻 專利文獻3 :日本特開2〇〇3— 1478〇號公報（段落〇〇ιι 等）200925610 IX. Description of the Invention: [Technical Field] The present invention relates to a probe card for performing electrical testing of electronic components such as semiconductor elements. [Prior Art] Normally, the probe card is provided with a slender & root probe such that the needle tip (needle tip) of each probe contacts the electrodes of the electronic component in the form of -pair, for the beta The electronic components are energized for electrical testing. In recent years, the electronic components have been gradually miniaturized or highly integrated with the demand of the society and the technology for supporting this. Therefore, the electrical components of the electronic components are also J-shaped, and the interval (pitch) thereof is also narrow. Further, according to the electronic component ', there are cases where the electrodes are arranged in a plurality of rows, and the electrode positions or pitches are different for each row. When performing electrical testing of such electronic components, the distance between the electrodes and the distance between the electrodes may be different from each other, and the probes may be in contact with each other. technology. For example, in order to prevent the probes from intermingling each other, there is a zigzag-shaped probe card in which the needle tips are arranged in the left-right direction of the electrodes of the electronic component (Patent Document). Further, the plurality of probes are divided into the needle body portion. The first probe group extending from one side of the needle tip portion and the second probe group extending from the needle tip portion to the other side of the needle body portion, and the probes of the 探针! and the second probe group are alternately arranged a probe card in the direction in which the needle tips are arranged (Patent Document 2). Further, the probe of the second layer of the 200925610 needle, the probe of the second layer, and the probe of the third layer (the lowermost layer) are perpendicular to the underside of the needle. A probe card in which the probes of any one layer are used in accordance with the position of the electrodes of the electronic component (Patent Document 3). Patent Document 1. Japanese Patent Laid-Open No. 2000-216204 (Paragraph 〇〇 17) Patent Literature 2: Unexamined Japanese Patent Publication No. 2〇〇1_1〇87〇8 (Request for Magical Patent Document 3: Japanese Patent Laid-Open No. 2〇〇3—1478〇 (paragraph 〇〇ιι, etc.)
然而，根據習知探針卡， 件中’當各行電極間之間距相 方向偏移時，由於探針間之間 以一對一之形式接觸於各電極 氣測試。 在具有複數電極行之電子元 異時或各行電極之位置於行 距一定，因此無法使各探針 ’不易進行該電子元件之電 列之特殊規格之電子元 以一對一之形式與電極 尤其是對於多數電極不規則排 件，習知探針卡，無法構成使探針 接觸。 ❹ 入 續各行電極間之間距較探針間之間距為小之電 凡件使用具有該探針之探斜+ 行電氣㈣。 +之料卡，料时㈣*無法進 【發明内容】 本發明之目的在於，使相鄰 # ^ ^ 忧相鄰之探針相互不接觸，而能 使1根探針之針尖部之針尖 具有葙叙尖^一對一之形式確實地接觸於 各 / 5之電子元件，例如電極配置於3行以上，且 订目對於其他行偏移配置之電子元件之電極。 200925610 本發明之探針卡，其包含：基板，具有配置複數個連 下面；以及第i、第2、第3、及第4探針群組，分 複數根探針，該複數板探針分別具備上端連接於該 主Z的針根部’從該針根部之下端往左右方向延伸的針 1’及從該針主體部前端往下方延伸、下端 的針尖部。 〆帛及第3探針群組之探針之針主體部，係從對應 ❹ k針根#之下端延伸於該第2及第4探針群組之探針 該第2及第4探針群組之探針之針主體部，係從對應 之該針根部之下端延伸於該第〖Μ 3探針群組之探針 • 該第3及第4探針群組之探針之針尖係m位於前 後方向。 、該複數個連接部係屬於第1及第2連接部群組之任一 者或另-者’屬於該第i連接部群組之連接部與屬於該第2 連接部群組之連接部係於該左右方向相距一間隔配置於該 〇 基板下面。屬於各探針群組之該複數根探針之該針尖部相Λ 對该針主體部之長邊方向抽線，f曲於該前後方向之1 或另一侧亦可。 又，該第3探針群組之探針之針尖部之彎曲方向與該 第4探針群組之探針之針尖部之彎曲方向互異亦可。又/ 最接近該第3探針群組之探針之該第丨探針群組之探針中 之2根探針之針尖部之彎曲方向互異，且最接近該第4探 針群組之探針之該第2探針群組之探針中之2根探針之 尖部之彎曲方向互異亦可。 針 200925610 又’該最接近之該第1探針群組之探針中之2根探針 之針尖部之針尖能於該左右方向彼此錯開，且該最接近之 該第2探針群組之探針中之2根探針之針尖 該前後方向彼此錯開。 針以於 該針尖在該前後方向位於直線上亦可。又，該第3及 第4探針群組能分別含有至少2個探針副群組。進而，該2 個探針副群組之探針之針尖在該前後方向成2行之構成亦 可’且各行之針尖排列於直線上亦可。 根據本發明之探針卡，由於該第3及第4探針群組之 探針之針尖交互地位於該前後方向，因此屬於第3及第4 探針群組之探針不使相鄰探針彼此接觸，能使探針定位。 尤其對電子元件3行以上之電極行之中間行之各電 極’使屬於第3及第4探針群組之探針不接觸相鄰之探針， 能交互定位。However, according to the conventional probe card, when the electrodes are offset from each other in the direction of the phase, the probes are contacted with each electrode in a one-to-one manner. In the case where the electron elements of the plurality of electrode rows are different or the row electrodes are at a certain line spacing, it is impossible to make each probe 'a special element of the electric component of the electronic component difficult to perform in a one-to-one manner with the electrode, especially For most electrode irregular arrangement, conventional probe cards cannot constitute contact with the probe. ❹ The distance between the electrodes of each row is smaller than the distance between the probes. The probe uses the probe with the probe + electric (4). + material card, material time (four) * can not enter [invention content] The purpose of the present invention is to make adjacent probes adjacent to each other without contact with each other, so that the tip of the needle tip of one probe has The one-to-one form is surely in contact with each of the electronic components of the /5, for example, the electrodes are arranged in more than three rows, and the electrodes of the electronic components are arranged for other rows of offset. 