WO2006075408A1

WO2006075408A1 - Continuity testing probe

Info

Publication number: WO2006075408A1
Application number: PCT/JP2005/000715
Authority: WO
Inventors: Hideki Hirakawa; Akira Souma; Yoshikazu Urushiyama
Original assignee: Kabushiki Kaisha Nihon Micronics
Priority date: 2005-01-14
Filing date: 2005-01-14
Publication date: 2006-07-20
Also published as: TWI277738B; JP4932499B2; TW200624815A; JPWO2006075408A1

Abstract

A continuity testing probe includes an arm area which extends in a first direction, and a needlepoint area continuous to one side in a second direction intersecting one direction of the arm area. The continuity testing probe has a board shape whose thickness direction is permitted to be a direction that intersects with the first and the second directions. The needlepoint area includes a pedestal part continuous to the arm area, and a contact part continuous to the pedestal part. The contact part includes a base part which forms a part of the pedestal part, and a protruding part which is continuous to the base part and protrudes in the second direction from the pedestal part. Thus, the contact part is prevented from being damaged.

Description

Probe for current test Technical field

The present invention relates to a probe used in an energization test of a flat object such as a semiconductor integrated circuit. Light

Background art

A flat test object such as a semiconductor integrated circuit is subjected to a current test to determine whether it is manufactured according to the written specifications. This type of energization test is performed using an electrical connection device such as a probe card, a probe block, or a probe unit, which is provided with a plurality of contacts or probes that are individually pressed against the electrodes of the object to be inspected. This type of electrical connection device is used to electrically connect an electrode of a device under test to a tester.

Probes used in this type of electrical connection device include needle-type probes manufactured from thin conductive metal wires, blade-type probes formed in a plate shape, and one surface of an electrical insulating sheet (film). There is a probe element type using a probe element in which a protruding electrode is formed on the formed wiring.

The blade type probe includes a single plate type manufactured from a conductive metal, and a stacked type probe that exposes and etches photoresist and etches the etched portion at least once. is there.

Both types of probes are supported in a cantilevered manner by a supporting member such as a wiring board, and the needle tip is pressed against the electrode of the object to be inspected. When the needle tip is pressed against the electrode of the object to be inspected, overdrive acts on the probe, and the probe is bent by elastic deformation.

As one of the blade type probes, the first and second arm portions extending in the first direction at intervals in the second direction, and the first and second arm portions at their leading ends 1st and 2nd connecting parts that connect at the part and the base end respectively, and the 1st connection Some include a needle tip portion that continues to one side in the second direction of the second portion and an attachment portion that continues to the other side in the second direction of the second connecting portion (Patent Document 1).

Patent Document 1: WO 2 0 0 4-1 0 2 2 0 7 Publication A 1

In the conventional probe, the needle tip portion includes a pedestal portion continuing from the first connecting portion and a contact portion continuing integrally with the pedestal portion.

In the probe as described above, the attachment portion is attached to an appropriate support member, is supported in a cantilever shape by the support member, and the needle tip is pressed against the electrode of the object to be inspected in this state. As a result, excessive overdrive acts on the probe, and the probe is bent by elastic deformation in the first and second arm portions.

However, in the conventional probe, when the overdrive acts, the contact part is damaged like a breakage. In particular, in the case of microprobes for integrated circuits, the contact area is very small and the mechanical strength of the contact area is weak. It is difficult to make the first and second arm portions elastically deformed greatly. If the overdrive amount cannot be increased as described above, the pressing force (needle pressure) of the needle tip against the electrode of the object to be inspected cannot be increased. The electrical connection cannot be established, and the position of the needle tip in the second direction must be matched with high accuracy. As a result, an accurate inspection cannot be performed. Disclosure of the invention

Problems to be solved by the invention

An object of the present invention is to prevent damage to a contact portion.

Means for solving the problem

An energization test probe according to the present invention includes an arm region extending in a first direction, and a needle tip region continuing on one side in a second direction intersecting the first direction of the arm region. The plate has a thickness direction that intersects the first and second directions. The needle tip region includes a pedestal portion continuing to the arm region, and a contact portion continuing to the pedestal portion, and the contact portion includes a base portion forming a part of the pedestal portion, and the base portion And a projecting portion projecting from the pedestal portion in the second direction. The invention's effect

In the probe of the present invention, the protrusion is pressed against the electrode of the object to be inspected. However, since the base of the contact portion forms a part of the pedestal, the contact area between the contact and the pedestal is larger than that of the conventional probe. Therefore, damage to the contact portion is prevented. The arm region includes first and second arm portions extending in the first direction with an interval in the second direction, and the first and second arm portions having a distal end portion and a proximal end portion. And the needle tip region may be formed so as to be integrally connected to the first connecting portion or the second arm portion.

