201243342 Λ 六、發明說明： 【發明所屬之技術領域】 本發明係關於用在如液晶顯示面板般之平板狀被檢查 體之電氣測試的探針裝置及探針單元。 【先前技術】 如封有液晶之液晶顯示面板般之平板狀被檢查體，一 般來說，係則吏用具備探針裝置之探針單元的檢査裝置、 亦即測試裝置來進行檢査、亦即進行測試。於此種測試中， 將來自測試裝置之電路之電氣訊號透過探針裝置供應至被 檢查體。 例如，專利文獻1所記載之探針裝置，包含：於前部 具備與被檢查體之電極接觸之多數個接冑t極的一個配線 片、電氣連接於配線片而結合之複數個連接片、以及支承 配線片之支承體。 配線片包含往前後方向延伸之第丨片狀構件、以及形 成在該第1片狀構件且前部設有前述接觸電極並延伸於前 後方向之多數個第1配線，以設有前述接觸電極之第1配 線為探針。夕數個第丨配線係於左右方向、亦即於配線片 之寬度方向彼此隔著間隔設在第1片狀構件。 又’各連接片包含往前後方向延伸之第2片狀構件、 以及設於該第2片狀構件且分別與配線片之第1配線對應 結合並延伸於前後方向之多數個第2配線。多數個第2配 線係於左右方向、亦即於連接片之寬度方向彼此隔著間隔 c 3 201243342 設在第2片狀構件。 複數個連接片係在將該等之寬度方向位置對齊之狀態 下彼此重疊、且錯開前後方向之位置結合於前述配線片。 各連接片電氣連接於測試裝置之電路，來自該電路之電氣 訊號透過各連接片之第2配線、第丨配線片之第丨配線、 以及設於第1配線之接觸電極被供應至被檢查體。 此探針裝置’係在配線片形成有第1片狀構件之第1 配線的面與連接片之形成有第2片狀構件之第2配線的面 相對向之狀態下使連接片之一部分對向於配線片，於此對 向之部分’將配線片之第i配線、及連接片之與該第1配 線對應之第2配線藉由熱壓接（亦即，將欲接合之材料以其 融點以下之適當温度加壓密接、且使其產生塑性變形，據 以使欲接合之材料表面接觸加以接合之接合方法）加以結 合。據此’配線片及連接片即被電氣連接。 不過，在將配線片與各連接片加以結合時，有時會在 §玄等之寬度方向、亦即複數個第丨或第2配線隔著間隔排 列之方向產生位置偏移，導致連接片之第2配線與位在和 配線片之對應第1配線相鄰位置之第丨配線接觸的不良情 形。 為防止此種第1配線與和此不對應之第2配線接觸， 引用文獻1之技術，係在連接片設置絶緣性保護層（resist。 此種絶緣性片，係以覆蓋待熱壓接（亦即、結合）至配線片之 第1配線之位置近旁以外之第2配線的方式，設於連接片。 將此種絶緣性保護層設在配線片與連接片之間的話， 201243342 係將用以結合第1及第2配線之貫通孔形成於絶緣性保護 層，使配線片彈性變形後壓入該貫通孔據以使第丨配線接 觸第2配線，而在該等之接觸面進行熱壓接。因此，第^ 配線，係以配線片沿著貫通孔之方式，在從左右方向觀察 之剖面呈彎曲成U字狀之狀態下，於該u字底部結合於連 接片之第2配線。 然而，在配線片被壓入保護層之貫通孔、第丨配線彈 性變形成U字狀之狀態下結合於第2配線時，被彎曲之配 線片會承受從U字狀回到平坦狀態、亦即會承受第丨配線 從第2配線分離之彈力。尤其是保護層之貫通孔為防止短 路而被形成為微孔徑，因此配線片係被強制的壓入貫通孔 而彎曲，前述彈力非常大。 因此，在第1配線片與第2配線片之間設置保護層之 上述探針裝置，即使將第丨配線與第2配線加以熱壓接， 亦會因第1配線欲從第2配線脫離之力作用於配線片，使 付第1配線與第2配線分離，從而產生配線片與連接片之 連接不良的問題。 先行技術文獻 [專利文獻1]日本特開平9 — 184853號公報 【發明内容】 發明欲解決之課題 本發明之目的，係在使配線片之配線與和該配線對應 之連接片之配線確實地連接。 5 201243342 用以解決課題之手段 為達成上述目的，本發明之探針裝置，包含與被檢查 體之電極接觸之多數㈣針、電氣連接於該探針之配線 片、電氣連接於該配線片之連接電路、介於該配線片與該 連接電路之mu、以及貫通魏緣性片將該配線 片與：連接電路加以電氣連接之熱熔融性的金屬構件。 ^ 述配線片，具有分別從該探針連續或電氣連接於該 料往後方延伸之多數個第丨配線、與該帛丨配線設在其 面之第1片狀構件。前述連接電路，係在其—部分與前 述配線片對向之狀態形成為片狀，具有分別與前述帛i、配 線對應之多數個第2配線、與前述第2配線設在其一面之 第2片狀構件。前述金屬構件貫通前述絶緣性片將前述第1 配線及與此對應之第2配線加以結合。 =述連接電路可至少具備分別具有多數個該第2配線 :以第2片狀構件之第以"連接片，前述第】配線可 :有對應前述第！連接片之前述第2配線的複數個第ι導 與對應前述第2連接片之前述第2配線的複數個第2 之^述金屬構件，可具有將前述第丨導電路及與此對應 :卜第1連接片之前述第2配線加以結合的複數個第ι 構:、' 與將前述第2導電路及與此對應之前述第2連 之别述第2配線加以結合的複數個第2金屬構… :第1金屬構件可於左右方向隔著間隔配置成一列，前： 2金屬構件可位於前述第i金屬構件之前方或後方 6 201243342 左右：向隔著間隔配置成一列。 月J述連接電路可i少1 γ岳八2|丨g + 線與前述心狀二:第2 = ,^ 冉1干的第！、第2及第3連接片，铪-+.铉 1配線具有對應前述第丄連接片之前』賴片月,J述第 1導電路、對庳… 則迷第2配線的複數個第 2導電路 連接片之前述第2配線的複數個第 個第3導電路β疋第3連接片之㈣第2配線的複數 前述金屬構件，且右膝今、+·势，# 前述第1連接片… 電路及與此對應之 凰谯 刖，〔第2配線加以結合的複數個第1金 ▲、、與將前述第2導電路及與此對應之前述第2連接 二述第2配線加以結合的複數個第2金屬構件、以及 7述第3導電路及與此對應之前述第3連接片之前述第2 配線加以的複數個第3金屬構件。 二述第1金屬構件可於左右方向隔著間隔配置成一 列’則述第2金屬構件可位於前述第工金屬構件之後方於 Ϊ右方向隔著間隔配置成—列，前述帛3金屬構件可位於 述第2金屬構件之後方於左右方向隔著間隔配置成一 歹J此外，刚述絶緣性片可被支承於前述配線片。 月1Jit第1第2及第3連接片可形成為相同形狀，前述 第2及第3連接片各個之前述第2配線可具有彼此平 行k伸、或越往則方越往左方或右方中之一方傾斜延伸的 第1配線區域，以及從該第丨配線區域之後端部往後方延 伸的第2配線區域’前述第！、第2及第3連接片可重疊成 在左右方向之位置相同。 7 201243342 刖 部配置在2 1連接片之前端部可較前述第2連接片之前端 ^己置^方，前述第2連接片之前端部可較前述第3連 述配置在前方…前述第1配線可具有從前 方間距越ΐ或電氣連接於前述探針往後方延伸、以越往前 乍之方式延伸於前後方向的第J導電路區域。 述絶二第可二?/— 支承於”覆蓋刖述配線片之前述第1配線之方式笨 片，又’前述絶緣性片可具備在前述探針 =接於前㈣丨配線之位置前述探針之後部針尖插通 -員通孔。 連接ΓΓ之探針單元，可包含:包含前述第卜第2及第3 探針，署上仏針衷置、為板狀且於上面之前方具備前述 =的探針座、在該探針座之後部設置成往上方延伸 且以刖後方向為厚度方向 1、第2及第3連接片分別電；：中繼基板、以及前述第 1電軋連接於此且設於前述中繼基 板的第1、帛2及第3連接部。 兮第^第1連接片可重疊在前述第2連接片之上側、而 =連接片重疊於前述第3連接片之上側，此外，前述 =連接料設於前述U連接部之下方、該第2連接部 可叹於前述第3連接部之下方。 發明效果 根據本發明之探針裝置 接片之間存在前述絶緣性片 熱炫融性的前述金屬構件將 ’即使在前述配線片與前述連 ’亦能藉由貫通該絶緣性片之 前述第1配線與和此對應之前 201243342 述第2配線加以結合。如此，即無需為了將前述配線片或 前述連接電路之前述連接片壓入前述絶緣性片之前 ^貝通 孔’而使前述連接片或前述配線片彎曲。 因此，即便是在透過前述絶緣性片而能防止前述第1 配線連接於不對應之前述第2配線，亦能在前述配線片或 前述連接電路之前述連接片不彎曲之情形下，將前迷第% 配線與第2配線加以結合。承上所述，由於不會產生使前 述第1配線與前述第2配線分離之力，因此能將前述第工 及第2配線確實地加以連接。 又，在將複數個前述連接片結合於一個前述配線片之 情形時，若於前述連接片設置前述絶緣性片的話，則須要 分別具備前述絶緣性片之複數個前述連接片，探針裝置之 造價將變得高昂。然而，若根據本發明的話，由於藉由將 絕緣性片設於配線片，僅需將一個前述絶緣性片設於一個 月1J述配線片即可，因此能以低價製作探針裝置。 【實施方式】 [用語説明] 於本發明中，係將圖2中之上下方向稱為上下方向或z 方向’將左右方向稱為以探針裝置之被檢查體側為前方、 以探針裝置之中繼基板側為後方的前後方向或γ方向，將 紙背方向稱為左右方向或X方向。不過，上述方向會隨著 ° 又置在如工作台等面板承座之被檢查體的姿勢而不同。 因此，探針裝置及探針塊（pr〇beblock)，在本發明令所[Technical Field] The present invention relates to a probe device and a probe unit for electrical testing of a flat object to be inspected like a liquid crystal display panel. [Prior Art] In the case of a flat-shaped object to be inspected like a liquid crystal display panel, a test device having a probe unit of a probe device, that is, a test device, is generally used for inspection, that is, carry out testing. In this test, the electrical signal from the circuit of the test device is supplied to the object to be inspected through the probe device. For example, the probe device described in Patent Document 1 includes a wiring piece having a plurality of contact t-poles in contact with electrodes of the test object in the front portion, and a plurality of connection pieces electrically connected to the wiring piece and connected thereto. And a support for supporting the wiring sheet. The wiring sheet includes a second sheet-like member extending in the front-rear direction, and a plurality of first wirings formed in the first sheet-like member and having the contact electrodes provided in the front portion and extending in the front-rear direction, and the contact electrodes are provided The first wiring is a probe. The plurality of ninth wirings are provided in the first sheet-like member at intervals in the left-right direction, that is, in the width direction of the wiring sheet. Further, each of the connecting pieces includes a second sheet-like member that extends in the front-rear direction, and a plurality of second wires that are provided in the second sheet-like member and that are coupled to the first wiring of the wiring sheet and extend in the front-rear direction. The plurality of second wirings are provided in the left and right direction, that is, in the width direction of the connecting piece, at intervals of c 3 201243342 in the second sheet member. A plurality of connecting sheets are overlapped with each other in a state in which the widthwise directions are aligned, and the positions in the front-rear direction are coupled to the wiring sheet. Each of the connecting pieces is electrically connected to the circuit of the test device, and the electrical signal from the circuit is transmitted through the second wire of each of the connecting pieces, the second wire of the second wiring piece, and the contact electrode provided in the first wire to the object to be inspected . In the probe device, a part of the connecting piece is made to face the surface of the first wiring of the first sheet-like member on the wiring sheet and the surface of the second wiring of the second sheet-shaped member of the connecting sheet. To the wiring sheet, the opposing portion 'the ith wiring of the wiring sheet and the second wiring corresponding to the first wiring of the connection sheet are thermocompression bonded (that is, the material to be bonded is used) The bonding at a suitable temperature below the melting point is pressure-bonded and plastically deformed, and the surface of the material to be joined is brought into contact and bonded. Accordingly, the wiring sheet and the connecting piece are electrically connected. However, when the wiring sheet is bonded to each of the connecting sheets, a positional shift may occur in the width direction of the sigma or the like, that is, a plurality of second or second wirings are arranged at intervals, thereby causing the connecting sheet. The second wiring is in contact with the second wiring that is in contact with the first wiring adjacent to the first wiring of the wiring sheet. In order to prevent such a first wiring from coming into contact with the second wiring that does not correspond to this, the technique of Document 1 is to provide an insulating protective layer on the connecting sheet. This insulating sheet is intended to cover the thermoforming to be bonded ( In other words, the second wiring is not connected to the vicinity of the position of the first wiring of the wiring sheet, and is provided in the connecting sheet. When such an insulating protective layer is provided between the wiring sheet and the connecting sheet, 201243342 is used. The through-holes that combine the first and second wirings are formed in the insulating protective layer, and the wiring sheet is elastically deformed, and then pressed into the through-holes so that the second wiring contacts the second wiring, and the contact surfaces are hot-pressed. Therefore, the second wiring is bonded to the second wiring of the connecting sheet at the bottom of the u-shaped portion in a state in which the cross section is bent in a U shape as viewed from the left and right direction so that the wiring piece follows the through hole. However, when the wiring sheet is pressed into the through hole of the protective layer and the second wiring is elastically deformed into a U shape, the bent wiring piece is returned to the flat state from the U shape. That will bear the second wiring from the second wiring In particular, since the through hole of the protective layer is formed into a micro-aperture to prevent short-circuiting, the wiring piece is forcibly pressed into the through hole and bent, and the elastic force is extremely large. Therefore, the first wiring piece and the second wiring piece are formed. In the probe device in which the protective layer is provided between the wiring sheets, even if the second wiring and the second wiring are thermocompression-bonded, the first wiring is forced to be detached from the second wiring, and the wiring is applied to the wiring sheet. The wiring is separated from the second wiring, and the connection between the wiring sheet and the connecting sheet is defective. [Problems to be Solved by the Invention] [Problem to be Solved by the Invention] The wiring of the wiring sheet and the wiring of the connecting piece corresponding to the wiring are reliably connected. 