200925610 The probe card of the present invention comprises: a substrate having a plurality of connected bottoms; and an i-th, 2nd, 3rd, and 4th probe groups, dividing the plurality of probes, the plurality of probes respectively A needle 1' having a needle base portion whose upper end is connected to the main Z is extended from the lower end of the needle base portion in the left-right direction, and a needle tip portion extending downward from the distal end of the needle body portion and having a lower end. The needle main body portion of the probe of the third probe group is a probe extending from the lower end of the corresponding ❹k needle root # to the probes of the second and fourth probe groups, the second and fourth probes The needle main body of the probe of the group is a probe extending from the lower end of the needle base to the probe of the third probe group; the probe tip of the probe of the third and fourth probe groups m is in the front and rear direction. The plurality of connection portions belong to any one of the first and second connection group groups or the other one of the connection portion belonging to the i-th connection portion group and the connection portion belonging to the second connection portion group The left and right directions are disposed at an interval below the ruthenium substrate. The needle tip portion of the plurality of probes belonging to each probe group may be drawn in the longitudinal direction of the needle body portion, and f may be curved on one or the other side of the front-rear direction. Further, the bending direction of the tip end portion of the probe of the third probe group may be different from the bending direction of the needle tip portion of the probe of the fourth probe group. And the tip of the probe of the second probe group closest to the probe of the third probe group has different bending directions and is closest to the fourth probe group. The tip of the probe of the second probe group of the probe may have different bending directions. The needle 200925610 and the tip of the tip end of the probes of the probes closest to the first probe group can be shifted from each other in the left-right direction, and the closest to the second probe group The tips of the two probes in the probe are staggered in the front-rear direction. The needle may be located on the straight line in the front and rear directions. Further, the third and fourth probe groups can each contain at least two probe subgroups. Further, the needle tips of the probes of the two probe subgroups may be formed in two rows in the front-rear direction, and the needle tips of the respective rows may be arranged on a straight line. According to the probe card of the present invention, since the probe tips of the probes of the third and fourth probe groups are alternately located in the front-rear direction, the probes belonging to the third and fourth probe groups do not cause adjacent probes. The needles are in contact with each other to position the probe. In particular, the electrodes of the middle row of the electrode rows of the electronic component three or more rows enable the probes belonging to the third and fourth probe groups to be in contact with each other without being in contact with the adjacent probes.
【實施方式】 以下，參照圖式說明本發明之較佳實施形態。 [關於用語] 本發明中’電子疋件之電極之縱行或探針之縱行之方 向（圖2及圖3中之上下方向）稱為前後方向，與前後方向交 又之方向、探針之針主體部延伸之方向（圖2及圖3中之左 右方向）稱為左右方向，圖2及圖3中之紙背面方向稱為上 下方向$而，該等方向因該電子元件即被測試體配置於 安裝有探針卡之職裝置時之該元件之情況而異。、 200925610 [第1實施例] 參照圖1〜圖4說明本發明之探針卡之第1實施例。 參照圖1及圖2 ’探針卡1〇係使用於通電測試，該通 電測試係用以測定如後所說明具有於左右方向相距間隔配 置成3行之複數個電極12之半導體積體電路之電子元件μ 之電氣特性。圖示之例中，表示電子元件14之一部分，其 電極12具有長方形之形狀。雖表示電極12具有小的厚度 尺寸，但探針卡10亦能適用於如凸塊電極般具有大厚度尺 ®寸之電極》 探針卡10係將複數根探針16、18、20、22、24、26 配置於基板28之下面28a，以使該等針尖34d(圖4(B))位於 各行之電極12上之前後方向延伸之直線上之狀態（圖2及圖 3)。圖示之例中’各探針係由導電性金屬細線所形成之針 型。探針16、18、24係藉由一方之壓針30安裝於基板28, 探針20、22、26係藉由另一方之壓針32安裝於基板28。 ◎ 各探針’針尖部34b(圖4(B))係相對於主體部34a(圖 4(B))，彎曲於下方與前後方向之一側或另一侧。各探針係 在主體部34a(圖4(B))藉由接著劑，以針尖部34b(圖4(B)) 向下方之狀態組裝於壓針3〇或32 ^各探針16、18、2〇、 22、24、26具有直控尺寸小至針尖側程度之圓錐形（即錐狀） 之形狀。 基板28之中央部具有矩形之開口 36，於開口 36之周 圍具有複數條配線（未圖示），係具有於該等配線分別電氣連 接之複數個連接部（焊墊）38a、38b之配線基板，且由電氣絕 9 200925610 緣材料形成。各探針之後端部34c(圖4(B))係藉由焊料或導 電性接著劑等接合材料，電氣連接於形成於基板28之該連 接部。 圖示之例中’連接部38&及38b係分別以左侧1行及右 側1行之構成，在每行之前後方向相距間隔而形成於基板 28之下面。 圖中’左侧1行之連接部38a成為探針16、18、24用 之焊墊。同樣地，右側i行之連接部38b成為探針2〇、22、 26用之焊塾。 如圖1及圖2所示，各探針係懸臂樑狀連接於各連接 部，各探針之針尖部34a之針尖34d係位於基板28之開口 36之下方空間36a。圖示之例中，雖以左側^行及右侧1 仃之構成形成連接部，但能以於左右方向相距間隔的多數 行構成。 壓針30、32係藉由接著劑、複數個螺桿構件等，安裝 Ο 於與基板28之開口 36之相對向之2個邊對應處之下側。 圖不之例中，壓針3〇、32雖形成於不同構件，但亦可以一 構件形成。 女哀於壓針30之探針 1 ^ 丄。么，，攸丞极28之主體 。34a之高度位置相同’主體部…係從針尖冑糾往相同 方向即與探針20、22、26侧相反侧之方向延伸。安裝於另 Γ壓針32之探針20、22、26,從基板28之主體部3仏之 二度位置相同，主體部34a係、從針尖部34b往相同方向即與 探針16、18、24側相反側之方向延伸。 200925610 圖3係放大表示圖1之探針卡1〇之複數根探針 20、22、24、26之配置之概略俯視圖，各探針16、18、2〇、 22、24、26係分別以一對一之形式接觸於電子元件14之複 數電極12。 