The probe according to the present invention further includes an extension region continuing on the other side in the second direction of the second connecting portion, and an attachment region continuing on the other side of the extension region in the second direction. Can be included.

The base of the contact region may have an L shape, a U shape, a T shape, or a Y shape.

The base of the contact area may form part of the surface of the pedestal. Alternatively, the base portion of the contact area may be embedded in the pedestal portion. The contact portion may be made of a hard metal material, and the arm region may be made of a tough metal material. Brief Description of Drawings

FIG. 1 is a front view showing a first embodiment of a probe according to the present invention.

FIG. 2 is a right side view of the probe shown in FIG.

FIG. 3 is a right side view showing a second embodiment of the probe according to the present invention.

FIG. 4 is a right side view showing a third embodiment of the probe according to the present invention.

FIG. 5 is a right side view showing a fourth embodiment of the probe according to the present invention.

FIG. 6 is a right side view showing a fifth embodiment of the probe according to the present invention.

FIG. 7 is a process diagram showing one embodiment of a method of manufacturing the probe shown in FIG. FIG. 8 is a diagram for explaining the process following FIG.

FIG. 9 is a diagram for explaining the process following FIG.

FIG. 10 is a diagram for explaining the process following FIG. 9 ₍

Explanation of symbols

1 0, 4 0, 4 4, 4 8 5 2 Probe

1 2 Arm area

1 4 Needle tip area

1 6 Extension area

1 8 Mounting area

2 0, 2 2 Arm

2 4, 2 6 Connecting part

2 8 Needle base area

3 0 Contact area of needle tip area

3 2, 4 2, 4 6, 5 0 5 4 Contact base

3 4 Protruding part of contact part Best mode for carrying out the invention

Hereinafter, in FIG. 1, the left-right direction is the first direction, the up-down direction is the second direction, and the direction perpendicular to the page is the third direction. These directions receive the object to be energized. Depending on professional chuck top.

Referring to FIGS. 1 and 2, the probe 10 includes an arm region 1 2 extending in the first direction (left-right direction), and a needle that integrally follows the lower edge of the distal end of the arm region 1 2 It includes a tip region 14, an extension region 16 that integrally follows the upper edge of the proximal end of the arm region 12, and a mounting region 18 that integrally follows the upper edge of the extension region 16.

The arm region 1 2 includes first and second arm portions 20 and 2 2 extending in the first direction at intervals in the second direction (vertical direction), and the first and second arms. The first and second connecting portions 2 4 and 2 6 connect the portions 2 0 and 2 2 at their tip and base ends, respectively.

The needle tip region 14 is formed by the lower edge of the tip of the second arm portion 2 2 and the first connecting portion 24. A pedestal portion 28 that continues integrally with the lower edge portion, and a contact portion 30 that protrudes from the lower edge portion of the pedestal portion 28, and a lower edge portion on the tip side of the first connecting portion 24 It protrudes downward from.

The arm area 1 2, extension area 1 6, mounting area 1 8 and pedestal 2 8 are in the form of an integral plate with approximately the same thickness dimensions, so the probe 10 is an entirely flat blade. It is a type of probe.

On the other hand, the contact portion includes a base portion 3 2 that forms a part of the pedestal portion 28, and a protrusion portion 3 4 that continues from the base portion 3 2 and protrudes downward from the pedestal portion 28, and Overall, it has a crank-like cross-sectional shape. The base portion 3 2 has an L-shaped cross section and is embedded in the pedestal portion 28.

The contact portion 30 has a downward leading end surface at the lower end. In the example shown in the drawing, this tip surface acts as a needle tip pressed against the electrode of the object to be inspected. However, instead of using the tip as a surface, a sharp tip may be used.