5 201243342 Means for Solving the Problem In order to achieve the above object, the probe device of the present invention includes the electrode in contact with the object to be inspected. a plurality of (four) pins, a wiring piece electrically connected to the probe, a connection circuit electrically connected to the wiring piece, a mu between the wiring piece and the connection circuit, and a through-wei A hot-melt metal member in which the wiring sheet and the connecting circuit are electrically connected to each other. The wiring sheet has a plurality of second wirings extending continuously or electrically from the probe to the rear of the material, and The first wiring member is provided on the surface thereof. The connection circuit is formed in a sheet shape in a state in which the portion is opposed to the wiring sheet, and has a plurality of portions corresponding to the 帛i and the wiring, respectively. 2. A second sheet-like member provided on one surface of the wiring and the second wiring. The metal member is inserted through the insulating sheet to bond the first wiring and the second wiring corresponding thereto. Each of the plurality of second wires: a first piece of the second sheet-shaped member, and a second piece of the first wire that corresponds to the second wire of the first connecting piece and corresponding to the aforementioned The plurality of second metal members of the second wiring of the second connecting piece may have a plurality of first electrodes that combine the second conductive circuit and the second wiring corresponding to the first connecting piece. Structure:, with a plurality of second metal structures in which the second conductive circuit and the second wiring of the second connection are connected to each other: the first metal members are arranged in a row at intervals in the left-right direction, and the front: 2 The metal member may be located in front of or behind the aforementioned i-th metal member 6 201243342: arranged in a row at intervals. Month J said the connection circuit can be less 1 γ Yue eight 2 | 丨 g + line with the aforementioned heart shape two: 2 =, ^ 冉 1 dry the first! The second and third connecting pieces, the 铪-+.铉1 wiring has a corresponding second galvanic connection before the first yoke connecting piece, and the first conductive circuit of the second conductive line. The plurality of first third conductive circuits β 疋 the third connecting piece of the second connecting piece of the second connecting piece of the second connecting piece of the second connecting piece, the right metal member, and the first connecting piece of the right side of the wire. And a plurality of first gold ▲ that are combined with the second wiring, and a plurality of second wirings that are connected to the second conductive circuit and the second connection The plurality of third metal members are provided by the second metal member and the third conductive circuit and the second wiring of the third connecting piece corresponding thereto. The first metal members may be arranged in a row at intervals in the left-right direction. The second metal members may be arranged in a row in the right-hand direction after the second metal members, and the 帛3 metal members may be arranged. The second metal member is placed in the left-right direction at intervals in the left-right direction. Further, the insulating sheet can be supported by the wiring sheet. The first 1st, 2nd, and 3rd connecting pieces of the 1Jit may be formed in the same shape, and the second wirings of the second and third connecting pieces may have a parallel k extension or a further left or right side. The first wiring region in which one of the two obliquely extends, and the second wiring region that extends rearward from the rear end portion of the second wiring region are the aforementioned! The second and third connecting pieces may be overlapped to have the same position in the left-right direction. 7 201243342 The end portion of the second connecting piece can be placed before the end of the 2 1 connecting piece, and the front end of the second connecting piece can be arranged in front of the third connecting piece. The wiring may have a J-th conductive circuit region that extends from the front pitch or is electrically connected to the probe to extend rearward and extends forward and backward in a front-rear direction. The second insulating film can be supported by a method of covering the first wiring of the wiring sheet, and the insulating sheet can be provided at the position where the probe is connected to the front (four) wiring. The needle tip of the needle is inserted into the through hole of the needle. The probe unit connected to the cymbal may include: the second and third probes included in the above, and the needle is placed in a plate shape and has the foregoing before The probe holder of the = is disposed to extend upward in the rear portion of the probe holder, and is electrically connected to the thickness direction 1 and the second and third connecting pieces in the rear direction; the relay substrate and the first electric rolling connection The first connection piece is disposed on the first connection piece of the relay substrate, and the first connection piece is overlapped on the upper side of the second connection piece, and the connection piece is overlapped with the third connection piece. Further, the above-mentioned = connecting material is provided below the U connecting portion, and the second connecting portion is sagged below the third connecting portion. Advantageous Effects of Invention According to the present invention, the aforementioned insulation is present between the tabs of the probe device The aforementioned metal members of the hot and mellow melt will be 'even in the aforementioned wiring sheet and the front The connection " can also be combined with the first wiring which is connected to the insulating sheet and the second wiring of the previous reference 201243342. Thus, it is not necessary to press the aforementioned wiring piece or the connecting piece of the connecting circuit into the aforementioned wiring. The connection piece or the wiring piece is bent before the insulating sheet is formed. Therefore, even if the first wiring is prevented from being connected to the second wiring which is not corresponding to the insulating sheet, the first wiring can be prevented from being connected to the second wiring. When the wiring sheet or the connecting piece of the connecting circuit is not bent, the first % wiring and the second wiring are combined. As described above, the first wiring and the second wiring are not separated. Therefore, when the plurality of connecting pieces are bonded to one of the wiring sheets, when the plurality of connecting pieces are bonded to one of the wiring sheets, the insulating sheet is provided on the connecting sheet. If a plurality of the aforementioned connecting sheets of the insulating sheet are required, the cost of the probe device will become high. However, according to the present invention, Since the edge sheet is provided on the wiring sheet, it is only necessary to provide one of the insulating sheets on the wiring sheet of one month. Therefore, the probe device can be manufactured at a low cost. [Embodiment] [Description of Terms] In the present invention, The upper and lower directions in FIG. 2 are referred to as the up-down direction or the z-direction. The left-right direction is referred to as the front-back direction or the γ-direction with the probe device side of the probe device as the front and the probe device's relay substrate side as the rear. The paper back direction is referred to as the left-right direction or the X-direction. However, the above-mentioned direction differs depending on the posture of the object to be inspected such as a table holder such as a table. Therefore, the probe device and the probe block (pr) 〇beblock), in the order of the present invention