圖中電子元件14具有屬於在左右方向相距間隔的第[Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. [About the terminology] In the present invention, the direction of the longitudinal direction of the electrode of the electronic component or the longitudinal direction of the probe (the upper and lower directions in FIGS. 2 and 3) is referred to as the front-rear direction, and the direction of the front-back direction and the probe are The direction in which the main body portion of the needle extends (the left and right direction in FIGS. 2 and 3) is referred to as the left and right direction, and the direction of the back side of the paper in FIGS. 2 and 3 is referred to as the up and down direction, and the directions are tested by the electronic component. The body configuration varies depending on the component when the probe card device is installed. [2009] [First Embodiment] A first embodiment of a probe card of the present invention will be described with reference to Figs. Referring to FIGS. 1 and 2, the probe card 1 is used for an energization test for measuring a semiconductor integrated circuit having a plurality of electrodes 12 arranged at three intervals in the left-right direction as described later. Electrical characteristics of the electronic component μ. In the illustrated example, one portion of the electronic component 14 is shown, and the electrode 12 has a rectangular shape. Although the electrode 12 has a small thickness dimension, the probe card 10 can also be applied to an electrode having a large thickness gauge such as a bump electrode. The probe card 10 is a plurality of probes 16, 18, 20, 22 24 and 26 are disposed on the lower surface 28a of the substrate 28 such that the needle tips 34d (Fig. 4(B)) are positioned on the straight lines extending in the front and rear directions on the electrodes 12 of the respective rows (Figs. 2 and 3). In the illustrated example, each probe is a needle formed of a thin conductive metal wire. The probes 16, 18, and 24 are attached to the substrate 28 by one of the press pins 30, and the probes 20, 22, and 26 are attached to the substrate 28 by the other presser pins 32. ◎ Each probe 'tip portion 34b (Fig. 4(B)) is bent to one side or the other side in the lower and the front-back direction with respect to the main body portion 34a (Fig. 4(B)). Each probe is assembled to the presser 3 or 32 by the adhesive portion 34b (Fig. 4(B)) in the main body portion 34a (Fig. 4(B)) by the adhesive. 2, 22, 24, 26 have a conical (ie, tapered) shape with a small size to the tip side. The central portion of the substrate 28 has a rectangular opening 36, and has a plurality of wirings (not shown) around the opening 36, and has wiring layers of a plurality of connecting portions (pads) 38a and 38b electrically connected to the wirings. And formed by the electrical material 9 200925610 edge material. The probe rear end portion 34c (Fig. 4(B)) is electrically connected to the connection portion formed on the substrate 28 by a bonding material such as solder or a conductive adhesive. In the illustrated example, the connecting portions 38 & and 38b are formed by one row on the left side and one row on the right side, and are formed on the lower surface of the substrate 28 at intervals in the front and rear directions of each row. In the figure, the connecting portion 38a on the left side of the line serves as a pad for the probes 16, 18, and 24. Similarly, the connecting portion 38b of the right i-row serves as a soldering pad for the probes 2, 22, and 26. As shown in Figs. 1 and 2, each probe is connected to each of the connecting portions in a cantilever shape, and the tip 34d of the tip end portion 34a of each probe is located in the space 36a below the opening 36 of the substrate 28. In the illustrated example, the connecting portion is formed by the left side row and the right side 1 仃, but it can be configured in a plurality of rows spaced apart from each other in the left-right direction. The press pins 30 and 32 are attached to the lower side corresponding to the two opposite sides of the opening 36 of the substrate 28 by an adhesive, a plurality of screw members, or the like. In the example of the figure, the press pins 3, 32 are formed in different members, but they may be formed in one member. The woman mourns the probe of the needle 30 1 ^ 丄. What, the main body of the bungee jumping. The height position of 34a is the same. The main body portion is extended from the tip end to the same direction, that is, in the direction opposite to the side of the probes 20, 22, and 26. The probes 20, 22, and 26 attached to the other nipple 32 are identical in position from the second portion of the main body portion 3 of the substrate 28, and the main body portion 34a is in the same direction from the needle tip portion 34b, that is, the probes 16, 18, The direction of the opposite side of the 24 side extends. 200925610 FIG. 3 is a schematic plan view showing the arrangement of the plurality of probes 20, 22, 24, 26 of the probe card 1 of FIG. 1 in an enlarged manner, and each of the probes 16, 18, 2, 22, 24, 26 is respectively The one-to-one form contacts the plurality of electrodes 12 of the electronic component 14. The electronic component 14 in the figure has the same interval in the left-right direction.