The width dimension of the pedestal portion 28 in the left-right direction is longer than the width dimension of the first connecting portion 24 in the left-right direction. Therefore, the pedestal portion 28 has a width dimension extending from the lower edge portion of the first connecting portion 24 to the lower edge portion on the distal end side of the second arm portion 22. Thus, the width dimension of the pedestal portion 28 in the left-right direction may be set to the same value as the width dimension of the first connecting portion 24 in the left-right direction.

The width dimension of the extension region 16 in the left-right direction is the same as the width dimension of the second connecting portion 26 in the left-right direction. However, the width dimension of the extension region 16 in the left-right direction may be set to a value different from the width dimension of the second connecting portion 26 in the left-right direction.

Probe 10 materials include nickel-phosphorus alloy (N i—P), nickel-tungsten alloy (N i _W), rhodium (R h), phosphor bronze (B e C u), nickel (N i), Examples thereof include conductive metal materials such as a palladium-cobalt alloy (P d -Co) and a palladium 'nickel-cobalt alloy (Pd-Ni-Co). The entire probe 10 may be made of any of the above materials. However, the contact part 30 may be made of a material different from other parts 1 2, 14, 16, 28, etc. In the latter case, the contact part 30 is made of a hard metal material such as rhodium, and the other parts 1 2, 14, 16 and 28 are made of a metal material having high toughness such as nickel. can do. As a result, even if a large overdrive is applied to the probe 10, the arm region 1 2 is greatly bent, and the probe 10 is prevented from being damaged. Further, if the entire probe 10 is made of the same material, or if the portion other than the contact portion 30 is made of the same material, the probe 10 can be easily manufactured.

The probe 10 is assembled into an electrical connection device such as a probe card. Such an electrical connection device is described in Patent Document 1, and detailed description thereof is omitted. In such an electrical connection device, a plurality of probes 10 are supported in a cantilever shape on a mounting substrate at a mounting portion 18.

The probe 10 is pressed against the electrode of the object to be inspected while the tip of the contact portion is supported in a cantilever shape on the mounting board of the electrical connection device.

When the needle tip is pressed against the electrode of the object to be inspected, the overdrive OD acts on the probe 10 and both the arm portions 20 and 22 are elastically deformed and bent.

Since the base 3.2 of the contact portion 30 forms part of the pedestal portion 28, the contact area between the contact portion 30 and the pedestal portion 28 is larger than that of the conventional probe. Therefore, breakage of the contact portion 30 such that the contact portion 30 is peeled off from the pedestal portion 28 is prevented. Instead of embedding the base 3 2 in the pedestal 2 8, as shown in the probe 40 shown in FIG. 3, the base 4 2 of the contact part 30 is enlarged so that the base 4 2 A part may be formed.

In the probe 44 shown in FIG. 4, the cross-sectional shape of the base portion 46 of the contact portion 30 is U-shaped, and the cross-sectional shape of the contact portion 30 is Y-shaped. The base portion 46 is embedded in the pedestal portion 28. This probe 44 also has the same effect as the probe 10.

Instead of embedding the base part 4 6 in the pedestal part 28, the base part 50 of the contact part 30 is enlarged so that the base part 50 becomes the side surface of the base part 28 and the bottom surface as shown in the probe 48 shown in FIG. A part may be formed.

In the probe 52 shown in FIG. 6, the cross-sectional shape of the base portion 54 of the contact portion 30 is T-shaped, and the cross-sectional shape of the contact portion 30 is T-shaped. The base portion 5 4 is embedded in the pedestal portion 28. This probe 52 also has the same effect as the probe 10.

An example of a method for manufacturing the probe 10 having the structure shown in FIGS. 1 and 2 will be described with reference to FIGS. First, as shown in FIG. 7A, a metal layer 62 such as a nickel layer is formed on one surface of a stainless steel plate-like substrate 60 by sputtering.

Next, as shown in FIG. 7B, a photoresist 64 is applied to the metal layer 62. Next, as shown in FIG. 7 (C), a recess 66 corresponding to a part of the arm region 12, the extension region 16, the attachment region 18 and the pedestal portion 28 is formed in the photoresist 64. Expose and develop photoresist 64.

Next, as shown in Fig. 7 (D), arm region 1 2, extension region 1 6, mounting region 1 8, and pedestal 2 by electric plating using a tough metal material such as nickel-chromium alloy A metal layer 6 8 acting as part of 8 is formed in the recess 6 6. Next, as shown in FIG. 7E, a metal layer 70 such as a nickel layer is formed on the photoresist 64 and the metal layer 68 by sputtering.