S 9 201243342 謂之上下方向（z方向），實際上，係在上下方向之狀態上 下反方向之狀態、斜方向之狀態等任一種方向之狀態下安 裝在測試裝置使用。 [測試裝置] 如圖1所示，測試裝置10係用於液晶顯示面板等之平 板狀被檢查體12的點亮檢査。測試裝置1〇具備送出餅測 。式被檢查體12之訊號的電路（未圖示對被檢查體I]，係 從電路透過測試裝置10供應用以檢査所須之、例如用以使 液晶顯示面板黑顯示之測試訊號或驅動訊號。 被檢查體12具有矩形形狀，在對應該矩形之至少一邊 的緣部12a，形成有多數個電極14。各電極14具有往形成 此之緣部12a長邊方向正交之χ方向或向延伸之帶狀 形狀，於緣部12a之長邊方向以既定間隔形成。圖示例中， 在被檢查體12之相鄰二個邊設有多數個電極14。 、J式裝置1 0 ’包含用以保持被檢查體12之夾頭頂1 6、 以及配置在夾頭頂16上方之多數個探針單元18。夾頭頂 上之被檢查體12 ’如先前眾所周知的，係藉由制動構件 20及推動器22於χγ平面調整其姿勢。 姿勢Ί周整之被檢查體i 2 ’藉由夾頭頂^ 6之吸引被保 持在夾a頭頂16上。夾頭頂16，如先前眾所周知的，係設在 y 〇上如此，夾頭頂16上之被檢查體12即能與夾頭 頂16 一體往Χ軸方向、γ軸方向及與Χ-Υ面成直角之Ζ 軸方向移動，亦能繞Ζ軸(亦即，Θ方向)旋轉。 各如針單疋18,具備在與夾頭頂平行之面上於夾頭 10 201243342 頂16上方隔著間隔配置 吩我万形之探針座（be 24、支承於探針座24之多 baSe) 座24之中繼基板28。 針裝置I以及設於探針 多數個探針裝置26係於探針座24之長邊方向 或Υ方向)隔著間隔被支承於探針座24。多數個探針裝置 26，如後之説明，係電氣連 、 y 礼磲按於肀繼基板28。中繼基板28 係藉由如扁平電徵箅之德垃财姑，Λ a ^ 士 運接配線3 0電氣連接於測試裝 之電路。 [探針裝置] 如圖2所示，各探針裝置％，包含裝載且連結於探針 座24之連結塊32、支承於連結塊32之支承塊34、結合於 支承塊34之結合塊36、支承於結合塊36之探針組裝體以、 將探針組裝體38電氣連接於中繼基板28之配線片 接電路42。. 連結塊32，藉由從探針座24豎立之方式連結於探針座 24之本體部32a、與從本體部32a上部往前方延伸之辅助部 32b，而具有L字狀之剖面形狀。連結塊32係藉由將本體 部32a從上方貫通至下方螺合於探針座24之複數支螺栓q 以可卸除之方式結合於探針座24。 支承塊34’藉由長方體形狀之本體部34a、與從本體部 34a下部往前方延伸之輔助部34b ’而具有倒[字狀之剖面 形狀。支承塊34藉由一組導件44及導軌46而以能在上下 方向移動之方式，在本體部34a之後面連結於連結塊32之 本體部32a前面，並藉由螺栓48以可調整上下方向位置之 11 201243342 方式支承於連結塊32之輔助部32b下側。 螺栓48將連結塊32之辅助部32b從上方貫通至下方， 並螺合於形成在支承塊34之螺孔5〇。支承塊34’被配置 f連結塊32之輔助部32b與支承塊κ之間之―㈣、缩螺 彈貫52彈麼向下方。如此，藉由調整螺检μ對支承塊 :4之螺入量’即能透過支承塊34及結合於支承塊“之結 〇塊36凋整探針組裝體％之高度位置。 結合塊3 6係以上下方向為厘谇 為厚度向之於左右方向長的 ::=，於其中央區域，藉由將支承塊“之辅助部_ =之二至下方螺合於結合塊％之螺栓54,結合於支承 :鬼：之下側。結合塊36 ’於其前下部具有 :向下段部3“。於向下段部-，藉由將結合塊3二： 件：：上方貫通至下方而螺合於探針組裝體38之螺合構 件5 6來維持探針組裝體31 、 如圖3所示，探針組裝體刊，在 向隔著間隔組裝之-對狹縫桿64，將多二〇下面於前後方 方向隔著間隔配置成延伸於前後 讀62於左右 横剖面形狀之絶緣性桿構件66貫 f ’使具有圓形 66之端部藉-對蓋構件68安裝於座片衣6十〇。62，並將桿構件 探針組裝體38係在嵌入結合塊％ 態下將螺合構件56螺合於座 °下段部36a之狀 维持在結合塊％下側如“:係: 為翼片式（亦即、板狀）之探 ，性材料製作， 以具有電氣絶緣性之陶究、合成樹 狹縫^64皆係 &作’具有於左右 12 201243342 方向長的角柱形狀。 各狹縫桿64被製作成角柱形狀，且被安裝在座片的 ^前部下面或後部下面成往左右方向延伸的狀g。各狹縫 杯64，在其下面具有於狹縫桿之長邊方向（左右方向）隔著 既疋間隔往前後方向延伸並開放於前方、後方及下方 數個狹縫。 夕 各狹縫對應探針62，並具有與對應之探針62之厚度尺 寸相對應之寬度尺寸’承接對應之探針62之前下部仏及 後上部62b。藉由兩狹縫桿64之狹縫來維持多數個探針α 之左右方向彼此之間隔。 兩蓋構件68配置在狹縫桿64之兩側，各蓋構件“在 將桿構件66之端部承接於其内側之狀態下，貫通蓋構件 68 ’藉由螺合在座片60之左右方向之端部的複數個螺合構 件69 以可卸除之方式安裝在座片60左右方向之側面。 各探針62’其厚度方向為左右方向，被配置在狹縫桿 64而成為刖下部62a及後上部6沘分別從座片⑽往前方及 ^方突出之狀態。各探針62，並往前後方向延伸將其前下 ^ 及後上。卩62b分別嵌合於前側及後側之狹縫桿64之 狹縫。 各探針62，在較嵌合於後側狹縫之後上冑62匕更後方 處”有向上方豎立之後部針尖62c。探針組裝體3 8係在 使各探針62之後部針尖62e接觸於配線片4〇之狀態下，被 維持於結合塊3 6。 圖4(A)所示’配線片4〇係在延伸於前後方向之狀態 c 13 201243342 下被支承於結合塊36之下面，於其前部電氣連接於探針組 裝體38。配線片4〇 ’具備一面貼於結合塊36之下面的第1 片狀構件70與形成在第i片狀構件7〇之另一面的多數個 第1配線72。各第！配線72對應於探針組裝體％之探針 62，配線片40具有與多數個探針02相同數量之第1配線 72 〇 進一步的’配線片40於其前部具備延伸於左右方向之 導膜（guide film)76(參照圖5(B))，透過設在導膜76於上下 方向貫通之多數個貫通孔77，將第i配線72之一部分露出 於下方。各探針62之後部針尖62c通過貫通孔77與對應之 第1配線72接觸。據此，配線片40與探針組裝體3 8即電 氣連接。 如圖4(B)所示，配線片4〇之後部電氣連接於連接電路 42。連接電路42包含複數個連接片8〇，各連接片具備 第2片狀構件82與設在片狀構件82之一面的多數個第2 配線84。各第2片狀構件82延伸於前後方向，且多數個配 線8 4彼此於左右方向隔著間隔往前後方向延伸之方式形成 在第2片狀構件82(參照圖8)。 各連接片80，使形成有第2配線84之面之一部分對興 於配線片40,在中間隔著絶緣性片74之狀態下結合於配線 片40。各第2 g己線84與帛i配線？！對應，透過貫通絶緣 I·生片74之金屬構件7S結合於對應之第i配線72。據此， 配線片40即電氣連接於連接電路42。 由於連接電路42電氣連接於測試裝置1〇之電路，因 14 201243342 此來自該電路之電氣訊號即透過連接電路42之各連接片8〇 之第2配線84、配線片40之第1配線72及探針組裝體38 之探針62，被供應至被檢查體12。 [配線片] 如圖5所示，配線片40具有以聚醯亞胺等之絶緣性材 料製作之第1片狀構件70、與形成在片狀構件7〇之多數個 第1配線72。因此，配線片40可以是所謂的軟性印刷電路 (FPC : Flexible Printed Circuits)或卷帶自動接合（TAB : TapeS 9 201243342 is a top-down direction (z direction), and is actually mounted in a test device in a state in which the state in the up-and-down direction is reversed or the state in the oblique direction. [Testing Apparatus] As shown in Fig. 1, the testing apparatus 10 is used for lighting inspection of the flat object 12 to be inspected by a liquid crystal display panel or the like. The test device 1 has a feed test. The circuit of the signal of the object 12 to be inspected (not shown to the object to be inspected I) is supplied with a test signal or a driving signal for the inspection of the liquid crystal display panel, for example, by the circuit through the test device 10. The test object 12 has a rectangular shape, and a plurality of electrodes 14 are formed on the edge portion 12a corresponding to at least one side of the rectangular shape. Each of the electrodes 14 has a meandering direction or a direction extending orthogonal to the longitudinal direction of the edge portion 12a where the edge portion 12a is formed. The strip-shaped shape is formed at a predetermined interval in the longitudinal direction of the edge portion 12a. In the illustrated example, a plurality of electrodes 14 are provided on two adjacent sides of the object to be inspected 12. The J-type device 1 0 'includes To maintain the chuck top 16 of the object 12 to be inspected, and a plurality of probe units 18 disposed above the top 16 of the chuck. The body 12' on top of the chuck is as previously known by the brake member 20 and the pusher. 22 adjusts its posture in the χ γ plane. The posture of the object to be inspected i 2 ' is held on the top 16 of the clip a by the attraction of the top of the chuck. The top 16 of the chuck, as previously known, is set at y 〇 So, the top of the chuck is checked. The body 12 can be moved integrally with the top 16 of the chuck in the direction of the x-axis, the direction of the γ-axis, and the direction of the y-axis at right angles to the Χ-Υ surface, and can also rotate about the Ζ axis (ie, the Θ direction). 18, having a relay seat (be 24, a plurality of baSe supported on the probe holder 24) of the probe holder 24 disposed at a position parallel to the top of the chuck on the top of the collet 10 201243342 The substrate 28. The needle device I and the plurality of probe devices 26 provided in the probe are supported by the probe holder 24 at intervals in the longitudinal direction or the Υ direction of the probe holder 24. A plurality of probe devices 26, as explained later, are electrically connected to the substrate 28 as follows. The relay substrate 28 is electrically connected to the circuit of the test device by, for example, a flat electric 箅 德 垃 财 财 Λ Λ 。 。 。 。. [Probe Device] As shown in FIG. 2, each probe device % includes a connection block 32 that is mounted and coupled to the probe holder 24, a support block 34 that is supported by the connection block 32, and a coupling block 36 that is coupled to the support block 34. The probe assembly supported by the bonding block 36 electrically connects the probe assembly 38 to the wiring piece connection circuit 42 of the relay substrate 28. The connecting block 32 has an L-shaped cross-sectional shape by being connected to the main body portion 32a of the probe holder 24 and the auxiliary portion 32b extending forward from the upper portion of the main body portion 32a so as to be erected from the probe holder 24. The coupling block 32 is detachably coupled to the probe holder 24 by penetrating the body portion 32a from above to a plurality of bolts q screwed to the probe holder 24 at the lower side. The support block 34' has a reversed-shaped cross-sectional shape by a body portion 34a having a rectangular parallelepiped shape and an auxiliary portion 34b' extending forward from the lower portion of the main body portion 34a. The support block 34 is coupled to the front surface of the main body portion 32a of the connecting block 32 behind the main body portion 34a by a plurality of guides 44 and guide rails 46 so as to be movable in the vertical direction, and can be adjusted in the up and down direction by the bolts 48. The position 11 201243342 is supported by the lower side of the auxiliary portion 32b of the connecting block 32. The bolt 48 penetrates the auxiliary portion 32b of the coupling block 32 from above to below, and is screwed to the screw hole 5〇 formed in the support block 34. The support block 34' is disposed so that the "(4)" between the auxiliary portion 32b of the connecting block 32 and the support block κ is downwardly moved. Thus, by adjusting the threading μ to the support block: the amount of screwing 4 can be transmitted through the support block 34 and the junction block 36 bonded to the support block, the height of the probe assembly body is reduced. The upper and lower directions are centimeters whose thickness is long in the left-right direction::=, in the central region thereof, by the bolts 54 of the joint block "the auxiliary portion _ = 2 to the lower portion of the support block" Combined with the support: Ghost: the lower side. The coupling block 36' has a lower section 3" in the lower front portion thereof. The screw member is screwed to the probe assembly 38 by penetrating the coupling block 3 from the lower portion to the lower portion. In the case of the probe assembly 31, as shown in FIG. 3, the probe assembly body is arranged such that the lower side of the slit rod 64 is disposed