卜3之電極行42a、42b、42c之複數個電極12，各電極行 42a、42b、42c之電極12係以相互等間隔配置於前後方向。 又，各電極行之電極係相對於其他電極行之電極稍微偏移 配置於其行方向（前後方向）’該等電極行未排列於左右方 向0 圖不之例中，第1電極行42a及第2電極行心分別係 第1行及最終行（第3行），且第3電極行42c係中間行。第 1電極行42a及第3電極行42e係分別表示7個電極η，第 2電極行傷係表示8個電極12。接近電子元件14之端部 44之電極依序為第2電極行似之第ι電極12、第3電極 ©行仏之第1電極12、第1電極行仏之第i電極12，以 後，以此順序將電極配置於各電極行。 複數根探針16、18係形士过，丨、， 係形成針尖位於最左側之第1探針 群組46a，複數根探針2〇、22 22係形成針尖位於最右側之第2 探針群組46b。又，藉數椒> 複數根探針24係形成針尖位於第i探 針群組40a之右側之第3摈 形 探針群組46c，複數根探針26係 /成針尖位於第2探針群纟B ” 群組b之左側之第4探針群組46d。 測試電子元件14時，楚，> 尖仫、, 第1探針群組46a之各探針之釙 尖係以一對一之形式接觸 針 乐1電極仃42a之各電極，又， 11 200925610 第2探針群組楊之各探針之針尖係以―對 於第2電極行42b之各電極。第玲 工接觸 群組偏之各探針24、26之針尖係交互以_46 =探針 觸於第3電極行42c。 #之形式接 各探針係如後所說明，屬於針尖 種類型之探針…之任-種。探針16 2:係方::】異之2 =針：構成’探針18、22係由第2型之探"圖4二 © ^，探針24、26係由第2型之探針B構成。 互相針群組46e之探針24係第1探針群組仏之相 互相鄰之探針16、18,㈣針尖部之f曲方向交又之= 16、18之間。又，第4探針群组46 針 群組⑽之相互相鄰之探針22及探針2^26係第2探針 曲方向交又之探針22及探針2。之探:。20,位於針尖部之， 圖3例中’第3探針群組46e之各探針之針尖 與端部44相反之方向(前後方向之後方)，且第4 4<^之各探針之針尖係彎曲在媸部 Ο 。 零曲在端郤44之方向(前後方向之前 方）〇 圖4⑷〜圖4(C)中，表示第2型之探之形狀 型之探針A與第2型之探U之針尖部之考曲方向係如圈 叫所示，具有在主體部34&之長邊方向對稱之形狀，亦即 係相反。 探針B包含：針根部34c，從探針卡1〇之 等以既定長度延伸於垂直下方’在下端部以趨近％度之鈍 角彎曲；上述主體部34a，從其前端部直線延伸；以及上述 12 200925610 針尖部34b’從主體部34a以趨近90度之鈍角在下方彎曲， 並且在左右方向之一側彎曲。探針B整體係從針根部3讣 之端部到針尖部34b之針尖34d為止一體成型之連續逐漸 縮徑之針。針尖部34b具有相對於主體部34a之長邊方向軸 線48偏移Λχ之針尖34d。又，各探針之針尖部亦相對於 針主體部彎曲，以使針尖位於較針主體部與針尖部之邊界 部更接近屬於對方之探針群組之探針側。 , ❹ ❹ 圖4(C)之例中，偏移ΔΧ2針尖部34d之彎曲方向，向 圖之探針B觀察’亦即在主體部％之長邊轴線係左方。 圖3之例中，探針16、22、26之針尖部地係從針主 體部34a斜向延伸在端部“之方向，且探針i8u 之針尖部34b係從針主體部34a延伸在與端部44相反之方 向。若各探針之針尖⑽對所對應之電極12滑行移動，就 m極12產生摩擦作用。藉此，由於刮取存在於各電 實電氣之連接面之氧化膜之電氣絕緣膜，因此探針與電極能確 [第1實施例之變形例] 變形:照圖5及圖6說明本發明之探針卡之第1實施例之 圖5及圖6係表示類似於圖】〜圖3所示之探 之 探針配置。對與使用於圖：〜圖3所 — 之構成元件相同之構成元件，附加相 &電子元件 予以省略。 附力相同參照號碼，其說明 如圖6所示，第3控紅_ 第探針群組46e含有複數根探針243， 13 200925610 第4探針群組46d含有禮數姐扣 3 ,稷數根探針26a。圖ό所示之探針24a 與圖3所示之探針24除了 除了對基板28(圖5)之探針之連接部 位置相異以外，其他你知 、问。同樣地，圖ό所示之探針26a 與圖3所示之探針26险τ谢 ,w τ 6除了對基板28之探針之連接部位置 相異以外，其他係相同。 说％ n j * ，J以下’僅說明相異點。 圖5所不’探針24a之連接部他係配置於從探 16 18之連接部…之位置位移至右方向側之基板28之下 面心之處。又，探針26a之連接部38d係配置於從探針 20、22之連接部38b·^·办罢从必 之位置位移至左方向側之基板28 面28a之處。 [第2實施例] 參照圖7及圖8說明本發明之探針卡之第2實施例。 圖7及圖8係表示與圖】〜圖3所示之探針配置相異之 探針配置。此外，對與使用於圖卜圖4所示之探針卡 :凡件及探針之構成元件相同之構成元件，附加相同之 考號碼，其說明予以省略。 所示之探針配置與圖3所示之探針 圓 ^ 斗7、内一 〜休町a匕罝，在第 1 探針群組46a之探針16、18及第2探針群組4补之探針如、 接觸於電極12之針尖位置之點相異。以下，僅說明相異 點0 如圖7所示，第1探針群組46a之探針18之針尖位 係位於電極行42a之電極12之左半部分之範圍第 群組46b之探針22之針尖位置係位於電極行㈣之電極 之右半部分之範圍。 2 200925610 =二與探針16相同係由第！型之探針A構成， —之針主體部34a在較探㈣之針主體部“a為 長之點相異。同樣地，雖探 型之探針B構成，但探針2〇a…探針2〇相同係由第2 之針主體部…為長之點相異Γ針體部Μ較探針2〇 [第2實施例之變形例] ❹ ❹ 變形:照圖9及^說明本發明之探針卡之第2實施例之 探針1D係表示類似於圖7〜圖8所示之探針配置之 =1:與使用於圖7〜圖8所示之探針卡及電子元件 之構成7L件相同之椹赤、开生 Τ 明予以省略。成①件’附加相同之參考號碼，其說 及複=0:示’第1探針群組^含有複數根探物 及複數根1 18 ’第2探針群組杨含有複數根探針2〇b 第4探^群22。第3探針群組46。含有複數根探針鳩， 第探針群組_含有複數根探針26b。 板^圖^所示之探針㈣與圖8所示之探針…除了對基 樣地，产之探針之連接部位置相異以外，其他係相同。同 針之連I針Mb與圖8所示之探針除了對基板28之探 =連接部位置相異以外，其他係相同。以下，僅說明相 18之連I9::探針⑽之連接部係配置於從探針 a之位置位移至右方向側之基板28之下面 a 。探針20b之連接部38b，係配置於從探針2〇之連 15 200925610 接部38b之位置位移至左方向側之基㈣之下面⑽之處。 又’探針24b之連接部38〇係配置於從探針i6b之連接 部術，之位置位移至右方向侧之基板以之下自^之處。 探針鳩之連接部似係配置於從探針2⑽之連接部鳩， 之位置位移至左方向側之基板28之下面2“之處。 在此變形例所示之探針16b之連接部38&，之位置能使 用與探針18同—長度之探針作為探針⑽。同樣地，在探 ❹針施之連接部鳩，之位置，能使用與探針22同-長度之 ^ 探針作為探針20b。 [第3實施例] 參照圖11及圖12說明本發明之探針卡之第3實施例。 圖11及圖12係表示與圖i〜圖3所示之探針配置相異 之探針配置。此外，對與使用於圖1〜圖4所示之探針卡、 電子元件及探針之構成元件相同之構成元件，附加相同之 參考號碼’其說明予以省略。 〇 本實施例中，電子元件14具有由第1〜4之電極行50a、 働、5〇c、5Gd構成之複數個電極12。雖第i電極行他 及第2電極行働之電# 12相互以等間隔配置於前後方 向’但第3電極行5Ge之各電極12及第4電極行5〇d之各 電極12相互以不等間隔配置於前後方向。χ，各電極行之 電冬係相對於其他電極行之電極稍微偏移配置於其行方 向’各電極行未排列於左右方向。 第1電極行5〇a及第2電極行5〇b係第1行及最終行， 且第3電極行5〇e及第4電極行咖係中間行。第i電極行 16 ❹ ❹ 200925610 表^個電極12 ’第2電極行5〇b係表*8個電極 二第電極行5〇C係表示4個電極12，“電極行_ 係表不' 3個電極12。 複數根探針56、58係形成位於最左側之第^ =數=:1係:r 於第2探針群組54b之左側之第4探針群組…。 =探針群組54e含有：第丨探針料組54e 探針64,以及第2探針副群組54c2 含有 66具有位於屬^ 有探針66,該探針 針尖。第針1 1 J群組_之探針之針尖右側之 有含有：第1探針副群組⑽，含 針I具有位^及屬第2探針副群組⑷2 ’含有探針7〇，該探 侧之針尖。第1探針副群組則之探針之針尖右 測試電子元件14時， ”之針尖係以一對丄 =針群組仏之各探針… 極12。第2探斜^形式接觸於第1電極行他之各電 -之形=二：各探針Μ之針尖係" 依照接近電子元=:二各電極12。 探針群組54c之探斜“端44之電極之順序，第3 4探針群、组54d之探^第3探針群組％之探針66、第 各針尖係以—對 、第3探針群組W之探針64之 12。 $式接觸於第3電極行5〇e之各電極 17 200925610 ^依照接近電子元件14之端部44之電極之順序，第4 探針群組54d之探針68、第3探針群組5軋之探針66、第 笛針群、且54d之探針68之各針尖係以一對一之形式接觸 於第4電極行50d之各電極12。 第1探針群、组54a及第2探針群組54b分別含有複數根 型之探針A及複數根第2型之探針B。在圖示之例之 1探針群組％中，依照接近電子元件14之端部44之順 © /配置有探針56(第1型之探針A)及探針58(第2型之探 組Γ後’依此順序完成探針配置。又，在第2探針群 ..’依照接近電子元件14之端部44之順序，配置 木針6〇(第2型之探針B)及探針62(第丨型之探針A)，以 後，依此順序完成探針配置。 第3探針群組54c及第4迤私被 第2型之探針B卢固 針群組⑷分別含有複數根 在不之例中，依照接近電子元件14之 。4之順序，按第3探針群组…之探針μ、第 d 群組54d之探針68、第3探舢继4 〇 針 罾 -^ 弟探針群組54c之探針66、第4 針群組54d之探針70、第 弟4探 探針群如执 第3探針群組54c之探針64、第4 序:配置於笛之1 .第3探針群組54C之探針64之順 序配置於第3電極行54c及第4電極行… 頃 第3探針群…探針“、66分別位於第二 紐54a之相互相鄰之一對 針群 方 探針6及58，亦即針尖部之彎曲 方向父叉之探針56及58之 穹曲 探針68、70分別位於第又’第4探針群組…之 π 探針群組54b之相互相鄰之盔4+ 6〇及62,亦即針尖部之彎 之探針 $莳方向交叉之探針6〇及 18 200925610 本實施例中，第3探針群組54c之各探針之針尖係變曲 在與電子元件14之端部44之方向相反之方向（前後方向之 後方），且第4探針群組54d之各探針之針尖係彎曲在電子 元件14之端部44之方向（前後方向之前方）。 [第3實施例之變形例] 參照圖13及圖14說明本發明之探針卡之第3實施例 之變形例。 圖11及圖12所示之探針 11及圖12所示之探針配 附加相同之參考號碼，其The plurality of electrodes 12 of the electrode rows 42a, 42b, and 42c of the electrode 3, and the electrodes 12 of the electrode rows 42a, 42b, and 42c are arranged at equal intervals in the front-rear direction. Further, the electrodes of the electrode rows are arranged slightly offset from the electrodes of the other electrode rows in the row direction (front-rear direction). The electrode rows are not arranged in the left-right direction. In the example, the first electrode row 42a and The second electrode row is the first row and the last row (third row), respectively, and the third electrode row 42c is the middle row. The first electrode row 42a and the third electrode row 42e represent seven electrodes η, respectively, and the second electrode row shows eight electrodes 12. The electrode adjacent to the end portion 44 of the electronic component 14 is sequentially the second electrode row like the first electrode 12, the third electrode © the first electrode 12, and the first electrode row ith electrode 12, and thereafter, This sequence places the electrodes on each electrode row. The plurality of probes 16 and 18 are shaped like a scorpion, and the first probe group 46a having the tip of the needle is located at the leftmost side, and