Next, as shown in FIG. 7 (F), a photoresist 72 is applied to the metal layer 70. Next, as shown in FIG. 8 (A), the photoresist 72 is exposed and developed so that the recess 74 is formed in the photoresist 72.

Next, as shown in FIG. 8B, a sacrificial layer 76 to be removed later is formed in the recess 74 by electric plating.

Next, as shown in FIG. 8C, the photoresist 72 is removed, and the metal layer 70 and the sacrificial layer 76 are exposed.

Next, as shown in FIG. 8 (D), a photoresist 78 is applied to the metal layer 70 and the sacrificial layer.

7 Apply to 6.

Next, as shown in FIG. 8E, the photoresist 72 is exposed and developed so that a recess 80 corresponding to the contact portion 30 is formed in the photoresist 78.

Next, as shown in FIG. 8 (F), a metal layer 82 that acts as the contact portion 30 is formed in the recess 80 by electrical plating using a hard metal material such as rhodium.

Next, as shown in FIG. 9A, the photoresist 78 is removed, and the metal layer 70,

8 2 and sacrificial layer 7 6 are exposed.

Next, as shown in FIG. 9B, a photoresist 82 is applied to the metal layers 70 and 82 and the sacrificial layer 76. Next, as shown in FIG. 9 (C), a recess 8 6 corresponding to the remaining part of the arm region 12, the extension region 16, the attachment region 18 and the pedestal portion 28 is formed in the photoresist 84. Expose and develop photoresist 84.

Next, as shown in Fig. 9 (D), arm region 1 2, extension region 1 6, mounting region 1 8 and pedestal part by electric plating using a tough metal material such as nickel-chromium alloy A metal layer 8 8 acting as the balance of 2 8 is formed in the recess 8 6. Next, as shown in FIG. S (E), the remaining portion of the photoresist 84 is removed to expose the metal layers 70 and 82 and the sacrificial layer 76.

Next, as shown in FIG. 10A, a part of the metal layer 72 and the sacrificial layer 76 are removed by etching.

Next, as shown in FIG. 10 (B), the remaining portion of the photoresist 64 is removed to expose the metal layer 62.

Next, as shown in FIG. 10 (C), a part of the metal layer 62 is removed by etching to expose the substrate 60.

Next, as shown in FIG. 10 (D), the metal layers 6 2, 6 8, 7 0, 8 2 and 8 8 are separated from the substrate 60. Thereby, the probe 10 is manufactured.

In the above manufacturing method, the metal layers 6 2 and 70 are for enhancing the adhesion of the metal layers 6 8, 8 2 and 8 8, and therefore the metal layers 6 8, 8 2 and 8 8 It may be omitted depending on the metal material used.

Other probes 40, 44, 48, and 52 can also be manufactured using electromechanical technology, sputtering technology, photolithography technology, etching technology, etc., as described above. Industrial applicability

The present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the present invention.

Claims

The scope of the claims

1. an arm region extending in a first direction; and a needle tip region continuing on one side in a second direction intersecting the first direction of the arm region, the first and second directions; A probe for energization test having a plate shape whose crossing direction is a thickness direction,

The needle tip region includes a pedestal portion that follows the arm region, and a contact portion that follows the pedestal portion, and the contact portion includes a base portion that forms a part of the pedestal portion, and the base portion. And a projecting portion projecting in the second direction from the pedestal portion.

2. The arm region includes first and second arm portions extending in the first direction at intervals in the second direction, and the first and second arm portions at their tip portions. And first and second connecting portions connected at the base end portions respectively,

The probe for energization testing according to claim 1, wherein the needle tip region continues integrally with the first connecting portion or the second arm portion.

3. Further comprising an extension region continuing on the other side in the second direction of the second connecting portion, and an attachment region continuing on the other side of the extension region in the second direction. The probe for electricity test as described.

4. The probe for energization test according to claim 1, wherein the base portion of the contact region has an L shape, a U shape, a T shape, or a Y shape.

5. The probe for energization test according to claim 1, wherein the base portion of the contact area forms a part of the surface of the pedestal portion.

6. The probe for energization test according to claim 1, wherein the base portion of the contact area is embedded in the pedestal portion. ''

7. The probe for energization test according to claim 1, wherein the contact portion is made of a high-hardness metal material, and the arm region is made of a high-toughness metal material.