at intervals in the front and rear directions. The insulating rod member 66 extending from the front and rear reading 62 in the shape of the left and right cross-sections is configured to have the end portion having the circular shape 66 attached to the seat cover member 6 to be mounted on the seat cover 6 and the probe member The assembly 38 is screwed to the lower portion 36a of the seat in the state of the embedded joint block %, and is maintained at the lower side of the joint block % such as ": system: is a fin type (that is, a plate shape). Exploration, production of sexual materials, ceramics with electrical insulation, synthetic tree slits ^64 are &&; as 'the shape of the corner column with the length of the left and right 12 201243342. Each of the slit bars 64 is formed in a prismatic shape, and is attached to the lower surface of the front portion of the seat piece or the lower portion of the rear portion to form a shape g extending in the left-right direction. Each of the slit cups 64 has slits extending in the longitudinal direction (left-right direction) of the slit bar in the front-rear direction and open to the front, the rear, and the lower side of the slit bar. Each of the slits corresponds to the probe 62 and has a width dimension corresponding to the thickness dimension of the corresponding probe 62' to receive the lower portion 仏 and the lower portion 62b of the corresponding probe 62. The distance between the left and right directions of the plurality of probes α is maintained by the slits of the two slit bars 64. The two cover members 68 are disposed on both sides of the slit bar 64, and each cover member "is penetrated in the left and right direction of the seat piece 60 by the cover member 68' in a state where the end portion of the lever member 66 is received inside thereof. The plurality of screw members 69 at the end portions are detachably attached to the side surfaces of the seat sheet 60 in the left-right direction. Each of the probes 62' has a thickness direction in the left-right direction, and is disposed on the slit rod 64 to be the lower portion 62a and the rear. The upper part 6沘 protrudes from the seat piece (10) to the front and the side. Each of the probes 62 extends in the front-rear direction to extend the front and lower sides and the rear side. The 卩62b is fitted to the slits on the front side and the rear side, respectively. The slit of the rod 64. Each of the probes 62 has a rear needle tip 62c that is erected upward when it is fitted to the rear side slit. The probe assembly 38 is held in the joint block 36 while the needle tip 62e of each probe 62 is in contact with the wiring sheet 4'. The wiring sheet 4 shown in Fig. 4(A) is supported on the lower surface of the bonding block 36 in a state extending in the front-rear direction c 13 201243342, and is electrically connected to the probe assembly 38 at the front portion thereof. The wiring sheet 4'' has a first sheet-like member 70 attached to the lower surface of the joint block 36 and a plurality of first wirings 72 formed on the other surface of the i-th sheet-like member 7''. Each! The wiring 72 corresponds to the probe 62 of the probe assembly %, and the wiring sheet 40 has the same number of first wirings 72 as the plurality of probes 02. Further, the wiring sheet 40 has a guide film extending in the left-right direction at the front portion thereof. (guide film) 76 (see FIG. 5(B)), a part of the i-th wiring 72 is exposed to the lower side through a plurality of through holes 77 provided in the vertical direction of the conductive film 76. The needle tip 62c at the rear of each probe 62 is in contact with the corresponding first wiring 72 through the through hole 77. Accordingly, the wiring sheet 40 is electrically connected to the probe assembly 38. As shown in Fig. 4(B), the rear portion of the wiring sheet 4 is electrically connected to the connection circuit 42. The connection circuit 42 includes a plurality of connecting pieces 8A, and each of the connecting pieces includes a second sheet member 82 and a plurality of second wires 84 provided on one surface of the sheet member 82. Each of the second sheet members 82 is extended in the front-rear direction, and a plurality of the wires 8 4 are formed in the second sheet-like member 82 (see Fig. 8) so as to extend in the front-rear direction at intervals in the left-right direction. Each of the connecting sheets 80 is bonded to the wiring sheet 40 with a portion of the surface on which the second wiring 84 is formed, and the wiring sheet 40 is interposed therebetween with the insulating sheet 74 interposed therebetween. Each 2 g line 84 and 帛i wiring? ! Correspondingly, the metal member 7S that has passed through the insulating I and the green sheet 74 is coupled to the corresponding i-th wiring 72. Accordingly, the wiring sheet 40 is electrically connected to the connection circuit 42. Since the connection circuit 42 is electrically connected to the circuit of the test device 1 , the electrical signal from the circuit is transmitted through the second wiring 84 of each connection piece 8 of the connection circuit 42 and the first wiring 72 of the wiring piece 40 and The probe 62 of the probe assembly 38 is supplied to the subject 12 to be inspected. [Wiring sheet] As shown in Fig. 5, the wiring sheet 40 has a first sheet member 70 made of an insulating material such as polyimide, and a plurality of first wirings 72 formed in the sheet member 7A. Therefore, the wiring sheet 40 may be a so-called flexible printed circuit (FPC: Flexible Printed Circuits) or a tape automated bonding (TAB: Tape).
Automated Bonding)等具有可撓性之片狀印刷配線基板。配 線片40延伸於前後方向，圖5中雖省了其中間部分之顯 示，但實際上，該中間部分延伸於前後方向（參照圖2)。 多數個第1配線72 ’如圖5(B)所示，彼此略並行的延 伸於前後方向’具有延伸於前後方向之第1導電路區域 72A、從第1導電路區域72A之後端連續向後方向延伸之第 2導電路區域72B、從第2導電路區域72B之後端連續向後 方延伸之第3導電路區域72C、以及從第3導電路區域72C 之後端連續往後方向延伸之第4導電路區域72 D。 第1導電路區域72A前端部之第1配線72之間距，係 與在探針組裝體3 8之左右方向隔著間隔配置之多數個探針 62之間距對應。此外’第1及第3導電路區域72a及72C 係以越後方、配線彼此之間距越大之狀態，而第2及第4 導電路區域72B及72D則以配線彼此之間距維持一定之狀 態延伸於前後方向。 如此，第1配線72即以第i導電路區域72A前端部之 £ 15 201243342 間距’亦即相對探針62之間距’第4導電路區域72D之間 亦即第1配線72後部之間距較大之方式，形成於 片狀構件70。 μ又第1配線72，於圖示例中，係在第！片狀構件7〇 置16條，分成以其中4條為一組的四個組。各組 73係將4條第1配線72，從圖5(Β)中之下側起設為第i、 第2、第3及帛4導電路73a、73b、73c及⑶。 於配線片40之前端部’設有延伸於左右方向（圖5(B) 中從上側往下側)之導膜76。導膜76具有於其厚度方向貫 通、且於長邊方向隔著間隔配置之多數個貫通孔77。多數 個貫通孔77之間隔，對應於第1配線72前端部之間距， 各貫通孔77使對應之第1配線72之-部分露出。藉由探 針62之後部針尖62c接觸於此露出部分，使第】配線72 與探針62電氣連接。 又，於配線片40之後部，以覆蓋苐i配線72之第4 導電路區域72D之方式設有絶緣性片74。在設有絶緣性片 74之第4導電路區域72D，各第1、第2、第3及第4導電 路73a' 73b、73c及73d分別形成有第丨、第2、第3及第 4金屬構件78a ' 78b、78c及78d »絶緣性片74在對應各金 屬構件78之位置具有於厚度方向貫通之多數個貫通孔79, 於各貫通孔79内配置有金屬材料78(參照圖6及圖乃。 設在各第1導電路73a之第1金屬構件78a(圖示例中 為4個），係在左右方向排列成一列的狀態下彼此隔著相同 間隔配置，設在各第2、第3及第4導電路73 b、73 c及73 d 16 201243342 之第2金屬構件78b、第3金屬構件78c及第4金屬構件 78d ’亦是同樣的，在左右方向排列成一列的狀態下彼此隔 著相同間隔配置。 又’第1金屬構件78a係配置在第4導電路區域72D 之前部’第2、第3及第4金屬構件78b、78c及78d則分 別隔著間隔配置在第1、第2及第3金屬構件78a、78b及 78d之前後方向及左右方向（圖5 (B)中之右側及上側）。 據此’各金屬材料78，與將所有金屬材料78(圖示例中 為1 ό個）於左右方向配置成一列之情形相較，由於是將左右 方向彼此之間隔取得較寬來配置，因此在與配線片8 〇之連 接時’可防止相鄰金屬材料78之短路。於圖示例中’各導 電路73a〜73d雖係延伸至第4導電路區域72D之後部，但 只要至少延伸至金屬構件7 8之配置部分即可。 配線片40若係印刷配線基板的話，即可藉由習知印刷 配線基板之設計及製造方法自由地設計第1配線72之配 置、亦即可自由地設計配線圖案。因此，可如專利文獻1 之配線片般’將一組連接端子之位置以前後方向不同位 置、而左右方向相同位置之方式、亦即，於前後方向對齊 成一直線之方式配置。 然而’若為了如專利文獻1般使連接端子（亦即結合部） 之位置在則後方向對齊成一直線，而於配線圖案設置大幅 灣曲之角部的肖’於印刷配線基板之製作中，有可能在該 角部與相鄰配線短路之狀態下形成印刷配線，而使配線片 產生電路不良的情形。 c 17 201243342 因此，如本實施例般，藉由將第1配線配置成延伸為 略平行之直線狀之狀態，則與習知在印刷配線基板之製造 中具有配線大幅彎曲之角部的情形相較，可降低印刷配線 基板之不良率。 本實施例中，配線片40雖係FPC、TAB等，但亦可以 是剛性印刷基板（RPC : Rigid Printed Circuits)。若為此種基 板的話’則第1片狀構件70係以氧化鋁、酚醛紙、環氧樹 脂玻璃等之硬質材料作成。 又，本實施例中’雖係將16條第1配線72形成於第1 片狀構件70，但實際上，係形成更多的第j配線72。在此 種場合，只要調整組73之數量與屬於各組之導電路之數量 加以分組即可。又，連接電路42之配線片片數，可作成與 各組之導電路數量相同數量。 [配線片與連接片之連接] 如圖6〜8所示，連接電路42包含第1、第2、第3及 第4連接片80a、8〇b、8〇c及8〇d，各連接片肋具備以聚 醯亞胺般之絶緣性材料製作之第2片狀構件82、與形成在 第2片狀構件82之多數個配線84。第2連接片係於前後方 向長的片狀構件，此外，多數個配線84倍以彼此在左右方 向者間隔、延伸治· & 令於剛後方向之方式設於第2片狀構件 82(參照圖8)。 