the plurality of probes 2, 22 22 form the second probe with the tip located at the rightmost side. Group 46b. Further, the plurality of peppers > the plurality of probes 24 form a third type of probe group 46c having a needle tip located on the right side of the i-th probe group 40a, and the plurality of probes 26 are formed at the second probe Group 4B group 4th probe group 46d on the left side of group b. When the electronic component 14 is tested, the tip of the probe, the tip of each probe of the first probe group 46a is a pair One form contacts each electrode of the needle 1 electrode 42a, and further, 11 200925610, the tip of each probe of the second probe group Yang is "for each electrode of the second electrode row 42b." The tip of each of the probes 24 and 26 interacts with _46 = the probe touches the third electrode row 42c. The probes are connected to each other as described later, and are probes of the needle tip type... Probe 16 2: system side::] different 2 = needle: constitute 'probe 18, 22 is detected by type 2', Fig. 4 2 © ^, probe 24, 26 is type 2 The probes B of the mutual needle group 46e are the probes 16 and 18 adjacent to each other in the first probe group, and (f) the direction of the f-curve of the needle tip is again between = 16, 18 Again, the 4th probe group 46-pin group (10) The probes 22 and the probes 2^26 which are adjacent to each other are the probes 22 and the probes 2 which are intersected by the second probe in the direction of the second probe. The probe 20 is located at the tip of the needle, and the third probe in the example of Fig. 3 The tip of each probe of the needle group 46e is opposite to the end 44 (behind the front-rear direction), and the tip of each of the probes of the fourth section is bent at the crotch portion. Direction (before and after the front-rear direction) FIG. 4(4) to FIG. 4(C) show the shape of the probe type A of the second type and the direction of the test of the tip end of the second type U. The shape has a shape that is symmetrical in the longitudinal direction of the main body portion 34 & that is, the opposite is true. The probe B includes: the root portion 34c extending from the probe card 1 to a predetermined length and extending vertically downward at the lower end portion An obtuse angle bending approaching %; the main body portion 34a linearly extending from the front end portion thereof; and the above-mentioned 12 200925610 needle tip portion 34b' is bent downward from the main body portion 34a at an obtuse angle approaching 90 degrees, and is on one side in the left and right direction Bending. The probe B as a whole is continuously tapered from the end of the root portion 3讣 to the needle tip 34d of the needle tip portion 34b. The needle tip portion 34b has a needle tip 34d that is offset from the longitudinal direction axis 48 of the main body portion 34a. Further, the tip end portion of each probe is also bent with respect to the needle body portion so that the needle tip is located at the needle body portion and the needle tip portion. The boundary portion is closer to the probe side of the probe group belonging to the other party. , ❹ ❹ In the example of FIG. 4(C), the offset ΔΧ2 is bent in the direction of the tip end portion 34d, and is observed in the probe B of the figure, that is, in the main body. The long side axis of the portion % is to the left. In the example of Fig. 3, the tips of the probes 16, 22, 26 extend obliquely from the needle body portion 34a in the direction of the end, and the tip of the probe i8u The portion 34b extends from the needle body portion 34a in a direction opposite to the end portion 44. If the tip (10) of each probe slides against the corresponding electrode 12, the m pole 12 produces a frictional effect. Therefore, since the electrical insulating film of the oxide film existing on the connection surface of each of the electrical and electrical electrodes is scraped off, the probe and the electrode can be confirmed. [Modification of the first embodiment] Modification: The present invention will be described with reference to FIGS. 5 and 6 Figs. 5 and 6 of the first embodiment of the probe card show probe configurations similar to those shown in Figs. For the constituent elements which are the same as those of the constituent elements used in the drawings: to Fig. 3, the additional phase & electronic components are omitted. The same reference numeral is attached, and the description is as shown in FIG. 6. The third control red_probe group 46e includes a plurality of probes 243, 13 200925610. The fourth probe group 46d includes a number of shackles 3 and a number of roots. Probe 26a. The probe 24a shown in Fig. 3 and the probe 24 shown in Fig. 3 are different from each other except that the position of the connecting portion of the probe of the substrate 28 (Fig. 5) is different. Similarly, the probe 26a shown in Fig. 3 and the probe 26 shown in Fig. 3 are in danger, and w τ 6 is the same except that the position of the connection portion of the probe of the substrate 28 is different. Say % n j * , J below 'only shows the difference. The connecting portion of the probe 24a in Fig. 5 is disposed at a position shifted from the position of the connecting portion of the