KR100955983B1 - 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 - Google Patents

기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 Download PDF

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Publication number
KR100955983B1
KR100955983B1 KR1020060119149A KR20060119149A KR100955983B1 KR 100955983 B1 KR100955983 B1 KR 100955983B1 KR 1020060119149 A KR1020060119149 A KR 1020060119149A KR 20060119149 A KR20060119149 A KR 20060119149A KR 100955983 B1 KR100955983 B1 KR 100955983B1
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KR
South Korea
Prior art keywords
film
groove
substrate
glass substrate
mask blank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060119149A
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English (en)
Korean (ko)
Other versions
KR20070057028A (ko
Inventor
히데토 아라이
Original Assignee
호야 가부시키가이샤
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Publication date
Application filed by 호야 가부시키가이샤 filed Critical 호야 가부시키가이샤
Publication of KR20070057028A publication Critical patent/KR20070057028A/ko
Application granted granted Critical
Publication of KR100955983B1 publication Critical patent/KR100955983B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1902—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1906—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for containing masks, reticles or pellicles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
KR1020060119149A 2005-11-30 2006-11-29 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체 Expired - Fee Related KR100955983B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00345272 2005-11-30
JP2005345272A JP4801981B2 (ja) 2005-11-30 2005-11-30 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020090118398A Division KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Publications (2)

Publication Number Publication Date
KR20070057028A KR20070057028A (ko) 2007-06-04
KR100955983B1 true KR100955983B1 (ko) 2010-05-04

Family

ID=38207282

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020060119149A Expired - Fee Related KR100955983B1 (ko) 2005-11-30 2006-11-29 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크수납체
KR1020090118398A Expired - Fee Related KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체
KR1020110008974A Expired - Fee Related KR101141484B1 (ko) 2005-11-30 2011-01-28 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020090118398A Expired - Fee Related KR101067200B1 (ko) 2005-11-30 2009-12-02 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체
KR1020110008974A Expired - Fee Related KR101141484B1 (ko) 2005-11-30 2011-01-28 기판수납용기, 마스크 블랭크 수납체 및 전사 마스크 수납체

Country Status (3)

Country Link
JP (1) JP4801981B2 (https=)
KR (3) KR100955983B1 (https=)
TW (2) TWI367850B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5153399B2 (ja) * 2008-03-19 2013-02-27 三洋電機株式会社 基板ケース及び処理方法
WO2014136247A1 (ja) * 2013-03-07 2014-09-12 ミライアル株式会社 基板収納容器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204328A (ja) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp ウェーハケース
KR100216108B1 (ko) * 1993-11-09 1999-08-16 오가와 쓰토무 글래스기판 반송용 박스
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113442A (ja) * 1982-12-18 1984-06-30 Konishiroku Photo Ind Co Ltd フオトマスク素材の保存方法
JPH0135474Y2 (https=) * 1986-05-30 1989-10-30
JPH04116193A (ja) * 1990-09-05 1992-04-16 Nkk Corp 耐食性および溶接性に優れた複層電解クロメート処理鋼板
JPH04116193U (ja) * 1991-03-28 1992-10-16 ホーヤ株式会社 基板収納ケース用載置台
KR20000014678U (ko) * 1998-12-30 2000-07-25 김영환 반도체장치의 마스크캐리어 박스
JP2001240179A (ja) * 2000-02-29 2001-09-04 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP2003300583A (ja) * 2002-04-09 2003-10-21 Sekisui Plastics Co Ltd 板状体の搬送用箱
JP2004059075A (ja) * 2002-07-29 2004-02-26 Nissho Iwai Plastic Corp ガラス基板搬送用ボックス
JP4363114B2 (ja) * 2003-07-25 2009-11-11 凸版印刷株式会社 板状基板処理用ラック
JP3995049B2 (ja) * 2003-08-20 2007-10-24 旭平硝子加工株式会社 ガラス基板搬送用ボックス
KR20050057889A (ko) * 2003-12-11 2005-06-16 김성모 평판표시장치용 기판 저장을 위한 수납박스

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204328A (ja) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp ウェーハケース
KR100216108B1 (ko) * 1993-11-09 1999-08-16 오가와 쓰토무 글래스기판 반송용 박스
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器

Also Published As

Publication number Publication date
TW200728168A (en) 2007-08-01
JP2007145397A (ja) 2007-06-14
KR20110026450A (ko) 2011-03-15
KR101067200B1 (ko) 2011-09-22
TWI367850B (en) 2012-07-11
JP4801981B2 (ja) 2011-10-26
TW201233605A (en) 2012-08-16
KR20070057028A (ko) 2007-06-04
KR101141484B1 (ko) 2012-05-04
KR20100004906A (ko) 2010-01-13
TWI526376B (zh) 2016-03-21

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