因此，連接片80可以是在第2片狀構件82形 數個配線84、亦即* > β 广如破稱為FPC、TAB或軟性扁平電湾 (FFC · Flexible Flat r u,、A flexible printed wiring board such as Automated Bonding). The wiring piece 40 extends in the front-rear direction, and although the display of the intermediate portion thereof is omitted in Fig. 5, actually, the intermediate portion extends in the front-rear direction (refer to Fig. 2). As shown in FIG. 5(B), the plurality of first wirings 72' extend in parallel with each other in the front-rear direction 'having a first conductive circuit region 72A extending in the front-rear direction and continuing rearward from the rear end of the first conductive circuit region 72A. The extended second conductive circuit region 72B, the third conductive circuit region 72C extending continuously from the rear end of the second conductive circuit region 72B, and the fourth conductive circuit extending continuously from the rear end of the third conductive circuit region 72C Area 72 D. The distance between the first wires 72 at the tip end portion of the first conductive circuit region 72A corresponds to the distance between the plurality of probes 62 arranged at intervals in the left-right direction of the probe assembly 38. Further, the first and third conductive circuit regions 72a and 72C are in a state in which the distance between the wirings is larger, and the second and fourth conductive circuit regions 72B and 72D are extended in a state in which the distance between the wirings is maintained constant. In the front and rear direction. In this manner, the first wiring 72 has a larger distance between the front end portion of the ith conductive circuit region 72A and the second portion of the first wiring 72, that is, the distance between the probes 62 and the fourth probe circuit region 72D. The form is formed on the sheet member 70. μ and the first wiring 72, in the example of the figure, are in the first! The sheet member 7 is divided into 16 pieces and divided into four groups of four of them. Each of the groups 73 has four first wirings 72, which are the i-th, second, third, and fourth guiding circuits 73a, 73b, 73c, and (3) from the lower side in Fig. 5 (Β). The front end portion of the wiring sheet 40 is provided with a conductive film 76 extending in the left-right direction (from the upper side to the lower side in Fig. 5(B)). The conductive film 76 has a plurality of through holes 77 that are continuous in the thickness direction and are arranged at intervals in the longitudinal direction. The interval between the plurality of through holes 77 corresponds to the distance between the distal end portions of the first wiring 72, and each of the through holes 77 exposes a portion corresponding to the first wiring 72. The first wiring 72 is electrically connected to the probe 62 by the needle tip 62c contacting the exposed portion at the rear of the probe 62. Further, an insulating sheet 74 is provided on the rear portion of the wiring sheet 40 so as to cover the fourth conductive circuit region 72D of the 苐i wiring 72. In the fourth conductive circuit region 72D in which the insulating sheet 74 is provided, the first, second, third, and fourth conductive circuits 73a' 73b, 73c, and 73d are formed with the second, second, third, and fourth, respectively. The metal members 78a' 78b, 78c, and 78d » the insulating sheet 74 has a plurality of through holes 79 penetrating in the thickness direction at positions corresponding to the respective metal members 78, and the metal material 78 is disposed in each of the through holes 79 (see FIG. 6 and In the first metal member 78a (four in the illustrated example) of each of the first conductive circuits 73a, the second metal members 78a (four in the illustrated example) are arranged at the same interval in a state of being arranged in a row in the left-right direction, and are provided in each of the second. The second metal member 78b, the third metal member 78c, and the fourth metal member 78d' of the third and fourth conductive circuits 73b, 73c, and 73d16 201243342 are also the same, and are arranged in a row in the left-right direction. The first metal member 78a is disposed in the front portion of the fourth conductive circuit region 72D. The second, third, and fourth metal members 78b, 78c, and 78d are disposed at intervals of the first. The second and third metal members 78a, 78b, and 78d are in the front-rear direction and the left-right direction (the right side and the upper side in FIG. 5(B)). According to this, each of the metal materials 78 is arranged such that all the metal materials 78 (one in the illustrated example) are arranged in a row in the left-right direction, because the distance between the left and right directions is wide. Therefore, when the connection to the wiring sheet 8 is connected, the short circuit of the adjacent metal material 78 can be prevented. In the illustrated example, the respective conductive circuits 73a to 73d extend to the rear of the fourth conductive circuit region 72D, but at least It is sufficient to extend the arrangement of the metal members 78. When the wiring sheet 40 is printed on the wiring board, the arrangement of the first wiring 72 can be freely designed by the design and manufacturing method of the conventional printed wiring board. Therefore, the wiring pattern can be designed in such a manner that the positions of a set of connection terminals are different in the front-rear direction and the same position in the left-right direction, that is, in the front-rear direction, in a straight line, as in the wiring sheet of Patent Document 1. However, if the position of the connection terminal (that is, the joint portion) is aligned in the rear direction as in the case of Patent Document 1, the wiring pattern is provided at the corner of the large bay curve. In the manufacture of the printed wiring board, there is a possibility that the printed wiring is formed in a state where the corner portion is short-circuited with the adjacent wiring, and the wiring sheet is defective in circuit. c 17 201243342 Therefore, as in the present embodiment, When the first wiring is arranged to extend in a substantially parallel linear shape, the defective ratio of the printed wiring board can be reduced as compared with the case where the corner portion in which the wiring is largely bent in the manufacture of the printed wiring board is conventionally known. In the embodiment, the wiring sheet 40 is FPC, TAB, or the like, but may be a rigid printed circuit board (RPC: Rigid Printed Circuits). In the case of such a substrate, the first sheet member 70 is made of a hard material such as alumina, phenolic paper or epoxy resin. Further, in the present embodiment, the 16 first wirings 72 are formed in the first sheet member 70, but actually, more j-th wirings 72 are formed. In this case, the number of adjustment groups 73 and the number of the conduction circuits belonging to each group may be grouped. Further, the number of wiring pieces of the connection circuit 42 can be made the same as the number of the number of conduction circuits of each group. [Connection of Wiring Sheet and Connecting Sheet] As shown in FIGS. 6 to 8, the connecting circuit 42 includes first, second, third, and fourth connecting pieces 80a, 8〇b, 8〇c, and 8〇d, each of which is connected. The ribs include a second sheet member 82 made of a polyimide-like insulating material and a plurality of wires 84 formed in the second sheet member 82. The second connecting piece is a sheet-like member that is long in the front-rear direction, and a plurality of wires 84 are provided in the second sheet-like member 82 so as to be spaced apart from each other in the left-right direction, and are extended in the rear direction. Refer to Figure 8). Therefore, the connecting piece 80 may have a plurality of wirings 84 in the second sheet member 82, that is, * > β is widely known as FPC, TAB or soft flat electric bay (FFC · Flexible Flat r u,
Cable)等之具有可撓性之片狀配線巧 18 201243342 路。連接片80使用FFC之情形時，FFC係將連接於配線片 4〇之連接邛之被覆之一面除去後使用。因此，FFC之平板 1導線即作用為帛2配線84，而被覆之另—面則作用為第 2片狀構件。 ” 各連接片80 ’係使設置第2配線84之面之一部分對向 於配線片40。於配線片4〇與連接片8〇之間，存在以覆蓋 第1導電路之方式設於配線片40之絶緣性片74。藉由此絶 緣！·生片74可防止第1配線72與不和此對應之第2配線 84(例如，與第！配線72對應之第2配線料相鄰之第2配 線8 4 )間之短路。 絶緣性片74亦可設於連接片80。不過，將複數個連接 片8〇連接於一片配線片40之情形時，若於配線片40設置 m生片74的话，僅需將—片絶緣性片74設於-片配線 片40即可因此與在複數個連接片80之各個設置絶緣性 片74之情形相較，可更價廉的製作探針裝置26。 如圖6所不，在連接連接片80前之配線片4〇，於設置 第1配線72之面’形成有具貫通孔79之絶緣性片74。絶 ，彖f生片74可以疋聚醯亞胺片等之絶緣層，亦可以是將聚醯 亞胺墨水以印刷技術加以塗布之絶緣層。於第i配線^之 對應貫通孔79之位置，金屬構件78形成為突塊狀。金屬 構件78之突塊之高度尺寸，可大於絶緣性片74之厚度尺 寸。 如圖7所示，當將連接片8〇連接於配線片4〇時，金 屬構件78即被壓潰而填滿於貫通孔79之狀態。透過此種 c 19 201243342 狀態之金屬構件78將第1配線72與第2配線84加以結合。 金屬構件78為熱熔融性之金屬構件，在將配線片4〇與連 接片80加以貼合之狀態下經由回流焊（refl〇w)步驟等之加 熱製程，即能將第i及第2配線72及Μ加以結合。〇 由於係在絶緣性片74之貫通孔79中填滿金屬構件78 之狀態下將配線片40與連接片80加以結合，因此，本發 明中，為了將配線片40之第1配線72與連接片8〇之第2 配線84加以結合，無需為為了將配線片4〇或連接片μ壓 入絶緣性片74之貫通孔79而使其彎曲。 承上所述，由於不會產生使配線片4〇或連接片8〇彎 曲而使第1配線72與第2配線84分離之力，因此可將前 述第1及第2配線確實的加以連接。此外，藉由將金屬= 件78之份量與貫通孔79之容量作成相同程度，即能防止 金屬構件78之飛散造成配線間之短路。 圖6及圖7中，雖係針對一處貫通孔79與金屬構件78 做了説明，但實際上，多數個貫通孔79及與該等對應之多 數個金屬構件78分別設在絶緣性片74及配線片40之多數 處，邊等多數處之金屬構件78經由回流焊製程將多數個第 1配線72與多數個第2配線84同時加以結合。 如圖8所示’第卜第2、第3及第4連接片8〇a、8〇b、 8〇e及8〇d’分別與第1、帛2、帛3及第4金屬構件78a、 78b 78c及78d。此外，各連接片之四條第2配線84彼此 之間隔’係與左右方向（配線片4〇刃寬度方向）排列成一列 之四個金屬構件78彼此之間隔相同。 20 201243342 由於係將四個金屬構件78配置成於左右方向排列成一 列’因此藉由在其列方向使連接片8〇之寬度方向對應，連 接片80即在以本身之長邊方向為配線片4〇 狀態下連接於配線片40。 ^之 本實施例中’各連接片8 0包含同-形狀之第2片狀構 件82、及與同—形狀之配線圖案設於第2片狀構件82之第 2配線84，為相同形狀。帛2片狀構件82形成為前後方向 之長帶狀f 2配線具備越往前方越往左方(圖8中越往左 側、即越傾斜向下側)傾斜之狀態之第i配線區域“A、以 及從第1配線區域84A之後端部於後方向（圖8中之右側） 直線狀延伸之第2配線區域8 4 B。 ㈣月中，第卜第2、第3及第4金屬構件78a、 78b 78c及78d，分別被配置成於前後方向（圖8中從左側 往右側）及左右方向（圖8中從下側往上側）位置錯開之狀 /L、又帛2及第3金屬材料78b及78c之前後方向間隔以 及第3及第4金屬材料78e及則之前後方向間隔，分別較 第1及第2金屬材料78a*湯之前後方向間隔以及第2 及第3金屬材料78b及78c之前後方向間隔來得大。 進步的’相鄰第1金屬構件78a彼此之間隔、相鄰第 2金屬構件78b彼此之間隔、相鄰第3金屬構件％彼此之 間隔、相鄰第4金屬構件78d彼此之間隔、以及連接片 之相鄰第2配線84彼此之間隔，皆分別相同。 ^上述方式製作之配線# 4〇與連接# 之連接中， 只要將傾斜之第丨酉己線區域84A之任—部分結合於配線片 c 21 201243342 40之金屬構件78的話，各連接片8〇即能藉由其前後方向 位置之調整據以調整連接片8〇之左右方向位置。例如，對 配線片40將連接片8Q在前方（圖8中之左側）加以結合的 話，連接片80即往左方（圖8中之下側）移動而被結合: 承上所述，藉調整連接片80之前後方向位置，即能在 使複數個連接片80之左右方向位置相同而重疊之狀態下江 其連接於配線片4〇。若能以左右方向位於同一位置之方式 =連接片80連接於配線片的話，連接片8〇之重疊即變^ 容易，探針裝置之製作亦容易。此外，將連接片8〇作成為 同一形狀即能使連接片8〇作成容易且更為價廉。 又，第1、第2及第3連接片80a、8〇b及80c之前端 部分別配置在較第2、第3及第4連接片80b、，及8二 之前端部前方處，第1及第2連接片80a及80b之前端部之 間隔較第2及第3連接片80b及80c之前端部之間隔小，第 2及第3連接片8〇c及8〇d之前端部之間隔較第3及第4連 接片80c及80d之前端部之間隔小β 連接片80之第2配線84，可不設置傾斜之第i配線區 域84A而僅由向前後方向延伸之第2配線區域84B形成。 不過，此種連接片8〇,無法藉由變更前後方向之位置來調 整左右方向之位置。 [連接電路與中繼基板之連接] 如圖2及圖7所示’連接電路42將配線片4〇與中繼 基板28加以電氣連接。連接電路係藉由安裝在探針座 24下面之電瘦保持具89被支承於探針座24。 22 201243342 連接電路42在第b第2、第3及第4連接片80a、80b、 8 0c及80d之刖部結合於配線片4〇，貫通探針座μ之貫通 孔24&’在5亥等之後部連接於中繼基板28。連接片80a、80b、 8 0c及80d刀別藉由如連接器般之連接部、9〇b、9〇c及 90d連接於中繼基板a。 第4連接片8〇d對應第4金屬構件78d結合在配線片 4〇之後部、帛3連接片8〇c對應第3金屬構件78。重疊結 合在第4連接片8〇d之上方、第2連接片_對應第2金 屬構件78b重疊結合在第3連接片_之上方、而第丄連接 片80a則對應第丨金屬構件78a重疊結合在第2連接片8扑 之上方。 又，連接片80與中繼基板28之連接部9〇，係以第2 連接部9Gb配置在第丨連接部9Ga上側、帛3連接部術 配置在第2連接部9Ge上側、第4連接部9()d配置在第3 連接部9〇C上側之方式連接於中繼基板处。以藉由此方式 將連接片80連接於配線片4〇及中繼基板28，即能在不使 連接片80錯開於左右方向、亦即於前後方向重疊配置複數 個連接片’據以將連接片80連接於中繼基板28。 將複數個連接片80重疊配置的話，與將連接片8〇於 左右方向錯開配置之情形相較，可縮短連接片8〇之長度尺 寸。因此，連接片80之製作變得容易，且探針裝置26之 製作更為價廉。 [配線片之其他實施例] 如圖9所示，配線片140係在先前説明之配線片4〇之Cable) and other flexible sheet-like wiring 18 201243342 road. In the case where the connecting sheet 80 is FFC, the FFC is used by removing one of the covers of the connecting ridges connected to the wiring sheets. Therefore, the flat panel 1 wire of the FFC functions as the 帛2 wiring 84, and the other surface of the coating acts as the second sheet member. Each of the connecting pieces 80' has a portion facing the second wiring 84 facing the wiring sheet 40. The wiring sheet 4A and the connecting sheet 8A are provided on the wiring sheet so as to cover the first conductive circuit. Insulation sheet 74 of 40. By insulating the green sheet 74, it is possible to prevent the first wiring 72 from being adjacent to the second wiring 84 (for example, the second wiring material corresponding to the second wiring) 2 Short circuit between wirings 8 4 ) The insulating sheet 74 may be provided on the connecting sheet 80. However, when a plurality of connecting sheets 8 are connected to one of the wiring sheets 40, if the wiring sheet 40 is provided with the m green sheet 74 In this case, it is only necessary to provide the sheet-like insulating sheet 74 to the sheet-like wiring sheet 40. Therefore, compared with the case where the insulating sheet 74 is provided for each of the plurality of connecting sheets 80, the probe device 26 can be manufactured at a lower cost. As shown in Fig. 6, the wiring sheet 4A before the connection piece 80 is connected, and the insulating sheet 74 having the through hole 79 is formed on the surface on which the first wiring 72 is provided. The insulating layer of the yttrium imide sheet or the like may also be an insulating layer which is coated with a polyimide film by a printing technique. The metal member 78 is formed in a protruding shape at the position of the through hole 79. The height of the projection of the metal member 78 may be larger than the thickness of the insulating sheet 74. As shown in Fig. 7, when the connecting piece 8 is connected to When the wiring sheet 4 is wound, the metal member 78 is crushed and filled in the through hole 79. The metal member 78 in the state of c 19 201243342 is bonded to the first wiring 72 and the second wiring 84. In the state in which the wiring member 4 is bonded to the connecting sheet 80 in a state in which the wiring member 4 is bonded to the connecting sheet 80, the i-th and second wirings 72 and Μ can be formed by a heating process such as a reflow process. In the present invention, in order to bond the first wiring of the wiring sheet 40, the wiring sheet 40 and the connecting sheet 80 are joined in a state in which the metal member 78 is filled in the through hole 79 of the insulating sheet 74. 72 is bonded to the second wiring 84 of the connecting piece 8〇, and it is not necessary to bend the wiring piece 4〇 or the connecting piece μ into the through hole 79 of the insulating sheet 74. The wiring piece 4〇 or the connecting piece 8〇 is bent to make the first wiring 72 and Since the force of the second wiring 84 is separated, the first and second wirings can be reliably connected. Further, the metal member 78 can be prevented by making the amount of the metal member 78 equal to the capacity of the through hole 79. The flying gap causes a short circuit between the wirings. In Fig. 6 and Fig. 7, although one through hole 79 and the metal member 78 are described, in actuality, a plurality of through holes 79 and a plurality of metal members corresponding thereto are formed. Each of the insulating sheets 74 and the wiring sheets 40 is provided at a plurality of places, and a plurality of first members 72 and a plurality of second wirings 84 are simultaneously joined via a reflow process. As shown in FIG. 8, 'the second, third, and fourth connecting pieces 8〇a, 8〇b, 8〇e, and 8〇d' are respectively associated with the first, second, third, and fourth metal members 78a. , 78b 78c and 78d. Further, the distance between the four second wires 84 of the respective connecting pieces is the same as the interval between the four metal members 78 arranged in a line in the left-right direction (the width direction of the wiring sheet 4). 20 201243342 Since the four metal members 78 are arranged in a row in the left-right direction, the connecting piece 80 is in the longitudinal direction of itself by the width direction of the connecting piece 8〇 in the column direction. The wiring sheet 40 is connected in a state of 4 turns. In the present embodiment, each of the connecting pieces 80 includes the same shape and the second sheet member 82, and the wiring pattern of the same shape is provided in the second wiring 84 of the second sheet member 82, and has the same shape. The 片2 sheet-like member 82 is formed in a long strip-shaped f 2 wiring in the front-rear direction, and has an ith wiring area "A" which is inclined to the left side (the left side in FIG. 8 is inclined to the lower side) And a second wiring region 8 4 B extending linearly from the rear end portion of the first wiring region 84A in the rear direction (the right side in FIG. 8). (D) Mid-month, the second, third, and fourth metal members 78a 78b, 78c, and 78d are respectively arranged in the front-rear direction (from the left side to the right side in FIG. 8) and the left-right direction (from the lower side to the upper side in FIG. 8), and are shifted in the shape of /L, 帛2, and the third metal material. The front and rear direction intervals of 78b and 78c and the third and fourth metal materials 78e and the front and rear direction intervals are respectively smaller than the first and second metal materials 78a* before and after the soup and the second and third metal materials 78b and 78c. The distance between the adjacent first metal members 78a is increased, the distance between adjacent second metal members 78b is spaced apart from each other, the distance between adjacent third metal members is different from each other, and the adjacent fourth metal member 78d is spaced apart. The distance between each other and the interval between adjacent second wires 84 of the connecting piece are The wiring is the same as the metal member 78 of the wiring piece c 21 201243342 40, and the connection is made in the connection of the wiring #4〇 and the connection #4 in the above-mentioned manner, as long as the portion of the inclined third wire region 84A is bonded to the metal member 78 of the wiring sheet c 21 201243342 40 The sheet 8 can adjust the position of the connecting piece 8〇 in the left-right direction by adjusting the position in the front-rear direction. For example, if the connecting piece 8Q is joined to the front side (the left side in FIG. 8) of the wiring piece 40, the connecting piece 80 is moved to the left (lower side in FIG. 8) and combined: as described above, by adjusting the front and rear direction positions of the connecting piece 80, the positions of the plurality of connecting pieces 80 in the left-right direction can be overlapped. In the state of the river, it is connected to the wiring sheet 4. If the connecting piece 80 is connected to the wiring sheet in the left-right direction, the overlap of the connecting sheet 8 is easy, and the probe device can be easily manufactured. Further, by forming the connecting piece 8 into the same shape, the connecting piece 8 can be made easy and cheaper. Further, the front ends of the first, second, and third connecting pieces 80a, 8〇b, and 80c are respectively disposed. In the second, third and fourth connecting pieces The front end portions of the first and second connecting pieces 80a and 80b are smaller than the front end portions of the second and third connecting pieces 80b and 80c, and the second and third portions are smaller than the front end portions of the second and third connecting pieces 80b and 80c. The distance between the ends of the connecting pieces 8〇c and 8〇d is smaller than the interval between the front ends of the third and fourth connecting pieces 80c and 80d. The second wiring 84 of the connecting piece 80 is not provided with the inclined i-th wiring area 84A. However, it is formed only by the second wiring region 84B extending in the front-rear direction. However, such a connecting piece 8〇 cannot adjust the position in the left-right direction by changing the position in the front-rear direction. [Connection of the connection circuit and the relay substrate] The connecting circuit 42 shown in FIGS. 2 and 7 electrically connects the wiring sheet 4A and the relay substrate 28. The connecting circuit is supported by the probe holder 24 by an electric slim holder 89 mounted under the probe holder 24. 