probe 16 to the center of the lower surface of the substrate 28 on the right side. Further, the connecting portion 38d of the probe 26a is disposed so as to be displaced from the position where the connecting portion 38b of the probes 20 and 22 is necessary to the position 28a of the substrate 28 on the left side. [Second Embodiment] A second embodiment of the probe card of the present invention will be described with reference to Figs. 7 and 8 . Fig. 7 and Fig. 8 show the probe arrangement which is different from the probe arrangement shown in Figs. In addition, the same reference numerals are attached to the same components as those of the probe card shown in Fig. 4, which are the same as those of the probe, and the description thereof will be omitted. The probe arrangement shown is the same as that of the probe circle 7, the inner one, and the second probe group 4 in the first probe group 46a. The point of the complementary probe, such as the position of the tip of the electrode 12, is different. Hereinafter, only the difference point 0 will be described. As shown in FIG. 7, the tip position of the probe 18 of the first probe group 46a is located in the range of the left half of the electrode 12 of the electrode row 42a, and the probe 22 of the group 46b. The tip position is in the range of the right half of the electrode of the electrode row (4). 2 200925610 = Two is the same as the probe 16 by the first! The probe A of the type is configured such that the needle main body portion 34a is different in the needle main body portion "a" of the probe (four). Similarly, although the probe type B is formed, the probe 2〇a... The needle 2 is the same as the second needle body portion ... is a long point different from the needle body portion Μ compared to the probe 2 〇 [Modification of the second embodiment] ❹ 变形 deformation: The present invention will be described with reference to FIGS. 9 and The probe 1D of the second embodiment of the probe card represents a probe configuration similar to that shown in FIGS. 7 to 8=1: and the probe card and electronic component used in FIGS. 7 to 8 The same 椹 、, 开 开 构成 构成 。 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 18 'The second probe group Yang contains a plurality of probes 2 〇 b 4th probe group 22. The third probe group 46. Contains a plurality of probes 第, the first probe group _ contains a plurality of probes 26b. The probe (4) shown in Fig. 2 and the probe shown in Fig. 8 are the same except for the position of the joint of the probe produced by the base. The same needle is attached to the same needle. And the probe shown in FIG. 8 except for the substrate 28 Detecting that the position of the connecting portion is different, the other systems are the same. Hereinafter, only the connecting portion of the phase 18 is described. The connecting portion of the probe (10) is disposed below the substrate 28 that is displaced from the position of the probe a to the right side. a. The connecting portion 38b of the probe 20b is disposed at a position shifted from the position of the probe 2 〇 15 15 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The lanthanoid system is disposed at a position from the connection portion of the probe i6b, and is displaced from the position on the right side of the substrate to the right side. The connection portion of the probe 似 is disposed in the connection portion from the probe 2 (10), The position is displaced to the lower 2" of the substrate 28 on the left side. In the position of the connecting portion 38& of the probe 16b shown in this modification, a probe of the same length as the probe 18 can be used as the probe (10). Similarly, a probe of the same length as the probe 22 can be used as the probe 20b at the position where the probe portion is attached. [Third Embodiment] A third embodiment of the probe card of the present invention will be described with reference to Figs. 11 and 12 . Fig. 11 and Fig. 12 show the probe arrangement which is different from the probe arrangement shown in Figs. Incidentally, the same components as those of the probe card, the electronic component, and the probe shown in Figs. 1 to 4 are denoted by the same reference numerals, and the description thereof will be omitted. In the present embodiment, the electronic component 14 has a plurality of electrodes 12 composed of the electrode rows 50a, 働, 5〇c, and 5Gd of the first to fourth electrodes. The electric currents of the ith electrode row and the second electrode row are arranged at equal intervals in the front-rear direction, but the electrodes 12 of the third electrode row 5Ge and the electrodes 12 of the fourth electrode row 5 〇d are not They are arranged at equal intervals in the front and rear direction. In other words, the electric winter of each electrode row is slightly offset from the electrodes of the other electrode rows in the row direction. The electrode rows are not arranged in the left-right direction. The first electrode row 5〇a and the second electrode row 5〇b are the first row and the final row, and the third electrode row 5〇e and the fourth electrode row are in the middle row. The i-th electrode row 16 ❹ ❹ 200925610 The table electrode 12 'the second electrode row 5 〇 b series table * 8 electrodes