TWI367850B - Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container - Google Patents

Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container

Info

Publication number
TWI367850B
TWI367850B TW095143912A TW95143912A TWI367850B TW I367850 B TWI367850 B TW I367850B TW 095143912 A TW095143912 A TW 095143912A TW 95143912 A TW95143912 A TW 95143912A TW I367850 B TWI367850 B TW I367850B
Authority
TW
Taiwan
Prior art keywords
package
substrate container
film
mask
coated glass
Prior art date
Application number
TW095143912A
Other languages
English (en)
Chinese (zh)
Other versions
TW200728168A (en
Inventor
Hideto Arai
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200728168A publication Critical patent/TW200728168A/zh
Application granted granted Critical
Publication of TWI367850B publication Critical patent/TWI367850B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1902—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1906—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for containing masks, reticles or pellicles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW095143912A 2005-11-30 2006-11-28 Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container TWI367850B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005345272A JP4801981B2 (ja) 2005-11-30 2005-11-30 基板収納容器、膜付きガラス基板収納体、マスクブランク収納体、および転写マスク収納体

Publications (2)

Publication Number Publication Date
TW200728168A TW200728168A (en) 2007-08-01
TWI367850B true TWI367850B (en) 2012-07-11

Family

ID=38207282

Family Applications (2)

Application Number Title Priority Date Filing Date
TW095143912A TWI367850B (en) 2005-11-30 2006-11-28 Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container
TW101105610A TWI526376B (zh) 2005-11-30 2006-11-28 基板收納容器、遮罩基底收納體、轉印遮罩收納體及覆膜玻璃基板收納體

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101105610A TWI526376B (zh) 2005-11-30 2006-11-28 基板收納容器、遮罩基底收納體、轉印遮罩收納體及覆膜玻璃基板收納體

Country Status (3)

Country Link
JP (1) JP4801981B2 (https=)
KR (3) KR100955983B1 (https=)
TW (2) TWI367850B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5153399B2 (ja) * 2008-03-19 2013-02-27 三洋電機株式会社 基板ケース及び処理方法
WO2014136247A1 (ja) * 2013-03-07 2014-09-12 ミライアル株式会社 基板収納容器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113442A (ja) * 1982-12-18 1984-06-30 Konishiroku Photo Ind Co Ltd フオトマスク素材の保存方法
JPH0135474Y2 (https=) * 1986-05-30 1989-10-30
JPH04116193A (ja) * 1990-09-05 1992-04-16 Nkk Corp 耐食性および溶接性に優れた複層電解クロメート処理鋼板
JPH04116193U (ja) * 1991-03-28 1992-10-16 ホーヤ株式会社 基板収納ケース用載置台
JPH06204328A (ja) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp ウェーハケース
JP2552625B2 (ja) * 1993-11-09 1996-11-13 淀川化成株式会社 ガラス基板搬送用ボックス
KR20000014678U (ko) * 1998-12-30 2000-07-25 김영환 반도체장치의 마스크캐리어 박스
JP2001240179A (ja) * 2000-02-29 2001-09-04 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP2003300583A (ja) * 2002-04-09 2003-10-21 Sekisui Plastics Co Ltd 板状体の搬送用箱
JP2004059075A (ja) * 2002-07-29 2004-02-26 Nissho Iwai Plastic Corp ガラス基板搬送用ボックス
JP4363114B2 (ja) * 2003-07-25 2009-11-11 凸版印刷株式会社 板状基板処理用ラック
JP3995049B2 (ja) * 2003-08-20 2007-10-24 旭平硝子加工株式会社 ガラス基板搬送用ボックス
JP4675601B2 (ja) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック 大型精密シート状製品および半製品用密封容器
KR20050057889A (ko) * 2003-12-11 2005-06-16 김성모 평판표시장치용 기판 저장을 위한 수납박스

Also Published As

Publication number Publication date
KR101141484B1 (ko) 2012-05-04
TWI526376B (zh) 2016-03-21
KR100955983B1 (ko) 2010-05-04
JP4801981B2 (ja) 2011-10-26
KR20100004906A (ko) 2010-01-13
JP2007145397A (ja) 2007-06-14
TW200728168A (en) 2007-08-01
TW201233605A (en) 2012-08-16
KR20070057028A (ko) 2007-06-04
KR20110026450A (ko) 2011-03-15
KR101067200B1 (ko) 2011-09-22

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