22 201243342 The connection circuit 42 is bonded to the wiring piece 4〇 at the crotch portion of the bth second, third, and fourth connecting pieces 80a, 80b, 80c, and 80d, and penetrates the through hole 24& of the probe holder μ at 5 The rear portion is connected to the relay substrate 28. The connecting pieces 80a, 80b, 80c, and 80d are connected to the relay substrate a by connectors such as connectors, 9〇b, 9〇c, and 90d. The fourth connecting piece 8〇d corresponds to the fourth metal member 78d to be coupled to the rear portion of the wiring sheet 4〇, and the 帛3 connecting piece 8〇c corresponds to the third metal member 78. The second connection piece _ corresponds to the upper side of the fourth connection piece 8〇d, the second connection piece_corresponding to the second metal member 78b is overlapped and joined to the third connection piece_, and the second connection piece 80a is overlapped with the second metal piece 78a. It is above the second connecting piece 8 . Moreover, the connection portion 9 of the connection piece 80 and the relay substrate 28 is disposed on the upper side of the second connection portion 9Ga by the second connection portion 9Gb, and the upper portion of the second connection portion 9Ge and the fourth connection portion are disposed on the second connection portion 9G. 9()d is connected to the relay substrate so as to be disposed on the upper side of the third connection portion 9A. By connecting the connecting piece 80 to the wiring sheet 4 and the relay substrate 28 in this manner, it is possible to arrange a plurality of connecting pieces without overlapping the connecting piece 80 in the left-right direction, that is, in the front-rear direction. The sheet 80 is connected to the relay substrate 28. When a plurality of connecting pieces 80 are arranged in an overlapping manner, the length of the connecting piece 8 can be shortened as compared with the case where the connecting pieces 8 are arranged in the left-right direction. Therefore, the manufacture of the connecting piece 80 becomes easy, and the probe device 26 is made cheaper. [Other Embodiments of Wiring Sheet] As shown in Fig. 9, the wiring sheet 140 is attached to the wiring sheet 4 previously described.
S 23 201243342 導電路區域72A之前後方向中間區域，將配線片40於寬度 方向加以切斷者。於配線片14〇之前端部設有導膜1 76，此 導膜1 76具有與該前端部之第1配線72之間距對應之貫通 孔 177。 以上述方式製作配線片14〇的話，由於第1導電路區 域72A係越往後方間距越大之狀態，因此可將配線片1 之第1配線72前端部之間距，作成較配線片40之第1配 線72前端部之間距大。 因此’在探針組裝體38之探針62間距變大時（亦即， 將被檢查體12更換為電極丨4之間距較大者時），為適合其 間距’可藉由變更配線片40之切斷部據以調整第丨配線72 之間距。 一般而言，於FPC、TAB等印刷配線基板之製造中， 作成相同形狀之複數個基板是容易的，且相同形狀之複數 個基板之製作成本較形狀不同之複數個基板之製作成本便 宜。因此’若能使用相同形狀之配線片製作探針間距不同 之多數個探針裝置的話’則與使用形狀不同之配線片來製 作多數個探針裝置之情形相較，能更價廉的製作探針裝置。 配線片140雖係在配線片40之導電路區域72A之前後 方向中間區域被切斷，但在導電路區域72 A之後端切斷時， 第1配線72之間距為最大。此外，亦可不切斷配線片4〇， 而在導電路區域72A之前後方向中間區域折返配線片4〇。 如圖10所示，於配線片240，在第1片狀構件7〇之全 面設有絶緣性片274。以此方式製作的話，由於第i配線 24 201243342 72之全體受到覆蓋，因此能防止因雜質附著在第1配線72 間而導致配線間之短路。 進一步的’藉由在絶緣性片274之前端部設置對應第1 配線72之間距之貫通孔277，可使絶緣性片274作用為導 膜。據此’無需分別形成絶緣性片274與導膜，因此配線 片之製作將變得容易。 [探針裝置之其他實施例] 如圖1 1所示，各探針裝置326，包含載置且連結於探 針座24之連結塊332、支承於連結塊332之支承塊334、 結合於支承塊334之結合塊336、支承於結合塊336之探針 塊338、將探針塊338電氣連接於中繼基板28之配線片 3 40、以及連接電路342。 探針裝置326之連結塊332及支承塊334,分別具有與 探針裝置26之連結塊32及支承塊34相同形狀及結合關 係。結合塊336係以上下方向為厚度方向、於左右方向長 之板狀構件，於其中央區域被結合於支承塊334之下側。 結合塊3 36與支承塊334係藉由將支承塊334從上方貫通 至下方螺合於結合塊336之螺栓354加以結合。 探針塊338藉由將結合塊336從上方貫通至下方螺合 於探針塊3 3 8之螺检3 5 6 ’結合於結合塊3 3 6。探針塊3 3 8 於其前部具有越前方、越往下方傾斜之狀態之板狀的配線 片支承體338a。配線片340被支承於探針塊338之下面及 配線片支承體338a之下面。 配線片340具有可撓性之片狀構件37〇、設於片狀構件S 23 201243342 The lead circuit region 72A is cut in the width direction from the intermediate portion in the front and rear directions. A guide film 1 76 is provided at an end portion of the wiring sheet 14A, and the conductive film 176 has a through hole 177 corresponding to the distance between the first wirings 72 of the front end portion. When the wiring sheet 14 is formed as described above, the distance between the front end portions of the first wirings 72 of the wiring sheet 1 can be made larger than that of the wiring sheets 40. 1 The distance between the front ends of the wires 72 is large. Therefore, when the pitch of the probe 62 of the probe assembly 38 becomes large (that is, when the subject 12 is replaced with a larger distance between the electrodes 丨4), the wiring piece 40 can be changed by being suitable for the pitch. The cut portion adjusts the distance between the second wires 72 accordingly. In general, in the manufacture of a printed wiring board such as FPC or TAB, it is easy to form a plurality of substrates having the same shape, and a plurality of substrates having the same shape can be manufactured at a lower cost than a plurality of substrates having different shapes. Therefore, if a plurality of probe devices having different probe pitches can be fabricated using the same shape of the wiring sheet, it is cheaper to make a probe than when a plurality of probe devices having different shapes are used to fabricate a plurality of probe devices. Needle device. The wiring sheet 140 is cut in the intermediate direction before and after the conductive circuit region 72A of the wiring sheet 40. However, when the rear end of the conductive circuit region 72A is cut, the distance between the first wirings 72 is maximized. Further, the wiring sheet 4A may be folded back without changing the wiring sheet 4A in the intermediate portion in the front and rear directions of the conductive circuit region 72A. As shown in Fig. 10, in the wiring sheet 240, an insulating sheet 274 is provided on the entire surface of the first sheet member 7A. In this way, since the entire i-th wiring 24 201243342 72 is covered, it is possible to prevent a short circuit between the wirings due to adhesion of impurities between the first wirings 72. Further, by providing the through holes 277 corresponding to the distance between the first wirings 72 at the ends of the insulating sheets 274, the insulating sheet 274 acts as a conductive film. According to this, it is not necessary to separately form the insulating sheet 274 and the conductive film, so that the wiring sheet can be easily produced. [Other Embodiments of Probe Device] As shown in Fig. 11, each probe device 326 includes a connection block 332 that is placed and coupled to the probe holder 24, a support block 334 that is supported by the connection block 332, and is coupled to the support. The bonding block 336 of the block 334, the probe block 338 supported by the bonding block 336, the wiring piece 340 electrically connecting the probe block 338 to the relay substrate 28, and the connection circuit 342. The connecting block 332 and the supporting block 334 of the probe device 326 have the same shape and bonding relationship as the connecting block 32 and the supporting block 34 of the probe device 26. The joint block 336 is a plate-like member having a thickness direction in the lower direction and a length in the left-right direction, and is bonded to the lower side of the support block 334 at a central portion thereof. The coupling block 3 36 and the support block 334 are joined by a bolt 354 that penetrates the support block 334 from above to below the coupling block 336. The probe block 338 is bonded to the bonding block 3 36 by threading the bonding block 336 from above to the screwing 3 5 6 ' screwed to the probe block 3 3 8 . The probe block 3 3 8 has a plate-shaped wiring piece support body 338a which is inclined forward in the front portion and is inclined downward. The wiring sheet 340 is supported under the probe block 338 and under the wiring sheet support 338a. The wiring sheet 340 has a flexible sheet member 37〇 and is provided on the sheet member.