two electrode row 5 〇 C system shows 4 electrodes 12, "electrode row _ system not" 3 Electrodes 12. The plurality of probes 56, 58 form the fourth probe group located on the leftmost side ==1 series: r on the left side of the second probe group 54b. Group 54e contains: a second probe set 54e probe 64, and a second probe subgroup 54c2 contains 66 has a probe 66, the probe tip. The first needle 1 1 J group _ The right side of the needle tip includes: a first probe subgroup (10), a needle containing a position ^ and a genus second probe subgroup (4) 2 'containing a probe 7 〇, the tip of the probe side. The first probe When the sub-group probe tip is right to test the electronic component 14, the tip of the probe is a pair of 丄=pin groups 各 each probe... pole 12. The second probe is in contact with the first electrode in the form of the electric current - the shape = two: the tip of each probe is "according to the proximity of the electronic element =: two electrodes 12". Probe group 54c probes the order of the electrodes of the end 44, the 34th probe group, the probe 54d, the third probe group % of the probe 66, the first needle tip is the pair, the third 12 of the probe group W of the probe group W. $-type contact with each electrode 17 of the third electrode row 5〇e 200925610 ^ 4th probe group 54d in accordance with the order of the electrodes close to the end portion 44 of the electronic component 14. The probes 68, the probes 66 of the third probe group 5, the needles of the first needle group, and the probes 68 of the probes of 54d are in contact with each of the electrodes 12 of the fourth electrode row 50d in a one-to-one manner. The first probe group, the group 54a, and the second probe group 54b each include a plurality of probes A and a plurality of probes B of the second type. In the probe group % of the illustrated example The probe 56 (the probe A of the first type) and the probe 58 (the probe of the second type) are disposed in accordance with the end portion 44 of the electronic component 14 and the probe arrangement is completed in this order. Further, in the second probe group, the wood needle 6〇 (the probe B of the second type) and the probe 62 (the probe type A of the second type) are arranged in the order of the end portion 44 of the electronic component 14. After that, the probe configuration is completed in this order. The third probe group 54c The fourth probe is a type 2 probe B Lugu needle group (4) containing a plurality of roots in each case, according to the order of the electronic components 14 to 4, according to the third probe group ... probe μ, the probe 68 of the d-th group 54d, the third probe 4, the probe 66 of the probe group 54c, the probe 70 of the 4th needle group 54d, and the probe 4 The needle group is the probe 64 of the third probe group 54c, the fourth sequence is arranged in the flute 1. The probe 64 of the third probe group 54C is arranged in the third electrode row 54c and the fourth electrode. The third probe group...the probes ", 66 are located adjacent to each other of the second button 54a, and the pair of probes 6 and 58 of the needle group, that is, the probe 56 of the parent side of the tip of the needle The distortion probes 68 and 70 of the 58 are located in the mutually adjacent helmets 4+ 6〇 and 62 of the π probe group 54b of the 'fourth probe group, respectively, that is, the probes of the bend of the needle tip The probes intersecting in the 莳 direction 6〇 and 18 200925610 In this embodiment, the tip of each probe of the third probe group 54c is bent in a direction opposite to the direction of the end portion 44 of the electronic component 14 (front and rear direction) After the party), and the fourth probe group The tip of each of the probes of 54d is bent in the direction of the end portion 44 of the electronic component 14 (before and after the front-rear direction). [Modification of Third Embodiment] The probe card of the present invention will be described with reference to FIGS. 13 and 14. 3 Modifications of the embodiment. The probe 11 shown in Figs. 11 and 12 and the probe shown in Fig. 12 are provided with the same reference numerals,
圖13及圖14係表示類似於 配置之探針配置。對與使用於圖 置之構成元件相同之構成元件， 說明予以省略。 如圖14所示，第3探針群組…含有帛ι探針副群組 cl及第2探針副群、组54c2。第i探針副群組^含有探 探針副群組㈤含有探針⑽(圖中僅表示丄 w不之探針64a 板28之探針之連接部位置相：传：64除了對基 圖"所示之探…圖5所示之探針他^ 之探針之連接部位置相異料，其他係_。、 圖Μ所示之探針68a與圖8所示 Μ之探針之連接部位置相異以外，其他除了對基板 圖14所示之探針7〇 同。同樣地’ 之探針之連接部位置相異財卜，其除了對基板^ 明相異點。 、相冋°以下，僅說 19 200925610 如圖13所示，探針64a之連接部38ci係配置於探針 56、58之連接部38a之位置之右方向側之基板28之下面 W。又’探針66a之連接部38c2係配置於探針⑷之連接 部38cl之位置之右方向側之基板28之下面28a。 ❹ ❹ 同樣地，探針68a之連接部38dl係配置於探針6〇、Μ 之連接部38b之位置之左方向侧之基板28之下面“a。又， 探針70a之連接部則係配置於探針咖之連接部則 之位置之左方向側之基板28之下面28a。 在此實施例所示之探針64a之連接部38ci及探針“a 之連接部38c2之位置，能使用與探針58同一形狀及同一長 度之探針作為探針64a、66^同樣地，在探針心之連接 部3如及探針術之連接部助之位置，能使用與探針 6〇同一形狀及同一長度之探針作為探針68&、7〇&。 在上述實施例及其變形例中，雖使用針型之探針，但 本發明亦能適用於揭示於國際公開公報號 之板狀之所謂「板型」之探針。 ’ 本發明並非限定於上述實施例，在不脫離申請專利範 圍之主旨範圍，能進行各種變更。 【圖式簡單說明】 圖1係與電子元件同時表示本發明之探針卡之第丨實 施例之概略截面圖。 圖2係圖1之俯視圖。 圖3係沿圖1之3·3線所獲得之省略壓針構件圖示之俯 20 200925610 視圖’且係概略放大表示探針配置之俯視圖。 圖4(A)係表示使用於本發明之探針卡之探針之俯視 圖，（B)係表示（A)之探針之側視圖，（c)係表示（A)之探針之 前視圖。 圖5係與電子元件同時表示圖丨所示之探針卡之變形 例之概略截面圖。 圖6係沿圖5之6_6線所獲得之省略壓針構件圖示之俯 視圖，且係概略放大表示探針配置之俯視圖。 圖7係與電子元件同時表示本發明之探針卡之第2實 施例之概略截面圖。 圖8係沿圖7之8-8線所獲得之省略壓針構件圖示之俯 視圖，且係概略放大表示探針配置之俯視圖。 圖9係與電子元件同時表示圖7所示之探針卡之變形 例之概略截面圖。 