S 25 201243342 370之多數個配線372、以及設於各第1配線372前端部之 接觸電極377(參照圖12)。連接電路342具備與探針裂置 26之連接電路42相同之複數個連接片80。 配線片340，以第1配線372與各連接片80之第2配 線84結合之方式，於其後部電氣連接於連接電路342。由 於連接電路342係電氣連接於測試裝置1 〇之電路，因此， 來自該電路之電氣訊號透過各連接片8〇之第2配線84、配 線片340之第1配線372及接觸電極377被供應至被檢查 體 12。 — 如圖12所示，配線片340，可與配線片4〇同樣的是如 FPC或TAB帶般之具有可撓性的片狀配線電路。配線片 延伸於前後方向，於圖12中雖省略其中央部，但實際上， 該中央部係於前後方向延伸為直線狀（參照圖丨丨）。 第1配線372於其前端部具備向下方突出之接觸電極 377。接觸電極377之間距 '亦即第i配線m前端部之間 距係與被檢查體12之電極14之間距對應。接觸電極3” 與第1配線372之前部係作用為與被檢查體12之電極μ 接觸之探針。 於配線>1 340之後部，與探針裝置26之配線片4〇同 樣的，以覆蓋第"己線72之方式設有具貫通於上下方向之 通孔79(參照圖6及圖7)之絶緣性片74。於絶緣 性片74之多數個貫通孔79中設有金屬構件78， 置與探針裝置26之配線片4〇相同。 連接電路342之連接片8〇,透過絶緣性片74與配線片 26 201243342 140對向’第1配線372與第2配線84透過金屬構件78結 合’據以電氣連接於配線片34〇。 產業上之可利用性 本發明，並不限於上述實施例，只要不脫離申請專利 範圍所記載之要旨，當然可以有各種變更。 【圖式簡單說明】 圖1係顯示具備本發明之探針裝置及探針單元之測試 裝置的俯視圖。 圖2係顯示本發明之探針裝置之第1實施例的側視圖。 圖3係將圖2中探針組裝體之近旁加以放大顯示的側 視圖。 圖4係放大顯示圖2中之4A及4B之部分的側視圖， 圖4(A)及4(B)係分別顯示圖2之4A及4B之部分。 圖5係顯示用於圖2中之探針裝置之配線片的圖，圖 5(A)係顯示配線片之側視圖、圖5(B)則顯示配線片之俯視 圖。 圖6係顯示圖2中之探針裝置之配線片與連接片連接 前之狀態的側剖面圓，圖6(A)顯示連接區域全體、圖6(b) 則係放大顯示圖6(A)之6B部分放大剖面圖。 圖7係顯示圖2中之探針裝置之配線片與連接片連接 後之狀態的側剖面圖，圖7(A)顯示連接區域全體、圖7(B) 則係放大顯示圖7(A)之7B部分的放大剖面圖。 圖8係顯示圖2中之探針裝置之配線片與複數個連接A plurality of wirings 372 of S 25 201243342 370 and contact electrodes 377 provided at the front end portions of the respective first wirings 372 (see Fig. 12). The connection circuit 342 is provided with a plurality of connection pieces 80 identical to the connection circuit 42 of the probe split 26. The wiring sheet 340 is electrically connected to the connection circuit 342 at the rear portion so that the first wiring 372 is coupled to the second wiring 84 of each of the connection sheets 80. Since the connection circuit 342 is electrically connected to the circuit of the test apparatus 1, the electric signal from the circuit is supplied to the second wiring 84 of each of the connection pieces 8 and the first wiring 372 and the contact electrode 377 of the wiring sheet 340 to be supplied to The body 12 to be inspected. — As shown in Fig. 12, the wiring sheet 340 can be a flexible chip wiring circuit like the FPC or TAB tape, similarly to the wiring sheet 4〇. The wiring piece extends in the front-rear direction, and the center portion is omitted in Fig. 12, but actually, the central portion extends linearly in the front-rear direction (see Fig. 。). The first wiring 372 has a contact electrode 377 that protrudes downward at the front end portion thereof. The distance between the contact electrodes 377 corresponds to the distance between the tip end portions of the i-th wiring m and the electrodes 14 of the test object 12. The contact electrode 3" and the front portion of the first wiring 372 function as probes that are in contact with the electrode μ of the test object 12. The rear portion of the wiring > 1 340 is the same as the wiring piece 4 of the probe device 26, An insulating sheet 74 having a through hole 79 (see FIGS. 6 and 7) penetrating in the vertical direction is provided to cover the first line. The metal member is provided in a plurality of through holes 79 of the insulating sheet 74. 78 is the same as the wiring piece 4A of the probe device 26. The connecting piece 8 of the connecting circuit 342 passes through the insulating sheet 74 and the wiring piece 26 201243342 140, and the first wiring 372 and the second wiring 84 are transmitted through the metal member. In the present invention, the present invention is not limited to the above-described embodiments, and various changes can of course be made without departing from the gist of the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a test apparatus including a probe device and a probe unit of the present invention. Fig. 2 is a side view showing a first embodiment of the probe device of the present invention. Fig. 3 is a view of Fig. 2. Side of the needle assembly that is magnified Figure 4 is a side elevational view showing portions of 4A and 4B of Figure 2, and Figures 4(A) and 4(B) show portions of Figures 4A and 4B, respectively. Figure 5 is for use in Figure 2 Fig. 5(A) shows a side view of the wiring piece, and Fig. 5(B) shows a plan view of the wiring piece. Fig. 6 shows a wiring piece of the probe device of Fig. 2. Fig. 6(A) shows the entire cross-sectional area before the connection piece is connected, and Fig. 6(b) shows an enlarged cross-sectional view of part 6B of Fig. 6(A). Fig. 7 shows Fig. 2 A side cross-sectional view showing a state in which the wiring piece of the probe device is connected to the connecting piece, FIG. 7(A) shows the entire connecting region, and FIG. 7(B) shows an enlarged enlarged cross-sectional view of the portion 7B of FIG. 7(A). Figure 8 is a diagram showing the wiring piece of the probe device of Figure 2 and a plurality of connections
S 27 201243342 片之連接關係的圖。 2實施例之配線 9(B)則顯示配線 圖9係顯示用於本發明探針裝置之第 片的圖，圖9(A)顯示配線片的側視圖、圖 片的俯視圖。 1〇係顯示用於本發明探針裝置之第3實施例之配線 的圖10(A)顯示配線片的側視圖、圖i〇(b)則顯示配 片的俯視圖 圖11係顯71^本發明^粟名 + gj* &松 鉍針裝置之第4實施例的側視圖。 圖Π係顯示用於圖U中所示探針裝置之配線“ ，圖12⑷顯示配線片的側視圖、圖12⑻則顯示配線^ 的俯視圖。 被檢查體 被檢查體之電極 探針座 探針裝置 配線片 連接電路 探針 探針之後部針尖 第1片狀構件 第1配線 第1導電路區域 【主要元件代表符號】 12 14 24 26 ' 326 40 ' 140 ' 240 ' 340 42 > 342 62 62cS 27 201243342 Diagram of the connection relationship of slices. Fig. 9 shows a wiring for the probe device of the present invention, and Fig. 9(A) shows a side view of the wiring sheet and a plan view of the image. Fig. 10 (A) showing a wiring used in the third embodiment of the probe device of the present invention, showing a side view of the wiring sheet, and Fig. i (b) showing a plan view of the patch. Invention 4: A side view of a fourth embodiment of a gemstone + gj* & The figure shows the wiring for the probe device shown in Fig. U, Fig. 12 (4) shows a side view of the wiring sheet, and Fig. 12 (8) shows a plan view of the wiring ^. The electrode probe holder probe device of the object to be inspected Wiring sheet connection circuit probe probe rear needle tip first sheet member first wiring first conductor circuit area [main component representative symbol] 12 14 24 26 ' 326 40 ' 140 ' 240 ' 340 42 > 342 62 62c
70 、 170 、 270 ' 370 72 、 172 、 272 、 372 72A 28 201243342 73a 第 1導電路 73b 第 2導電路 73c 第 3導電路 73d 第 4導電路 74 、 274 絶緣性片 76 導膜 77 > 177 ' 277 導膜之貫通孔 78 金屬構件 78a 第 1金屬構件 78b 第 2金屬構件 78c 第 3金屬構件 78d 第 4金屬構件 79 絶緣性片之貫 80a 第 1連接片 80b 第 2連接片 80c 第 3連接片 80d 第 4連接片 82 第 2片狀構件 84a 第 1配線區域 84b 第 2配線區域 90a 第 1連接部 90b 第 2連接部 90c 第 3連接部 90d 第 4連接部 29 201243342 377 接觸電極 3070, 170, 270 ' 370 72 , 172 , 272 , 372 72A 28 201243342 73a 1st conductive circuit 73b 2nd conductive circuit 73c 3rd conductive circuit 73d 4th conductive circuit 74, 274 Insulating sheet 76 Guide film 77 > 177 '277 Guide film through hole 78 Metal member 78a First metal member 78b Second metal member 78c Third metal member 78d Fourth metal member 79 Insulating sheet 80a First connecting piece 80b Second connecting piece 80c Third connection Sheet 80d Fourth connecting piece 82 Second sheet member 84a First wiring region 84b Second wiring region 90a First connecting portion 90b Second connecting portion 90c Third connecting portion 90d Fourth connecting portion 29 201243342 377 Contact electrode 30