圖10係沿圖9之1(MG線所獲得之省略壓針構件圖示 ❹之俯視圖，且係概略放大表示探針配置之俯視圖。 圖11係與電子元件同時表示本發明之探針卡之第3實 施例之概略截面圖。 之二2係沿圖11之12·12線所獲得之省略㈣構件圏示 ^ 且係概略放大表示探針配置之俯視圓。 Μ圖13係與電子元件同時表示圖11❹之探針卡之變 形例之概略截面圖。 圖1 4係沿圖〗3之】 之俯满蘭，之14_14線所獲得之省略壓針構件圖示 ’手、概略放大表示探針配置之俯視圖。 21 200925610 【主要元件符號說明】 10 探針卡 16、16a、16b、18 探針 20、20a、20b、22、60、62 探針 24、24a、24b、64、64a、66 探針 26、26a、26b、68、68a、70、70a 探針 28 基板Figures 13 and 14 show probe configurations similar to those configured. The description of the constituent elements that are the same as those of the constituent elements used in the drawings will be omitted. As shown in Fig. 14, the third probe group ... contains a probe subgroup cl and a second probe subgroup, and a group 54c2. The i-th sub-group ^ contains a probe sub-group (5) containing a probe (10) (only the position of the probe of the probe of the probe 64a plate 28 is shown in the figure: pass: 64 except for the base map "The probe shown in Fig. 5 shows that the position of the probe of the probe of the probe is dissimilar, other probes _., the probe 68a shown in Fig. 8 and the probe shown in Fig. 8 The position of the connection portion is different from that of the probe 7 shown in Fig. 14. Similarly, the position of the connection portion of the probe is different, except that the substrate is different from the substrate. In the following, only 19, 2009, 256, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00, 00 The connecting portion 38c2 is disposed on the lower surface 28a of the substrate 28 on the right side of the position of the connecting portion 38cl of the probe (4). ❹ ❹ Similarly, the connecting portion 38d1 of the probe 68a is disposed on the probe 6〇, Μ The lower surface of the substrate 28 on the left side of the position of the portion 38b is "a. Further, the connection portion of the probe 70a is disposed at the position of the connection portion of the probe coffee. The lower surface 28a of the substrate 28 on the direction side. In the position of the connecting portion 38ci of the probe 64a and the connecting portion 38c2 of the probe "a", the probe having the same shape and the same length as the probe 58 can be used as the probe. Similarly, the probes 64a and 66 can be used as probes 68&, at the position where the probe connecting portion 3 and the probe connection portion are assisted, and the probe having the same shape and the same length as the probe 6 can be used. In the above-described embodiments and their modifications, the probe of the needle type is used, but the present invention is also applicable to the so-called "plate type" probe disclosed in the plate shape of the International Publication No. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention. FIG. 1 is a view showing a third embodiment of the probe card of the present invention simultaneously with an electronic component. Fig. 2 is a plan view of Fig. 1. Fig. 3 is a plan view of the probe arrangement taken along the line of the omitted needle member shown in Fig. 1 on line 3·3. 4(A) shows the use of the present invention The top view of the probe of the card, (B) shows the side view of the probe of (A), and (c) shows the front view of the probe of (A). Figure 5 shows the probe shown in the figure together with the electronic component. Fig. 6 is a plan view showing an omitting needle member taken along line 6-6 of Fig. 5, and is a plan view showing a probe arrangement in a plan view. Fig. 7 is a view showing a configuration of a probe. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 8 is a plan view showing an omitting needle member taken along line 8-8 of Fig. 7, and showing a plan view of a probe arrangement in an enlarged manner. Fig. 9 is a schematic cross-sectional view showing a modification of the probe card shown in Fig. 7 simultaneously with an electronic component. Fig. 10 is a plan view of the probe arrangement omitted from the MG line taken along line 1 of Fig. 9 and schematically showing a probe arrangement. Fig. 11 is a view showing the probe card of the present invention simultaneously with the electronic component. A schematic cross-sectional view of the third embodiment. The second and second embodiments are omitted from the line (12) of Fig. 11, and the outline of the probe arrangement is shown in a magnified manner. Figure 13 is the same as the electronic component. Fig. 1 is a schematic cross-sectional view showing a modification of the probe card of Fig. 11. Fig. 1 is a diagram of the omitted needle member obtained by the line 14_14 along the line of Fig. 3 Top view of the configuration. 21 200925610 [Explanation of main component symbols] 10 Probe cards 16, 16a, 16b, 18 Probes 20, 20a, 20b, 22, 60, 62 Probes 24, 24a, 24b, 64, 64a, 66 Needle 26, 26a, 26b, 68, 68a, 70, 70a probe 28 substrate
下面 針主體部 針尖部 針根部 針尖 連接部（焊墊） 連接部（焊墊） 連接部（焊墊） 第1探針群組 第2探針群組 第3探針群組 第4探針群組 28a 34a 34b 34c 34d 38a、38a’、38b、38b， 38c 、 38cl ' 38c2 38d 、 38dl 、 38d2 46a、54a 46b 、 54b 46c、54c 46d、54d 22Lower needle main body needle tip needle tip tip connection portion (pad) connection portion (pad) connection portion (pad) first probe group second probe group third probe group fourth probe group Groups 28a 34a 34b 34c 34d 38a, 38a', 38b, 38b, 38c, 38cl ' 38c2 38d , 38dl , 38d2 46a , 54a 46b , 54b 46c , 54c 46d , 54d 22